Presentations -
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化学プローブを用いた長尺大気圧プラズマ生成活性ラジカルの可視化
松浦寛人、トラントラングエン、胡敏、仲野匠、岩田悠揮、鈴木陽香、豊田浩孝
2022年第83回応用物理学会秋季学術講演会 2022.9.20 応用物理学会
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Angular distribution of high-energy species on RF-biased electrode of a capacitively-coupled plasma Invited International conference
Hirotaka Toyoda
cLPS Global Plasma Forum 2022.9.8 Center for Low-temperature Plasma Sciences
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二周波容量結合型Ar/C4F8/O2パルスプラズマ中のイオン時分解計測
加藤 閣人, 関 悠斗，久保井 宗一, 鈴木 陽香, 豊田 浩孝
令和４年度電気・電子情報関係学会東海支部連合講演会 2022.8.29
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Experimental Study on boron distribution and transport at plasma-facing components during impurity powder dropping International coauthorship International conference
T. Kawate, N. Ashikawa, M. Goto, T. Oishi, Y. Kawamoto, H. Toyoda, M. Shoji, G. Kawamura, S. Masuzaki, F. Nespoli, E.P. Gilson, R. Lunsford, C. Suzuki, A. Nagy, D. Gates
15th Asia Pacific Physics Conference Association of Asia Pacific Physical Societies
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二周波重畳容量結合型プラズマから電極へ入射する高速粒子のイメージング法を用いた角度分布計測
市川景太, 鈴木陽香, 豊田浩孝
第69回応用物理学会春期学術講演会 2022.3.25
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Surface analysis of polyimide film treated by Ar/O2 atmospheric-pressure microwave plasma
Y. Iwata, T. Ogasawara, H. Suzuki, H. Toyoda
2022.3.26
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水シールド環境下でのマイクロ波励起水蒸気プラズマの生成と応用 Invited
鈴木陽香、豊田浩孝
第69回応用物理学会春期学術講演会 2022.3.23
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Time-resolved measurements of ions in a dual-frequency capacitively-coupled Ar/C4F8/O2 pulsed plasma by mass spectrometry
Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, Hirotaka Toyoda
2022.3.25
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Increase in plasma density by applying negative pulse bias voltage on a substrate stage in an electron cyclotron resonance plasma
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai2, Haruka Suzuki, and Hirotaka Toyoda
2022.3.22
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高周波容量結合型プラズマにおける高アスペクト比キャピラリーホール底部のチャージアップ現象 Invited
豊田 浩孝
応用物理学会シリコンテクノロジー分科会第234回研究集会 2022.3.15
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Bubbling Phenomenon on Liquidized Sn-Bi-Li-Er Alloy Surface under H-Plasma Exposure International conference
Kota Tamura, Hirotaka Toyoda
The 2nd US-Japan Workshop on Power and Particle Control in a Steady State Magnetic Fusion DEMO Reactor by Liquid Metal PFCs 2022.3.11
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Angular distribution of high-energy Ar ion and neutral in a 13.56 MHz capacitively-coupled plasma International conference
Keita Ichikawa, Haruka suzuki, Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 09aC05O 2022.3.9
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RF Voltage Division of in RF-biased High-density Plasma with Floating Liner International conference
Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki, Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 07P-14 2022.3.7
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Radical measurements of Ar/C4F8 dual frequency capacitively-coupled plasma International conference
Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, and Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 08P-14 2022.3.8
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Bubbling Phenomenon of Sn-Bi-Li-Er Alloy under H2 Plasma Exposure International conference
Kota Tamura, H. Suzuki, J. Miyazawa, S. Masuzaki, M. Tokitani, H. Toyoda
ISPlasma2022/IC-PLANTS2022 08P-21 2022.3.8
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O Radical Measurement of Ar/O2 Microwave Plasma in Atmospheric Pressure International conference
Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki and Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 07pC09O 2022.3.7
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Plasma density increase of electron cyclotron resonance plasma by high voltage pulse power application International conference
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda
ISPlasma2022/IC-PLANTS2022 07pC08O 2022.3.7
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Influence of the magnetic field configuration on the conductive carbon film deposition in an ECR Ar/C6H6 plasma with high voltage bias
Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, and Hirotaka Toyoda
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Bubbling phenomenon of melted tin-bismuth-lithium-erbium alloy during hydrogen plasma exposure
Kota Tamura, H. Suzuki, J. Miyazawa, S. Masuzaki, M. Tokitani, H. Toyoda
2022.1.25
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Imaging measurement of angular distribution of high-energy particles incident on an electrode in a capacitively-coupled plasma
Keita Ichikawa, Manh Hung Chu, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, and Hirotaka
2022.1.25