講演・口頭発表等 - 豊田 浩孝
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VHF-DC 重畳マグネトロンプラズマ装置の特性評価
福井 崇史，福岡 侑士，高田 昇治, 笹井 建典, 豊田 浩孝
平成26年度電気・電子・情報関係学会東海支部連合大会
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Novel sputtering system for uniform dielectric film deposition 国際会議
Hirotaka Toyoda, Toshiya Hagihara
International conference on microelectronics and plasma technology 2014
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Development of compact UHF plasma source 招待有り 国際会議
Hirotaka Toyoda and Shota Koga
The International Symposium on Plasma-Nano Materials and Processes
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パルスDC マグネトロンプラズマ中の酸素負イオン計測
福岡 侑士，小川 勇人, 高田 昇治, 豊田 浩孝
第61回応用物理学関係連合講演会
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メートル級マイクロ波大気圧ラインプズマの均一性評価
中野 優 ，鈴木 陽香 ，伊藤 仁 ，関根 誠 ，堀 勝 ，豊田 浩孝
第61回応用物理学関係連合講演会
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パルスマイクロ波励起大気圧ラインプラズマの空間分解計測
鈴木 陽香 、中野 優 、伊藤 仁 、関根誠 、堀 勝 、豊田 浩孝
第61回応用物理学関係連合講演会
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液流路式マイクロ波プラズマの溶液処理性能評価
伊藤 美智子, 高橋 朋大, 高島 成剛, 野村 記生, 北川 富則, 豊田 浩孝
第61回応用物理学関係連合講演会
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電解質溶液電極を用いたパルスDCプラズマにおける電解質由来金属原子の二次元吸収分光計測
鷹羽 貴史，鈴木 陽香，高田 昇治，豊田 浩孝
第61回応用物理学関係連合講演会
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誘導結合型 誘導結合型 HBr プラズマにおける Br ラジカル表面損失確率の評価
藤井 良隆 ，飯野 大輝 ,豊田 浩孝
第61回応用物理学関係連合講演会
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表面波プラズマ支援RF スパッタにおける絶縁性ターゲットの表面電位評価
萩原 敏哉，野田 智紀，豊田 浩孝
第61回応用物理学関係連合講演会
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Evaluation the reaction of Br radical at silicon surface in an Inductively Coupled HBr plasma 国際会議
YOSHITAKA FUJII, DAIKI IINO, AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Magnet-Free Sputtering System Using Surface Wave Plasma 国際会議
Toshiya Hagihara, Tomonori Noda and Hirotaka Toyoda
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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O- Energy Distribution in a VHF-Superimposed DC Magnetron Plasma 国際会議
YUSHI FUKUOKA, HAYATO OGAWA, KENSUKE SASAI, NORIHARU TAKADA AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Spatiotemporal Resolved Investigations of Atmospheric Pressure Line Plasma 国際会議
SUGURU NAKANO, HARUKA SUZUKI, HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Spatio-temporal Behavior of Alkaline Metals in a DC Pulsed-Plasma with Liquid Electrode 国際会議
TAKAFUMI TAKABA, HARUKA SUZUKI, NORIHARU TAKADA, AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Decomposition of Phenol by Pulsed Microwave Plasma Generated in the Vicinity of a Fluid Flow Path 国際会議
MICHIKO ITO, TOMOHIRO TAKAHASHI, SEIGO TAKASHIMA, NORIO NOMURA, TOMINORI KITAGAWA AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Design of Meter-Scale Compact Microwave Antenna Structure by Electromagnetic Simulation 国際会議
SHOGO KONDO, KENSUKE SASAI, NORIHARU TAKADA AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Influence of Discharge-off Duration on the Plasma Density in an Atmospheric-pressure Pulsed Microwave Discharge 国際会議
KAZUKI EGASHIRA, HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Production of High-Uniform Microwave Line Plasma at Atmospheric Pressure 国際会議
HARUKA SUZUKI, SUGURU NAKANO,HITOSHI ITOH, MAKOTO SEKINE, MASARU HORI AND HIROTAKA TOYODA
6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/7th International Conference on Plasma-Nano Technology & Science
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Advanced microwave plasma technology for liquid treatment 招待有り 国際会議
Hirotaka Toyoda, T. Takahashi, N. Takada
46th Annual Winter Conference following a special symposium