講演・口頭発表等 - 豊田 浩孝
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RFマグネトロンプラズマ中の高エネルギー負イオン計測
後藤和也、石島達夫、大嶋則和、木下啓蔵、豊田浩孝
プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会 プロシーディングス
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SiH4 Dissociation Process in Microwave-Excited SiH4/H2 Plasma 国際会議
H. Endo, H. Asano, T. Ishijima and H. Toyoda
The 2nd International Conference on Plasma-Nanotechnology & Science
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Detection of Energetic Negative Ions in an RF Magnetron Plasma 国際会議
K. Goto, T. Ishijima, N. Ohshima, K. Kinoshita and H. Toyoda
The 2nd International Conference on Plasma-Nanotechnology & Science
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Treatment of Organic Solution with Microwave Excited Plasmas 国際会議
R. Saito, H. Sugiura, T. Ishijima and H. Toyoda
The 2nd International Conference on Plasma-Nanotechnology & Science
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Organic Solute Decomposition with Microwave Bubble Plasma 国際会議
T. Ishijima, R. Saito, H. Sugiura, H. Toyoda
9th International Symposium on Biomimetic Materials Processing (BMMP-9)
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SOLUTE DECOMPOSITION WITH MICROWAVE-EXCITED BUBBLE PLASMA 国際会議
R. Saito, H. Sugiura, T. Ishijima and H. Toyoda
The 8th International Workshop of Advanced Plasma Processing and Diagnostics Joint Workshop with Plasma Application Monodzukuri(PLAM)
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Investigation of Solute Decomposition Process in Water by Multibubble Plasma at Reduced and Atmospheric Pressures 国際会議
T. Ishijima, H. Sugiura, R. Saito and H. Toyoda
The IUMRS International Conference in Asia 2008
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Rapid Surface Modification of PET Film by High Density Microwave Plasma 国際会議
Y. Gunjo, K. Goto, T. Ishijima, H. Toyoda, K. Iseki, and H. Sugai
The IUMRS International Conference in Asia 2008
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Evaluation of Absolute H2O2 Concentration in Water Treated by Microwave Bubble Plasma 国際会議
R. Saito, H. Sugiura, T. Ishijima, H. Toyoda
The IUMRS International Conference in Asia 2008
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Film Quality of Microcrystalline Silicon Films Deposited by SiH4/H2 Surface Wave Plasma CVD 国際会議
H. Endo, J. Sakai, H. Asano, T. Ishijima, H. Toyoda
The IUMRS International Conference in Asia 2008
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Production of Large-Area Plasma by Three Parallel Waveguide Systems and Its Application to Si Film Deposition 国際会議
H. Endo, T. Hayashi. Y. Takanishi, T. Ishijima, H. Toyoda, H. Sugai, A. Masuda and M. Kondo
30th International Symposium on Dry Process(DPS2008)
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Diagnostics of Microwave Excited Plasma in Liquid Using Spectroscopic Measurements 国際会議
H. Sugiura, R. Saito, T. Ishijima, and H. Toyoda
30th International Symposium on Dry Process(DPS2008)
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Effect of H2O Addition on Rapid Surface Treatment of Polymer Film by High Density Microwave Plasma 国際会議
Y. Gunjo, K. Goto, T. Ishijima, H. Toyoda, K. Iseki, and H. Sugai
30th International Symposium on Dry Process(DPS2008)
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Mater-Scale Microwave Plasma Production and its Application to Silicon Thin Film Deposition 国際会議
H. Toyoda, Y. Takanishi, H. Endo, T. Ishijima
61th Gaseous Electronics Conference
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Diagnostics of Microwave Bubble Plasma in Liquid 国際会議
H. Toyoda, H. Sugiura, R. Saito, T. Ishijima
61th Gaseous Electronics Conference
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Meter-Scale Plasma Production and Thin Film Deposition Process with Parallel Waveguide at 915 MHz Microwave Excitation 国際会議
T. Ishijima, Y. Takanishi, H. Endo and H. Toyoda
9th Asia-Pacific Conference on Plasma Science and Technology and 21st Symposium on Plasma Science for Materials
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Solute Decomposition in Water by Slot-Excited Microwave Plasmas at Atmospheric Pressures 国際会議
T. Ishijima, H. Sugiura, R. Saito and H. Toyoda
9th Asia-Pacific Conference on Plasma Science and Technology and 21st Symposium on Plasma Science for Materials
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915ＭＨｚ表面波プラズマによる微結晶シリコン薄膜堆積
浅野弘嗣、坂井淳二、遠藤広考、石島達夫、豊田浩孝
平成20年度電気関係学会東海支部連合大会
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水蒸気添加高密度マイクロ波アルゴンプラズマによるPETフィルムの高速表面改質
郡上祐一、後藤和也、石島達夫、豊田浩孝、伊関清司、菅井秀郎
平成20年度電気関係学会東海支部連合大会
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表面波プラズマCVDによる微結晶シリコン薄膜堆積と電気伝導特性評価
遠藤広考、坂井淳二、浅野弘嗣、石島達夫、豊田浩孝
平成20年度電気関係学会東海支部連合大会