Presentations -
-
Effect of Fine Particles on Electron Temperature in Hydrogen Plasmas International conference
Y. Hori, K. N. Ostrikov, H. Toyoda and H. Sugai
Proceedings of 25th International Conference on Phenomena in Ionized Gases
-
Cross Section for Electron Impact Dissociation from SF6 to SF3 and from SiH4 to SiH3 International conference
H. Kanda, H. Toyoda and H. Sugai
Proceedings of 25th International Conference on Phenomena in Ionized Gases
-
Beam Experiment on Fluorocarbon-based Etching of Si and SiO2 Surfaces International conference
H. Morishima, Y. Hori, H. Toyoda and H. Sugai
Proceedings of 25th International Conference on Phenomena in Ionized Gases
-
Observation of Fluorocarbon Beam Intertraction with Si and SiO2 Surface International conference
H. Toyoda, Y. Hori, H. Morishima and H. Sugai
Proceedings of International Symposium on Dry Process
-
High Rate Deposition of Silicon Thin Films by a Surface-wave Excited Silane Plasma International conference
A. Ohishi, H. Toyoda and H. Sugai
Abstracts of Joint Conference of The 12th Intrnational Toki Conference on Plasma Physics and Controlled Nuclear Fusion and The 3rd General Scientific Assembly of Asia Plasma Fusion Association
-
Surface-Wave Plasma Deposition of a-C:H Films for Field Emission International conference
T. Sano, M. Nagatsu, N. Takada, N. Toyoda, H. Sugai, W. X. Guang, T. Hirao, H. Toyoda
Bulletin of 53rd Annual Gaseous Electronics Conf
-
Field Emission Characteristics of Amorphous Carbon Films Deposited by Surface Wave Plasma International conference
M. Nagatsu, T. Sano, N. Takada, N. Toyoda, W. X. Guang, T. Hirao, H. Toyoda, H. Sugai
Abstracts of IV International Workshop on Microwave Discharges:Fundamentals and Applications
-
Electron Energy Distributions of Planar Surface Wave Discharge International conference
H. Sugai, I. Ghanashev, L. Tsendin, M. Hosokawa, H. Toyoda
Abstracts of IV International Workshop on Microwave Discharges:Fundamentals and Applications
-
Reaction Processes on Silicon Surface Irradiated by Fluorocarbon Ion Beams International conference
H. Toyoda, H. Morishima Y. Hori and H. Sugai
Dry Process Sympo. '00
-
Beam Study of the Interaction of CF3+ Ion with Silicon Surface Invited International conference
H.Sugai, H.Toyoda
Abstracts of International Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces
-
Interaction of CF3+ Ion Beam with Silicon Surfaces Invited International conference
H. Toyoda, H. Sugai
Abstracts of 3rd Int. Workshop on Fluorocarbon Plasmas
-
Wall Temperature Effect on H Atom Density in Silane ICP for poly-Si Deposition International conference
H. Toyoda, T. Kojima,A. Ohishi, M. Goto, M. Nishitani and H. Sugai
Abstracts of 15th ESCAMPIG
-
Comparison of Electron Energy Distribution Functions of Planar Surface Wave Plasma with Inductive RF Plasma International conference
H. Sugai, M. Hosokawa, H. Toyoda, I. Ghanashev, L. Tsendin
Microwave Discharges:Fundamentals and Applications
-
Hydrogen Retention Effects on Lithium-Induced Suppression of Graphite Sputtering International conference
N. Ito, H. Toyoda, K. Morita, H. Sugai
14th International Conference on Plasma-Surface Interaction in Controlled Fusion Devices
-
Wave Modes and EEDF Diagnostics of SWP for Oxide Etching International conference
H. Kokura, K. Yamauchi, M. Hosokawa, K. Nakamura, H. Toyoda, T. Hayami, H. Sugai
Dry Process Sympo. '99
-
Measurements of Electron-Impact-Dissociation Cross Section for Neutral Products International conference
Hideo Sugai and Hirotaka Toyoda
21th Int. Conf.on the Physics of Electronic and Atomic Collisions
-
Cross Section Measurement of Electron Impact Dissociation into Neutral Radicals from SF6 and C3HF7O International conference
H. Toyoda, H. Kanda, H. Sugai
Int. Seminar on Atomic Processes in Plasmas
-
Laboratory Studies on Li Conditioning International conference
H. Toyoda, H. Sugai
Japan/US Workshop on High Heat Flux Compo-nents and Plasma Surface Interactions for Next Fusion Devices
-
Profile Control and its Effects on Plasma Confinement in Heriotron E International conference
T.OBIKI, T.MIZUUCHI, H.SUGAI, H.TOYODA,et al.
Proc. IAEA-CN-69/EX2/5
-
Biased Optical Probe Measurement of Electron Energy Distribution Function in Processing Plasma International conference
H. Toyoda, M. Hosokawa, R. Fukute, S. Noda, Y. Hikosaka, K. Kinoshita, M. Sekine, H. Sugai
4th Int. Conf. on Reactive Plasmas