講演・口頭発表等 - 堤 隆嘉
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低温における絶縁膜の擬ウェットプラズマエッチング
蕭 世男、関根 誠、飯島 祐樹、須田 隆太郎、大矢 欣伸、木原 嘉英、堤 隆嘉、石川 健治、堀 勝
第84回応用物理学会秋季学術講演会 2023年9月22日
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容量結合型パルスプラズマにおける負イオンの電極材料依存性
都地 一輝、堤 隆嘉、蕭 世男、関根 誠、石川 健治、堀 勝
第84回応用物理学会秋季学術講演会 2023年9月22日
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プラズマ誘起欠陥の発生と修復 ~酸素プラズマがSiO2/Si界面に及ぼす影響~
布村 正太、堤 隆嘉、堀 勝
第84回応用物理学会秋季学術講演会 2023年9月21日
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原子層エッチングにおけるプラズマ誘起欠陥へのラジカル吸着挙動
オソニオ アイラ ペラロ、堤 隆嘉、石川 健治、堀 勝
第84回応用物理学会秋季学術講演会 2023年9月21日
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In-liquid plasma synthesis, morphological control, and functionalization of nanographene materials 国際会議
H. Kondo, T. Tsutsumi, M. Hiramatsu, M. Hori
THERMEC'2023 2023年7月3日
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Plasma Synthesis of Graphene-Based Materials: Functionalization and Applications 招待有り 国際共著 国際会議
H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, and M.Hori
THERMEC'2023 2023年7月3日
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Recent Progress in the Synthesis of Functional and Three-Dimensional Carbon Nano-Composites By Gas-Liquid Interface Plasma 国際会議
H.Kondo, H.Zhou, T.Tsutsumi, K.Ishikawa, M.Sekine, and M.Hori
243rd ECS Meeting
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A comparative study on the CF4/H2 and HF/H2 plasmas for etching of highly hydrogenated SiN films 国際会議
Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori
25th International Symposium on Plasma Chemistry (ISPC25)
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Global and local contribution analysis of process parameters in Plasma enhanced chemical vapor deposition of amorphous carbon har 国際会議
Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, and Masaru Hori
The 4th International Conference on Data Driven Plasma Sciences ( ICDDPS-4 )
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熱酸化膜/シリコン界面でのプラズマ誘起欠陥の発生と修復
布村 正太、坂田 功、堤 隆嘉、堀 勝
第70回応用物理学会春季学術講演会
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成膜パラメータの寄与度解析に基づく、 水素化アモルファスカーボン薄膜のエッチ耐性の向上
安藤 悠介、近藤 博基、石川 健治、堤 隆嘉、関根 誠、堀 勝
第70回応用物理学会春季学術講演会
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Characterization of Plasmas and Polymerized Hydrofluorocarbon Films in Capacitively Coupled CF4/H2 Plasmas 国際会議
Yusuke Imai, Shih-Nan Hsiao, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Self-Limited Fluorination of Electron Beam-Irradiated GaN Surface 国際会議
Yusuke Izumi, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Contribution Analysis of Process Parameters in Plasma-Enhanced Chemical Vapor Deposition of Amorphous Carbon 国際会議
Yusuke Ando, Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Positive and Negative Ion Behaviors in DC-Imposed Ar/SF6 Pulsed Plasma 国際会議
Kazuki Toji, Takayoshi Tsutsumi, Kenji Ishikawa, Shih-Nan Hsiao, Makoto Sekine and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Etching Behavior of Lamellar Poly(styrene-b-2-vinylpyridine) Block Copolymer under N2/H2 Plasma Process 国際会議
Ma. Shanlene Dela Vega, Ayane Kitahara, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Atsushi Takano, Yushu Matsushita and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Study on Plasma Process Using Adsorbed C7F14 as an Etchant 国際会議
Kohei Masuda, Makoto Sekine, Kenji Ishikawa, Shih-Nan Hsiao, Takayoshi Tsutsumi, Hiroki Kondo and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Morphological Effect of Carbon Nanowalls on Exosome Capture 国際会議
Takumi Hashimoto, Hiroki Kondo, Hiromasa Tanaka, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Takao Yasui, Yoshinobu Baba, Mineo Hiramatsu and Masaru Hori
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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MEMS Nozzle for Capturing Lily Pollen in Array and Fixing on Culture Media 国際会議
Sachiko Sugiyama, Gang Han, Takayoshi Tsutsumi, Hiromasa Tanaka and Minoru Sasaki
15th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 16th International Conference on Plasma-Nano Technology & Science (ISPlasma2023/IC-PLANTS2023)
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Plasma diagnostics and characteristics of hydrofluorocarbon films in capacitively coupled CF4/H2 plasmas 国際会議
Shih-Nan Hsiao, Yusuke Imai, Nicolay Britun, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
International Symposium on Semiconductor Manufacturing 2022