Papers - SAKASHITA, Mitsuo
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Challenges of Energy Band Engineering with New Sn-Related Group IV Semiconductor Materials for Future Integrated Circuits
S. Zaima, O. Nakatsuka, T. Yamaha, T. Asano, S. Ike, A. Suzuki, M. Kurosawa, W. Takeuchi, and M. Sakashita
ECS Trans. 2015 Vol. 69 page: 89 2015.10
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Oxygen and germanium migration at low temperature influenced by the thermodynamic nature of the materials used in germanium metal-insulator-semiconductor structures
K. Kato, N. Taoka, M. Sakashita, O. Nakatsuka, and S. Zaima
Appl. Phys. Lett. Vol. 107 page: 102102 2015.9
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Epitaxial formation of Ni germanide on Ge(0 0 1) substrate by reactive deposition
Y. Deng, O. Nakatsuka, A. Suzuki, M. Sakashita, S, Zaima
Solid-State Electronics Vol. 110 page: 44 2015.8
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Growth and applications of GeSn-related group-IV semiconductor materials Reviewed
S. Zaima, O. Nakatsuka, N. Taoka, M. Kurosawa, W. Takeuchi and M. Sakashita
Science and Technology of Advanced Materials Vol. 16 page: 043502 2015.7
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High hole mobility tin-doped polycrystalline germanium layers formed on insulating substrates by low-temperature solid-phase crystallization Reviewed
W. Takeuchi, N. Taoka, M. Kurosawa, M. Sakashita, O. Nakatsuka, and S. Zaima
Appl. Phys. Lett. Vol. 107 page: 022103 2015.7
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SiO2/SiC MOS界面の欠陥特性に酸窒化処理が与える影響
竹内和歌奈, 山本建策, 坂下満男, 金村髙司, 中塚理, 財満鎭明
信学技報 IEICE Technical Report Vol. 115 page: 27 2015.6
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Ge1-xSnxエピタキシャル層中の欠陥へ及ぼす熱処理の効果
浅野孝典, 柴山茂久, 竹内和歌奈, 坂下満男, 中塚理, 財満鎭明
信学技報 IEICE Technical Report Vol. 115 page: 63 2015.6
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金属/Ge界面への超高Sn組成SnxGe1-x層導入による界面電気伝導特性の制御
鈴木陽洋, 柴山茂久, 坂下満男, 竹内和歌奈, 中塚理, 財満鎭明
信学技報 IEICE Technical Report Vol. 115 page: 57 2015.6
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高Sn組成SiSnの形成とバンド構造 -直接遷移構造化を目指して-
黒澤昌志, 竹内和歌奈, 坂下満男, 中塚理, 財満鎭明
信学技報 IEICE Technical Report Vol. 115 page: 35 2015.4
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Influence of interface structure on electrical properties of NiGe/Ge contacts Reviewed
Y. Deng, O. Nakatsuka, M. Sakashita and S. Zaima
Jpn. J. Appl. Phys. Vol. 54 page: 05EA01 2015.4
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Impact of hydrogen surfactant on crystallinity of Ge1-xSnx epitaxial layers Reviewed
T. Asano, N. Taoka, K. Hozaki, W. Takeuchi, M. Sakashita, O. Nakatsuka and S. Zaima
Jpn. J. Appl. Phys. Vol. 54 page: 04DH15 2015.3
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Formation of chemically stable GeO2 on the Ge surface with pulsed metal-organic chemical vapor deposition Reviewed
S. Shibayama, T. Yoshida, K. Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima
Appl. Phys. Lett. Vol. 106 page: 062107 2015.2
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Sn/Geコンタクトにおけるフェルミレベルピニングの軽減およびショットキー障壁高さの低減
鈴木陽洋, 柴山茂久, 黒澤昌志, 坂下満男, 竹内和歌奈, 中塚理, 財満鎭明
応用物理学会 薄膜・表面物理分科会、シリコンテクノロジー分科会 共催 特別研究会「ゲートスタック研究会 ─材料・プロセス・評価の物理─」第20回記念研究会研究報告 page: 59 2015.1
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GeO2薄膜の正方晶形成による化学的安定性の向上
柴山茂久, 吉田鉄兵, 加藤公彦, 坂下満男, 竹内和歌奈, 田岡紀之, 中塚理, 財満鎭明
応用物理学会 薄膜・表面物理分科会、シリコンテクノロジー分科会 共催 特別研究会「ゲートスタック研究会 ─材料・プロセス・評価の物理─」第20回記念研究会研究報告 page: 185 2015.1
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Challenges and Developments in GeSn Process Technology for Si Nanoelectronics Invited Reviewed
S. Zaima, O. Nakatsuka, N. Taoka, K. Kato, W. Takeuchi, and M. Sakashita
ECS Trans. 2014 Vol. 64 page: 147 2014.10
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Formation of high-quality oxide/Ge1-xSnx interface with high surface Sn content by controlling Sn migration Reviewed
K. Kato, N. Taoka, T. Asano, T. Yoshida, M. Sakashita, O. Nakatsuka, and S. Zaima
Appl. Phys. Lett. Vol. 105 page: 122103 2014.9
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Robustness of Sn precipitation during thermal oxidation of Ge1-xSnx on Ge(001) Reviewed
K. Kato, T. Asano, N. Taoka, M. Sakashita, W. Takeuchi, O. Nakatsuka, S. Zaima
Jpn. J. Appl. Phys. Vol. 53 page: 08LD04 2014.7
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Importance of Ge surface oxidation with high oxidation rate in obtaining low interface state density at oxide/Ge interfaces Reviewed
S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima
Jpn. J. Appl. Phys. Vol. 53 page: 08LD02 2014.7
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Interface properties of Al2O3/Ge structures with thin Ge oxide interfacial layer formed by pulsed metal organic chemical vapor deposition Reviewed
T. Yoshida, K. Kato, S. Shibayama, M. Sakashita, N. Taoka, W. Takeuchi, O. Nakatsuka, and S. Zaima
Jpn. J. Appl. Phys. Vol. 53 page: 08LD03 2014.7
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Interaction of Sn atoms with defects introduced by ion implantation in Ge substrate Reviewed
N. Taoka, M. Fukudome, W. Takeuchi, T. Arahira, M. Sakashita, O. Nakatsuka, and S. Zaima
J. Appl. Phys. Vol. 115 page: 173102 2014.5