Presentations -
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誘導結合型HBr プラズマ中のBr ラジカル挙動
飯野大輝，野尻康弘，鈴木啓之，大池 匠，藤井良隆，豊田浩孝
第60回応用物理学関係連合講演会
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大気圧パルスマイクロ波プラズマにおける放電開始後のプラズマ挙動
江頭一輝 ，村瀬卓也 ，豊田浩孝
第60回応用物理学関係連合講演会
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スパッタリングにおける高エネルギー粒子の発生とその制御 Invited
豊田 浩孝
プラズマ材料科学第１５３委員会第108回研究会
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Temporal and Spatial Variations of Atomic Metals in Atmospheric-Pressure Pulsed-Plasmas with Liquid Electrode International conference
H.Suzuki, T. Takaba, N. Takada and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
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Microwave Plasma Production - From Micro- to Meter-scale - Invited International conference
H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
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Absolute Dissociation Cross Section of CH2F2 into CH2F for Electron-Impact International conference
H.Ogawa and H.Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
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Deposition of Microcrystalline Silicon Thin Film by Compact Antenna Structure International conference
S.Kondo, S.Nakano and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
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Synergistic Effect of Ultrasonic Wave on Microwave Excited Plasma Production under Water International conference
T. Takahashi, N. Takada and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
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Surface-Wave Excited Plasma Produced in Low Pressures International conference
T. Noda, M. Nakabo and H. Toyoda
The 6th International Conference on Plasma-Nano Technology & Science
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Measurement of Br Atom Density in an Inductively-Coupled HBr Plasma by Appearance Mass Spectrometry International conference
Y.Fujii, T. Oike, D. Iino, K. Suzuki and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Development of Compact Microwave Plasma Source and Its Application to Si Film Deposition International conference
S. Kondo, S. Nakano and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Production of Surface-Wave Excited Plasma in Low Pressures International conference
T.Noda, M. Nakabo and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Effect of Superposition of Ultrasonic Power on Microwave Plasma under Water International conference
T. Takahashi, N. Takada, H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Absolute Cross Section Measurement for Electron-Impact Dissociation of CH2F2 into CH2F International conference
H. Ogawa and H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Temporal Variation of Alkaline Metals in an Atmospheric-Pressure Pulsed-Plasma with Liquid Electrode International conference
H. Suzuki, T. Takaba, N. Takada, H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Time-Resolved Measurement of Electric Field in Ar and N2 Atmospheric-Pressure Microwave Plasmas International conference
K. Egashira, T. Murase AND H. Toyoda
5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
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Measurement of Electron-Impact Cross Section for Dissociation of CH2F2 into CH2F International conference
H. Ogawa and H. Toyoda
The 16th International Workshop of Advanced Plasma Processing and Diagnostics
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コンパクトマイクロ波アンテナを用いた微結晶シリコン薄膜の生成
近藤将吾，中野優，豊田浩孝
第３０回プラズマプロセシング研究会
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二電子ビーム法を用いたCH2F2への電子衝突によるCH2Fラジカル生成断面積測定
小川勇人，豊田浩孝
第３０回プラズマプロセシング研究会
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シュタルク分光を用いたAr及びN2添加大気圧マイクロ波プラズマの時分解計測
江頭 一輝，村瀬 卓也，豊田 浩孝
第３０回プラズマプロセシング研究会