Papers - TOYODA, Hirotaka
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Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C3HF70 Reviewed
H. Tanaka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 37 ( 9A ) page： 5053-5059 1998
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Observation of Surface Dissociation of Low-energy Polyatomic Ions Relevant to Plasma Processing
H. Sugai, Y. Mitsuoka, H. Toyoda
J. Vac. Sci. Technol. Vol. 16 ( 1 ) page： 290-293 1998
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Basic Experiments on in-situ Magnetized Boronization by Electron Cycrotron Resonance Discharges Reviewed
H. Kokura, K. Sasaki, H. Toyoda, T. Mizuuchi, K. Kondo, F. Sano, T. Obiki, H. Sugai
J. Nucl. Mater. Vol. 241-243 page： 1217-1221 1997
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Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasmas Reviewed
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
Japanese Journal of Applied Physics Vol. 36 ( 6A ) page： 3714-3720 1997
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Cross Section Measurements for Electron-Impact Dissociation of C4F8 into Neutral and Ionic Radicals Reviewed
H. Toyoda, M. Iio, H. Sugai
Japanese Journal of Applied Physics Vol. 36 ( 6A ) page： 3730-3735 1997
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Laboratory Expercment on hydrogen and impurity behaviors in lithium-deposited environment
H. Toyoda, M. Watanabe, H. Sugai
Journal of Nuclear Materials Vol. 241-243 page： 1031-1035 1997
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Diagnostics for Advanced Plasma Control of Materials Processing Reviewed
H. Sugai, T.H. Ahn, I. Ghanashev, M. Goto, H. Toyoda, N. Nagatsu, K. Nakamura, K. Suzuki
Plasma Phys. Control. Fusion Vol. 39 page： A445-458 1997
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Lithium Wall Conditioning for Fuel and Impurity Control Reviewed
H. Sugai, M. Ohori, H. Toyoda
Vacuum Vol. 47 ( 6-9 ) page： 981-984 1996
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Lower Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductivety Coupled Silane Plasma
M. Goto, H. Toyoda, M. Kitagawa, T. Hirao, H. Sugai
Japanese Journal of Applied Physics Vol. 35 ( 8A ) page： L1009-1011 1996
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Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions. Reviewed
Y. Mitsuoka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 34 ( 11A ) page： L1486-1489 1995
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Hydrogen Content and Isotope Exchange in Boronization Reviewed
M. Yamage, H. Sugai, T. Saito, H. Toyoda, M. Saidoh, N. Ogiwara, T. Mizuuchi, F. Sano, et al.
J. Nucl. Mater. Vol. 220-222 page： 743-747 1995
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Observation of Ion Scattering from Metals Surfaces Bombarded with Low-Energy Hydrocarbon Ions Reviewed
Y. Mitsuoka, H. Toyoda, H. Sugai
Jpn. J. Appl. Phys. Vol. 34 ( 4B ) page： L516-519 1995
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Wall Conditioning with Lithium Evaporation Reviewed
H. Sugai, H. Toyoda, K. Nakamura, K. Furuta, M. Ohori, K. Toi, S. Hirokura, K. Sato
J. Nucl. Mater. Vol. 220-222 page： 254 1995
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Simple Direct Monitoring of SiH3 Radical and Particulates in a Silane Plasma with Ultra-Violet Transmission Spectroscopy Reviewed
H. Toyoda, M. Goto, M. Kitagawa, T. Hirao, H. Sugai
Jpn. J. Appl. Phys. Vol. 34 ( 4A ) page： L448-451 1995
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A Biased Optical Probe Method for Measurements of Electron Enaergy Distribution in a Plasma
H. Sugai, H. Toyoda, K. Nakano, N. Isomura
Journal of Plasma Sources, Science and Technoloy Vol. 4 page： 366372 1995
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Boronization Study for Application to Large Helical Device
N. Noda, A. Sagara, H. Yamada, H. Toyoda, H. Sugai, Y. Kubota, N. Inoue, K. Akaishi,, et al.
J. Nucl. Mater. Vol. 220-222 page： 623-626 1995
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Relative Cross Sections for Electron-Impact Dissociation of SF6 into SFx(x=1-3) Neutral Radicals Reviewed
M. Iio, M. Goto, H. Toyoda, H. Sugai
Contribution to Plasma Physics Vol. 35 ( 4-5 ) page： 405-413 1995
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Absolute Cross Sections for the Electron-Impact Dissociation of CF4 and CHF3 into the CFx (x=1-3) Neutral Radicals Reviewed
H. Sugai, H. Toyoda, T. Nakano, M. Goto
Contribution to Plasma Physics Vol. 35 ( 4-5 ) page： 415-420 1995
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CCH3 and CH Densities in a Diamond Growth DC Discharge Reviewed
K.L. Menningen, M.A. Childs, H. Toyoda, Y. Ueda, L.W. Anderson, J.E. .Lawler
Contribution to Plasma Physics Vol. 35 ( 4-5 ) page： 359-373 1995
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Measurement of CH3 and CH Densities in a Diamond Growth d. c. Discharge Reviewed
M.A. Childs, K.L. Menningen, H. Toyoda, L.W. Anderson, J.E. Lawler
Europhys. Lett. Vol. 25 ( 9 ) page： 729-734 1994