研究者詳細 - 石川　健治

論文 - 石川　健治

分割表示 417 件中 221 - 240 件目／全件表示 >>

Cytotoxic effects of plasma-irradiated fullerenol 査読有り

Kanno, D; Tanaka, H; Ishikawa, K; Hashizume, H; Hori, M

JOURNAL OF PHYSICS D-APPLIED PHYSICS 51 巻 ( 37 ) 2018年9月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Journal of Physics D Applied Physics

Fullerenol dissolved in water was irradiated with a non-equilibrium atmospheric pressure plasma. Plasma irradiation altered the fullerenol solution by introducing carbonyl groups, ether bonds, and intercalated nitrate anions. The resulting plasma-irradiated fullerenol (PF) was added in cell culture medium. PF-supplemented medium exhibited a cytotoxic effect on HeLa cells. Notably, HeLa cells cultured in the PF-added cell culture medium generated intracellular reactive oxygen and nitrogen species, such that the endocytosis of PF induced the apoptotic cell death. The cytotoxic effect inducing apoptosis was found in the PF-supplemented medium.

DOI： 10.1088/1361-6463/aad510

大気圧プラズマ処理による異種材料接合招待有り査読有り

近藤博基, 堤隆嘉, 石川健治, 関根誠, 堀勝

化学工学 82 巻 ( 9 ) 2018年9月

New hopes for plasma-based cancer treatment 査読有り Open Access

Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Shinya Toyokuni, Hiroaki Kajiyama, Fumitaka Kikkawa, and Masaru Hori

Plasma 1 巻 ( 1 ) 頁： 150 - 155 2018年9月

Real-time control of a wafer temperature for uniform plasma process 査読有り

Tsutsumi T., Fuknaga Y., Ishikawa K., Kondo H., Sekine M., Hori M.

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings 2018-December 巻 2018年7月

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）出版者・発行元：IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Our developed non-contact method for measurement of temperature of silicon (Si) wafer by using autocorrelation-type fourier domain low coherence interferometer has advantageous in accuracy and rapid response. We demonstrate measurements in temperature for Si wafer at real-time during plasma process and in estimation of heat flux to the wafer from plasma, involving heats balanced plasma source and conductive loss in Si. The analysis indicated that other heat sources like the chamber parts with relatively high temperature impact on the duty ratio during the process with feedback control of the wafer teperture.

DOI： 10.1109/ISSM.2018.8651183

Temperature dependence on plasma-induced damage and chemical reactions in GaN etching processes using chlorine plasma 査読有り

Liu, ZC; Ishikawa, K; Imamura, M; Tsutsumi, T; Kondo, H; Oda, O; Sekine, M; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Plasma-induced damage (PID) on GaN was optimally reduced by high-temperature chlorine plasma etching. Energetic ion bombardments primarily induced PID involving stoichiometry, surface roughness, and photoluminescence (PL) degradation. Chemical reactions under ultraviolet (UV) irradiation and chlorine radical exposure at temperatures higher than 400 °C can be controlled by taking into account the synergism of simultaneous photon and radical irradiations to effectively reduce PID.

DOI： 10.7567/JJAP.57.06JD01

Progress in nanoscale dry processes for fabrication of high-aspect-ratio features: How can we control critical dimension uniformity at the bottom? 査読有り国際共著 Open Access

Ishikawa, K; Karahashi, K; Ishijima, T; Cho, SI; Elliott, S; Hausmann, D; Mocuta, D; Wilson, A; Kinoshita, K

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

In this review, we discuss the progress of emerging dry processes for nanoscale fabrication of high-aspect-ratio features, including emerging design technology for manufacturability. Experts in the fields of plasma processing have contributed to addressing the increasingly challenging demands of nanoscale deposition and etching technologies for high-aspect-ratio features. The discussion of our atomic-scale understanding of physicochemical reactions involving ion bombardment and neutral transport presents the major challenges shared across the plasma science and technology community. Focus is placed on advances in fabrication technology that control surface reactions on three-dimensional features, as well as state-of-the-art techniques used in semiconductor manufacturing with a brief summary of future challenges.

DOI： 10.7567/JJAP.57.06JA01

Low-autofluorescence fluoropolymer membrane filters for cell filtration 査読有り Open Access

Kihara, N; Kuboyama, D; Onoshima, D; Ishikawa, K; Tanaka, H; Ozawa, N; Hase, T; Koguchi, R; Yukawa, H; Odaka, H; Hasegawa, Y; Baba, Y; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

A fluoropolymer membrane filter with through-holes was fabricated by photolithographic patterning and the dry etching method. 380,000 highly packed through-holes, each with a diameter of 7 µm were able to cover a whole area with a diameter of 13 mm. Ethylene tetrafluoroethylene (ETFE) was used as the membrane, which was suitable for the fluorescence detection of rare cells such as circulating tumor cells (CTCs) in human blood. The device fabrication for the size based capture of rare cells in blood such as CTCs is realized in this study.

DOI： 10.7567/JJAP.57.06JF03

Impact of helium pressure in arc plasma synthesis on crystallinity of single-walled carbon nanotubes 査読有り

Ando, A; Takeda, K; Ohta, T; Ito, M; Hiramatsu, M; Ishikawa, K; Kondo, H; Sekine, M; Suzuki, T; Inoue, S; Ando, Y; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Single-walled carbon nanotubes (SWNTs) were synthesized with a high growth rate by an arc plasma method employing the electrodes made from a Ni–Y mixture catalyst. In a previous study, it was reported that the monitoring of high-crystallinity SWNT growth enabled the evaluation of the results of the optical emission spectroscopy (OES) of C<inf>2</inf>, Ni, and Y. Here, the impact of helium pressure of arc plasma on the high crystallinity of SWNTs was determined by considering the high intensity ratios of catalytic metals over C<inf>2</inf> emissions at low helium pressures in the arc plasma.

DOI： 10.7567/JJAP.57.06JF01

Effects of gas residence time of CH<sub>4</sub>/H<sub>2</sub> on sp<SUP>2</SUP> fraction of amorphous carbon films and dissociated methyl density during radical-injection plasma-enhanced chemical vapor deposition 査読有り

Sugiura, H; Jia, LY; Kondo, H; Ishikawa, K; Tsutsumi, T; Hayashi, T; Takeda, K; Sekine, M; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Quadruple mass spectrometric measurements of CH<inf>3</inf> density during radical-injection plasma-enhanced chemical vapor deposition to consider the sp<sup>2</sup> fraction of amorphous carbon (a-C) films were performed. The sp<sup>2</sup> fraction of the a-C films reached a minimum of 46%, where the CH<inf>3</inf> density was maximum for a residence time of 6 ms. The sp<sup>2</sup> fraction of the a-C films was tailored with the gaseous phase CH<inf>3</inf> density during the deposition. This knowledge is useful for understanding the formation mechanism of bonding structures in the a-C films, which enables the precise control of their electronic properties.

DOI： 10.7567/JJAP.57.06JE03

Dry Process FOREWORD 査読有り

Karahashi, K; Kinoshita, K; Higashi, S; Ishikawa, K; Ishijima, T; Kuboi, N

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

Dissociative properties of 1,1,1,2-tetrafluoroethane obtained by computational chemistry 査読有り

Hayashi, T; Ishikawa, K; Sekine, M; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 6 ) 2018年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

The electronic properties and dissociative channels of the alternative to the CCl<inf>2</inf>F<inf>2</inf> (CFC-12) refrigerant, 1,1,1,2-tetrafluoroethane (HFC-134a) with a low global warming potential (GWP, 1430), were revealed by computational chemistry. The results show that CF<inf>3</inf><sup>+</sup> and CHF<inf>2</inf><sup>+</sup> ions are mainly produced by ionization. The CF<inf>3</inf>CH<inf>2</inf><sup>+</sup> ion is produced by ion pair formation and by direct ionization in the energy region higher than approximately 15 eV, but also in small amounts by the ionization of the dissociated CF<inf>3</inf>CH<inf>2</inf> radical. This information is useful for etching process engineers in leading-edge semiconductor manufacturing.

DOI： 10.7567/JJAP.57.06JC02

Nanographene synthesized in triple-phase plasmas as a highly durable support of catalysts for polymer electrolyte fuel cells 査読有り

Amano, T; Kondo, H; Takeda, K; Ishikawa, K; Hiramatsu, M; Sekine, M; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 4 ) 2018年4月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Nanographene was synthesized in triple-phase plasmas comprising a gaseous phase, a gas-liquid boundary layer, and an in-liquid phase using a setup in which one electrode was placed in the gaseous phase while the other was immersed in the liquid phase. The triple-phase plasmas were generated using a pure alcohol, such as ethanol, 1-propanol, or 1-butanol, by applying a high voltage to a pair of electrodes made of copper or graphite. The nanographene synthesized using ethanol had high durability and thus could serve as a catalyst support in polymer electrolyte fuel cells (PEFCs). The PEFCs exhibited low degradation rates in the high-potential cycle test of a half-cell, as a result of which, a loss of only 10% was observed in the effective electrochemical surface area of Pt, even after 10,000 cycles.

DOI： 10.7567/JJAP.57.045101

Oxygen reduction reaction properties of nitrogen-incorporated nanographenes synthesized using in-liquid plasma from mixture of ethanol and iron phthalocyanine 査読有り

Amano, T; Kondo, H; Takeda, K; Ishikawa, K; Hiramatsu, M; Sekine, M; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 4 ) 2018年4月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Nanographenes were synthesized using in-liquid plasma from a mixture of iron phthalocyanine and ethanol. In a previous study, micrometer-scale flakes with nitrogen incorporation were obtained. A nonprecious metal catalytic activity was observed with 3.13 electrons in an oxygen reduction reaction under an acidic solute condition. Large-surface-area, high-graphene-crystallinity, and iron-carbon-bonding sites were found owing to a high catalytic activity in Fe-N/nanographene.

DOI： 10.7567/JJAP.57.040303

Cytotoxicity of cancer HeLa cells sensitivity to normal MCF10A cells in cultivations with cell culture medium treated by microwave-excited atmospheric pressure plasmas 査読有り

Takahashi, Y; Taki, Y; Takeda, K; Hashizume, H; Tanaka, H; Ishikawa, K; Hori, M

JOURNAL OF PHYSICS D-APPLIED PHYSICS 51 巻 ( 11 ) 2018年3月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Journal of Physics D Applied Physics

Cytotoxic effects of human epithelial carcinoma HeLa cells sensitivity to human mammary epithelial MCF10A cells appeared in incubation with the plasma-activated medium (PAM), where the cell culture media were irradiated with the hollow-shaped contact of a continuously discharged plasma that was sustained by application of a microwave power under Ar gas flow at atmospheric pressure. The discharged plasma had an electron density of 7

DOI： 10.1088/1361-6463/aaab09

Free radical generation by non-equilibrium atmospheric pressure plasma in alcohol-water mixtures: an EPR-spin trapping study 査読有り

Uchiyama, H; Ishikawa, K; Zhao, QL; Andocs, G; Nojima, N; Takeda, K; Krishna, MC; Ishijima, T; Matsuya, Y; Hori, M; Noguchi, K; Kondo, T

JOURNAL OF PHYSICS D-APPLIED PHYSICS 51 巻 ( 9 ) 2018年3月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Journal of Physics D Applied Physics

Free radical species in aqueous solution - various alcohol-water reaction mixtures - by exposure to non-equilibrium cold atmospheric pressure Ar plasma (CAP), were monitored using electron paramagnetic resonance spin-trapping techniques with 3, 5-dibromo-4-nitrosobenzene sulfonate as a water soluble nitroso spin trap. The major radical species were formed by H-abstraction from alcohol molecules due to •OH radicals. In the ethanol-water mixture •CH<inf>2</inf>CH<inf>2</inf>OH produced by H abstraction from CH<inf>3</inf> group of the ethanol and •CH<inf>3</inf> radicals were detected. The latter was due to the decomposition of unstable CH<inf>3</inf>•CHOH to form the •CH<inf>3</inf> radicals and the stable formaldehyde by C-C bond fission. These intermediates are similar to those observed by reaction with •OH radicals generation in the H<inf>2</inf>O<inf>2</inf>-UV photolysis of the reaction mixtures. The evidence of •CH<inf>3</inf> radical formation in the pyrolytic decomposition of the reaction mixtures by exposure to ultrasound or in methane irradiated with microwave plasma have been reported previously. However, the pyrolytic •CH<inf>3</inf> radicals were not found in both plasma and H<inf>2</inf>O<inf>2</inf>-UV photolysis condition. These results suggests that free radicals produced by Ar-CAP are most likely due to the reaction between abundant •OH radicals and alcohol molecules.

DOI： 10.1088/1361-6463/aaa885

Facile fabrication of a poly(ethylene terephthalate) membrane filter with precise arrangement of through-holes 査読有り

Kihara, N; Odaka, H; Kuboyama, D; Onoshima, D; Ishikawa, K; Baba, Y; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 3 ) 2018年3月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Although membrane filters are indispensable in biochemical analysis fields, most methods for through-hole fabrication are complex and inefficient. We developed a simple method of fabricating poly(ethylene terephthalate) (PET) membrane filters with a precise arrangement of through-holes for the isolation of circulating tumor cells (CTCs) based on their size. By photolithography and dry etching, highly packed 380,000 through-holes with a diameter of 7 μm were able to cover a whole area with a diameter of 13 mm. Device fabrication for the size-based capture of rare cells in blood such as CTCs is realized in this study.

DOI： 10.7567/JJAP.57.037001

Reduced HeLa cell viability in methionine-containing cell culture medium irradiated with microwave-excited atmospheric-pressure plasma 査読有り

Takahashi, Y; Taki, Y; Takeda, K; Hashizume, H; Tanaka, H; Ishikawa, K; Hori, M

PLASMA PROCESSES AND POLYMERS 15 巻 ( 3 ) 2018年3月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Plasma Processes and Polymers

The mechanism underlying the death of cancer cells incubated in plasma-activated medium (PAM) prepared by irradiation of culture medium with atmospheric-pressure plasma is revealed by analyzing changes in the culture medium composition using liquid chromatography-tandem mass spectrometry and nuclear magnetic resonance spectroscopy. The concentration of the essential amino acid methionine declined in microwave-excited plasma-irradiated medium, whereas, that of methionine sulfoxide increased due to oxidation of methionine. The decrease in methionine concentration in the cell culture medium rather than the increase in methionine sulfoxide leads to the decline in the survival rate of HeLa cells incubated in PAM. These results provide useful insights into the mechanism of selective cancer cell death in PAM.

DOI： 10.1002/ppap.201700200

Nanographene synthesis employing in-liquid plasmas with alcohols or hydrocarbons 査読有り

Ando, A; Ishikawa, K; Kondo, H; Tsutsumi, T; Takeda, K; Ohta, T; Ito, M; Hiramatsu, M; Sekine, M; Hori, M

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 2 ) 2018年2月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Graphenes of nanometer-scale grain size (nanographenes) were synthesized using in-liquid plasmas with alcohols or hydrocarbons. This method of nanographene synthesis showed a trade-off relationship between crystallinity and synthesis rate. The high crystallinity of nanographenes synthesized with alcohols was evaluated from the small full width at half maxima (FWHM) of the G band in Raman scattering spectra. On the other hand, in the case of using hydrocarbons such as n-hexane and benzene, a significantly high synthesis rate was obtained but the crystallinity of nanographenes was low. It was found that hydroxyl groups and oxygen atoms of liquid sources play important roles in determining the crystallinity of synthesized nanographenes.

DOI： 10.7567/JJAP.57.026201

Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials FOREWORD 査読有り Open Access

Naritsuka, S; Miyazaki, S; Fujiwara, Y; Hiramatsu, M; Inoue, Y; Ishikawa, K; Ito, M; Itoh, T; Kasu, M; Miyake, H; Sasaki, M; Shirafuji, T; Suda, Y

JAPANESE JOURNAL OF APPLIED PHYSICS 57 巻 ( 1 ) 2018年1月

Electron impact ionization of perfluoro-methyl-vinyl-ether C<sub>3</sub>F<sub>6</sub>O 査読有り

Kondo, Y; Ishikawa, K; Hayashi, T; Sekine, M; Hori, M

PLASMA SOURCES SCIENCE & TECHNOLOGY 27 巻 ( 1 ) 2018年1月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Plasma Sources Science and Technology

A mechanism for the electron impact ionization of perfluoro-methyl-vinyl-ether (CF<inf>3</inf>OCF=CF<inf>2</inf>) molecules was studied theoretically using quantum chemical calculations. Positive and negative C<inf>2</inf>F<inf>3</inf>O<sup>-</sup> ions were abundantly generated, as supported by quadrupole mass spectrometry observations. The vinyl ethers easily dissociated at the ether bond due to polarization of the charge on the bridging oxygen atom. Consequently, perfluoro-vinyl-ethers form abundant ions via ether-specific pathways.

DOI： 10.1088/1361-6595/aaa22e

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