Faculty Profiles - HATA Seiichi

Papers - HATA Seiichi

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J2220102 Drive and production of two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti

Watanabe Shigetaka, Nakamitsu Yutaka, Sakurai Junpei, Mizojiri Mizue, Hata Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2014 ( 0 ) page： _J2220102- - _J2220102- 2014

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In Micro Electro Mechanical Systems (MEMS) technology, structure of amorphous alloy thin film is manufactured by sputter deposition and lift-off process. But its thickness is not uniform because lift-off masking material block off. The structure thickness of amorphous alloy thin film is low in the vicinity of lift-off masking material, and its cross-sectional shape is not rectangular. For these problems, we proposed new fabrication method of thick film structure of metallic glass with the sputtering jig, which combines projection surfaces and spacers. As this application, we have successfully fabricated two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti, which have uniform film thickness, rectangular cross-sectional shape and electrical factors. However, the sample was not able to be driven in driving test, because the torsion bar of sample had been broken for Cu-Zr-Ti crystallization. In this paper, we proposed low temperature production process which is not to crystallize Cu-Zr-Ti. And we have succeeded in fabricating and driving the two-axis scanning micro mirror device.

DOI： 10.1299/jsmemecj.2014._j2220102-

CiNii Research

F041003 Novel Fabrication Process to Enable Integration of Metallic Materials and Polymer Materials

HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2014 ( 0 ) page： _F041003-1 - _F041003-3 2014

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

When suitable materials in the right place are able to place freely anywhere, it can be produced with microactuators, sensors, and signal processing circuit to freely also inside as well as the surface of mechanical parts. Although they are basic research, two new processes indicating the possibility are introduced in this presentation. One is novel lift-off process using die. The other is direct reduction Cu patterning process by femtosecond laser pulses. These new processes show the potential to allow any arrangement of a polymeric material and metal in any place.

DOI： 10.1299/jsmemecj.2014._f041003-1

CiNii Research

S0440101 Laser direct reduction of CuO nanoparticles for Cu fine patterning

MIZOSHIRI Mizue, ARAKANE Shun, MAETANI Takuya, SHIKIDA Mitsuhiro, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2014 ( 0 ) page： _S0440101- - _S0440101- 2014

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

CuO nanoparticles were directly reduced to form fine Cu micropatterns using femtosecond laser pulses. CuO nanoparticles were dispersed into reductant agent and base-polymers. When the focused laser pulses were irradiated into the CuO nanoparticle based films on glass substrates, the Cu micropatterns were formed by reducing and sintering of CuO nanoparticles. XRD spectrum of the laser irradiated areas shows Cu peaks although the Cu peaks were not observed in XRD spectra of the non-irradiated area. The width of the Cu micropatterns were increased by decreasing laser pulse energy and increasing laser scanning speed. The minimum line width was 7 μm under the condition that the laser pulse energy and scanning speed were 0.36 nJ and 100 μm/s, respectively. When the pulse energy was low and the scanning speed was high, the line width of the Cu micropatterns only depended on the pulse energy, not the scanning speed. This result indicates that the threshold fluence could exist to form Cu micropatterns.

DOI： 10.1299/jsmemecj.2014._s0440101-

CiNii Research

Two-axis Scanning Micro Mirror Device with Thick Film Metallic Glass Cu-Zr-Ti and Parylene-C Reviewed

Shigetaka Watanabe, Yutaka Nakamitsu, Sakurai Junpei, Mizue Mizojiri, Seiichi Hata

2014 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS) 2014

Language：English Publishing type：Research paper (international conference proceedings) Publisher：IEEE

In this paper, we proposed a new fabrication method of thick film structure which has rectangular cross-sectional shape. This fabrication method utilized a new sputtering jig consisting of substrate and spacer units. The surface level of spacer unit is lower than one of substrate unit. After thick film deposition, the spacer unit is removed. In comparison with conventional sputtering and lift off process, thickness uniformity of structure fabricated by this method is improved dramatically. Finally, we fabricated the two-axis scanning micro mirror device which has coil element on the thick film structure of Parylene-C/Cu-Zr-Ti thin film metallic glass. This device achieved the optical scan angles of horizontal 10 degrees and vertical 10 degrees.

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Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks Reviewed

Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Seiichi Hata

Proceedings of 24th 2013 International Symposium on Micro-NanoMechatronics and Human Science page： 100-106 2013.11

Novel Combinatorial Method for Evaluation of Machinability for Glass Lens Mold Material Reviewed

Shengxian Jiang, Junpei Sakurai, Yuko Aono and Seiichi Hata

Proceedings of 24th 2013 International Symposium on Micro-NanoMechatronics and Human Science page： 100-106 2013.11

PVDF actuator for high-frequency fatigue test of thin-film metals Reviewed

Nastaran Tamjidi, Kohei Sato, Junpei Sakurai, Seiichi Hata

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING Vol. 8 ( 2 ) page： 199 - 205 2013.3

Language：English Publishing type：Research paper (scientific journal) Publisher：WILEY-BLACKWELL

This paper suggests a poly(vinylidene fluoride) (PVDF) piezoelectric diaphragm actuator used in a novel fatigue test method for thin metal films. A thin-film metal specimen is stamped on top of the actuator using a stamping epoxy. As the actuator vibrates, the stress in the specimen increases until it fails under fatigue. A finite element model of the actuator is built, and its vibration amplitude is confirmed to be in a good agreement with experiment. Then, a model of the specimen is added to this model to simulate the vibration of the specimen for fatigue test. Stress analysis of the specimen at a driving voltage of 200 V0p confirms that this actuator can increase the stress in the specimen to near 1 GPa, which is high enough for the fatigue test of metals such as titanium. In the experiment, a thin-film titanium specimen is stamped on top of the actuator which is then vibrated. The stress in the fatigue gauge on thin-film specimen increased until the specimen failed under fatigue. This shows that the proposed PVDF actuator is suitable for the fatigue test of thin-film metals such as titanium. (c) 2012 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

DOI： 10.1002/tee.21840

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High-Throughput Characterization of Thin Film Shape Memory Alloys

Aono Yuko, Kawaguchi Ryutaro, Sakurai Junpei, Hata Seiichi

IEEJ Transactions on Sensors and Micromachines Vol. 133 ( 8 ) page： 348 - 353 2013

Language：Japanese Publishing type：Research paper (scientific journal) Publisher：The Institute of Electrical Engineers of Japan

Thin film shape memory alloys (SMAs) are promising materials for micro-machines because of their high-output power, large strain, and actuation without high voltage. To search for compositions of suitable thin film SMAs for each application, combinatorial technique is useful tool, however the technique requires high-throughput characterization method for thermal property which is an important property of thin film SMAs such as two way martensitic transformation temperature and thermal hysteresis. In this paper, novel high-throughput characterization method for such properties using thermography is proposed and demonstrated. Compositionally integrated thin film SMA samples (TiNiPd) with only 1mm<sup>2</sup> of each area are characterized at once. The difference of martensitic and reverse martensitic transformation temperature against those temperatures measured by a conventional method, differential scanning calorimetry, is about 5K.

DOI： 10.1541/ieejsmas.133.348

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Combinatorial Search of Magnetostrictive Materials for Sensors

Maetani Takuya, Nakamitsu Yutaka, Sakurai Junpei, Nakagawa Shigeki, Hata Seiichi

IEEJ Transactions on Sensors and Micromachines Vol. 133 ( 8 ) page： 342 - 347 2013

Language：Japanese Publishing type：Research paper (scientific journal) Publisher：The Institute of Electrical Engineers of Japan

Combinatorial search is one of the useful methods that could search for optimal composition of alloy materials or novel alloy materials. Combinatorial sputtering provides sample group (library) having different compositions in a limited place. Then, the properties of the samples can be scanned in an efficient way. In this research, it was studied that magnetostrictive material with high magnetostriction, relative permeability and resistivity. Desired value of magnetostriction is more than 20×10<sup>-6</sup>, relative permeability is more than 4000, and resistivity is more than 100 µΩ·cm. As a result, composition that Cr content is less than 14 at.% fill the desired value of relative permeability, and more than 10 at.% fill the desired value of resistivity. There is possibility to fill the desired value of magnetostriction.

DOI： 10.1541/ieejsmas.133.342

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研究室だより：名古屋大学大学院工学研究科マイクロ・ナノシステム工学専攻集積機械デバイス講座マイクロ・ナノプロセス工学グループ Invited

秦誠一

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） Vol. 133 ( 6 ) page： NL6_2 - NL6_2 2013

6・2・6 特殊加工(6・2 材料加工,6.機械材料・材料加工,<特集>機械工学年鑑) Invited

秦誠一

日本機械学会誌 Vol. 116 ( 1137 ) page： 534 2013

632 Novel evaluation method for machinability of Ni-Nb-Ti alloy

JIANG Shengxian, SAKURAI Junpei, AONO Yuko, HATA Seiichi

The Proceedings of the Materials and processing conference Vol. 2013.21 ( 0 ) page： _632-1_ - _632-3_ 2013

Language：English Publisher：The Japan Society of Mechanical Engineers

Abstract As mold material for glass lens with microstructures, it requires not only excellent mechanical properties, high thermal stability and oxidation resistance, but also satisfying machinability Using combinatorial arc plasma deposition, Ni-Nb-Ti thin film libraries were deposited for evaluations of some properties, such as, crystallization temperature, thermal stabilities, hardness, oxidation resistance and so on When Ni within 40-58 at %, Nb within 24-46 at %, Ti within 5-20 at %, the thin film exhibited excellent thermal stability However, for machinability, the conventional method can measure only one composition at each time which is both time-consuming and expensive Therefore, a novel combinatorial deposition and evaluation method for machinability are proposed In those methods, thin film samples with concentrically grading composition are sputter - deposited using combination targets The sample has grading compositions of which in the center Ti content is rich and becomes gradually decreasing from center to edge This means that each position on the surface of sample represents a particular composition Then this sample will be cut at different positions After that, cutting depth and the roughness of cutting surfaces will be measured It is clearly to see this new method is more efficient than conventional method, which is able to measure a lot of compositions' machinability at one time with one sample

DOI： 10.1299/jsmemp.2013.21._632-1_

CiNii Research

Novel Combinatorial Method for Evaluation of Machinability for Glass Lens Mold Material

Jiang, SX; Sakurai, J; Aono, Y; Hata, S

2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS) 2013

J212036 Moisture-in-oil sensor that has an outstanding resistance for environment

YOSHII Yusuke, NAKAMITSU Yutaka, MUKAI Nobuyuki, MIZOGUTI Takashi, TAKAHASHI Tsutomu, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2013 ( 0 ) page： _J212036-1 - _J212036-3 2013

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

To realize a sensor that monitors moisture-in-oil, it is required a nanoporous thin film to separate water moleculars from oil. In this paper, we propose nanoporous thin films by utilizing dealloying behavior of dual-phase alloy in an acidic solution. Dealloying behavior is selective chemical etching process some of the most intricate and random three-dimensional morphologies. Using this dealloyed nanoporous thin film as an upper electrode of sensor, we produce a moisture-in-oil sensor that has an outstanding resistance for environment. Nanoporous Cr thin films were prepared by sputtering Cu and Cr, followed by annealing and dealloying. The nanoporous Cr thin films had pores ranging from about 200 nm to 300 nm and thicknesses about 1.0 μm.

DOI： 10.1299/jsmemecj.2013._j212036-1

CiNii Research

J212021 Compound micro process for two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti

Watanabe Shigetaka, Nakamitsu Yutaka, Sakurai Junpei, Hata Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2013 ( 0 ) page： _J212021-1 - _J212021-5 2013

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In Micro Electro Mechanical Systems (MEMS) technology, thick film structure is manufactured by sputter deposition and lift-off process. However, its thickness is not uniform because lift-off masking material block off. The structure thickness is low in the vicinity of lift-off masking material, and its cross-sectional shape is not rectangular. Thick film structure design is limited by this problem. Furthermore, it is hard to build uniformly electrical factors on the thick film structure surface. In this paper, we propose compound micro process for thick film structure with the sputtering jig, which combines projection surfaces and spacers. In the new compound micro process, since thick film structure is formed on the projection plane, the film thickness does not decrease as compared with lift-off process. Thereby, electrical factors can be built on the thick film structure surface. That structure is separated from the sputtering jig by removal of sacrificial layers and pacers. By removing the extra burr, thick film structure that has rectangular cross section and uniform thickness is made. In this way, we have successfully fabricated two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti, which have uniform film thickness, rectangular cross-sectional shape and electrical factors.

DOI： 10.1299/jsmemecj.2013._j212021-1

CiNii Research

J212017 Fatigue test of thin film alloy using micro-actuator

Yap Jeng Hua, SATO Kouhei, Nastaran Tamjidi, SAKURAI Junpei, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2013 ( 0 ) page： _J212017-1 - _J212017-2 2013

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In MEMS technology, it is important to know the characteristics of thin film alloys. Studies have been made on the high speed and high efficiency high-throughput evaluation in a wide variety of samples. Nevertheless, high-throughput evaluation of fatigue strength which is important in MEMS design has not been studied enough. In this research, we propose a high-throughput fatigue test for thin film alloys using micro-actuator, including the fabrication of both micro-actuator and specimen. This method is succeeded applying on Ti specimen with higher than 5 kHz frequency of loading. Finally, the S-N curve of Ti thin film was obtained.

DOI： 10.1299/jsmemecj.2013._j212017-1

CiNii Research

J212012 Combinatorial search and evaluation for Fe-Ni-Cr magnetostrictive materials

MAETANI Takuya, NAKAMITSU Yutaka, SAKURAI Junpei, NAKAGAWA Shigeki, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2013 ( 0 ) page： _J212012-1 - _J212012-3 2013

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Combinatorial search is one of the useful methods that could search for optimal composition of alloy materials or novel alloy materials. Combinatorial sputtering provides sample group (library) having different compositions in a limited place. Then, the properties of the samples can be scanned in an efficient way. In this research, it was studied that magnetostrictive material with high magnetostriction, relative permeability and resistivity. Desired value of magnetostriction is more than 20×10^<-6>, relative permeability is more than 4000, and resistivity is more than 100 μΩ・cm. As a result, composition that Cr content is less than 14 at.% fill the desired value of relative permeability, and more than 10 at.% fill the desired value of resistivity. Magnetostriction was evaluated by the capacitance change of capacitor consisted of cantilever and electrode.

DOI： 10.1299/jsmemecj.2013._j212012-1

CiNii Research

F113004 Electrostatic Micro Actuator made of Thin Film Metallic Glasses

HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2013 ( 0 ) page： _F113004-1 - _F113004-5 2013

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

This paper introduces driven methods for curled-up type electrostatic micro actuator made of thin film metallic glasses. One of the methods achieves analog motion over the full range of its stroke without closed loop control system. The device consists of a curled-up moving electrode that delivers large deflection in the out-of-plane direction and a taper-shaped base electrode. A prototype device achieves analog motion for 70% by rectangular AC voltage from 0V to 400V. Another method removes remnant charge that can cause a moving electrode to "stick" to its insulator and demonstrates the effectiveness of the method experimentally. The method is applicable to many types of MEMS because it does not require any change to the actuator fabrication process, structure, dimensions or materials. The only modification is to the waveform of the applied voltage.

DOI： 10.1299/jsmemecj.2013._f113004-1

CiNii Research

Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks

Mizoshiri, M; Mikami, M; Ozaki, K; Shikida, M; Hata, S

2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS) 2013

Micro-Nano Technology for Our Daily Life

HATA Seiichi

Journal of the Society of Mechanical Engineers Vol. 116 ( 1130 ) page： 11 - 11 2013

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Papers - HATA Seiichi