研究者詳細 - 秦　誠一

論文 - 秦　誠一

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Combinatorial new facing targets sputtering

Maetani T., Mori N., Nakamitsu Y., Hata S.

Materials Research Society Symposium Proceedings 1427 巻頁： 50 - 55 2012年12月

出版者・発行元：Materials Research Society Symposium Proceedings

Combinatorial sputtering is one of the useful methods that can be used to search for optimal composition of alloy materials or for new alloy materials. To search materials more efficiently, it is required that compositions and their distribution on samples can be easily controlled for the evaluation of their properties. Moreover, it is desirable that compositions change linearly to search for novel materials systematically. In conventional combinatorial sputtering method, it is difficult to fabricate samples having linear compositions distribution without moving hard masks or rotating substrate. In this paper, a novel combinatorial sputtering method with New Facing Targets Sputtering (Combi-NFTS) of material search is introduced. In this method, several sputtering targets are placed in opposite direction, and substrates are placed in vertical direction of these targets. From this structure, thin film with binary/ternary composition distribution could be synthesized onto one single substrate. Moreover, it can fabricate samples having relatively linear composition distribution without moving hard masks or rotating substrate. As an example, Cu, Zr and Ti pure targets were used to confirm the performance of Combi-NFTS. Binary system of Cu-Zr and ternary system of Cu-Zr-Ti thin films were fabricated by using Combi-NFTS. After deposition, compositions of the films were characterized by the energy dispersive X-ray spectroscopy. As a result of Cu-Zr binary system, the composition of the thin film was changed as the power of targets was changed. Moreover, composition distribution was expanded as the distance from substrate to targets was decreased. In the Cu-Zr-Ti ternary system, it was obtained similar trend for composition distribution. Moreover, the composition changed two dimensional by changing the substrate position. These results indicate that combi-NFTS can easily control the composition and composition distribution of thin films by changing the power of targets or the distance from substrate to targets which make combi-NFTS very suitable for combinatorial materials search. © 2012 Materials Research Society.

DOI： 10.1557/opl.2012.1403

Scopus

Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization

Sakurai, J; Hata, S

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 541 巻 ( 541 ) 頁： 8 - 13 2012年4月

記述言語：英語出版者・発行元：Materials Science and Engineering: A

We conducted a search for Ti-Ni-Zr thin film metallic glasses (TFMGs) exhibiting a shape memory effect after crystallization. We investigated the possibility of (Ti, Zr)(100-x)-Nix thin film amorphous alloys exhibiting a glass transition. All prepared samples were classified into three groups such as Ti-rich (x<50), equiatomic (50<x<51) and Ni-rich (x>51) samples. Equiatomic Ti-Ni-Zr thin film amorphous alloys with Zr content ranging from 11 to 17at.% showed a glass transition, and thus were concluded to be TFMGs. Several Ni-rich samples exhibit glass transition and were also TFMGs. On the other hand, Ti-rich samples did not exhibit a glass transition irrespective of the Zr content. Moreover, we investigated the shape memory behavior of crystallized TiNiZr TFMGs. Ti39Ni50Zr11 TFMGs annealed at 973K for 3.6ks exhibited a martensitic transformation from the B2 to the B19' phase upon cooling and heating. The martensitic phase start temperature and reverse martensitic phase start temperature were 296 and 352K, respectively. In addition, this alloy showed good shape memory behavior, achieving recovery strain of 2.5% and a critical stress for slip of 500MPa. © 2012 Elsevier B.V.

DOI： 10.1016/j.msea.2012.01.075

Web of Science

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High-frequency fatigue test of metallic thin films using PVDF microactuator

Tamjidi, N; Sato, K; Suzaki, R; Nakamitsu, Y; Sakurai, J; Hata, S

IEICE ELECTRONICS EXPRESS 9 巻 ( 5 ) 頁： 403 - 409 2012年3月

記述言語：英語出版者・発行元：IEICE Electronics Express

Novel high-frequency bending fatigue test method for sputtered metallic thin films using PVDF microactuator is proposed. Thin film titanium specimen as an example and a PVDF piezoelectric microactuator are fabricated. The specimen is stamped on this actuator and the actuator is vibrated at its resonance frequency until the specimen fails by fatigue. The stress in the specimen is calculated from vibration amplitude. By using the proposed method, the stress-fatigue life cycle (S-N) curve of the thin film titanium is obtained over 50 times faster than conventional method. © IEICE 2012.

DOI： 10.1587/elex.9.403

Web of Science

Scopus

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High-frequency fatigue test of sputtered metallic thin film using PVDF microactuator 査読有り

Tamjidi N., Suzaki R., Sato K., Nakamitsu Y., Sakurai J., Hata S.

IEICE Electronics Express 9 巻 ( 5 ) 頁： 403-409 2012年

Search for Ti-Ni-Zr thin film metallic glasses exhibiting a shape memory effect after crystallization 査読有り

Sakurai J., Hata S.

Materials Science and Engineering: A ( 541 ) 頁： 8–13 2012年

電鋳Niパイプを用いた円筒形超音波リニアマイクロアクチュエータ査読有り

高垣輝多, 孫　東明, 汪　盛, 桜井淳平, 秦　誠一

日本機械学会論文集C編 77 巻 ( 783 ) 頁： 4136-4143 2011年11月

Searching for noble Ni-Nb-Zr thin film amorphous alloys for optical glass device molding die materials 査読有り

Junpei Sakurai, Mitsuhiro Abe, Masahiro Ando, Yuko Aono and Seiichi Hata

Precision Engineering 35 巻 ( 4 ) 頁： 537-546 2011年10月

Novel Thermographic Method for Characterizing Transformation Temperatures of Thin Film Shape Memory Alloys Aimed at Combinatorial Approach 査読有り

Yuko Aono, Junpei Sakurai, Akira Shimokohbe, and Seiichi Hata

Japanese Journal of Applied Physics 50 巻 ( 066601 ) 頁： 5 2011年2月

CORROSION RESISTANCE CONSOLIDATION OF A DIAPHRAGM TYPE VACUUM SENSOR 査読有り

H. Kozako, J. Sakurai, N. Mukai, Y. Ohnuma, T. Takahashii, and S. Hata

Technical Digest of The 24th IEEE International Conference on MEMS 頁： 400-403 2011年1月

Driving mechanism, design, fabrication process and experiments of a cylindrical ultrasonic linear microactuator 査読有り

Sheng Wang, Dongming Sun, Keebong Choi. Seiichi Hata and Akira Shimokohbe

IEEE Transactions on UFFC 58 巻 ( 1 ) 頁： 168-77 2011年1月

Effect of sputtering method on characteristics of amorphous Ni-Nb-Zr alloys for glass lenses molding die materials 査読有り

Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando, Yuko Aono, Shengxian Jiang, Akira Shimokohbe, Seiichi Hata

Journal Solid Mechanics and Materials Engineering 4 巻 ( 12 ) 頁： 1742-1753 2010年12月

Combinatorial Technology on Searching for Novel Amorphous Alloys 査読有り

Seiichi Hata, Junpei Sakurai, Y. Aono, N. Tamujidi, Y. Matsumoto and A. Shimokohbe

The 6th International Workshop on Combinatorial Materials Science and Technology 頁： CDROM 2010年10月

Temperature gradient heating system for high-throughput method for determining time-temperature-transformation diagram using thin film samples 査読有り

Yuko Aono, Junpei Sakurai, Tetsuo Ishida, Akira Shimokohbe and Seiichi Hata

The 6th International Workshop on Combinatorial Materials Science and Technology 頁： CD-ROM 2010年10月

Combinatorial searching for Ni-Nb-Zr amorphous alloys as glass lens molding die materials 査読有り

Junpei Sakurai, Mitsuhiro Abe, Masayuki Ando and Seiichi Hata

Key Eng. Mater. 447-448 巻頁： 661-665 2010年9月

Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting a Shape Memory Effect after Crystallization 査読有り

Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata

Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing 頁： 78 2010年8月

High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples 査読有り

Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata

Technical Abstract of the 7th Pacific Rim International Conference on Advanced Materials and Processing, 90 (2010.8, Cairns, Australia) 頁： 90 2010年8月

Searching for Pt-Zr-Ni Thin Film Amorphous Alloys for Optical Glass Lenses Molding Materials 査読有り

Junpei Sakurai, Seiichi Hata, Ryusuke Yamuchi, Mitsuhiro Abe, and Akira Shimokohbe

Precision Engineering 34 巻 ( 3 ) 頁： 431-439 2010年7月

A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel 査読有り

Kee-Bong Choi, Jae Jong Lee, Seiichi Hata

Sensors and Actuators A 161 巻 ( 1-2 ) 頁： 173-181 2010年6月

High-throughput Evaluation of Crystallization Temperature of Pd-Cu-Si System Using Integrated Thin Film Samples 査読有り

Yuko Aono, Junpei Sakurai, Akira Shimokohbe and Seiichi Hata

Materials Science Forum 654-656 巻頁： 2426-2429 2010年6月

Characteristics of Ti-Ni-Zr Thin Film Metallic Glasses Exhibiting Shape Memory Effect After Crystallization 査読有り

Junpei Sakurai, Yuko Aono, Yui Ishida and Seiichi Hata

Materials Science Forum 654-656 巻頁： 1066-1069 2010年6月

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