Papers - HATA Seiichi
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Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass, Reviewed
Seiichi Hata, Takashi Fukushige and Akira Shimokohbe
Proceedings of CPT2002 page： 162-167 2002.10
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Fabrication and Evaluation of On-Chip Micro Variable Inductor Reviewed
Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe
Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002 page： 210-211 2002.9
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Integrated Conical Soring Linear Actuator Reviewed
Seiichi Hata, Tokokazu Kato, Takashi Fukushige and Akira Shimokohbe
Book of abstracts in Micro- and Nanoengineering International Conference (MNE 2002) page： 208-209 2002.9
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EMS Technology. Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, 306-307 (2002.9. N Reviewed
Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE
Yoshisato YOKOYAMA, Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE page： 306-307 2002.9
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Micro-Forming of Thin Film Metallic Glass by Local Laser Heating Reviewed
Hee-Won JEONG, Seiichi HATA and Akira SHIMOKOHBE
Technical Digest of The 15th IEEE International Conference on MEMS 2002 page： 372-375 2002.1
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A Micro Lens Actuator for Optical Flying Head Reviewed
Seiichi HATA, Yutaka YAMADA, Junichi ICHIHARA and Akira SHIMOKOHBE
Technical Digest of The 15th IEEE International Conference on MEMS 2002, page： 507-510 2002.1
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Three-Dimensional Micro-Forming Process of Thin Film Metallic Glass in the Supercooled Liquid Region Reviewed
S. HATA, Y. LIU, T. KATO and A. SHIMOKOHBE
Proceedings of 10th International Conference on Precision Engineering (ICPE) page： 37-41 2001.7
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Thin Film Metallic Glasses: Fabrication and Property Test. Reviewed
Y. LIU, S. HATA, K. WADA and A. SHIMOKOHBE
Technical Digest of The 14th IEEE International Conference on MEMS 2001 page： 102-105 2001.1
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薄膜金属ガラスの成膜と物性 Reviewed
秦 誠一，劉 永東，和田晃一，下河邉明
精密工学会誌 Vol. 67 ( 10 ) page： 1708-1713 2001
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金属ガラスの精密・微細加工に関する基礎的研究（Zr基バルク金属ガラスの引張変形挙動） Reviewed
秦 誠一，劉 永東，長峯靖之，下河邉明
日本機械学会論文集Ｃ編 Vol. 67 ( 660 ) page： 313-318 2001
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Thermal, Mechanical and Electrical Properties of Pd-based Thin Film Metallic Glass Reviewed
YONGDONG LIU, SEIICHI HATA, KOUICHI WADA and AKIRA SHIMOKOHBE
J. Appl. Phys Vol. 40 page： 5382-5388 2001
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超塑性複合加工によるマイクロ２段歯車の創製 Reviewed
早乙女康典，秦 誠一，坂口幸二
塑性と加工 Vol. 41 ( 468 ) page： 49-53 2000
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薄膜金属ガラスを用いた微細構造物の製作－（第１報）薄膜金属ガラスの製作と過冷却液体域を利用した微細成形－ Reviewed
秦 誠一, 後藤 潤, 佐藤海二, 下河邉明
精密工学会誌 Vol. 66 ( 1 ) page： 96-101 2000
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薄膜金属ガラスを用いた微細構造物の製作－（第２報）薄膜金属ガラス静電マイクロアクチュエータの提案と試作－ Reviewed
秦 誠一, 後藤 潤, 佐藤海二, 下河邉明
精密工学会誌 Vol. 66 ( 2 ) page： 287-291 2000
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液体の表面張力を利用したマイクロ部品のセルフアライメントの原理と特性 Reviewed
佐藤海二, 関 智紀, 秦 誠一, 下河邉明
精密工学会誌 Vol. 66 ( 2 ) page： 282-286 2000
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Self-alignment of Microparts Using Liquid Surface Tension - Examination of the Alignment Characteristics Reviewed
K. SATO, K. ITO, S. HATA and A. SHIMOKOHBE
Proceedings of ASPE's 15th Annual Meeting page： 345-348 2000
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elf-alignment for Microparts Assembly using Water Surface Tension Reviewed
K. SATO, S. HATA and A. SHIMOKOHBE
Proceedings of SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS'99 Vol. 3892 page： 321-328 1999.10
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Fabrication of Thin Film Metallic Glass and its Application to Microactuator. Reviewed
S. HATA, K. SATO and A. SHIMOKOHBE
International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS'99 Vol. 3892 page： 97-108 1999.10
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金属ガラスの精密・微細加工に関する研究（Ｚｒ基金属ガラスの過冷却液体域における成形性） Reviewed
秦 誠一, 山田典弘, 早乙女康典, 井上明久, 下河邉明
日本機械学会論文集Ｃ編 Vol. 65 ( 633 ) page： 346-352 1999
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Precision and Micro Machining of Metallic Glasses -Formability of Zr Based Metallic Glasses in the Supercooled Liquid State Reviewed
S. HATA, N. YAMADA, Y. SAOTOME, A. INOUE and A. SHIMOKOHBE
Proceedings of China-Japan Bilateral Symposium on Advanced Manufacturing Engineering page： 81-86 1998.10