Presentations -
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液中プラズマプロセスを用いたメタノール内金属基板上へのナノグラフェンの成膜
デラヴェガマリアシャンリン、近藤博基、堤隆嘉、グエン ティ・トゥイーンガ、石川健治、関根誠、ヴァスケズマグダレノジュニア、堀勝
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カーボンナノウォールの形態と高さが光透過率に及ぼす影響
射場 信太朗、近藤 博基、石川 健治、関根 誠、堤 隆嘉、平松 美根男、堀 勝
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C2F6/H2混合ガスを用いてラジカル注入型プラズマ励起化学気相堆積法により成長されたカーボンナノウォールのモフォロジー制御
橋本拓海, 近藤博基, 石川健治, 堤隆嘉, 関根誠, 平松美根男, 堀勝
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カーボンナノウォールの形態と高さが光透過率に及ぼす影響
射場 信太朗, 近藤 博基, 石川 健治, 関根 誠, 堤 隆嘉, 平松 美根男, 堀 勝
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液中プラズマプロセスを用いたメタノール内金属基板上へのナノグラフェンの成膜
デラヴェガマリアシャンリン, 近藤博基, 堤隆嘉, グエン ティ・トゥイーンガ, 石川健治, 関根誠, ヴァスケズマグダレノジュニア
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真空紫外原子吸光分光法による大気圧マイクロ波Ar/O2プラズマのO原子密度計測
岩田悠揮, 小笠原知裕, 鈴木陽香, 堤隆嘉, 堀勝, 豊田浩孝
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Optical transmission of carbon nanowalls from ultra-violet region to infra-red region International conference
S. Iba, H. Kondo, K. Ishikawa, T. Tsutsumi, M. Sekine, M. Hiramatsu, and M. Hori
Material Research Meeting (MRM2021)
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Three-dimensional structural analysis of carbon nanowalls synthesized by a radical-injection plasma-enhanced chemical vapor deposition system International conference
Hiroki Kondo, Atsushi Ozaki, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Uroš Cvelbar, Mineo Hiramatsu
Material Research Meeting (MRM2021)
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Optical transmission of carbon nanowalls from ultra-violet region to infra-red region International conference
S. Iba, H. Kondo, K. Ishikawa, T. Tsutsumi, M. Sekine, M. Hiramatsu, M. Hori
Material Research Meeting (MRM2021)
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Three-dimensional structural analysis of carbon nanowalls synthesized by a radical-injection plasma-enhanced chemical vapor deposition system International conference
Hiroki Kondo, Atsushi Ozaki, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Uroš Cvelbar, Mineo Hiramatsu
Material Research Meeting (MRM2021)
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Spatial Distribution Measurement of Atomic Oxygen from Atmospheric-Pressure Microwave Line Plasma by Atomic Absorption Spectroscopy International conference
Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori and Hirotaka Toyoda
12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
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Comparison of CF4/H2 and HF/H2 Plasmas for Etching of PECVD-Prepared SiN Films International conference
Shih-Nan Hsiao, Nicolay Britun, Thi-Thuy-Nga Nga, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori
12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
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Behavior of Hydrogen Atom in Atmospheric Pressure Micro-Hollow Cathode Discharge International conference
Keigo Takeda, Takayoshi Tsutsumi, Mineo Hiramatsu, Masaru Hori
12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
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Behavior of Hydrogen Atom in Atmospheric Pressure Micro-Hollow Cathode Discharge International conference
Keigo Takeda, Takayoshi Tsutsumi, Mineo Hiramatsu, Masaru Hori
12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
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Comparison of CF4/H2 and HF/H2 Plasmas for Etching of PECVD-Prepared SiN Films International conference
Shih-Nan Hsiao, Nicolay Britun, Thi-Thuy-Nga Nga, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
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Spatial Distribution Measurement of Atomic Oxygen from Atmospheric-Pressure Microwave Line Plasma by Atomic Absorption Spectroscopy International conference
Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori, Hirotaka Toyoda
12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-12)
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Random forest model for property control of plasma International conference
J. Kurokawa, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, and M. Hori
The 42nd International Symposium on Dry Process (DPS2021)
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Selective plasma-enhanced atomic layer etching of SiO using a silane coupling agent International conference
A. Osonio, T. Tsutsumi, B. Mukherjee, R. Borude, N. Kobayashi, M. Hori
The 42nd International Symposium on Dry Process (DPS2021)
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Transient effects in cyclic processes on fabrications of high-aspect-ratio trenches International conference
T. Yoshie, T. Tsutsumi, K. Ishikawa, M. Hori
The 42nd International Symposium on Dry Process (DPS2021)
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Random forest model for property control of plasma International conference
J. Kurokawa, T. Tsutsumi, K. Ishikawa, H. Kondo, M. Sekine, M. Hori
The 42nd International Symposium on Dry Process (DPS2021)