Presentations -
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Low Pressure Sustainment of Surface-Wave Microwave Plasma with Modified Microwave Coupler (MMC-SWP) International conference
KENSUKE SASAI, HARUKA SUZUKI AND HIROTAKA TOYODA
8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/9th International Conference on Plasma-Nano Technology & Science
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マイクロ波プラズを用いた高圧無電極紫外ランプの試作とその長尺化の検討
西川 拓、豊田 浩孝
第3回光源物性とその応用研究会
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大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性
鈴木陽香, 中野優, 伊藤仁, 関根誠, 堀勝, 豊田浩孝
第32回プラズマ・核融合学会 年会
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Experimental Verification of the Importance of Slot Position in Microwave Plasma Production with Slot Antenna Array International conference
S. Koga and H. Toyoda
DPS2015
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Surface Roughness Control of DC Sputter Film Deposition by Superposition of VHF Power International conference
Takashi Fukui, Taku Suyama, Yushi Fukuoka, Kensuke Sasai, Hirotaka Toyoda
ICRP-9/GEC-68/SPP-33
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Development of High-Throughput Liquid Treatment System Using Slot Antenna Excited Microwave Plasma International conference
SHO TAKITOU, MICHIKO ITO, SEIGOU TAKASHIMA, NORIO NOMURA, TOMINORI KITAGAWA, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
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Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process International conference
HARUKA SUZUKI, SUGURU NAKANO, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
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Origin of Substrate Heating During Oxide Film Deposition by DC Magnetron Discharge and Superposition of VHF Power International conference
KENTA SETAKA, TAKASHI FUKUI, KENSUKE SASAI, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
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Organic Decomposition Performance of In-line Liquid Treatment System Using Microwave Plasma International conference
MICHIKO ITO, SEIGO TAKASHIMA, NORIO NOMURA, TOMINORI NOMURA, HIROTAKA TOYODA
ICRP-9/GEC-68/SPP-33
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Ultraviolet Light Source Using Electrodeless Microwave Discharge International conference
Taku Nishikawa, Hirotaka Toyoda
ICRP-9/GEC-68/SPP-33
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Evaluation of Heat Flux to Film Surface in DC-VHF Superposed Magnetron Plasma International conference
K. Setaka, T. Fukui, T. Suyama, K. Sasai, and H. Toyoda
the 21th KJ workshop
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ベンチュリ効果を用いたマイクロ波プラズマ液体処理装置の性能向上
滝藤 奨，伊藤 美智子, 高島 成剛, 野村 記生, 北川 富則, 豊田 浩孝
平成27年度電気・電子・情報関係学会東海支部連合大会
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VHF-DC重畳マグネトロンスパッタにおける膜特性の評価
巣山 拓，福井 崇史，福岡 侑士，笹井 建典，豊田 浩孝
平成27年度電気・電子・情報関係学会東海支部連合大会
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スロット内生成マイクロ波プラズマの基礎的検討
山本 匡毅，鈴木 陽香，豊田 浩孝
平成27年度電気・電子・情報関係学会東海支部連合大会
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Desorption of Alkaline Metals from Electrolyte Liquid Contacting with a DC Pulsed-Plasma International conference
Haruka Suzuki, Takafumi Takaba, Noriharu Takada and Hirotaka Toyoda
AEPSE2015
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Toward Real Uniform Sputtering – Spatial Uniformity of Thickness and Quality - Invited International conference
Hirotaka Toyoda
AEPSE2015
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Optimization of In-line Plasma Treatment Performance International conference
Michiko Ito, Seigo Takashima, Norio Nomura, Tominori Kitagawa and Hirotaka Toyoda
AEPSE2015
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吸収分光法によるVHF-DC 重畳マグネトロンプラズマのガス温度測定
第76回応用物理学会秋季学術講演会
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Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
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VHF -DC 重畳 マグネトロンスパッタにおける膜表面粗さの制御
第76回応用物理学会秋季学術講演会