Presentations -
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Observation of SiO2 Surface Irradiated by Fluorocarbon Neutrals and Energetic Ion Beam International conference
Hirotaka Toyoda, Noriharu Takada and Hideo Sugai
Proceedings of 3rd International Symposium on Dry Process
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Distribution of Fe atom density in a dc magnetron sputtering plasma source measured by laser-insuced fluorescence imaging spectroscopy International conference
K.Shibagaki, N.Nafarizal, K.Sasaki, H.Toyoda, S.Iwata, T.Kato, S.Tsunashima, H.Sugai
Bulletin of the american physical society(Abstracts of the 56th Annual Gaseous Electronics Conference
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Deposition of High Quality Poly-and Microcrystalline Silicon Films by a Surface-Wave Excited Plasma International conference
H.Toyoda, S.Somiya, H. Sugai
Bulletin of the american physical society(Abstracts of the 56th Annual Gaseous Electronics Conference
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Energy Distribution Measurement of Atoms and Ions Sputtered by a Magnetron Plasma International conference
H.Matsui, H. Toyoda, K.Shibagaki, T.Kato, S.Iwata, S.Tsunashima, H.Sugai
Bulletin of the american physical society(Abstracts of the 56th Annual Gaseous Electronics Conference
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高圧力H2/SiO4表面波プラズマにおけるシリコン薄膜堆積の高速化
宗宮暁、山内木綿子、豊田浩孝、菅井秀郎
第20回プラズマプロセシング研究会
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解離に起因する運動エネルギー電離断面積への影響
松井洋樹、木下欣紀(B)、豊田浩孝、菅井秀郎
第20回プラズマプロセシング研究会
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フロロカーボン分子とイオンの同時照射によるSiおよびSiO2エッチング表面反応の観察
村上勇夫、豊田浩孝、菅井秀郎
第20回プラズマプロセシング研究会
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Observation of Etching Reactions on SiO2/Si Surface under Co-Incidence of Fluorocarbon Molecule and Ion Beam Invited International conference
H. Toyoda, I. Murakami and H. Sugai
Proceedings of Int. Conf. Phenomena in Ionized Gases
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SiおよびSiO2への高エネルギーフロロカーボンラジカル照射による表面反応のビーム実験
豊田浩孝、菅井秀郎
プラズマ・ナノテクノロジー研究会
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Beam Study of Si and SiO2 Etching Reactions by Energetic Fluorocarbon Radicals Invited International conference
Hirotaka Toyoda
Bulletin of the american physical society(Abstracts of the 55th Annual Gaseous Electronics Conference, Minneapolis
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Interaction of Ionic and Neutral Fluorocarbon Radical Beam with Si and SiO2 Surface International conference
Hirotaka Toyoda, Isao Murakami and Hideo Sugai
Proc. International Symposium on Dry Process
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High rate deposition of silicon films by surface-wave excited silane plasma International conference
S. Somiya , H. Toyoda, H. Sugai
Proc.Joint Conference on ESCAMPIG 16(Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases) and ICRP 5(Fifth International Conference on Reactive Plasmas)
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Modelling of effect of nano-sized particles on electron temperature in reactive plasmas International conference
Y. Hori, K. Ostrikov, H. Toyoda, H. Sugai
Proc.Joint Conference on ESCAMPIG 16(Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases) and ICRP 5(Fifth International Conference on Reactive Plasmas)
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Beam experiment on methane formation by hydrogen plasma-graphite interaction under lithium effect International conference
H. Yagi , H. Toyoda, H. Sugai
Proc.Joint Conference on ESCAMPIG 16(Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases) and ICRP 5(Fifth International Conference on Reactive Plasmas
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Surface reaction of fluorocarbon beam on silicon and silicon dioxide International conference
H. Toyoda, I. Murakami, H. Sugai
Proc.Joint Conference on ESCAMPIG 16(Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases) and ICRP 5(Fifth International Conference on Reactive Plasmas
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Cross section for electron impact ionization and dissociation of C5F8 International conference
H. Matsui , H. Toyoda, H. Sugai
Proc.Joint Conference on ESCAMPIG 16(Sixteenth European Conference on Atomic & Molecular Physics of Ionized Gases) and ICRP 5(Fifth International Conference on Reactive Plasmas
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リチウムコンディショニングによるグラファイト損耗抑制の温度依存性
八木博之、豊田浩孝、菅井秀郎
第4回核融合エネルギー連合講演会
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表面波励起H2/SiH4プラズマを用いたシリコン薄膜の高速堆積
豊田浩孝、大石晃宏、宗宮暁、菅井秀郎
電気学会プラズマ研究会・電気学会研究会
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Dramatic Reduction of Chemical Sputtering of Graphite under Intercalation of Lithium International conference
H. Yagi, H. Toyoda and H. Sugai
15th Int. Conf. on Plasma-Surface Interactions in Controlled Fusion Devices
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High Rate Deposition of Micro-and Poly-Crystalline Silicon Films by a Surface Wave Plasma International conference
A. Ohishi, H. Toyoda and H. Sugai
Proceedings of 25th International Conference on Phenomena in Ionized Gases