Presentations -
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High Rate Deposition of Silicon Films at Low Temperature Employing Surface Wave Excited Plasma Invited International conference
H. Toyoda
The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
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Efficient Solute Decomposition in Liquid with Bubble Plasma Production by Microwaves International conference
H. Sugiura, T. Ishijima, H. Toyoda
The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
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Surface Modification of PTFE Film by High Demsity Microwave Plasma International conference
K. Ishikawa, T. Ishijima, H. Toyoda
The 6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)
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マイクロ波バブルプラズマの安定生成による溶質分解効果の向上
杉浦宏康，石島達夫，豊田浩孝，佐藤正典，菅井秀郎
第25回プラズマプロセシング研究会プロシーディングス
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高密度マイクロ波プラズマによるPETフィルムの高速表面改質
郡上祐一，豊田浩孝，伊関清司，菅井秀郎
第25回プラズマプロセシング研究会プロシーディングス
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Production of Surface Wave Excited Plasma by a Parallel-Waveguide System and its Application to Si Film Deposition
H. Endo, Y. Takanishi, T. Hayashi, H. Toyoda, H. Sugai
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Surface Modification of Fluorocarbon Polymer Film by High Density Surface Wave Plasma
K. Ishikawa, T. Ishijima, H. Toyoda, K. Sasai, H. Sugai
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LARGE-AREA HIGH-SPEED DEPOSITION OF mc-Si THIN FILMS BY 915 MHz SURFACE WAVE PLASMA International conference
Hideo Sugai, Tatsuo Ishijima, Hirotaka Toyoda, Atsushi Masuda, Michio Kondo
17th International Photovoltaic Science and Engineering Conference
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Production of High Density Plasma for Silicon Film Deposition at Low Substrate Temperatures Invited International conference
Hirotaka Toyota
2007 Trans-Pacific Workshop on Flexible Electronics
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Development and Characteristics of Neutral Beam Source International conference
Y. Hara, S. Takashima, S. Den, K. Yamakawa, H. Kanou, H. Sugai, H. Toyoda, M. Hori
The 3nd International Student Workshop on Plasma Science and Technology
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Production of Large-Area and Uniform Surface Wave Plasma along Linear Parallel Waveguides International conference
Y. Takanishi, H. Endo, T. Ishijima, H. Toyoda and H. Sugai
29th International Symposium on Dry Process(DPS2007)
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Plasma Activation of Oxide Ceramics Surface for Hydrogen Production by Water Vapor Decomposition International conference
Y. Yamaguchi, T. Ishijima, H. Toyoda and H. Sugai
29th International Symposium on Dry Process(DPS2007)
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Microcrystalline Thin Film Deposition by Surface Wave Excited Plasma at 2.45 GHz International conference
T. Hayashi, Y. Takanishi, H. Toyoda and H. Sugai
29th International Symposium on Dry Process(DPS2007)
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Development and Characteristics of Nitorogen Radical Beam International conference
Y. Hara, S. Takashima, K. Yamakawa, S. Den, H. Kano, H. Toyoda, M. Sekine and M. Hori
29th International Symposium on Dry Process(DPS2007)
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Reaction of Fluorocarbon Species with Si and SiO2 Surfaces1 Invited International conference
HIROTAKA TOYODA
60th Annual Gaseous Electronics Conference
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Suppression of High-Energy Backscattered Species in Magnetron Sputter Plasma with Cylindrical Cathode International conference
HIROTAKA TOYODA, YUSUKE TAKAGI, HIDEO SUGAI
60th Annual Gaseous Electronics Conference
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2.45GHz並列励起表面波プラズマの生成とシリコン薄膜堆積
遠藤広考、高西雄大、林孝信、豊田浩孝、菅井秀郎
平成19年度電気関係学会東海支部連合大会
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気泡制御によるマイクロ波バブルプラズマの安定化と溶質分解効果の向上
杉浦宏康、石島達夫、豊田浩孝、佐藤正典、菅井秀郎
平成19年度電気関係学会東海支部連合大会
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プラズマCVDの基礎 Invited
豊田浩孝
第34回アモルファスセミナー
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プラズマ照射によるフッ素樹脂の表面改質
石川喬介、石島達夫、豊田浩孝、笹井建典、菅井秀郎
平成19年度電気関係学会東海支部連合大会