Faculty Profiles - HATA Seiichi

Papers - HATA Seiichi

Division display 101 - 120 of about 302 ／ All the affair displays >>

Fabrication of two dimensional periodic structures by self-assembling PDMS microparts

Iijima Yuki, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

The Proceedings of the Symposium on Micro-Nano Science and Technology Vol. 2017.8 ( 0 ) page： PN-70 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We prepared poly(dimethylsiloxane) (PDMS)-based microparts and fabricated hexagonal periodic structures by selfassembly. Periodic structures of PDMS are advantageous for the development of micro-optical devices because of the high transparency of PDMS in a wide range of wavelengths, including visible light. PDMS microparts were fabricated using the combination of photolithography and ultra-violet ozone treatment. The shape of the microparts was hexagonal prism consisting a hole in the center. The side lengths and the height were 10 μm and 8 μm, respectively. Self-assembly was progressed by the coffee-ring effect that flow the microparts toward outside of the suspension droplet that consisted of PDMS microparts and deionized water. A diffraction pattern was observed by laser irradiation to the self-assembled periodic structures. The ring pattern indicates that series of periodic structures were partially formed on the template.

DOI： 10.1299/jsmemnm.2017.8.pn-70

CiNii Research

Micro folding structure fabrication of Ti-Ni-Zr high formable shape memory alloys

WATANABE Hiroto, MIZOSHIRI Mizue, HATA Seiichi, SAKURAI Junpei

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220105 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We evaluated microforming ability and shape memory behaviors of Ti38Ni50Zr12 (at.%) high formable shape memory alloys (HFSMAs) for the fabrication of the micro folding structure such as foldable pipe structures. In the fabrication method of foldable pipe, at first, Ti-Ni-Zr thin film metallic glass (TFMG) sheet is creased by using micro jigs in the supercooled liquid region. Secondary, the both side edges of the sheet with creases are bonded together to make pipe structure. Finally, TFMG pipe with creases is annealed to be became SMAs. To foldable fabricate pipe structure, we evaluated microforming ability, shape memory behavior of folded SMAs, and bonding conditions. We succeeded to fabricate folded specimens with folding angle θ of 60° and 90°. In order to investigate shape memory behaviors, folded specimens were annealed at 873 K for 1 hour and become SMAs. Their shape memory behaviors were evaluated by bending tests during several thermal cycles, they showed good shape memory behaviors. We confirmed that folded specimens with folding angle θ of 60° and 90° can recover its shape without plastic deformation even if it was deformed to straight shape (θ=180°). We evaluated bonding conditions by using micro jigs between HFSMAs and bonding strength. As the results, when bonding pressure was 75 MPa, we succeeded the bonding process using viscous flow or diffusion bonding. Bonding strength increased with increasing bonding temperature. When bonding temperature was 673 K, the bonded specimen was crystallized and show bonding strength of more than 2.5 MPa. However, when bonding temperature was over 723 K, the specimens stuck with micro jig.

DOI： 10.1299/jsmemecj.2017.j2220105

CiNii Research

Combinatorial searching for Ti-Ni-Zr high formability shape memory alloys

SAKURAI Junpei, MURAKAMI Motoki, MiZOSHIRI Mizue, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220104 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In this paper, we proposed the combinatorial evaluation method of thermal properties such as glass transition temperature Tg and crystallization temperature Tx for Ti-Ni-X high formable shape memory alloys (HFSMAs). We fabricated the integrated library consisting of 5 samples with different alloy compositions. This library was prepared by carousel type co-sputtering system using metal shadow masks. Alloy composition distribution of this library had homogeneous in one direction (RD direction). In contrast, in another direction (TD direction), this library had compositionally graded alloy composition. Finally, we combinatorial-evaluated thermal properties of 5 Ti-Ni-Zr amorphous samples on the library. 3 samples showed glass transition, and they were thin film metallic glasses. Specifically, they were HFSMAs. Other 2 samples did not show glass transition, and they were only amorphous sample (only SMAs). These results agreed with the results of previous paper using conventional sequential evaluation methods.

DOI： 10.1299/jsmemecj.2017.j2220104

CiNii Research

Combinatorial evaluation of magnetic property by using SOI-MEMS device

MAETANI Takuya, HONGAWA Yuki, MIZOSHIRI Mizue, SAKURAI Junpei, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220103 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In this research, we investigated high throughput evaluation method of magnetostriction and relative permeability for magnetostrictive materials using MEMS device. MEMS device is fabricated by bonding process of evaluation substrate which consist of pick up coil and vibrating electrode, and sample substrate which is fabricated on the SOI wafer. The resonance frequency of fabricated cantilever sample is 6.6 kHz which is measured by using frequency response analyzer, applied voltage between sample surface and vibrating electrode is 80 Vpp. Vibrating state is measured by using Laser Doppler Vibrometer. The magnetization of the sample is evaluated from the output voltage of pick up coil placed near the cantilever sample. Rock in amplifier is used for the measurement of voltage of pick up coil. The output voltage is increased as long as increasing applied magnetic field. This result shows the possibility to measure magnetization of magnetic materials using proposed MEMS device. In this paper, we show the evaluation result of resonance frequency and magnetization curve of fabricated MEMS device.

DOI： 10.1299/jsmemecj.2017.j2220103

CiNii Research

Preparation of PDMS microparts and evaluation of their self-assembling properties for fabrication of periodic structures

IIJIMA Yuki, MIZOSHIRI Mizue, SAKURAI Junpei, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220203 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We evaluated the self-assembling properties of fabricated poly(dimethylsiloxane) (PDMS)-based microparts. The PDMS-based microparts, which are advantageous for use in optical devices due to their high transparency in ultraviolet (UV) to near infrared light, were fabricated and assembled. The microparts were prepared by photo-lithography and UV-ozone treatment processes. The size of the microparts was 20 μm and the shape was a hexagonal prism to form hexagonal close-packed by self-assembly. The microparts were prepared approximately 2×105 numbers on a glass substrate, following that they were separated from substrate by sonicating in acetone. The suspension including microparts was prepared by evaporating acetone and adding water and surfactant F-127. The microparts were self-assembled by using the capillary force and the coffee-ring effect. The suspension including microparts and water was dripped to the template glass substrates which had photoresist patterns. Microparts were self-assembled by the coffee-ring effect which occurred with water volatilization. Finally, the PDMS-based periodic structures were successfully formed by self-assembled hexagonal close-packed of microparts.

DOI： 10.1299/jsmemecj.2017.j2220203

CiNii Research

Defocus direct-writing properties of Cu micropatterns in femtosecond laser reduction of CuO nanoparticles

ITO Yasuaki, MIZOSHIRI Mizue, SAKURAI Junpei, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： S0460101 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We investigated defocus direct-writing properties of Cu micropatterns on planar poly(dimethylsiloxane) (PDMS) substrates in femtosecond laser reduction of CuO nanoparticles (NPs). The Cu lines written at defocus position of every 1 μm from -5 to 5 μm had almost uniform width, 20±1 μm, at a numerical aperture (NA) of 0.45. The crystal structures of the micropatterns which were formed at the defocus positions of -5, 0, and 5 μm were also evaluated. The micropatterns were formed at the pulse energy of 0.45 nJ, scan pitch of 5 μm, and various scan speed. Regardless of the defocus position, the degree of reduction of micropatterns exhibited the same properties. When scan speed was larger than 10 mm/s, Cu-rich micropatterns were obtained. When scan speed was 5 mm/s, Cu2O-rich micropatterns were formed. Finally, Cu-based mesh micropatterns were fabricated at various laser scan pitch. When scan pitch was determined as 25 μm and 50 μm, Cu-rich mesh micropatterns were formed at 5 mm/s. The temperature coefficient of resistance of Cu-rich mesh micropatterns with the pitch of 25 μm was 0.005/°C, which was as small as expected values.

DOI： 10.1299/jsmemecj.2017.s0460101

CiNii Research

Fabrication of SOI-MEMS device for combinatorial searching of magnetostrictive materials

HONGAWA Yuki, MAETANI Takuya, SAKURAI Junpei, MIZOSHIRI Mizue, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220102 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Magnetostrictive materials are applicable to various types of sensors. In order to increase the resolution of the sensor, materials with high magnetostriction amount and relative permeability are required and Fe-Ni-Cr alloys are expected to have excellent magnetic properties. For searching materials with ideal properties, combinatorial search is one of the effective method. In this study, integrated SOI-MEMS device for combinatorial search is fabricated. This device is designed to perform combinatorial search of magnetostriction amount and relative permeability of Fe-Ni-Cr alloys.

DOI： 10.1299/jsmemecj.2017.j2220102

CiNii Research

Photoelastic stress measurement of PVA hydrogel using image processing

ABE Shuhei, KUMENO Yuki, IKEDA Seiichi, SAITO Azusa, KAWAKAMI Masaru, FURUKAWA Hidemitsu, MIZOSHIRI Mizue, SAKURAI Junpei, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J0470302 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Photoelastic stress measurement of PVA hydrogel for vessel model was investigated. In order to apply to the vessel model, the properties of PVA hydrogel were evaluated. Young's modulus of PVA hydrogel is 0.06-0.45 MPa, which is useful for reproducing soft vascular tissue. The photoelastic coefficient of PVA hydrogel is 1.60×10-9 Pa-1, which is useful for photoelastic stress measurement. We constructed a new photoelastic observation system that can measure the value and direction of stress from only RGB values. In order to minimize the overlap ratio of the same color in color map, the number of 1 wave plate is 2 and the insertion angle is 30 degrees. Furthermore, a program was developed to output stress distribution images by image processing using this photoelastic observation system. As a result of photoelastic stress measurement of PVA hydrogel under tensile loading, measurement was successful with an error of 6.0%, which is sufficient accuracy.

DOI： 10.1299/jsmemecj.2017.j0470302

CiNii Research

Fabrication of Cu/Cu-Ni thin film thermoelectric generator for energy harvest

SHIMIZU Yuki, MIZOSHIRI Mizue, MIKAMI Masashi, SAKURAI Junpei, HATA Seiishi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220202 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We demonstrated the fabrication of Cu/Cu-Ni thin-film thermoelectric generators for energy harvest. The device consisted of 50 pairs of Cu/Cu-Ni thermocouples. The widths of the Cu (p-type) and Cu-Ni (n-type) thermoelectric elements were 75 μm and 225 μm, respectively. The length of the both elements was 5 mm. Cu and Cu-Ni thin films were deposited on glass substrates using radio-frequency magnetron sputtering method and formed by lift-off techniques. Cu plate was connected the cold sides of the pn junctions using Ag paste. The compositions of Cu and Ni in the deposited thin films using a Cu60Ni40 alloy target were 58.5(±1.4)at% and 41.5(±0.9)at%, respectively, indicating that significant oxidation of the thin films were not observed. The generation properties of the fabricated 5 devices, which were connected in series, were evaluated. When the hot sides of the devices were heated at 55.4°C using a hot plate as a thermal source, the temperature difference of between the hot and cold sides was approximately 18°C. The open-circuit voltage and maximum power were 192 mV and 1.46 μW (0.65 mW/m2), respectively.

DOI： 10.1299/jsmemecj.2017.j2220202

CiNii Research

Fabrication of a nano-porous electrode film filter using a novel Cu-Cr dealloying and its application for a sensor

YOSHII Yusuke, SAKURAI Junpei, MIZOSHIRI Mizue, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220201 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In our previous study, a nano-porous film was fabricated by a Cu-Cr dealloying concluding an annealing process, which play a role in a thermal coarsening of an as-deposited Cu-Cr film. Because of the thermal coarsening, metal grains were grown, thus Cu was easily dealloyed from an as-deposited Cu-Cr film. However sensor materials were restricted due to a high coarsening temperature. In this study, a novel Cu-Cr dealloying was introduced, in which process high sputtering pressure and low sputtering power supply the place of the annealing process. A Cu82Cr18 film with an area with dimensions 2 mm×5 mm was fabricated on a polyimide by co-sputtering for 35 min at 2.5 Pa of argon, at 175 W for the Cu target and 80 W for the Cr target. The so fabricated film was immersed in 22.5% HNO3 for 30 minutes at room temperature. As a result, Cu was dealloyed from the as-deposited Cu82Cr18 film, ant its composition changed into Cu25Cr75. Furthermore, an appearance of the film changed from Cu brown to transparent appearance. As a reason of the transparency, a chromium oxide was formed. In addition, a nanoporous structure with 20-40 nm pores was successfully observed using FE-SEM. This nano-porous film was applied for an upper electrode of a moisture sensor which takes sandwich structure of an upper electrode/a polyimide/a lower electrode. The fabricated sensor showed a good responsibility in the air and a good hysteresis of 9.3%F.S., which was within the desired value of 10.0%F.S..

DOI： 10.1299/jsmemecj.2017.j2220201

CiNii Research

Combinatorial Searching for Chlorine Evolution Electrode Catalyst

TAKAGI Shingo, MIYAMOTO Masashi, MIZOSHIRI Mizue, HATA Seiichi, SAKURAI Junpei

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J2220101 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We performed combinatorial searching of suitable Ir-Ru-TiO2/Ti system electrode catalysts for brine electrolysis. Proposed combinatorial evaluation substrates were fabricated by micro electro mechanical systems (MEMS) process. 9 Ir-Ru-TiO2/Ti electrode catalysts were prepared on the glass substrate by a combinatorial co-sputtering system. As characteristics of electrode catalyst, the maximum current density and the durability was evaluated during brine electrolysis in NaCl solution of 30 g/L. The measurement of the maximum current density was performed by linear sweep voltammetry. Durability was evaluated by observation of catalyst surface and X-ray diffractometry before and after brine electrolysis. As the results of linear sweep voltammetry, Ir24.3Ru35.3Ti40.4 electrode catalyst exhibited the highest maximum current density among 51 fabricated Ir-Ru-TiO2/Ti samples, and showed approximately 1.5 times higher maximum current density than Ir25.1Ru26.2Ti48.7 electrode catalyst having the composition near DSE (Dimensionally Stable Electrode), which is used for industrial electrode catalyst for brine electrolysis. Ir24.3Ru35.3Ti40.4 electrode catalyst showed good durability for brine electrolysis.

DOI： 10.1299/jsmemecj.2017.j2220101

CiNii Research

Stress measurement of designable-gel using photoelastic method

KUMENO Yuki, ABE Shuhei, IKEDA Seiichi, SAITO Azusa, KAWAKAMI Masaru, FURUKAWA Hidemitsu, MIZOSHIRI Mizue, SAKURAI Junpei, HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan Vol. 2017 ( 0 ) page： J0470305 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We investigated mechanical properties and photoelastic coefficient of designable-gel, double network gel, for fabricating vessel models. Designable-gel samples were prepared with different material ratios, and especially crosslinker(MBAA) 27 mM samples were prepared by molding and shaping with 3D gel printer “SWIM-ER” (Prof. Furukawa et al., Yamagata Univ.). Moreover, the stress occurring in the sample was measured by the photoelastic stress measurement system using photoelastic effect and image processing, developed by our group, and the error between the tensile test result and the measurement system result was evaluated. The young's modulus of designable-gel was found to be 0.12 - 0.77 MPa for strain 0 - 15%, and 0.22 - 1.3 MPa for 15% ~, and is within the young's modulus of human vessels. Therefore, designable-gel was shown to be useful for reproducing human vessels. The photoelastic coefficient of designable-gel was 0.012 - 0.022 ×10-9 Pa-1, and is effective for measuring stress by photoelastic effect. The error between the tensile test result and the measurement system result was 7.3%. The vessel model made of designable-gel can be applied to the photoelastic stress measurement system, because the error is small and acceptable.

DOI： 10.1299/jsmemecj.2017.j0470305

CiNii Research

Fabrication of Cu-based mesh-thermal detectors using femtosecond laser reduction pattering of CuO nanoparticles

Ito Yasuaki, Mizoshiri Mizue, Sakurai Junpei, Hata Seiichi

The Proceedings of the Symposium on Micro-Nano Science and Technology Vol. 2017.8 ( 0 ) page： PN-16 2017

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Cu-based mesh-thermal detector was fabricated using femtosecond laser reduction patterning on planer glass substrate. First, the width of line patterns formed in various scan speed were evaluated. Then, the lattice structures of the micropatterns formed in scan speed of 5 mm/s, scan pitch of 5 or 25 μm were examined using X-ray diffraction analysis. When the scan pitch was 25 μm, the lattice patterns were Cu-rich materials with the electrical resistivity of 4.1×10-5 Ωm. Cu2O-rich patterns with the electrical resistivity of 1.2×10-1 Ωm were obtained when the scan pitch was 5 μm. Finally, we demonstrated the fabrication of Cu-based mesh-thermal detectors with the scan pitch of 25 μm. The thermal detector provided the plus temperature coefficient of resistance of 0.002/ºC. This mesh patterning technique is useful for fabricating microdevices such as sensors.

DOI： 10.1299/jsmemnm.2017.8.pn-16

CiNii Research

Effect of Different Solvents on Cu Micropatterns Formed via Femtosecond Laser Reduction Patterning

Mizoshiri Mizue, Arakane Shun, Sakurai Junpei, Hata Seiichi

International Journal of Automation Technology Vol. 10 ( 6 ) page： 934 - 940 2016.11

Language：English Publishing type：Research paper (scientific journal) Publisher：Fuji Technology Press Ltd.

We investigated the effect of different solvents on the Cu micropatterns formed via femtosecond laser reduction patterning. Solvents such as ethylene glycol, 2-propanol, and glycerol were mixed with CuO nanoparticles and polyvinylpyrrolidone. The degree of reduction and the resistivity of the fabricated micropatterns depended on the solvent. Glycerol was the most effective reducing agent. This solution was used to fabricate Cu/Cu2O composite micro-temperature sensors. Cu-rich electrodes and Cu2O-rich sensors were selectively formed by controlling the laser scanning speed at 5 mm/s and 0.5 mm/s, respectively, when the pulse energy was 0.53 nJ. The temperature sensor exhibited a negative temperature coefficient of the resistance, which was consistent with the value for Cu2O.

DOI： 10.20965/ijat.2016.p0934

Scopus

CiNii Research

researchmap

Direct Writing of Cu-based Micro-temperature Sensors onto Glass and Poly(dimethylsiloxane) Substrates Using Femtosecond Laser Reductive Patterning of CuO Nanoparticles

Mizue Mizoshiri, Seiichi Hata

Research & Reviews: Journal of Material Sciences Vol. 4 ( 4 ) page： 47-54 2016.10

Direct fabrication of Cu/Cu

Mizoshiri Mizue, Ito Yasuaki, Arakane Shun, Sakurai Junpei, Hata Seiichi

Jpn. J. Appl. Phys. Vol. 55 ( 6 ) page： 06GP05 2016.6

Language：English Publisher：IOP publishing

Micro-temperature sensors, which composed of a Cu<inf>2</inf>O-rich sensing part and two Cu-rich electrodes, were directly fabricated by femtosecond laser reduction patterning of CuO nanoparticles. Patterning of the microstructures was performed by laser scanning with pitches of 5, 10, and 15 µm. Cu<inf>2</inf>O-rich micropatterns were formed at the laser scan speed of 1 mm/s, the pitch of 5 µm, and the pulse energy of 0.54 nJ. Cu-rich micropatterns that had high generation selectivity of Cu against Cu<inf>2</inf>O were fabricated at the laser scan speed of 15 mm/s, the pitch of 5 µm, and the pulse energy of 0.45 nJ. Electrical resistivities of the Cu<inf>2</inf>O- and Cu-rich micropatterns were approximately 10 Ω m and 9 µΩ m, respectively. The temperature coefficient of the resistance of the micro-temperature sensor fabricated under these laser irradiation conditions was −5.5 × 10−3/°C. This resistance property with a negative value was consistent with that of semiconductor Cu<inf>2</inf>O.

DOI： 10.7567/JJAP.55.06GP05

Web of Science

Scopus

researchmap

Fabrication of CuO-based antireflection structures using self-arranged submicron SiO

Kondo Tasuku, Mizoshiri Mizue, Mikami Masashi, Itou Yoshitaka, Sakurai Junpei, Hata Seiichi

Jpn. J. Appl. Phys. Vol. 55 ( 6 ) page： 06GP07 2016.6

Language：English Publisher：IOP publishing

We fabricated antireflection structures (ARSs) on the hot side of a thermoelectric generator (TEG) to absorb near-infrared (NIR) solar light with low reflective energy loss. First, the ARSs, composed of a CuO thin-film coated hemisphere array were designed using rigorous coupled wave analysis. Reflective loss was reduced to 6.7% at a grating period of 200 nm, as determined by simulation. Then, the ARSs were fabricated on a glass substrate using self-arranged submicron SiO<inf>2</inf>spheres, following the coating of a CuO thin film. Finally, the effect of the ARSs on NIR solar light generation was investigated by evaluating the generation properties of the TEG with the ARSs on the hot side. In comparison with the TEG with the CuO flat thin film on the hot side, the ARSs increased the temperature difference between the hot and cold sides by approximately 1.4 times. The CuO-based ARSs absorbed NIR solar light effectively.

DOI： 10.7567/JJAP.55.06GP07

Web of Science

Scopus

researchmap

Fabrication of CuO-based anti-reflection structures using self-arranged submicron SiO2 spheres for thermoelectric solar generation Reviewed

Tasuku Kondou, Mizue Mizoshiri, Masashi Mikami, Junpei Sakurai, Seiichi Hata

Japanese Journal of Applied Physics Vol. 55 ( 6S1 ) 2016.5

Direct fabrication of Cu/Cu2O composite micro-temperature sensor using femtosecond laser reduction patterning Reviewed

Mizue Mizoshiri, Yasuaki Ito, Shun Arakane Junpei Sakurai, Seiichi Hata

Japanese Journal of Applied Physics Vol. 55 page： 06GP05 2016.5

Language：English Publishing type：Research paper (scientific journal)

Micro-temperature sensors, which composed of a Cu2O-rich sensing part and two Cu-rich electrodes, were directly fabricated by femtosecond
laser reduction patterning of CuO nanoparticles. Patterning of the microstructures was performed by laser scanning with pitches of 5, 10, and
15 µm. Cu2O-rich micropatterns were formed at the laser scan speed of 1 mm/s, the pitch of 5 µm, and the pulse energy of 0.54 nJ. Cu-rich
micropatterns that had high generation selectivity of Cu against Cu2O were fabricated at the laser scan speed of 15 mm/s, the pitch of 5 µm, and
the pulse energy of 0.45 nJ. Electrical resistivities of the Cu2O- and Cu-rich micropatterns were approximately 10 Ω m and 9 µΩ m, respectively. The
temperature coefficient of the resistance of the micro-temperature sensor fabricated under these laser irradiation conditions was %5.5 ' 10%3/°C.
This resistance property with a negative value was consistent with that of semiconductor Cu2O. © 2016 The Japan Society of Applied Physics

DOI： 1347-4065/55/6S1/06GP05

金属酸化物ナノ粒子を用いたフェムト秒レーザー還元直接描画法

溝尻瑞枝，秦誠一

OPTRONICS Vol. 35 ( 413 ) page： 145-151 2016.5

　 PREV - NEXT 　

<HATA Seiichi>

Papers - HATA Seiichi