Presentations -
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Development of New Neutral Beam Source and its Characteristic of Change Exchange International conference
Y. Hara, S. Takashima, S. Den, K. Yamakawa, H. Kanou, H. Sugai, H. Toyoda, M. Hori
Japanese-German Student Workshop on Plasma Science and Technology
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Development of New Neutral Beam Source and its Characteristic of Change Exchange International conference
Y. Hara, S. Takashima, S. Den, K. Yamakawa, H. Kanou, H. Sugai, H. Toyoda, M. Hori
COE 2006 2nd International COE Forum on Plasma Science and Technology
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メートル級大面積プラズマプロセスの現状と展望 Invited
豊田浩孝
第53回応用物理学関係連合講演会
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円筒マグネトロンプラズマによる高エネルギー粒子抑制とスパッタ膜平坦化
高木佑輔、坂下洋平、豊田浩孝、菅井秀郎
第53回応用物理学関係連合講演会
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GaN-MBE成長における窒素ラジカル源からの活性粒子束の測定
金井英和、石島達夫、豊田浩孝、菅井秀郎、大坂次郎
第53回応用物理学関係連合講演会
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915MHz長尺高密度プラズマによる微結晶シリコン薄膜堆積
岡安隆文、堀田芳彦、野尻康弘、高西雄大、石島達夫、豊田浩孝、菅井秀郎、増田淳、近藤道雄
第53回応用物理学関係連合講演会
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異なるバイアス電極形状と放電ガス下のプラズマイオン注入の振舞い
ホルゼル ニコラ、スタマテ エウジェン、豊田浩孝、菅井秀郎
第53回応用物理学関係連合講演会
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表面波プラズマ源のガス導入系および窓材質の最適化による微結晶シリコンの膜質向上
堀田芳彦、岡安隆文、豊田浩孝、菅井秀郎
第53回応用物理学関係連合講演会
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Energetic Particle Reduction on Substrate in Cylindrical Magnetron Sputter System International conference
Y. Takagi, Y. Sakashita, H. Toyoda and H. Sugai
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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プロセシングプラズマの生成・制御とプラズマ計測技術 Invited
豊田浩孝
技術情報協会セミナー
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Dependence of GMR in Co/Cu Multolayers on Sputtering Conditions International conference
C. C. Chen, Y. Sakashita, Y. Suzuki, T. Kato, S. Iwata, S. Tsunashima, H. Toyoda, K. Sasaki, H. Sugai
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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Slot-Excited Surface Wave Plasma for Giant Scale Processing Invited International conference
Hideo Sugai, Yasuhiro Nojiri, Tatsuo Ishijima, Hirotaka Toyoda
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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Gas and Window Material Control for High Quality mc-Si Film Deposition by Surface Wave Plasma International conference
Y. Takanishi, Y. Hotta, H. Toyoda and H. Sugai
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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Surface Wave Plasma Expansion by Parallel Antenna Excitation for Large-Area Silicon Film Deposition International conference
T. Okayasu, Y. Hotta, H. Toyoda and H. Sugai
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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Surface Investigation of Ion Dose Non-Uniformity Due to Modal and Discrete Focusing Effects During PIII of Silicon International conference
N. Holtzer, E Stamate, H. Toyoda and H. Sugai
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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Numerical simulation of energetic species in a VHF-DC magnetron plasma and comparison with experiments International conference
H. Toyoda, Y. Sakashita, Y. Takagi and H. Sugai
ICRP-6/SPP-23(6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing)
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Deposition of mc-Si Film by Surface Wave Plasma with a New Gas Shower System
Y. Hotta, T. Okayasu, Y. Takanishi, H. Toyoda and H. Sugai
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Independent Control of Backscattering energy and Sputter Rate in a VHS-DC Superimposed Magnetron Source International conference
H. Toyoda, Y. Sakashita, Y. Takagi, K. Sasaki, J. Gao. T. Kato, S. Iwata, S. Tsunashima, H. Sugai
AVS52nd International Symposium & Exhibition
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表面波励起SiH4/H2プラズマによる微結晶シリコン薄膜の高速堆積
堀田芳彦、岡安隆文、豊田浩孝、菅井秀郎
第66回応用物理学会学術講演会
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YBaCuOターゲットマグネトロンスパッタリングプラズマ中の銅原子とイットリウム原子の発光強度
高軍思、ナファリザル ナヤン、佐々木浩一、豊田浩孝、菅井秀郎
平成17年度電気関係学会東海支部連合大会