Papers - HATA Seiichi
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Characteristics of Thin Film Metallic Glasses for MEMS and Precise Part Reviewed
J. Sakurai, S. Hata and A. Shimokohbe
Proceedings of Second TIT-BIT Joint Workshop on Mechanical Engineering page： CD-ROM 2007.8
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Characteristics of Thin Film Metallic Glasses for MEMS and Precise Part Reviewed
J. Sakurai, S. Hata and A. Shimokohbe
Proceedings of Second TIT-BIT Joint Workshop on Mechanical Engineering page： CD-ROM 2007.8
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A Hemoglobin and Volum Measurement Sensor for Point of Care Testing Analyzer using MEMS Process Reviewed
Rikiya Tanabe, Seiichi Hata and Akira Shimokohbe
IEEJ Transactions on Sensors and Micromachines Vol. 127 ( 5 ) page： 267-271 2007.8
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Behavior of joining interface between thin film metallic glass and silicon nitride at heating Reviewed
19. Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC), page： 56 2007.5
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Behavior of joining interface between thin film metallic glass and silicon nitride at heating Reviewed
Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Abstracts in1st International Conference on Science and Technology for Advanced Ceramics (STAC) and 2nd International Conference on Joining Technology for New Metallic Glasses and Inorganic Materials (JTMC page： 56 2007.5
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Searching for Novel Ru-Based Thin Film Metallic Glass by Combinatorial Arc Plasma Deposition Reviewed
Junpei Sakurai Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Jpn. J. Appl. Phys Vol. 46 ( 4A ) page： 1590-1595 2007
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A Disposable Concept Laminated MEMS Hematology Chip Reviewed
R. Tanabe, S. Hata, A. Shimokohbe
Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology ( 1 ) page： 45-48 2007
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A Disposable Concept Laminated MEMS Hematology Chip Reviewed
R. Tanabe, S. Hata, A. Shimokohbe
Conference Proceedings of 7th International Conference of the European Society for Precision Engineering and Nanotechnology ( 1 ) page： 45-48 2007
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Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition Reviewed
Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology, pp page： 41 2006.12
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The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition Reviewed
Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology page： pp63 2006.12
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Searching for Ru-based Amorphous Thin Film and Thin Film Metallic Glass with Combinatorial Arc Plasma Deposition Reviewed
Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology page： pp63 2006.12
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The Search for Novel Amorphous Thin Films using Combinatorial Arc Plasma Deposition Reviewed
Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Book of Abstracts in 4th International Workshop on Combinatorial Materials Science & Technology page： pp63 2006.12
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Built-in Capacitive Displacement Sensor with Long Full-Scale Range for Electrostatic Microactuators Reviewed
Takashi Fukushige, Takehiko Hayashi, Seiichi Hata and Akira Shimokohbe
IEEJ Transactions on Sensors and Micromachines Vol. 126 ( 9 ) page： 522-527 2006
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MEMS complete blood count sensors designed to reduce noises from electolysis gas Reviewed
Rikiya Tanabe, Seiichi Hata, Akira Shimokohbe
Microelectronic Engineering Vol. 83 ( 4-9 ) page： 1646-1650 2006
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Combinatorial Arc Plasma Deposition of Thin Films Reviewed
Seiichi HATA, Ryusuke YAMAUCHI, Junpei SAKURAI and Akira SHIMOKOHBE
Jpn. J. Appl. Phys. Vol. 45 ( 4A ) page： 2708-2713 2006
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Combinatorial Search for Low Resistivity PdCuSi Thin Film Metallic Glass Reviewed
Ryusuke YAMAUCHI, Seiichi HATA, Junpei SAKURAI and Akira SHIMOKOHBE
Jpn. J. Appl. Phys Vol. 45 ( 7 ) page： 5911-5919 2006
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A MEMS complete blood count sensor with vanes for reduction in influence of electrolysis gas Reviewed
Rikiya Tanabe, Seiichi Hata and Akira Shimokohbe
IEEJ Transactions on Sensors and Micromachines Vol. 126 ( 7 ) page： 297-301 2006
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Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy Reviewed
Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting page： CD-ROM 2005.11
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Out-of-plane Motion Microactuator Made of Thin Film Metallic Glass Reviewed
Seiichi Hata, Takashi Fukushige, Hiroyuki Tachikawa and Akira Shimokohbe
Proc. of 18th International Congress of Mechanical Engineering (COBEM 2005) page： CD-ROM 2005.11
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Combinatorial Optimization of Low Electrical Resistivity Pd-based Thin Film Metallic Glasses Reviewed
Ryusuke Yamauchi, Seiichi Hata, Junpei Sakurai and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting page： CD-ROM 2005.11