講演・口頭発表等 - 中塚 理
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Robustness of Sn Precipitation During Thermal Process of Ge1-xSnx 国際会議
K. Kato, T. Asano, N. Taoka, M. Sakashita, O. Nakatsuka, S. Zaima
2013 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY - (IWDTF 2013)
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Interface Properties of Al2O3/Ge MOS Structures with Thin Ge Oxide Interfacial Layer Formed by Pulsed MOCVD 国際会議
T. Yoshida, K. Kato, S. Shibayama, M. Sakashita, N. Taoka, W. Takeuchi, O. Nakatsuka, S. Zaima
2013 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES - SCIENCE AND TECHNOLOGY - (IWDTF 2013)
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Heteroepitaxial Growth of Sn-Related Group-IV Materials On Si Platform for Microelectronic and Optoelectronic Applications: Challenges and Opportunities 国際会議
O. Nakatsuka, N. Taoka, T. Asano, T. Yamaha, M. Kurosawa, M. Sakashita and S. Zaima
The 224th Electrochemical Society Meeting
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Reduction of Interface States Density due to Post Oxidation with Formation of AlGeO Layer at Al2O3/Ge Interface 国際会議
S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka and S. Zaima
The 224th Electrochemical Society Meeting
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Characterization of Local Strain Structures in Heteroepitaxial Ge1-xSnx/Ge Microstructures by using Microdiffraction Method 国際会議
S. Ike, Y. Moriyama, M. Kurosawa, N. Taoka, O. Nakatsuka, Y. Imai, S. Kimura, T. Tezuka, and S. Zaima
The 224th Electrochemical Society Meeting
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Interaction between Sn atoms and Defects Introduced by Ion Implantation in Ge Substrate 国際会議
N. Taoka, M. Fukudome, T. Arahira, W. Takeuchi, M. Sakashita, O. Nakatsuka, and S. Zaima
JSPS Core-to-Core Program Workshop - Atomically Controlled Processing for Ultralarge Scale Integration -
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Stabilization for Higher-k Films with Meta-Stable Crystalline Structure 国際会議
K. Kato, T. Saito, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, and S. Zaima
JSPS Core-to-Core Program Workshop - Atomically Controlled Processing for Ultralarge Scale Integration -
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Fluctuation of Lattice Spacing around Trough Si Vias in Wafer -on -wafer Structures 国際会議
N. Taoka, O. Nakatsuka, Y. Mizushima, H. Kitada, Y. S. Kim, T. Nakamura, T. Ohba, and S. Zaima
Advanced Metallization Conference 2013 (AMC 2013) 30th Edition
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Formation and Crystalline Structure of Ni Silicides on Si(110) Substrate 国際会議
O. Nakatsuka, M. Hasegawa, K. Kato, N. Taoka, and S. Zaima
Advanced Metallization Conference 2013:23rd Asian Session (ADMETA Plus 2013)
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Fluctuation of Lattice Spacing around Trough Si Vias in Wafer -on -wafer Structures 国際会議
N. Taoka, O. Nakatsuka, Y. Mizushima, H. Kitada, Y. S. Kim, T. Nakamura, T. Ohba, and S. Zaima
Advanced Metallization Conference 2013:23rd Asian Session (ADMETA Plus 2013)
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Thermal Stability of Epitaxial NiGe Layers Formed on Ge(110) Substrate 国際会議
Y. Deng, O. Nakatsuka, N. Taoka, and S. Zaima
Advanced Metallization Conference 2013:23rd Asian Session (ADMETA Plus 2013)
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Reduction of Schottky Barrier Height for n-type Ge Contact by using Sn Electrode 国際会議
A. Suzuki, S. Asaba, J. Yokoi, O. Nakatsuka, M. Kurosawa, K. Kato, M. Sakashita, N. Taoka and S. Zaima
2013 International Conference on Solid State Devices and Materials (SSDM 2013)
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Engineering of Energy Band Structure with Epitaxial Ge1-x-ySixSny/n-Ge Hetero Junctions for Solar Cell Applications 国際会議
S. Asaba, T. Yamaha, M. Kurosawa, M. Sakashita, N. Taoka, O. Nakatsuka and S. Zaima
2013 International Conference on Solid State Devices and Materials (SSDM 2013)
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Interaction of Sn atoms with Defects Introduced by Ion Implantation in Ge Substrate 国際会議
T. Arahira, M. Fukudome, N. Taoka, W. Takeuchi, M. Sakashita, O. Nakatsuka and S. Zaima
2013 International Conference on Solid State Devices and Materials (SSDM 2013)
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Large grain growth of poly-GeSn on insulator by pulsed laser annealing in water 国際会議
M. Kurosawa, N. Taoka, H. Ikenoue, O. Nakatsuka and S. Zaima
2013 International Conference on Solid State Devices and Materials (SSDM 2013)
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Strain Undulation around Through Si Vias in Wafer-On-Wafer Structures 国際会議
N. Taoka, O. Nakatsuka, Y. Mizushima, H. Kitada, Y. S. Kim, T. Nakamura, T. Ohba and S. Zaima
2nd international Workshop Advanced Packaging & System Technology (IWAPS 2013)
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Function of Additional Element Incorporation for Tetragonal ZrO2 Formation 国際会議
K. Kato, T. Saito, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, S. Zaima
NIMS Conference 2013 -Structure Control of Atomic/Molecular Thin Films and Their Applications-
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Crystalline Structures and Electrical Property of Epitaxial Ni Germanide Layers Formed on Ge(110) Substrate 国際会議
Y. Deng, J. Yokoi, O. Nakatsuka, N. Taoka, S. Zaima
The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and the 6th International Symposium on Control of Semiconductor Interfaces (ISCSI-VI)
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Impacts of AlGeO Formation by Post Thermal Oxidation of Al2O3/Ge Structure on Interface Properties 国際会議
S. Shibayama, K. Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, S. Zaima
The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and the 6th International Symposium on Control of Semiconductor Interfaces (ISCSI-VI)
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Formation of Tetragonal ZrO2 Thin Film by ALD Method 国際会議
K. Kato, T. Saito, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakatsuka, S. Zaima
The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and the 6th International Symposium on Control of Semiconductor Interfaces (ISCSI-VI)