Presentations -
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Cross Section of Electron-Impact Dissociation of Methane into Neutral Radicals International conference
T. Nakano, H. Toyoda, H. Sugai
Int. Seminor on Reactive Plasmas
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Diagnostics and Modeling of Radical Density Profiles in a Methane RF Discharge International conference
H. Sugai, H. Toyoda, Y. Hikosaka
43rd Gaseous Electronics Conf.
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Measurements of Electron-Impact Cross Sections for Dissociation from CH4 into CH3 and CH2 International conference
H. Sugai, T. Nakano, H. Toyoda
43rd Gaseous Electronics Conf.
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Mass Spectroscopic Analysis of Neutral Radicals in a RF Methane Plasma International conference
H. Sugai, H. Toyoda, H. Kojima
9th Sympo. on Plasma Chemistry
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Hydrogen Trapping and Detrapping in Amorphous Carbon Films Exposed to a Hydrogen Plasma International conference
H. Toyoda, S. Yoshida, H. Sugai
9th Sympo. on Plasma Chemistry
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Absolute Density and Spatial Distribution of the Free Radical CH3 and CH2 in a Methane RF Plasma International conference
H. Sugai, H. Toyoda, H. Kojima
42nd Gaseous Electronics Conf.
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In-situ Boron Coating and Its Removal by Glow Discharge Processes International conference
H. Toyoda, T. Isozumi, H. Sugai, T. Okuda
8th Int. Conf. on Plasma Surface Interactions in Controlled Fusion Devices
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Recent Experiments on Heliotron-E International conference
T. Ohbiki, T. Mizuuchi, H. Sugai, H. Toyoda, et al.
12th Int. Conf. on Plasma Physics and Controlled Nuclear Fusion Research
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Hydrogen Recycling Control by Helium Ion Bombardment onto Carbonized Surfaces International conference
H. Sugai, H. Toyoda, S. Ohsha, S. Yoshida, A. Sagara
8th Int. Conf. on Plasma Surface Interactions in Controlled Fusion Devices
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Carbonization Experiment by ECR Discharge in JIPPT-IIU International conference
Y. Sakamoto, H. Amemiya, H. Toyoda, H. Sugai et al.
8th Int. Conf. on Plasma Surface Interactions in Controlled Fusion Devices
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Effects of Carbon Wall on the Behaviour of Heliotron-E Plasmas International conference
N. Noda, T. Mizuuchi, H. Toyoda, S. Yoshida, H. Sugai et al.
8th Int. Conf. on Plasma Surface Interactions in Controlled Fusion Devices
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Coating of Pure-Boron and Boron-Carbon Alloys by a Toroidal Glow Discharge International conference
H. Toyoda, H. Sugai, T. Izozumi, T. Okuda
8th Int. Sympo. on Plasma Chemistry
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Formation of Pure-boron and Boron-Carbon Alloys by a Toroidal Glow Discharge International conference
H. Toyoda, H. Sugai, T. Isozumi, T. Okuda
Borides and Related Compounds
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Activation Energy of Hydrogen Plasma Etching of Amorphous Boron Films International conference
H. Toyoda, H. Sugai, T. Okuda
40th Gaseous Electronics Conf.
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Flux Controlled Deposition of Hydrogenated Amorphous Silicon Films International conference
H. Sugai, H. Toyoda, T. Okuda
Gordon Research Conf. on Plasma Chemistry
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Key Active Species in Hydrogenated Amorphous Silicon Deposition Processes in a Toroidal DC Discharge International conference
H. Toyoda, H. Sugai, A. Yoshida, T. Okuda
8th Int. Conf. on Gas Discharges and Thier Applications
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A Mass Spectrometer for Boundary Plasma Diagnostics International conference
H. Kojima H. Sugai, T. Mori, H. Toyoda, T. Okuda
6th Int. Conf. on Plasma Surface Interactions in Controlled Fusion Devices
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高周波容量結合型プラズマにおける高アスペクト比キャピラリーホール底部のチャージアップ現象 Invited
豊田浩孝
第234回シリコンテクノロジー分科会研究会 2022.3.15