研究者詳細 - 秦　誠一

Stress-Driven Magnetic Barkhausen Noise Generation in FeCo Magnetostrictive Alloy 査読有り

Yamazaki, T; Furuya, Y; Hata, S; Nakao, W

IEEE TRANSACTIONS ON MAGNETICS 58 巻 ( 1 ) 2022年1月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：IEEE Transactions on Magnetics

Stress-driven magnetic Barkhausen noise (MBN) can be potentially used to develop a high-sensitivity dynamic force sensor. MBN is a compositional pulse due to the domain wall movement in ferromagnetic material induced by the external field. In this study, we provide an in-depth understanding of the responsiveness of MBN to external stress using ferromagnetic materials with a high magnetostriction constant ( $\lambda $ ). We demonstrate stress-driven MBN from strong textured Fe29Co71 alloy wires ( $\lambda _{\mathrm {s}} =117$ ppm)/epoxy resin composite via uniaxial compression testing by changing the stress rate level from 0.55 to 28 GPa/s under a static bias magnetic field of 55 mT. The relationship between the stress rate of the external force and root-mean-square (rms) value of MBN output voltages showed high sensitivity, i.e., $V_{\mathrm {rms}}= 0.00441 (d\sigma /dt)$ , and acceptable linearity that could be used to quantitatively evaluate the dynamic force. This stress-driven MBN generation mechanism could be based on the domain wall movement induced by the inverse magnetostrictive effect of FeCo alloys. We believe that this study will aid in the research focusing on the dynamic magnetostrictive mechanism and development of novel applications for high-sensitivity force sensors that have no batteries.

DOI： 10.1109/TMAG.2021.3126898

Examination of Mechanical Properties and Photoelastic Properties of Gel Material for Blood Vesssel Mimics 査読有り国際誌

Yamada, D; Hori, S; Abe, S; Kumeno, Y; Yamazaki, T; Oka, C; Sakurai, J; Hata, S

JOURNAL OF MEDICAL DEVICES-TRANSACTIONS OF THE ASME 15 巻 ( 3 ) 2021年9月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Journal of Medical Devices, Transactions of the ASME

Catheter surgery is a minimally invasive treatment in which visual information is limited to a two-dimensional image generated by an X-ray camera. This results in the possibility that stress applied by the catheter onto a blood vessel wall damages the vessel. Doctors must therefore be skillful at catheter surgery. We proposed a catheter surgery simulator that visualizes the stress applied to the blood vessel wall using photoelasticity. The manufacture of this simulator requires creating blood vessel mimics that reproduce the physical properties of blood vessel tissue using photoelasticity. This study investigated the mechanical and photoelastic properties of gel materials and selected a gel composition suitable for making blood vessel mimics. The mechanical properties of polyvinyl alcohol (PVA) hydrogel changed in the range 70–335 kPa by changing the composition ratio, and double network (DN) gel changed in the range 0.13–1.06 MPa by changing the composition ratio. These gels could be adjusted by changing the material composition to provide Young’s moduli similar to that of blood vessels. The photoelastic properties of PVA hydrogel changed in the range 1.38–2.76 109/Pa by changing the composition ratio, and DN gel changed in the range 0.012–0.029 109/Pa by changing the composition ratio.

DOI： 10.1115/1.4051516

反力可変受動形触覚ディスプレイ用アクチュエータの作製と評価

南原圭汰, 山崎貴大, 岡智絵美, 秦誠一, 櫻井淳平

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 141 巻 ( 9 ) 頁： 304 - 309 2021年9月

記述言語：日本語出版者・発行元：一般社団法人電気学会

In this paper, we report on the fabrication and evaluation of actuator for reaction force variable passive-type tactile display using high formable Ti-Ni-Cu shape memory alloy. This actuator is driven by the superelastic effect and superior in force expression, responsiveness, and miniaturization compared to conventional tactile displays using shape memory alloys. This actuator was fabricated in a convex shape by utilizing a viscous flow of Ti-Ni-Cu metallic glass. After crystallization, the metallic glass was changed to the shape memory alloy. In this manner, we successfully acquired the desired convex cross structure with a height of 123 μm at the center of cross. Additionally, while pushing 100 μm, we successfully varied the reaction force ranged from 40 to 80 mN, necessary to deform the skin and electrical resistance linearly by controlling the temperature. From these results, we showed that the actuator of this study can be used as tactile display that can express desired hardness and softness by temperature control. We also showed the possibility that the temperature of each actuator can be controlled individually by electrical heating using the linear relationship between temperature and electrical resistance.

DOI： 10.1541/ieejsmas.141.304

CiNii Research

Combinatorial synthesis of nanocrystalline FeSiBPCuC-Ni-(Nb,Mo) soft magnetic alloys with high corrosion resistance 査読有り国際誌

Yamazaki, T; Tomita, T; Uji, K; Kuwata, H; Sano, K; Oka, C; Sakurai, J; Hata, S

JOURNAL OF NON-CRYSTALLINE SOLIDS 563 巻頁： 120808 2021年7月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Journal of Non-Crystalline Solids

Fe-based nanocrystalline FeSiBPCuC alloys (NANOMET®) with a combination of high magnetic flux density, high permeability, and low iron loss have attracted much attention for use in magnetic core devices such as small power supplies, motors, and transformers. However, further improvement of the corrosion resistance is still required because surface oxidation during the water atomization process inevitably deteriorates the magnetic properties of these alloys. Here, we use a combinatorial magnetron sputtering system to fabricate new (FeSiBPCuC)100−x−yNix(Nb,Mo)y (0 ≤ x ≤ 10, 0 ≤ y ≤ 2 at%) amorphous thin films with enhanced corrosion resistance. We found that the co-presence of Ni (2–4 at%) and Mo (1–2 at%) in the FeSiBPCuC amorphous thin films promoted a further improvement of the corrosion resistance. The magnetic coercivity of (FeSiBPCuC)95.5Ni4.0Nb0.5 and (FeSiBPCuC)97.0Ni2.0Mo1.0 thin films was deteriorated compared with that of a FeSiBPCuC ribbon.

DOI： 10.1016/j.jnoncrysol.2021.120808

Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding 査読有り国際誌

Morisaki, R; Yamazaki, T; Oka, C; Sakurai, J; Hirai, T; Takahashi, T; Tsuji, H; Ohno, N; Hata, S

JAPANESE JOURNAL OF APPLIED PHYSICS 60 巻 ( SC ) 2021年6月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japanese Journal of Applied Physics

Ar plasma in a fast atom beam (FAB) source with magnetic fields, which was previously developed [Precis. Eng. 62, 106 (2020)] to achieve high-performance surface activated bonding, was analyzed by particle-in-cell-Monte Carlo collision simulation and experimental measurements. Simulation in the proposed FAB source with magnetic fields shows that higher electron density accumulation occurs near the irradiation port by E × B drift, and the potential gradient near the irradiation port steepens, which results in an increase in Ar+ flux to the irradiation port. The variation in the plasma distribution due to the effect of the magnetic field contributes to an increase in the amount of Ar-FAB irradiation, which reduces erosion of the carbon electrodes and suppresses the formation of carbon agglomerates. These simulation results were verified experimentally with Langmuir probe measurements and FAB irradiation experiments with oxide layer removal. The analysis results explain why high performance is achieved with the proposed FAB source.

DOI： 10.35848/1347-4065/abe683

FABRICATION AND EVALUATION OF A NOVEL ACTUATOR FOR REACTION FORCE VARIABLE PASSIVE-TYPE TACTILE DISPLAYS 査読有り

Murase, M; Nambara, K; Yamazaki, T; Oka, C; Hata, S; Sakurai, J

2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) 頁： 663 - 666 2021年

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）出版者・発行元：21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

In this paper, we report the fabrication and evaluation of an actuator for reaction force variable passive-type tactile displays using a highly formable Ti-Ni-Cu shape-memory alloy. The actuator relies on the superelastic effect of SMAs and can influence the applied reaction force. We successfully fabricated the desired convex cross structure with a height of 123 m, varied the reaction force between 40 and 80 mN at a depth of 100 m, and controlled the electrical resistance linearly with temperature.

DOI： 10.1109/TRANSDUCERS50396.2021.9495608

New Long Life Fast Atom Beam Source for Surface Activated Bonding 査読有り

Morisaki, R; Sakurai, J; Oka, C; Yamazaki, T; Akao, T; Takahashi, T; Tsuji, H; Ohno, N; Hata, S

2021 7TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D) 頁： 8 - 8 2021年

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）出版者・発行元：2021 7th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2021

We clarify a mechanism for longer lifetime of the fast atom beam (FAB) source for surface activated bonding proposed in our previous study. The new FAB source achieves highly efficient FAB irradiation and suppression of generation of fine carbon (C) particles. In this study, the distribution of sputtering and deposition on the inner wall of the C electrodes have been evaluated by measuring the thickness of the electrodes before and after long-time use. In the new source, the C erosion area due to sputtering is localized near the irradiation port and the sputtered C is deposited on other electrode surface, whereas in the conventional one, the erosion occurs on all surfaces of C electrodes. The reduction of electrode erosion due to sputtering contributes significantly to the extension of the lifetime of the new FAB source.

DOI： 10.1109/LTB-3D53950.2021.9598414

MEMS構造体を利用した薄膜内部応力の測定

高瀬駿, 山崎貴大, 岡智絵美, 櫻井淳平, 秦誠一

年次大会 2021 巻 ( 0 ) 頁： J221-07 2021年

微細加工を応用したAI時代の材料探索

秦誠一

年次大会 2021 巻 ( 0 ) 頁： K041-01 2021年

Development of a fast atom beam gun for surface-activated bonding 査読有り国際誌

Morisaki, R; Hirai, Y; Oka, C; Mizoshiri, M; Yamazaki, T; Sakurai, J; Hirai, T; Takahashi, T; Tsuji, H; Hata, S

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 62 巻頁： 106 - 112 2020年3月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Precision Engineering

© 2019 Elsevier Inc. Surface-activated bonding (SAB), also called room-temperature bonding, is used in three-dimensional integration technology for semiconductor devices. An Ar fast atom beam (FAB) is used for SAB. However, conventional FAB guns must be replaced after hundreds of minutes of irradiation because carbon abrasion powders are generated by Ar ions sputtering in the gun. Therefore, this study develops a novel FAB gun with improved lifetime. The proposed FAB gun applies magnetic fields to guide Ar ions to reduce sputtering in the gun and improve irradiation efficiency. The proposed FAB gun indicates the possibility of improving gun lifetime.

DOI： 10.1016/j.precisioneng.2019.11.006

Fabrication of novel microvalves driven by heat from magnetic nanoparticles

Miwa D., Sakurai J., Hata S., Oka C.

JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020 2020年

出版者・発行元：JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020

The present paper proposes novel microvalves remotely controlled without electrical wiring on each valve. The proposed microvalves are controlled utilizing heat from magnetic nanoparticles in an alternating magnetic field. A procedure for fabrication of the microvalves was established. the fabricated microvalves operated on a hotplate.

DOI： 10.1115/LEMP2020-8529