論文 - 中塚 理
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Electrical properties of Ni silicide/Si contact 査読有り
Y. Tsuchiya, O. Nakatsuka, H. Ikeda, A. Sakai, S. Zaima, and Y. Yasuda
Proc. of Advanced Metallization Conference 2001 (AMC2001) 頁： 679-684 2001年
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Dependence of contact resistivity on impurity concentration in Co/Si systems 査読有り
O. Nakatsuka, T. Ashizawa, K. Nakai, A. Tobioka, A. Sakai, S. Zaima, and Y. Yasuda
Appl. Surf. Sci. 159-160 巻 頁： 149-153 2000年
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Interfacial reactions of Ti/ and Zr/Si1-xGex/Si contacts with rapid thermal annealing 招待有り 査読有り
Y. Yasuda, O. Nakatsuka, and S. Zaima
Thin Solid Films 373 巻 頁： 73-78 2000年
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Contact resistivities and electrical properties of Co/Si contacts by rapid thermal annealing 査読有り
O. Nakatsuka, T. Ashizawa, H. Iwano, S. Zaima, and Y. Yasuda
Proc. of Advanced Metallization and Interconnect Systems for ULSI Applications in 1998 頁： 605-611 1999年
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Effect of Ge atoms on interfacial reactions of Ti/ and Zr/Si1-xGex/Si contacts 査読有り
H. Iwano, H. Hayashi, M. Yoshinaga, O. Nakatsuka, S. Zaima, and Y. Yasuda
Proc. of Advanced Metallization and Interconnect Systems for ULSI Applications in 1998 頁： 599-604 1999年
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Conductance oscillations in hopping conduction systems fabricated by focus ion beam implantation 査読有り
H. Kondo, H. Iwano, O. Nakatsuka, K. Kaga, S. Zaima, and Y Yasuda
Jpn. J. Appl. Phys. 36 巻 ( 6B ) 頁： 4046-4048 1997年