論文 - 豊田 浩孝
-
Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition 査読有り
K. Sasai, T. Hagihara, T. Noda, H. Suzuki, H. Toyoda
Jpn. J. Appl. Phys., 55 巻 頁： 086202 -1-5(2016) 2016年7月
-
Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma 査読有り
Takafumi Takaba, Haruka Suzuki and Hirotaka Toyoda
Journal of Physics D: Applied Physics, Volume 49, Number 29 49 巻 ( 29 ) 頁： 295202 2016年6月
-
Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave 査読有り
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda
Jpn. J. Appl. Phys. ( 55 ) 頁： Article ID: 01AH09-1-6(2016) 2015年12月
-
Low pressure sustainment of surface-wave microwave plasma with modified microwave coupler 査読有り
Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda
Jpn. J. Appl. Phys. ( 55 ) 頁： Article ID: 016203-1-5(2016) 2015年12月
-
New line plasma source excited by 2.45 GHz microwave at atmospheric pressure 査読有り
Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori and Hirotaka Toyoda
8 巻 ( 3 ) 頁： 036001 2015年2月
-
Synergistic effect of microwave plasma and ultrasonic wave on decomposition of organic compounds in water 査読有り
Tomohiro Takahashi, Noriharu Takada, and Hirotaka Toyoda
Japanese Journal of Applied Physics 53 巻 ( 7S ) 頁： 07KE01 2014年6月
-
酸化物ターゲットを用いたRFマグネトロンプラズマにおける高エネルギー粒子の挙動 招待有り 査読有り
豊田浩孝
Journal of the Vacuum Society of Japan 57 巻 ( 3 ) 頁： 80-83 2014年3月
-
Influence of Si Substrate Temperature and Bias Voltage on Surface Reaction of Br Radical in HBr Inductively Coupled Plasma
D. Iino, Y. Fujii, T. Oike, H. Toyoda
JPS Conf. Proc. 1 巻 頁： 015070-1-4 (2014) 2014年3月
-
Influence of Oxygen Addition and Wafer Bias Voltage on Bromine Atom Surface Reaction in a HBr/Ar Inductively Coupled Plasma 査読有り
Daiki Iino , Yasuhiro Nojiri, Keiji Suzuki, Takumi Oike, Yoshitaka Fujii, and Hirotaka Toyoda
Japanese Journal of Applied Physics 52 巻 ( 11 ) 頁： 11NC01-1-6 2013年11月
-
High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System 査読有り
Hitoshi Itoh, Yusuke Kubota, Yusaku Kashiwagi, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Hirotaka Toyoda and Masaru Hori
Jpn. J. Appl. Phys. 52 巻 頁： 11NE01 2013年11月
-
A Development of Atmospheric Pressure Plasma Equipment and Its Applications for Treatment of Ag Films Formed from Nano-Particle Ink
H. Itoh, Y. Kubota, Y. Kashiwagi, K. Takeda, K. Ishikawa, H. Kondo, M. Sekine, H. Toyoda and M. Hori
Journal ofPhysics:ConferenceSeries 441 巻 頁： 012019 2013年6月
-
Rapid Plasma Treatment of Polyimide for Adhesive and Durable Copper Film Deposition
K. Usami, T. Ishijima, H. Toyoda
Thin Solid Films 521 巻 頁： 22-26 2012年10月
-
High performance of carbon nanowall supported Pt catalyst for methanol electro-oxidation
Chengxu Zhang , Jue Hu , Xiangke Wang , Xiaodong Zhang , Hirotaka Toyoda , Masaaki Nagatsu , Yuedong Meng
CARBON 50 巻 頁： 3731–3738 2012年4月
-
Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source 査読有り
Yasuhiro Hara , Keigo Takeda, Koji Yamakawa, Shoji Den, Hirotaka Toyoda, Makoto Sekine, and Masaru Hori
Applied Physics Express 5 巻 頁： 035801 2012年2月
-
Characterization of a steam plasma jet at atmospheric pressure
Guohua Ni, Peng Zhao, Cheng Cheng, Ye Song, Hirotaka Toyoda and Yuedong Meng
Plasma Sources Sci. Technol. 21 巻 頁： 015009 (12pp) 2012年1月
-
Microphase separated hydroxide exchange membrane synthesis by a novel plasma copolymerization approach
Chengxu Zhang, Jue Hua, Xiangke Wang, Hirotaka Toyoda, Masaaki Nagatsu, Xiaodong Zhang, Yuedong Meng
Journal of Power Sources 198 巻 頁： 112– 116 2011年10月
-
Spatial Profile Measurement of SiH3 Radical Flux in SiH4/H2 Microwave Plasma by Modified Appearance Mass Spectrometry 査読有り
Toshiyuki Kuroda, Masahira Ikeda, Tatsuo Ishijima, and Hirotaka Toyoda
Jpn. J. Appl. Phys. 50 巻 頁： 08JB05 2011年8月
-
High-Performance Plasma-Polymerized Alkaline Anion-Exchange Membranes for Potential Application in Direct Alcohol Fuel Cells
Chengxu Zhang, Jue Hu, Masaaki Nagatsu, Yuedong Meng, Wei Shen, Hirotaka Toyoda, Xingsheng Shu
Plasma Process. Polym. 8 巻 頁： 1024–1032 2011年8月
-
Preparation of high-performance hydroxide exchange membrane by a novel ablation restriction plasma polymerization approach
Chengxu Zhang, Jue Hu, Yuedong Meng, Masaaki Nagatsu and Hirotaka Toyoda
Chem. Commun. 47 巻 頁： 10230–10232 2011年5月
-
Magnetron sputtering of platinum nanoparticles onto vertically aligned carbon nanofibers for electrocatalytic oxidation of methanol
Chengxu Zhang, Jue Hu, Masaaki Nagatsu, Xingsheng Shu, Hirotaka Toyoda, Shidong Fang, Yuedong Meng
Electrochimica Acta 56 巻 頁： 6033– 6040 2011年5月