研究者詳細 - 秦　誠一

CiNii Research

S0440103 酸化ニッケルナノ粒子のフェムト秒レーザ還元微細パターニング

田村健紀, 溝尻瑞枝, 櫻井淳平, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _S0440103- - _S0440103- 2015年

S0440102 フェムト秒レーザ直接還元描画法による微細Cuパターンの導電特性

荒金駿, 溝尻瑞枝, 櫻井淳平, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _S0440102- - _S0440102- 2015年

MoB-2-1 CHARACTERISTICS OF TI-NI-ZR THIN FILM METALLIC GLASSES FOR MEMS WITH THREE DIMENSIONAL STRUCTURE

Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE 2015 巻 ( 0 ) 頁： _MoB-2-1-1 - _MoB-2-1-3 2015年

J2220305 バイオレジストを用いたマイクロバブルの流量特性

高桑暁, 伊藤啓太郎, 溝尻瑞枝, 櫻井淳平, 新井史人, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _J2220305- - _J2220305- 2015年

J2220302 ナノクラック薄膜を用いた静電容量形水分センサの評価

深川雄貴, 櫻井淳平, 溝尻瑞枝, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _J2220302- - _J2220302- 2015年

J2220201 シリカ微小球の自己組織化を利用した熱電発電用反射防止構造の作製

近藤祐, 溝尻瑞枝, 三上裕史, 櫻井淳平, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _J2220201- - _J2220201- 2015年

J2220105 水素発生触媒用ハイスループット評価基板の作製

宮本将志, 鈴木慧, 櫻井淳平, 溝尻瑞枝, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _J2220105- - _J2220105- 2015年

J2220102 磁歪・比透磁率のハイスループット評価用デバイスの製作

前谷卓哉, 桜井淳平, 溝尻瑞枝, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _J2220102- - _J2220102- 2015年

J2220101 Ti-Ni-Cu薄膜金属ガラス/形状記憶合金の特性評価

櫻井淳平, 溝尻瑞枝, 秦誠一

年次大会 2015 巻 ( 0 ) 頁： _J2220101- - _J2220101- 2015年

Study on passive momentum exchange landing gear using two-dimensional analysis

Watanabe, T; Hata, S; Otsuki, M

ACTA ASTRONAUTICA 105 巻 ( 2 ) 頁： 407 - 416 2014年12月

Combinatorial Search of Magnetostrictive Materials for Sensors 査読有り

Maetani, T; Nakamitsu, Y; Sakurai, J; Nakagawa, S; Hata, S

ELECTRONICS AND COMMUNICATIONS IN JAPAN 97 巻 ( 9 ) 頁： 342 - U3 2014年9月

出版者・発行元：Electronics and Communications in Japan

Combinatorial search is one of the useful methods that could search for optimal composition of alloy materials or novel alloy materials. Combinatorial sputtering provides sample group (library) having different compositions in a limited place. Then, the properties of the samples can be scanned in an efficient way. In this research, magnetostrictive material with high magnetostriction, relative permeability, and resistivity was studied. Desired value of magnetostriction is more than 20 × 10-6, relative permeability is more than 4000, and resistivity is more than 100 μΩ·cm. As a result, composition that Cr content is less than 14 at.% fill the desired value of relative permeability, and more than 10 at.% fill the desired value of resistivity. There is possibility to fill the desired value of magnetostriction. © 2014 Wiley Periodicals, Inc.

DOI： 10.1002/ecj.11681

Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method 査読有り

Mizoshiri, M; Mikami, M; Ozaki, K; Shikida, M; Hata, S

APPLIED PHYSICS EXPRESS 7 巻 ( 5 ) 頁： 057101 2014年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Applied Physics Express

We have demonstrated a patterning process for the fabrication of thermoelectric thick-film modules by a thermally assisted sputtering method (TASM) and a lift-off technique. Given the experimental requirements of TASM, poly(dimethylsiloxane) (PDMS) was used as the heat-resistant masks in the lift-off technique. After the film deposition, the PDMS lift-off mask was removed from the substrate. This process enables the fabrication of 30-μm-thick and 300-μm-wide Sb2Te3 and Bi 2Te3 thick-film patterns. The increase in film thickness increased the power generated by the module, which was consistent with the theoretical value. © 2014 The Japan Society of Applied Physics.

DOI： 10.7567/APEX.7.057101

Ni-Nb-Zr-Ti amorphous alloys for glass lens molding die materials 査読有り

Jiang, SX; Abe, M; Ando, M; Aono, Y; Sakurai, J; Hata, S

MICROELECTRONIC ENGINEERING 116 巻頁： 6 - 10 2014年3月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Microelectronic Engineering

Mold materials for glass lenses with microstructures, such as gratings, require not only excellent mechanical properties, high thermal stability and oxidation resistance, but also sufficient machinability by Single-Point Diamond Turning (SPDT). Our research on Ni-Nb-Zr alloys has shown that one amorphous alloy composition (Ni35Nb40Zr25 at.%) met almost all the requirements for glass lens mold materials. Unfortunately, when fabricating gratings on the mold, the immense wear on the bit, which may be caused by the high hardness of the alloy (more than 10 GPa by the nano-indentation method), made it impossible to cut precise gratings. Consequently, the addition of a fourth element was considered to decrease the hardness. After several experiments, the addition of Ti was found to decrease the hardness. At first, Ti was added to substitute 10% Zr, to give Ni 35Nb40Zr15Ti10 at.%. Although this alloy had a lower hardness (9.5 GPa) than Ni35Nb40Zr 25 at.%, it still cannot be micro-cut by SPDT. It was then decided to substitute Ti for Ni-Nb instead of Zr. Three samples: Ni30Nb 35Zr25Ti10 at.%, Ni28Nb 32Zr25Ti15 at.% and Ni25Nb 30Zr25Ti20 at.%, were fabricated for evaluation. Finally, the Ni28Nb32Zr25Ti 15 at.% and Ni25Nb30Zr25Ti 20 at.% were found to have a low enough hardness to allow for precision machining. © 2013 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.mee.2013.11.008

Design of CuO anti-reflection structure for thin-film thermoelectric generator

Kondou T., Mizoshiri M., Hata S.

2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014 2014年1月

出版者・発行元：2014 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2014

Copper oxide anti-reflection structures were designed by rigorous coupled wave analysis for thin-film thermoelectric solar generator. We proposed thin-film thermoelectric generator with the anti-reflection structure on the hot side of pn junction. When infrared solar light from 800 to 1200 nm wavelength is irradiated to the thermoelectric generator, the anti-reflection structure on the hot side generates the temperature gradient between the hot side and cold side of pn junction. When the cross-sectional geometry of the anti-reflection structures was hemisphere which was geometrically approximated pyramid one, the reflectance from 800 to 1200 nm wavelength was reduced than flat and binary ones. The reflectance of solar light was obtained by considering the solar light spectra and its polarization. By assuming that the average of TM and TE polarized light was the reflectance of solar light, the reflectance was reduced to be 9.6% when the period of the anti-reflection structure was 700 nm. Taking into account of the reflectance of Cu on cold side 99%, this large reflectance difference is expected to generate a large temperature gradient between hot side and cold side.

DOI： 10.1109/MHS.2014.7006118