Papers - TOYODA, Hirotaka
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Investigation of the ion dese non-uniformity caused by sheath-lens focusing effect on silicon wafers Reviewed
N. Holtzer , E. Stamate, H. toyoda and H. Sugai
Thin Solid Films Vol. 515 page： 4887-4891 2007.4
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Dependence of Giant Magnetoresitance in Cn/Cu Multilayers on Sputtering Condition Reviewed
Changchuan Chen, Y. Suzuki, T. Kato. S. Iwata, S. Tsunashima, H. Toyoda, H. Sugai
Japanese Juenal of Applied Physics Vol. 45 ( 10B ) page： 8466-8468 2006.10
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Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma Reviewed
Y. Takagi, Y. Sakashita, H. Toyoda, and H. Sugai
Vacuum Vol. 80 ( 6 ) page： 581-587 2006.3
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バイアス光プローブによる反応性プラズマのEEDF測定 Reviewed
豊田浩孝
プラズマ・核融合学会誌 Vol. 81 ( 7 ) page： 496-501 2005
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High-energy ions and atoms sputtered and reflected from magnetron source for deposition of magnetic thin films Reviewed
H. Matsui, H. Toyoda and H. Sugai
J. Vac. Sci. Technol. A Vol. 23 ( 4 ) page： 671-675 2005
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Evidence of Direct SiO2 Etching by Fluorocarbon Molecules under Ion Bombardment Reviewed
N. Takada, H. Toyoda, I. Murakami and H. Sugai
Journal of Applied Physics Vol. 97 ( 1 ) page： 013534 1-5 2005
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Evidence of Radical-free Etching of SiO2 by Fluorocarbon Molecules under Ion Bombardment Reviewed
N. Takada, H. Toyoda and H. Sugai
Transacitons of the Materials Research Society of Japan Vol. 30 ( 1 ) page： 319-322 2005
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Beam Study of the Si and SiO2 Etching Processes by Energetic Fluorocarbon Ions Reviewed
H. Toyoda, H. Morishima, R. Fukute, Y. Hori, I .Murakami and H. Sugai
J. Appl. Phys. Vol. 95 page： 5172-5179 2004
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Dramatic Reduction of Chemical Sputtering of Graphite under Intercalation of Lithium Reviewed
H. Yagi, H. Toyoda, H. Sugai
J. Nucl. Mater. Vol. 313-316 page： 284-287 2003
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Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductively-Coupled Plasma Reviewed
T. Kojima, A. Ohishi, H. Toyoda, M. Goto, M. Nishitani and H. Sugai
Jpn. J. Appl. Phys. Vol. 40 ( 1 ) page： 322-325 2001
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Rapid Diffusion of Lithium into Bulk Graphite in Lithium Conditioning Reviewed
N. Itou, H. Toyoda, K. Morita and H. Sugai
J. Nucl. Mater. Vol. 290-293 page： 381-385 2001
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Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field Reviewed
H. Sugai, H. Toyoda, J. Ihde and J. Winter
J. Plasma and Fusion Research Vol. 77 ( 2 ) page： 130-136 2001
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Electron Energy Distribution Function and the Influence on Fluorocarbon Plasma Chemistry Reviewed
H. Sugai, I. Ghanashev, M. Hosokawa, K. Mizuno, K. Nakamura, H. Toyoda and K. Yamauchi
Plasma Sources Sci. Technol Vol. 10 page： 378-385 2001
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Measurement of Electron-Impact-Dissociation Cross Section for Neutral Products Reviewed
H. Sugai, H. Toyoda
AIP Conf. Proc. Vol. 500 page： 349-358 2000
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Laboratory Experiment on Lithium Chemistry and its Application to Effective Wall Conditioning Reviewed
S. Kato, M. Watanabe, H. Toyoda, H. Sugai
J. Nucl. Mater. Vol. 266-269 page： 406-411 1999
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PSI in Fusion Devices -Function and Perspective of Wall Conditioning
J. Plasma and Fusion Research Vol. 75 ( 4 ) page： 403-408 1999
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Lower Temperature Deposition of Poly-Crystalline Silicon Films from a Modified Inductively-Coupled Silane Plasma
K. Goshima, H. Toyoda, T. Kojima, M. Nishitani, M. Kitagawa, H. Yamazoe, H. Sugai
Jpn. J. Appl. Phys. Vol. 38 ( 6A ) page： 3655-3659 1999
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High Sensitivity Optical Absorption Spectroscopy by Optical Multichannel Analyzer Reviewed
OYO-BUTURI Vol. 68 ( 5 ) page： 551-552 1999
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Beam Experiments on Radical Production in Gas Phase and on Solid Surfaces Reviewed
J. Plasma and Fusion Research Vol. 75 ( 7 ) page： 779-784 1999
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Mechanism of Carbon Impurity Suppression by Lithium Conditioning Reviewed
J. Plasma and Fusion Research Vol. 75 ( 4 ) page： 459-466 1999