Presentations -
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原子層エッチングにおけるプラズマ誘起欠陥へのラジカル吸着挙動
オソニオ アイラ ペラロ, 堤 隆嘉, 石川 健治, 堀, 勝
第84回応用物理学会秋季学術講演会 2023.9.21
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低温における絶縁膜の擬ウェットプラズマエッチング
蕭 世男, 関根 誠, 飯島 祐樹, 須田 隆太郎, 大矢 欣伸, 木原 嘉英, 堤 隆嘉, 石川 健治, 堀 勝
第84回応用物理学会秋季学術講演会 2023.9.22
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プラズマ誘起欠陥の発生と修復 ～酸素プラズマがSiO2/Si界面に及ぼす影響～
布村 正太, 堤 隆嘉, 堀 勝
第84回応用物理学会秋季学術講演会 2023.9.21
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In-liquid plasma synthesis, morphological control, and functionalization of nanographene materials International conference
H. Kondo, T. Tsutsumi, M. Hiramatsu, M. Hori
THERMEC'2023 2023.7.3
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In-liquid plasma synthesis, morphological control, and functionalization of nanographene materials International conference
H. Kondo, T. Tsutsumi, M. Hiramatsu, M. Hori
THERMEC'2023 2023.7.3
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Plasma Synthesis of Graphene-Based Materials: Functionalization and Applications Invited International coauthorship International conference
H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, and M.Hori
THERMEC'2023 2023.7.3
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Plasma Synthesis of Graphene-Based Materials: Functionalization and Applications Invited International coauthorship International conference
H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, M.Hori
THERMEC'2023 2023.7.3
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Recent Progress in the Synthesis of Functional and Three-Dimensional Carbon Nano-Composites By Gas-Liquid Interface Plasma International conference
H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, and M.Hori
243rd ECS Meeting
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Recent Progress in the Synthesis of Functional and Three-Dimensional Carbon Nano-Composites By Gas-Liquid Interface Plasma International conference
H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, M.Hori
243rd ECS Meeting
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A comparative study on the CF4/H2 and HF/H2 plasmas for etching of highly hydrogenated SiN films International conference
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori
25th International Symposium on Plasma Chemistry (ISPC25)
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A comparative study on the CF4/H2 and HF/H2 plasmas for etching of highly hydrogenated SiN films International conference
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
25th International Symposium on Plasma Chemistry (ISPC25)
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Global and local contribution analysis of process parameters in Plasma enhanced chemical vapor deposition of amorphous carbon har International conference
Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori
The 4th International Conference on Data Driven Plasma Sciences ( ICDDPS-4 )
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Global and local contribution analysis of process parameters in Plasma enhanced chemical vapor deposition of amorphous carbon har International conference
Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
The 4th International Conference on Data Driven Plasma Sciences ( ICDDPS-4 )
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熱酸化膜/シリコン界面でのプラズマ誘起欠陥の発生と修復
布村 正太、坂田 功、堤 隆嘉、堀 勝
第70回応用物理学会春季学術講演会
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成膜パラメータの寄与度解析に基づく、 水素化アモルファスカーボン薄膜のエッチ耐性の向上
安藤 悠介、近藤 博基、石川 健治、堤 隆嘉、関根 誠、堀 勝
第70回応用物理学会春季学術講演会
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成膜パラメータの寄与度解析に基づく、 水素化アモルファスカーボン薄膜のエッチ耐性の向上
安藤 悠介, 近藤 博基, 石川 健治, 堤 隆嘉, 関根 誠, 堀 勝
第70回応用物理学会春季学術講演会
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熱酸化膜/シリコン界面でのプラズマ誘起欠陥の発生と修復
布村 正太, 坂田 功, 堤 隆嘉, 堀 勝
第70回応用物理学会春季学術講演会
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Characterization of Plasmas and Polymerized Hydrofluorocarbon Films in Capacitively Coupled CF4/H2 Plasmas International conference
Yusuke Imai, Shih-Nan Hsiao, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023）
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Self-Limited Fluorination of Electron Beam-Irradiated GaN Surface International conference
Yusuke Izumi, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023）
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Contribution Analysis of Process Parameters in Plasma-Enhanced Chemical Vapor Deposition of Amorphous Carbon International conference
Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science （ISPlasma2023/IC-PLANTS2023）