Presentations -
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Cell responses of Pseudochoricystis ellipsoidea on atmospheric pressure plasma treatments International conference
T. Kato, Y. Hosoi, S.Yamaoka, H.Hashizume, K.Ishikawa, H.Tanaka, T.Tsutsumi, H.Kondo, M.Sekine and M.Hori
28th Annual Meeting of MRS-J
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Effects and Mechanism of Electric Stimulation Through Carbon Nanowalls Scaffold on Proliferation and Differentiation of Cultured Cells International conference
Hiroki Kondo, Tomonori Ichikawa, Kenji Ishikawa, Hiromasa Tanaka, Takayoshi Tsutsumi, Keigo Takeda, Makoto Sekine, Masaru Hori, Mineo Hiramatsu
A Meeting of the Materials Research Society
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In situ analysis of ion-irradiated and chlorinated GaN surface during cyclic etching processes International conference
M. Hasegawa, T. Tsutsumi, A. Tanide, H. Kondo, M. Sekine, K. Ishikawa, M. Hori
The 40th International Symposium on Dry Process
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Synthesis of composite of tin oxide particles and graphene sheets employing the in-liquid plasma process International conference
Ranjit R. Borude , Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo and Masaru Hori
The 40th International Symposium on Dry Process
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Effects of electrical and spectroscopic properties of nonequilibrium atmospheric pressure plasma source on adhesion strengths of a polymeric resin International conference
K. Katsuno, T. Tsutsumi, K. Ishikawa, K. Takeda, T. Jindo, S. Takikawa, A. Niwa, S. Takashima, Y. Nonoyama, H. Hashizume, H. Tanaka, H. Kondo, M. Sekine, and M. Hori
The 40th International Symposium on Dry Process
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Etch Characteristics of Atomic Layer Etching by Alternating Fluorocarbon Deposition and Oxygen Plasma Etching International conference
T. Tsutsumi, A. Kobayashi, T. Nozawa, N. Kobayashi and M. Hori
The 40th International Symposium on Dry Process
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Plasma Modification of Si-compound Surfaces: Opportunities for Atomic Layer Etching International conference
R.H.J. Vervuurt, K. Nakane, T. Tsutsumi, A. Kobayashi, M. Hori and N. Kobayashi
The 40th International Symposium on Dry Process
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Defect termination mechanism in amorphous carbon films by atomic hydrogen radicals International conference
The 40th International Symposium on Dry Process
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High temperature etching of GaN with H2-added Cl2 plasma International conference
T. Omichi, A. Tanide, K. Ishikawa, T. Tsutsumi, H. Kondo, M. Sekine, M. Hori
The 40th International Symposium on Dry Process
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Fundamental study of the interaction of plasma species with organic materials by experimental and computational approaches International conference
Y. Fukunaga, P. Ventzek, B. Lane, A. Ranjan, G. S. Hwang, G. Hartmann, R. Upadhyay, L. L. Raja, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori
The 40th International Symposium on Dry Process
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Floating-Wire-Assisted Atmospheric Pressure Plasma for High-Speed Glass Etching International conference
Thi-Thuy-Nga Nguyen, M. Sasaki, H. Odaka, T. Tsutsumi, K. Ishikawa and M. Hori
The 40th International Symposium on Dry Process
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Effects of synchronized DC bias on densities of charged species in pulsed plasmas of fluorocarbon gases International conference
K. Nakane, T. Ueyama, T. Tsutsumi, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine, Y. Ohya, and M. Hori
The 40th International Symposium on Dry Process
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Spatiotemporal behavior of OH radical in AC-excited atmospheric pressure Ar plasma jet generated in open air International conference
Keigo Takeda, Ren Kuramashi, Kenji Ishikawa ,Takayuki Tsutsumi, Masaru Hori
71st Annual Gaseous Electronics Conference
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Floating-wire-assisted remote generation of high-density atmospheric pressure inductively coupled plasma International conference
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Hidefumi Odaka, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori
71st Annual Gaseous Electronics Conference
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Behaviors of Charged Species in Afterglow of Dual Frequency Pulsed Capacitively Coupled Plasma with a Synchronous Negative DC-bias International conference
T. Tsutsumi, T. Ueyama, K. Ishikawa, H. Kondo, M. Sekine, Y. Ohya, M. Hori
AVS 65th INTERNATIONAL SYMPOSIUM & EXHIBITION 2018
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Fundamental Studies of Plasma Species with Organic Materials of Varying Hydrogen and Oxygen Composition by Computational and Experimental Approaches International conference
Y. Fukunaga, P. Ventzek, B. Lane, A. Ranjan, M. Sekine, T. Tsutsumi, H. Kondo, K. Ishikawa, R. Upadhyay, L. L. Raja, G. Hartmann, G. S. Hwang, M. Hori
AVS 65th INTERNATIONAL SYMPOSIUM & EXHIBITION 2018
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Fine Temperature Monitoring of Si Wafer for Plasma Processing Invited International conference
Masafumi Ito, Takayuki Ohta, Takayoshi Tsutsumi, Masaru Hori
AIMES2018
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Si系材料のフルオロカーボンプラズマ支援原子層エッチング Invited
堤 隆嘉、近藤 博基、石川 健治、関根 誠、小林 伸好、堀 勝
第79回応用物理学会秋季学術講演会
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Cl2プラズマによるGaN高温エッチングのH2添加効果
大道貴裕、 谷出敦、 石川健治、 堤隆嘉、 近藤博基、 関根誠、 堀勝
第79回 応用物理学会秋季学術講演会
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原子状水素によるアモルファスカーボン膜の欠陥終端機構
大橋 靖之, 杉浦 啓嗣, 近藤 博基, 石川 健治, 堤 隆嘉, 関根 誠, 堀 勝
第79回 応用物理学会秋季学術講演会