講演・口頭発表等 - 石川 健治
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Atomic Layer Etching of GaN Using Cl2/Ar Plasma at 400℃ 国際会議
Shohei Nakamura, Atsushi Tanide, Takahiro Kimura, Soichi Nadahara, Kenji Ishikawa, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Initial growth kinetics of hydrogenated amorphous carbon films observed by real-time ellipsometry 国際会議
Jumpei Kurokawa, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi,Makoto Sekine and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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IR spectra of monosaccharide treated with atmospheric pressure plasma using sum frequency generation spectroscopy 国際会議
Yuta Yoshida, Takayuki Ohta, Kenji Ishikawa, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Measurements of negative ion density and plasma parameters in Ar/O2/C4F8 etching plasmas by Langmuir probe-assisted laser photodetachment 国際会議
B. B. Sahu, S.Hattori, T. Tsutsumi, N. Britun, Makoto Sekine, Kenji Ishikawa, H. Tanaka,T. Gohira, Y. Ohya, Noriyasu Ohno, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Selective killing effects of organics in plasma-activated Ringer's solutions 国際会議
Yuki Suda, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Reversible change in surface morphology of lipid bilayer induced by indirect plasma irradiation 国際会議
Hiroki Kondo, Takuya Tonami, Sotaro Yamaoka, Hiromasa Tanaka, Kenji Ishikawa, Makoto Sekine, Masafumi Ito and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Enhancement of alcohol production of budding yeast by direct irradiation of nonequilibrium atmospheric pressure plasma 国際会議
Shogo Matsumura, Kenji Ishikawa, Hiromasa Tanaka, Hiroshi Hashizume, Masafumi Ito, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Effect of wall-to-wall distance of carbon nanowalls on survival yield in surface assisted laser desorption/ionization mass spectrometry 国際会議
Ryusei Sakai, Hiroki Kondo, Kenji Ishikawa, Takayuki Ohta, Mineo Hiramatsu, Naohiro Shimizu, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Quality increase of fruits with plasma treatment on strawberry cultivation 国際会議
Hiroshi Hashizume, Shogo Matsumoto, Kenki Tsubota, Kaoru Sanda, Hiroko Mizuno, Akiko Abe, Genki Yuasa, Satoe Tohno, Hiromasa Tanaka, Kenji Ishikawa, Masafumi Ito, Hidemi Kitano, Hitoshi Sakakibara, Susumu Nikawa, Takayuki Okuma, Masayoshi Maeshima,Masaaki Mizuno, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Design of removal process of SnO2 on glass by H2/Ar plasma at atmospheric pressure and medium pressure 国際会議
Thi-Thuy-Nga Nguyen, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Crystalline structures and local electrical conductivity at crossing points of carbon nanowalls 国際会議
Atsushi Ozaki, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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A comparative study on inn growth at very high frequencies (VHF) by radical enhanced metalorganic chemical vapor deposition (REMOCVD) 国際会議
Frank Wilson Amalraj, Naohiro Shimizu, Osamu Oda, Kenji Ishikawa, and Masaru Hori
13th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science (ISPlasma2021/IC-PLANTS2021) 2021年3月8日
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Plasma applications for agriculture from seeds to field 国際会議
Hiroshi Hashizume, Hiroko Mizuno, Akiko Abe, Kenki Tsubota, Genki Yuasa, Satoe Tohno, Mikiko Kojima, Yumiko Takebayashi, Hiromasa Tanaka, Kenji Ishikawa, Masafumi Ito, Hidemi Kitano, Shogo Matsumoto, Hitoshi Sakakibara, Takayuki Okuma, Susumu Nikawa, Masayoshi Maeshima, Masaaki Mizuno, and Masaru Hori
3rd international workshop on plasma agriculture (IWOPA3) Greifswald, Germany. online, March 1-3, 2021 2021年3月1日
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Roles of seed pigments in responses of seeds to plasma treatment 国際会議
Kazunori Koga, Pankaj Attri, Ryo Arita, Ryoya Sato, Hayate Tanaka, Masaya Hiromatsu, Kayo Matsuo, Daisuke Yamashita, Kenji Ishikawa, Naho Itagaki, Kunihiro Kamataki, Masaharu Shiratani, and Vida Mildaziene
3rd international workshop on plasma agriculture (IWOPA3) Greifswald, Germany. online, March 1-3, 2021 2021年3月1日
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Electron spin resonace study on germination dynamics of plasma-activated seeds of radish sprouts 国際会議
Kenji Ishikawa, Ryo Arita, Ryoya Sato, Hayate Tanaka, Masaya Hiromatsu, Tomoaki Yoshida, Pankaj Attri, Kunihiro Kamataki, Naho Itagaki, Daisuke Yamashita, Kayo Matsuo, Kazunori Koga, and Masaharu Shiratani
3rd international workshop on plasma agriculture (IWOPA3) Greifswald, Germany. online, March 1-3, 2021 2021年3月1日
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(Plenary) Plasma-surface interactions in plasma etching of future device fabrication 国際会議
Kenji Ishikawa, Y. Miyawaki, T. Takeuchi, K. Takeda, S. Tajima, H. Kondo, T. Hayashi, M. Sekine, and M. Hori
The 16th International Workshop on Advanced Plasma Processing and Diagnostics
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Plasma-Biological Surface Interaction for Food Hygiene: Real-time in situ electron spin resonance measurements 国際会議
Kenji Ishikawa, H. Mizuno, H. Tanaka, H. Hashizume, T. Ohta, M. Ito, K. Takeda, H. Kondo, M. Sekine, and M. Hori
The 34th International Symposium on Dry Process (DPS)
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A High Temperature Plasma Etching of GaN and Its Reaction Mechanism 国際会議
R. Kometani, S. Chen, M. Liu, Kenji Ishikawa, H. Kondo, K. Takeda, T. Egawa, H. Amano, M. Sekine, and M. Hori
The 34th International Symposium on Dry Process (DPS)
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Studies on Plasma Etching of Si3N4 in Capacitively Coupled Plasma employing C5HF7 国際会議
Y. Miyawaki, Y. Kondo, M. Sekine, Kenji Ishikawa, T. Hayashi, K. Takeda, A. Ito, H. Matsumoto, and M. Hori
The 34th International Symposium on Dry Process (DPS)
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A reduction of degradation on ArF photoresist by C5HF7 plasma etching and its mechanism 国際会議
K. Asano, Y. Miyawaki, Kenji Ishikawa, M. Sekine, K. Takeda, A. Ito, H. Matsumoto, H. Kondo, and M. Hori
The 34th International Symposium on Dry Process (DPS)