Faculty Profiles - ISHIKAWA, Kenji

Papers - ISHIKAWA, Kenji

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Spatial distributions of O, N, NO, OH and vacuum ultraviolet light along gas flow direction in an AC-excited atmospheric pressure Ar plasma jet generated in open air Reviewed

Takeda Keigo, Ishikawa Kenji, Tanaka Hiromasa, Sekine Makoto, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS Vol. 50 ( 19 ) 2017.5

電子スピン共鳴法を活用したプラズマバイオ反応プロセスの診断 Invited Reviewed

石川健治, 近藤隆, 竹田圭吾, 呉準席, 橋爪博司, 田中宏昌, 近藤博基, 太田貴之, 伊藤昌文, 関根誠, 堀勝

プラズマ核融合学会誌 2017.5

Bactericidal pathway of Escherichia coli in buffered saline treated with oxygen radicals Reviewed

Kobayashi Tsuyoshi, Iwata Natsumi, Oh Jun-Seok, Hahizume Hiroshi, Ohta Takayuki, Takeda Keigo, Ishikawa Kenji, Hori Masaru, Ito Masafumi

JOURNAL OF PHYSICS D-APPLIED PHYSICS Vol. 50 ( 15 ) 2017.4

Effects of center dot OH and center dot NO radicals in the aqueous phase on H2O2 and NO2- generated in plasma-activated medium Reviewed

Kurake Naoyuki, Tanaka Hiromasa, Ishikawa Kenji, Takeda Keigo, Hashizume Hiroshi, Nakamura Kae, Kajiyama Hiroaki, Kondo Takashi, Kikkawa Fumitaka, Mizuno Masaaki, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS Vol. 50 ( 15 ) 2017.3

Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas Reviewed

Ohya Yoshinobu, Ishikawa Kenji, Komuro Tatsuya, Yamaguchi Tsuyoshi, Takeda Keigo, Kondo Hiroki, Sekine Makoto, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS Vol. 50 ( 15 ) 2017.3

Behavior of absolute densities of atomic oxygen in the gas phase near an object surface in an AC-excited atmospheric pressure He plasma jet Reviewed

Takeda Keigo, Kumakura Takumi, Ishikawa Kenji, Tanaka Hiromasa, Sekine Makoto, Hori Masaru

APPLIED PHYSICS EXPRESS Vol. 10 ( 3 ) 2017.3

Characteristics of optical emissions of arc plasma processing for high-rate synthesis of highly crystalline single-walled carbon nanotubes Reviewed

Ando Atsushi, Takeda Keigo, Ohta Takayuki, Ito Masafumi, Hiramatsu Mineo, Ishikawa Kenji, Kondo Hiroki, Sekine Makoto, Suzuki Tomoko, Inoue Sakae, Ando Yoshinori, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS Vol. 56 ( 3 ) 2017.3

Investigation of effects of ion energies on both plasma-induced damage and surface morphologies and optimization of high-temperature Cl-2 plasma etching of GaN Reviewed

Liu Zecheng, Pan Jialin, Asano Atsuki, Ishikawa Kenji, Takeda Keigo, Kondo Hiroki, Oda Osamu, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS Vol. 56 ( 2 ) 2017.2

Absolute density of precursor SiH3 radicals and H atoms in H-2-diluted SiH4 gas plasma for deposition of microcrystalline silicon films Reviewed

Abe Yusuke, Ishikawa Kenji, Takeda Keigo, Tsutsumi Takayoshi, Fukushima Atsushi, Kondo Hiroki, Sekine Makoto, Hori Masaru

APPLIED PHYSICS LETTERS Vol. 110 ( 4 ) 2017.1

Thermal Cyclic Atomic-Level Etching of Nitride Films: A Novel Way for Atomic-Scale Nanofabrication Reviewed

Shinoda, K; Miyoshi, N; Kobayashi, H; Kurihara, M; Izawa, M; Ishikawa, K; Hori, M

ATOMIC LAYER DEPOSITION APPLICATIONS 13 Vol. 80 ( 3 ) page： 3 - 14 2017

Language：English Publishing type：Research paper (scientific journal) Publisher：ECS Transactions

A highly selective, rapid thermal-cyclic atomic-level etching (ALE) process for SiNx films has been developed. The first step of this process is exposing SiNx to hydrofluorocarbon plasma to form an (NH4)2SiF6 layer on the SiNx surface. The second step is rapid thermal annealing with infrared (IR) irradiation to decompose and sublimate the (NH4)2SiF6 layer. Etching of SiNx was observed after the (NH4)2SiF6 layer was removed by thermal annealing. Cyclic etching tests were carried out by repeated plasma exposure and IR irradiation. It was found that the cyclic process is self-limiting because etching depth depends only on the cycle number and not on the plasma exposure time. A high selectivity over SiC2 and poly Si was confirmed. This paper reviews the novel isotropic ALE for nitride films focusing on the surface reaction mechanism investigated by x-ray photoelectron spectroscopy (XPS) and thermal desorption spectroscopy (TDS). Isotropic ALE of TiN was also demonstrated using the same approach.

DOI： 10.1149/08003.0003ecst

Web of Science

Scopus

Microfluidic transport through micro-sized holes treated by non-equilibrium atmospheric-pressure plasma Reviewed Open Access

Takumi Ito, Kenji Ishikawa, Daisuke Onoshima, Naoto Kihara, Kentaro Tatsukoshi, Hidefumi Odaka, Hiroshi Hashizume, Hiromasa Tanaka, Hiroshi Yukawa, Keigo Takeda, Hiroki Kondo, Makoto Sekine, Yoshinobu Baba, and Masaru Hori

IEEE Transactions on Plasma Science Vol. 44 ( 12 ) page： 3060 - 3065 2016.12

Non-thermal atmospheric pressure plasma activates lactate in Ringer’s solution for anti-tumor effects Reviewed Open Access

Hiromasa Tanaka, Kae Nakamura, Masaaki Mizuno, Kenji Ishikawa, Keigo Takeda, Hiroaki Kajiyama, Fumi Utsumi, Fumitaka Kikkawa, and Masaru Hori

Scientific Reports Vol. 6 page： 36282 2016.11

Effects of assisted magnetic field to an atmospheric-pressure plasma jet on radical generation at the plasma-surface interface and bactericidal function Reviewed

Chih-Tung Liu, Takumi Kumakura, Kenji Ishikawa, Hiroshi Hashizume, Keigo Takeda, Masafumi Ito, Jong-Shinn Wu, and Masaru Hori

Plasma Sources Science and Technology Vol. 25 ( 6 ) page： 065005 2016.10

Micro sand timer in glass membrane device separates single circulating tumor cells in blood Reviewed

Daiki Kuboyama, Daisuke Onoshima, Hiroshi Yukawa, Hiromasa Tanaka, Kenji Ishikawa, Masaru Hori, and Yoshinobu Baba

The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Micro Total Analysis Systems 2016 (Convention Center Dublin, Dublin, Ireland, Oct. 9-13, 2016) page： 297 - 298 2016.10

Control of Internal Plasma Parameters Toward Atomic Level Processing Reviewed

Makoto Sekine, Takayoshi Tsutsumi, Yusuke Fukunaga, Keigo Takeda, Hiroki Kondoa, Kenji Ishikawa, and Masaru Hori

ECS Transactions Vol. 75 ( 6 ) page： 21 - 24 2016.10

Thermal cyclic etching of silicon nitride by formation and desorption of ammonium fluorosilicate Reviewed

Kazunori Shinoda, Masaru Izawa, Tadamitsu Kanekiyo, Kenji Ishikawa, and Masaru Hori

Applied Physics Express Vol. 9 ( 10 ) page： 106201 2016.9

Cold plasma interactions with enzymes in foods and model systems Reviewed International coauthorship

N. N. Misra, S. K. Pankaj, Annalisa Segat, and Kenji Ishikawa

Trends in Food Science & Technology Vol. 55 page： 39 - 47 2016.9

Synthesis of calcium oxalate crystals in culture medium irradiated with non-equilibrium atmospheric-pressure plasma Reviewed

Naoyuki Kurake, Hiromasa Tanaka, Kenji Ishikawa, Kae Nakamura, Hiroaki Kajiyama, Fumitaka Kikkawa, Masaaki Mizuno, Yoko Yamanishi, and Masaru Hori

Applied Physics Express Vol. 9 ( 9 ) page： 096201 2016.8

Rapid electron density decay observed by surface-wave probe in afterglow of pulsed fluorocarbon-based plasma Reviewed

Yoshinobu Ohya, Manabu Iwata, Kenji Ishikawa, Makoto Sekine, Masaru Hori, and Hideo Sugai

Japanese Journal of Applied Physics Vol. 55 ( 8 ) page： 080309 2016.7

ラジカル支援原子層制御ナノプロセス Invited Reviewed

石川健治, 小林明子, 盧翌, 竹田圭吾, 近藤博基, 関根誠, 堀勝

化学工学 2016.7

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Papers - ISHIKAWA, Kenji