Presentations -
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Beam Study on Mechanism of Carbon-Monoxide Assisted Nickel Etching International conference
Y. Kinoshita, H. Toyoda and H. Sugai
Proceedings of 4th International Symposium on Dry Process
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リチウムコンディショニングによるグラファイトの水素リテンション抑制効果の基礎実験
坂下洋平、豊田浩孝、菅井秀郎
プラズマ・核融合学会第21回年会
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Measurement of High-Energy Neutral Atoms in Rare Gas Magnetron Discharge International conference
H. Toyoda, Y. Sakashita, J. Gao, K. Sasaki, S, Iwata, T. Kato, S. Tsunashima, H. Sugai
Bulletin of the american physical society(Abstracts of the 57th Annual Gaseous Electronics Conference, Bunratty
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Visualized measurements of densities and velocities of Fe and Cu atoms in magnetron sputtering plasmas International conference
J. Gao, N. Nafarizal, K. Shibagaki, K. Sasaki, H. Toyoda, S. Iwata, T. Kato, S. Tsunashima, H. Sugai
Bulletin of the american physical society(Abstracts of the 57th Annual Gaseous Electronics Conference, Bunratty
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表面波プラズマにより堆積したシリコン膜の高品質化
豊田浩孝、堀田芳彦、菅井秀郎
第65回応用物理学会学術講演会
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グラファイトへのリチウムコーティングによる水素リテンション抑制
坂下洋平、豊田浩孝、菅井秀郎
第5回核融合エネルギー連合講演会
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マグネトロンスパッタリングによる磁性薄膜作成プロセスの診断(Diagnostics of Magnetron Sputering Process for Magnetic Thin Film Deposition) Invited
豊田浩孝、柴垣寛治、佐々木浩一、菅井秀郎
第51回応用物理学関係連合講演会
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Impurity Release and Suppression in Deposition of Nano- Micro- and Polycrystalline Silicon Films by a Surface Wave Excited Plasma International conference
H. Toyoda, S. Somiya, Y. Hotta and H. Sugai
International Workshop on Plasma Nano-Technology and Its Future Vision
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Visualization of Density and Velocity Distributions of Atoms in DC Magnetron Sputtering Plasmas by Laser-Induced Fluorescence Imaging International conference
K. Shibagaki, N. Nafarizal, K. Sasaki, H. Toyoda, T. Kato, S. Iwata, S. Tsunashima and H. Sugai
Int. COE Forum on Plasma Science and Technology
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Oxygen Impurity Release and Its Suppression in a Surface-Wave Excited Plasma for Silicon Film Deposition International conference
Y. Hotta, S. Somiya, H. Toyoda and H. Sugai
Int. COE Forum on Plasma Science and Technology
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Suppression of Hydrogen Retention in Graphite by Lithium Deposition International conference
Y. Sakashita, H. Toyoda and H. Sugai
Int. COE Forum on Plasma Science and Technology
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Mass Spectrometric Measurement of Energetic Ions and Neutrals in Magnetron Plasma for Magnetic Film Deposition International conference
H. Toyoda, H. Matsui, K. Shibagaki, K. Sasaki, T. Kato, S. Iwata, S. Tsunashima and H. Sugai
Int. COE Forum on Plasma Science and Technology
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2D-Imaging Measurements of Sputtered Atom Velocities in dc Magnetoron Discharges by Doppler-Shifted LIF International conference
K. Sasaki, K. Shibagaki, N. Nafarizal, H. Toyoda, T. Kato, S. Iwata, S. Tsunashima, H. Sugai
Abstracts of the 51th International Symposium on America Vacuum Society
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High Speed Deposition of mc-Si and Large Grain Poly-Si Films by Surface-Wave Excited H2/SiH4 Plasma International conference
T. Toyoda, Y. Hotta, H. Sugai
Abstracts of 15th Symposium of Materials Research Society of Japan
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Evidence of Radical-free Etching of SiO2 by Fluorocarbon Molecule under Ion Bombardment International conference
N. Takada, H. Toyoda and H. Sugai
Abstracts of 15th Symposium of Materials Research Society of Japan
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Chemical Reactivity of Fluorocarbon Molecules on SiO2/Si Surface under Co-incidence with Energetic Argon Ions International conference
N. Takada, H. Toyoda and H. Sugai
Abstracts of 7th APCPST(Asia Pacific Conference on Plasma Science and Technology) and 17th SPSM(Symposium on Plasma Science for Materials)
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Diagnostics of High-Energy Argon Atoms in a Magnetron Discharge Plasma International conference
H. Toyoda, Y. Sakashita, K. Sasaki and H. Sugai
Abstracts of 7th APCPST(Asia Pacific Conference on Plasma Science and Technology) and 17th SPSM(Symposium on Plasma Science for Materials)
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Visualization of Spatial Velocity Distribution of Atoms in Magnetron Sputtering Plasmas by Laser-Induced Fluorescence Imaging Spectroscopy International conference
K. Shibagaki, N. Nafarizal, K. Sasaki, H. Toyoda, S. Iwata, T. Kato, S. Tsunashima and H. Sugai
Abstracts of 7th APCPST(Asia Pacific Conference on Plasma Science and Technology) and 17th SPSM(Symposium on Plasma Science for Materials)
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Beam Experiment on Metal Etching Processes under Co-Incidence of Carbon-Monoxide and Energetic Argon Ions International conference
Y. Kinoshita, H. Toyoda and H. Sugai
Int. COE Forum on Plasma Science and Technology
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Observation of SiO2/Si Surface Under Co-Incidence of Fluorocarbon Molecules and Energetic Argon Ions International conference
N. Takada, H. Toyoda and H. Sugai
Int. COE Forum on Plasma Science and Technology