Papers - NAKATSUKA, Osamu
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Electrical properties of Ni silicide/Si contact Reviewed
Y. Tsuchiya, O. Nakatsuka, H. Ikeda, A. Sakai, S. Zaima, and Y. Yasuda
Proc. of Advanced Metallization Conference 2001 (AMC2001) page: 679-684 2001
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Dependence of contact resistivity on impurity concentration in Co/Si systems Reviewed
O. Nakatsuka, T. Ashizawa, K. Nakai, A. Tobioka, A. Sakai, S. Zaima, and Y. Yasuda
Appl. Surf. Sci. Vol. 159-160 page: 149-153 2000
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Interfacial reactions of Ti/ and Zr/Si1-xGex/Si contacts with rapid thermal annealing Invited Reviewed
Y. Yasuda, O. Nakatsuka, and S. Zaima
Thin Solid Films Vol. 373 page: 73-78 2000
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Contact resistivities and electrical properties of Co/Si contacts by rapid thermal annealing Reviewed
O. Nakatsuka, T. Ashizawa, H. Iwano, S. Zaima, and Y. Yasuda
Proc. of Advanced Metallization and Interconnect Systems for ULSI Applications in 1998 page: 605-611 1999
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Effect of Ge atoms on interfacial reactions of Ti/ and Zr/Si1-xGex/Si contacts Reviewed
H. Iwano, H. Hayashi, M. Yoshinaga, O. Nakatsuka, S. Zaima, and Y. Yasuda
Proc. of Advanced Metallization and Interconnect Systems for ULSI Applications in 1998 page: 599-604 1999
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Conductance oscillations in hopping conduction systems fabricated by focus ion beam implantation Reviewed
H. Kondo, H. Iwano, O. Nakatsuka, K. Kaga, S. Zaima, and Y Yasuda
Jpn. J. Appl. Phys. Vol. 36 ( 6B ) page: 4046-4048 1997