Papers - HATA Seiichi
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Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature Reviewed
24. Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting page： CD-ROM 2005.11
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Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy Reviewed
Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting page： CD-ROM 2005.11
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Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature Reviewed
Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting page： CD-ROM 2005.11
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Integrated conical spring linear actuators for tilting-mirror applications Reviewed
T. Fukushige, S. Hata and A. Shimokohbe
Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005) page： pp12-13 2005.9
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A complete blood count micro sensor designed to reduce noise from electrolysis gas Reviewed
R. Tanabe, S. Hata and A. Shimokohbe
Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005) page： pp622-623 2005.9
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Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range Reviewed
T. Fukushige, S. Hata, Takehiko Hayashi, and A. Shimokohbe
Proc. IPACK2005 page： CD-ROM, pp. IPACK2005-73145 2005.6
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Thin Film Metallic Glasses as New MEMS Materials Reviewed
Seiichi Hata, Junpei Sakurai and Akira Shimokohbe
Technical Digest of The 18th IEEE International Conference on MEMS 2005 page： 479-482 2005.1
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A MEMS Conical Spring Actuator Array Reviewed
T. Fukushige, S. Hata, and A. Shimokohbe,
IEEE/ASME Journal of Microelectromechanical Systems Vol. 14 ( 2 ) page： 243-253 2005
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Novel fabrication method of metallic glass thin film using carousel type sputtering system Reviewed
J. Sakurai, S. Hata and A. Shimokohbe
Proc. of SPIE Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, page： 260-267 2004.12
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A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking Reviewed
T. Fukushige, S. Hata and A. Shimokohbe
Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) page： 15-16 2004.6
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2-DOF thin film metallic glass microactuator Reviewed
S. Hata, H. W. JEONG and A. Shimokohbe
Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) page： 9-10 2004.6
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Large-output-force out-of-plane MEMS actuator array Reviewed
T. Fukushige, S. Hata and A. Shimokohbe
Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology, Vol. 5276 page： 240-248 2003.12
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Micro dome shape structures made of thin film metallic glass Reviewed
Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai and Akira Shimokohbe
Micro System Technology 2003 page： (MST '03), 180-187 2003.10
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Reduction of electrical resistivity in PdCuSi thin film metallic glass Reviewed
J. Sakurai, S. Hata and A. Shimokohbe
Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03) page： CD-ROM 2003.9
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On-Chip Variable Inductor Using Microelectromechanical Systems Technology Reviewed
Yoshisato YOKOYAMA ,Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE
Jpn. J. Appl. Phys Vol. 42 page： 2190-2192 2003
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Self-alignment of microparts using liquid surface tension - behavior of microparts and alignment characteristics Reviewed
Kaiji Sato, Kentaro Ito, Seiichi Hata and Akira Shimokohbe
Precision Engineering Vol. 27 page： 42-50 2003
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Microforming of Three-Dimensional Microstructures from Thin Film Metallic Glass Reviewed
Hee-Won Jeong, Seiichi Hata and Akira Shimokohbe
IEEE/ASME Journal of Microelectromechanical Systems Vol. 12 ( 1 ) page： 42-52 2003
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Fabrication and Evaluation of On-Chip Micro Variable Inductor Reviewed
Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe
Microelectronic Engineering ( 67-68 ) page： 582-587 2003
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集積化円すいばねマイクロアクチュエータ Reviewed
秦 誠一，加藤友和，福重孝志，下河邉 明
精密工学会誌 Vol. 69 ( 3 ) page： 438-442 2003
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Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass Reviewed
Seiichi Hata, Takashi Fukushige and Akira Shimokohbe
Proceedings of CPT2002 page： 162-167 2002.10