Presentations -
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Time-resolved Measurement of Charge Density at the Bottom of High-aspect-ratio Holes in a Pulsed Capacitively Coupled Plasma Invited International conference
Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, and Hirotaka Toyoda
5th Asia-Pacific Conference on Plasma Physics, 26 Sept-1Oct, 2021, Remote e-conference(AAPPS-DPP2021) 2021.9.28
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Large A rea Ashing Treatment of Polyimide Film by Atmospheric pressure Pulsed Microwave Line Plasma with Ar/O 2 International conference
T.Ogasawara, Y.Iwata, H.Suzuki and H.Toyoda
5th Asia-Pacific Conference on Plasma Physics, 26 Sept-1Oct, 2021, Remote e-conference(AAPPS-DPP2021)
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流動液体プラズマ処理装置を用いたAgナノ粒子の長時間安定合成
〇山口 和也1、鈴木 陽香1、笹井 建典1、豊田 浩孝1,2 (1.名大工、2.核融合研)
第82回応用物理学会秋季学術講演会、22a-P08-2 2021.9.22 応用物理学会
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High conductive carbon film deposition by electron cyclotron resonance (ECR) plasma
〇Hansin BAE1、Hamaguchi Ikumi1、Kensuke Sasai2、Haruka Suzuki1,2、Hirotaka Toyoda1,2,3 (1.Nagoya Univ.、2.Nagoya Univ. cLPS、3.NIFS)
2021.9.12
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大気圧長尺マイクロ波ラインプラズマによる広幅高速アッシング処理
○岩田悠揮，小笠原知裕，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-4 2021.9.7
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イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測
○市川景太，鈴木陽香（名大），豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-7 2021.9.7
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二周波容量結合型フルオロカーボンプラズマ中のラジカル計測
○関悠斗，久保井宗一，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-6 2021.9.7
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表面波プラズマを用いた高導電性炭素膜の高速堆積
○濱口育未，BaeHansin，笹井建典，鈴木陽香（名大）， 豊田浩孝（名大/ 核融合研）
令和3年度電気・電子・情報関係学会東海支部連合大会、A1-5 2021.9.7
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BH and BD molecular spectroscopy during the Impurity Powder Dropper experiments International conference
T. KAWATE, N. Ashikawa, M. Goto, T. Oishi, Y. Kawamoto, and H. Toyoda
15th International Workshop on Hydrogen Isotopes in Fusion Reactor Materials（HWS2020）
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ＬＨＤにおけるボロンを使った水素リサイクリング抑制実験
芦川直子（核融合研、総研大）、川手朋子（核融合研、総研大）、豊田浩孝（名古屋大学）、Zhen SUN（ASIPP、PPPL）
日本原子力学会 春の年会（2021）オンライン（早稲田大学） 2021.3.17
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High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-wave Plasma
2021.3.18
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International Expansion of Division of Plasma Electronics -Collaboration with GEC- Invited
2021.3.17
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Long-term Operation of Liquid Flow Plasma Processing Device and Its Application to Ag Nanoparticle Production
2021.3.19
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Wide-Area Ashing Treatment by Pulsed Microwave Atmospheric Pressure Ar/O2 Plasma
2021.3.19
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Plasma Fluctuation b y Inse rtion of a Small Grou nded Electrode into I nductively Coupled Plasma with I nsulated L iner
2021.3.19
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Wide-area and High-speed Deposition of Graphitic Film by Microwave Surface Wave Plasma with High Power Pulse International conference
Hansin Bae, Haruka Suzuki, Kensuke Sasai and Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 09aB05O 2021.3.9
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Effect of grounded electrode on plasma propety in ICP with floating liner International conference
Manabu Kyuzo*, Yukinori Chiba, Haruka Suzuki and Hirotaka Toyoda
2021.3.8
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Deuterium Depth Profile of Plasma-Exposed Solid/Liquid Tin International conference
Kota Tamura,Haruka Suzuki, Suguru Masuzaki,Masayuki Tokitani, Junichi Miyazawa, Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 08P-38 2021.3.8
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Time-dependent Measurement of Charge Density at Bottom of High-aspect Hole in a Capacitively-coupled Plasma International conference
Makoto Moriyama, Naoya Nakahara, Keita Ichikawa,Manh Hung Chu,Haruka Suzuki* and Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 08pB14O 2021.3.8
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Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave Line Plasma with Ar/O2 International conference
2Haruka Suzuki*, Tomohiro Ogasawara, Yuki Iwata, and Hirotaka Toyoda
ISPlasma2021/IC-PLANTS2021 08pB07O 2021.3.8