論文 - 石川 健治
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Plasma diagnostic approach for high rate nanocrystalline Si synthesis in RF/UHF hybrid plasmas using a PECVD process 査読有り
Bibhuti Bhusan Sahu, Jeon G. Han, Kyung-Sik Shin, Kenji Ishikawa, Masaru Hori, and Yudai Miyawaki
Plasma Sources Sci. Technol. 24 巻 ( 2 ) 頁： 025019 2015年3月
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CF3+ fragmentation by electron impact ionization of perfluoro-propyl-vinyl-ethers, C5F10O, in gas phase 査読有り 国際共著
Yusuke Kondo, Kenji Ishikawa, Toshio Hayashi, Yudai Miyawaki, Keigo Takeda, Hiroki Kondo, Makoto Sekine, and Masaru Hori
Japan. J. Appl. Phys. 54 巻 ( 4 ) 頁： 040301 2015年3月
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Study of the decomposition mechanism of PMMA-type polymers by hydrogen radicals 査読有り
Yu Arai, Yusuke Noto, Yousuke Goto, Seiji Takahashi, Masashi Yamamoto, Akihiko Kono, Tatsuo Ishijima, Kenji Ishikawa, Masaru Hori, and Hideo Horibe
Thin Solid Film 575 巻 頁： 12-16 2015年2月
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Estimation of activation energies for decomposition reaction of polymer by hydrogen radicals generated using hot-wire catalyzer 査読有り
Akihiko Kono, Yu Arai, Yousuke Goto, Masashi Yamamoto, Seiji Takahashi, Tadaaki Yamagishi, Kenji Ishikawa, Masaru Hori, and Hideo Horibe
Thin Solid Film 575 巻 頁： 17-20 2015年2月
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Experimental evidence of warm electron populations in magnetron sputtering plasmas 査読有り 国際共著
B. B. Sahu, Jeon G. Han, Hye R. Kim, Kenji Ishikawa, and Masaru Hori
J. Appl. Phys. 117 巻 頁： 033301 2015年1月
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Hydrofluorocarbon ion density of argon- or krypton-diluted CH2F2 plasmas: Generation of CH2F+ and CHF2+ by dissociative-ionization in charge exchange collisions 査読有り
Yusuke Kondo, Yudai Miyawaki, Kenji Ishikawa, Toshio Hayashi, Keigo Takeda, Hiroki Kondo, Makoto Sekine, and Masaru Hori
J. Phys. D: Appl. Phys. 48 巻 ( 4 ) 頁： 045202 2015年1月
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Robust characteristics of semiconductor-substrate temperature-measurement method using auto-correlation type frequency-domain low-coherence interferometry 査読有り
Takayoshi Tsutsumi, Takayuki Ohta, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Makoto Sekine, Masaru Hori, and Masafumi Ito
Jpn. J. Appl. Phys. 54 巻 頁： 01AB03 2015年1月
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Quantitative Clarification of Inactivation Mechanism of Penicillium digitatum Spores Treated with Neutral Oxygen Radicals 査読有り
Hiroshi Hashizume, Takayuki Ohta, Keigo Takeda, Kenji Ishikawa, Masaru Hori, and Masafumi Ito
Jpn. J. Appl. Phys. 54 巻 頁： 01AG05 2015年1月
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Plasma Medical Science for Cancer Therapy: Toward Cancer Therapy Using Nonthermal Atmospheric Pressure Plasma 招待有り 査読有り
Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Keigo Takeda, Kae Nakamura, Fumi Utsumi, Hiroaki Kajiyama, Hiroyuki Kano, Yasumasa Okazaki, Shinnya Toyokuni, Shoichi Maruyama, Fumitaka Kikkawa, and Masaru Hori
IEEE Trans. on Plasma Sci. 42 巻 ( 12 ) 頁： 3760-3763 2014年12月
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Effectiveness of plasma diagnostic in ultra high frequency and radio frequency hybrid plasmas for synthesis of silicon nitride film at low temperature 査読有り 国際共著
Bibhuti Bhusan Sahu, Kyung-Sik Shin, Su-Bong Jin, Jeon G. Han, Kenji Ishikawa and Masaru Hori
J. Appl. Phys. 116 巻 頁： 134903 2014年10月
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Recovery of Atom Density Drift Caused by Change in Reactor Wall Conditions by Real-time Autonomous Control 査読有り
Toshiya Suzuki, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Makoto Sekine, and Masaru Hori
Journal of Physics D: Applied Physics 47 巻 頁： 422002 2014年9月
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Diagnostics of plasma-biological surface interactions in low pressure and atmospheric pressure plasmas 招待有り 査読有り
Kenji Ishikawa, and Masaru Hori
International Journal of Modern Physics: Conference Series 32 巻 頁： 1460318 2014年8月
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Cell survival and proliferation signaling pathways are downregulated by plasma-activated medium in glioblastoma brain tumor cells 査読有り
Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Kae Nakamura, Fumi Utsumi, Hiroaki Kajiyama, Hiroyuki Kano, Shoichi Maruyama, Fumitaka Kikkawa, and Masaru Hori
Plasma Medicine 4 巻 頁： 1 2014年7月
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Temporal Changes of Absolute Densities of Atoms in H2 and N2 Mixture Gas Plasmas by Surface Modifications of Reactor Wall 査読有り
Toshiya Suzuki, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru Hori
Jpn. J. Appl. Phys. 53 巻 頁： 050301 2014年4月
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Epitaxial Growth of GaN by Radical-Enhanced Metalorganic Chemical Vapor Deposition (REMOCVD) in the Downflow of a Very High Frequency (VHF) N2/H2 Excited Plasma– Effect of TMG Flow Rate and VHF Power 査読有り
Yi Lu, Hiroki Kondo, Kenji Ishikawa, Osamu Oda, Keigo Takeda, Makoto Sekine, Hiroshi Amano, and Masaru Hori
J. Cryst. Growth 391 巻 頁： 97-103 2014年4月
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Hierarchical regrowth of flowerlike nanographene sheets on oxygen-plasma-treated carbon nanowalls
Hironao Shimoeda, Hiroki Kondo, Kenji Ishikawa, Mineo Hiramatsu, Makoto Sekine, and Masaru Hori
Appl. Phys. Express 7 巻 頁： 046201 2014年3月
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Effects of nitrogen plasma post-treatment on electrical conduction of carbon nanowalls 査読有り
Hyung Jun Cho, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Mineo Hiramatsu, and Masaru Hori
Jpn. J. Appl. Phys. 53 巻 頁： 040307 2014年3月
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Nanostructure modification to carbon nanowall surface employing hydrogen peroxide solution 査読有り
Hironao Shimoeda, Hiroki Kondo, Kenji Ishikawa, Mineo Hiramatsu, Makoto Sekine, and Masaru Hori
Jpn. J. Appl. Phys. 53 巻 頁： 040305 2014年3月
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Spatial distribution of absolute atomic oxygen density of a non-equilibrium atmospheric pressure planar plasma jet 査読有り
Fengdong Jia, Kenji Ishikawa, Keigo Takeda, Hiroyuki Kano, Jagath Kularatne, Hiroki Kondo, Makoto Sekine and Masaru Hori
Plasma Source Sci Technol. 23 巻 頁： 025004 2014年3月
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Chemical Reactions during Plasma-enhanced Atomic Layer Deposition of SiO2 Films employing aminosilane and O2/Ar plasma at 50 C 査読有り
Lu Yi, Akiko Kobayashi, H. Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru Hori
JAPANESE JOURNAL OF APPLIED PHYSICS 53 巻 2013年12月