Papers - TOYODA, Hirotaka
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Cross Section Measurements for Electron-Impact Dissociation of CHF3 into Neutral and Ionic Radicals, Reviewed
M. Goto, K. Nakamura, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys., Vol. 33 ( 6A ) page： 3602-3607 1994
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Measurement of Absolute Hydrogen Dissociation in a Diamond Deposition System Reviewed
M.A. Childs, K.L. Menningen, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. Lawler
Phys. Lett. A Vol. 194 page： 119123 1994
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Ultraviolet Spectroscopy of Gaseous Spacies in a Hot Filament Diamond Deposition System When C2H2 and H2 are the Input Gases. Reviewed
H. Toyoda, M.A. Childs, K.L. Menningen, L.W. Anderson, J.E. Lawler
J. Appl. Phys. Vol. 75 ( 6 ) page： 3142-3150 1994
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Absolute Radical Density Measurements in a CH4-H2 d.c. Discharge Reviewed
K.L. Menningen, M.A. Childs, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. Lawler
Diamond and Related Mater Vol. 3 page： 422-425 1994
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Evaluation of a Substrate Pretreatment for Hot Filament CVD Reviewed
K.L. Menningen, M.A. Childs, H. Toyoda, L.W. Anderson, J.E. Lawler
J. Mater. Res. Vol. 9 ( 4 ) page： 915-920 1994
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Plasma-assisted Surface Modification and Radical Diagnostics Reviewed
H. Sugai, M. Yamage, Y. Hikosaka, T. Nakano, H. Toyoda
J. Nucl. Mater Vol. 200 page： 403-411 1993
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Methyl Radical Production in a Hot Filament CVD System Reviewed
K.L. Menningen, M.A. Childs, P. Chevako, H. Toyoda, L.W. Anderson, J.E. Lawler
Chem. Phys. Lett Vol. 204 ( 5-6 ) page： 573-577 1993
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Spatial Distribution and Surface Loss of CF3 and CF2 Radicals in a CF4 Etching Plasma Reviewed
Y. Hikosaka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys Vol. 32 ( 3A ) page： L353-L356 1993
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Drastic Change in CF2 and CF3 Kinetics Induced by Hydrogen Addition into CF4 Etching Plasma Reviewed
Y. Hikosaka, H. Toyoda, H. Sugai
Japanese J. Appl. Phys Vol. 32 ( 5A ) page： L690-L693 1993
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Appearance Mass Spectrometry of Neutral Radicals in Radio Frequency Plasmas Reviewed
H. Sugai, H. Toyoda
Journal of Vacuum Science and Technology Vol. A10 ( 4 ) page： 1193-12004 1992
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In-situ Boron Nitride Coating and Comparison with Existing Boronization Reviewed
M. Yamage, T. Ejima, H. Toyoda, H. Sugai
J. Nucl. Mater. Vol. 196-198 page： 618-621 1992
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プラズマ界面における異常発光とフラグメンテーション Reviewed
片寄恭一, 豊田浩孝, 菅井秀郎
核融合研究 Vol. 67 ( 1 ) page： 51-61 1992
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High Speed Cleaning of Boronized Wall with a CF4 Containing Plasma Reviewed
H. Toyoda, A. Hanami, M. Yamage, H. Sugai
Japanese Journal of Applied Physics Vol. 30 ( 3B ) page： L514-517 1991
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Electron Impact Dissociation of Methane into CH3 and CH2 Radicals, II. Absolute Cross Sections Reviewed
T. Nakano, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 30 ( 11A ) page： 2912-2915 1991
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Electron Impact Dissociation of Methane into CH3 and CH2 Radicals, I. Relative Cross Sections Reviewed
T. Nakano, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 30 ( 11A ) page： 2908-2911 1991
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Interactions of Bulk-Boronized Graphites with Deuterium Plasmas in the PISCES-B Facility Reviewed
Y. Hirooka, R.W. Conn, H. Toyoda, H. Sugai et al.
Fusion Technol Vol. 19 page： 2059-2069 1991
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Spatial Distribution of CH2 and CH2 Radicals in a Methane RF Discharge Reviewed
H. Sugai, H. Kojima, A. Ishida, H. Toyoda
Applied Physics Letters Vol. 56 ( 26 ) page： 2616-2618 1990
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Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge Reviewed
H. Toyoda, A. Hanami, H. Sugai
Jpn. J. Appl. Phys. Vol. 29 ( 7 ) page： 1322-1323 1990
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RF Plasma Production at Ultralow Pressure with Surface Magnetic Confinement Reviewed
T. Shirakawa, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 29 ( 6 ) page： L1015-1018 1990
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Ion-Induced Radical Production on Surfaces during Deposition of Hydrogenated Amorphous Carbon Reviewed
Y. Yamashita, K. Katayose, H. Toyoda, H. Sugai
Journal of Applied Physics Vol. 68 ( 7 ) page： 3735-3737 1990