講演・口頭発表等 - 豊田 浩孝
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High-Quality a-Si:H Film Deposition on Low-Temperature Substrate in Inductively Coupled Silane Plasma 国際会議
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
3rd Int. Conf. on Reactive Plasmas
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Observation of Surface Dissociation of Low-energy Polyatomic Ions Relevant to Plasma Processing 国際会議
H. Sugai, Y. Mitsuoka, H. Toyoda
Int. Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces
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Low-Temperature Deposition of Poly-Si Films by Inductively-Coupled Silane Plasma 国際会議
K. Goshima, H. Toyoda, M. Kitagawa, M. Nishitani, H. Yamazoe, H. Sugai
1st Asia-Pacific Int. Sympo. on the Basic and Application of Plasma Technologies
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Lower-Temperature Deposition of Poly-Crystalline Silicon Films by a High-Density Inductive Plasma 国際会議
H. Toyoda, K. Goshima, M. Goto, M. Kitagawa, H. Sugai
Dry Process Sympo. '97
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Behaviour of Oxygen Atoms and High Energy Negative Ions in a Magnetron Plasma 国際会議
H. Toyoda, K. Goshima, K. Ichihara, H. Sugai
3rd Int. Conf. on Reactive Plasmas
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Advanced Diagnostics and Control of High-Density Plasma Sources 国際会議
H. Sugai, T. H. Ahn, I. P. Ghanashev, M. Goto, M. Nagatsu, K. Nakamura, H. Toyoda and G. Xu
Proc.191st Electrochemical Society Meeting
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Effects of ECH on NBI Plasma in Heliotron E 国際会議
T. Obiki, F. Sano, H. Zushi, H. Sugai, H. Toyoda et al.
16th Int. Conf. on Fusion Energy
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Laboratory Studies on Lithium Conditioning Effects 国際会議
H.Sugai, M.Watanabe and H.Toyoda
Abstracts of Workshop on Lithium Effects in Plasmas
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Deposition of High Photo-Conductivity a-Si:H Film Using ICPs without Substrate Heating 国際会議
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
23rd IEEE Int. Conf. on Plasma Science
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Production and Loss Processes of High-Energy Oxygen Negative Ions in a DC Magnetron Plasma 国際会議
H. Toyoda, S. Takahashi, K. Ichihara, M. Ohkubo, H. Sugai
23rd IEEE Int. Conf. on Plasma Science
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Basic Exepriments on in-situ Magnetized Boronization by Electron Cyclotron Resonance Discharges 国際会議
H. Kokura, K. Sasaki, H. Toyoda, M. Mizuuchi, K. Kondo, F. Sano, T. Ohbiki, H. Sugai
12th Int. Conf. on Plasma-Surface Interactions in Controlled Fusion Devices
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Laboratory Experiments on Hydrogen and Impurity Behaviours in Lithium-Deposited Environment 国際会議
H. Toyoda, M. Watanabe, H. Sugai
12th Int. Conf. on Plasma-Surface Interactions in Controlled Fusion Devices
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Negative Ion Kinetics in a Magnetron Oxygen Plasma 国際会議
H. Toyoda, S. Takahashi, K. Goshima, K. Ichihara, H. Sugai
Int. Conf. on Plasma Physics
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Lower Temeprature Formation of High-quality Hydrogenated Amorphous Silicon Film by Usinga an Inductively Coupled Plasma 国際会議
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
Int. Conf. on Plasma Physics
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Diagnostics for Advanced Plasma Control of Materials Processing 国際会議
H. Sugai, T.H. Ahn, M. Goto, M. Nagatsu, K. Nakamura, K. Suzuki, H. Toyoda
Int. Conf. on Plasma Physics
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Lithium Wall Conditioning for Fuel and Impurity Control 国際会議
H. Sugai, M. Ohori, H. Toyoda
13th Int. Vacuum Congress
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Molecular Ion-Surface Interactions:Dependence on Ion Species and Surface Materials 国際会議
Y. Mitsuoka, H. Toyoda, S. Mukainakano, T. Hattori and H. Sugai
IUVSTA Int. Workshop on Plasma Sources and Surface Interactions in Materials Processing
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Silyl Radical Detection in a Silane Plasma Using Ultra-Violet Transmission Spectroscopy 国際会議
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
IUVSTA Int. Workshop on Plasma Sources and Surface Interactions in Materials Processing
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Silyl Radical Detection in a Silane Plasma Using Ultra-Violet Transmission Spectroscopy 国際会議
H. Toyoda, M. Goto, M. Kitagawa, T. Hirao, H. Sugai
42nd National Sympo. of the American Vacuum Society
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Space-Resolved Measurements of Negative Ion Energy Distributions in an O2 Magnetron Plasma 国際会議
S. Takahashi, H. Toyoda, M. Ohkubo, K. Ichihara, H. Sugai
IUVSTA Int. Workshop on Plasma Sources and Surface Interactions in Materials Processing