論文 - 秦 誠一
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Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature 査読有り
24. Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting 頁： CD-ROM 2005年11月
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Cathodic Arc Plasma Combinatorial Material Synthesis for Composition Search of New Amorphous Alloy 査読有り
Seiichi Hata, Ryusuke Yamauchi, Junpei Sakurai and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting 頁： CD-ROM 2005年11月
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Evaluation of Mo-based Amorphous Alloy Thin Films Exhibiting High Crystallization Temperature 査読有り
Junpei Sakurai, Seiichi Hata, Ryusuke Yamauchi and Akira Shimokohbe
Proc. of 2005 MRS Fall Meeting 頁： CD-ROM 2005年11月
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Integrated conical spring linear actuators for tilting-mirror applications 査読有り
T. Fukushige, S. Hata and A. Shimokohbe
Abstracts of 31st International Conference on Micro- and Nano-Engineering (MNE2005) 頁： pp12-13 2005年9月
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A complete blood count micro sensor designed to reduce noise from electrolysis gas 査読有り
R. Tanabe, S. Hata and A. Shimokohbe
Abstracts of 31st International Conference on Micro- and Nano-Engineering 2005 (MNE2005) 頁： pp622-623 2005年9月
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Design and Driving Methodology of Out-of-Plane Electrostatic Microactuator with Extended Stable Motion Range 査読有り
T. Fukushige, S. Hata, Takehiko Hayashi, and A. Shimokohbe
Proc. IPACK2005 頁： CD-ROM, pp. IPACK2005-73145 2005年6月
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Thin Film Metallic Glasses as New MEMS Materials 査読有り
Seiichi Hata, Junpei Sakurai and Akira Shimokohbe
Technical Digest of The 18th IEEE International Conference on MEMS 2005 頁： 479-482 2005年1月
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A MEMS Conical Spring Actuator Array 査読有り
T. Fukushige, S. Hata, and A. Shimokohbe,
IEEE/ASME Journal of Microelectromechanical Systems 14 巻 ( 2 ) 頁： 243-253 2005年
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Novel fabrication method of metallic glass thin film using carousel type sputtering system 査読有り
J. Sakurai, S. Hata and A. Shimokohbe
Proc. of SPIE Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, 頁： 260-267 2004年12月
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A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking 査読有り
T. Fukushige, S. Hata and A. Shimokohbe
Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) 頁： 15-16 2004年6月
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2-DOF thin film metallic glass microactuator 査読有り
S. Hata, H. W. JEONG and A. Shimokohbe
Proceedings of European Society for Precision Engineering and Nanotechnology (euspen Glasgow 2004) 頁： 9-10 2004年6月
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Large-output-force out-of-plane MEMS actuator array 査読有り
T. Fukushige, S. Hata and A. Shimokohbe
Proceedings of SPIE International Symposium on Microelectronics, MEMS and Nanotechnology, 5276 巻 頁： 240-248 2003年12月
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Micro dome shape structures made of thin film metallic glass 査読有り
Seiichi Hata, Takashi Yamanaka, Jyunpei Sakurai and Akira Shimokohbe
Micro System Technology 2003 頁： (MST '03), 180-187 2003年10月
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Reduction of electrical resistivity in PdCuSi thin film metallic glass 査読有り
J. Sakurai, S. Hata and A. Shimokohbe
Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03) 頁： CD-ROM 2003年9月
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On-Chip Variable Inductor Using Microelectromechanical Systems Technology 査読有り
Yoshisato YOKOYAMA ,Takashi FUKUSHIGE, Seiichi HATA, Kazuya MASU and Akira SHIMOKOHBE
Jpn. J. Appl. Phys 42 巻 頁： 2190-2192 2003年
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Self-alignment of microparts using liquid surface tension - behavior of microparts and alignment characteristics 査読有り
Kaiji Sato, Kentaro Ito, Seiichi Hata and Akira Shimokohbe
Precision Engineering 27 巻 頁： 42-50 2003年
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Microforming of Three-Dimensional Microstructures from Thin Film Metallic Glass 査読有り
Hee-Won Jeong, Seiichi Hata and Akira Shimokohbe
IEEE/ASME Journal of Microelectromechanical Systems 12 巻 ( 1 ) 頁： 42-52 2003年
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Fabrication and Evaluation of On-Chip Micro Variable Inductor 査読有り
Takashi Fukushige, Yoshisato Yokoyama, Seiichi Hata, Kazuya Masu and Akira Shimokohbe
Microelectronic Engineering ( 67-68 ) 頁： 582-587 2003年
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集積化円すいばねマイクロアクチュエータ 査読有り
秦 誠一，加藤友和，福重孝志，下河邉 明
精密工学会誌 69 巻 ( 3 ) 頁： 438-442 2003年
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Displacement Characteristics of Microactuators Made of Thin Film Metallic Glass 査読有り
Seiichi Hata, Takashi Fukushige and Akira Shimokohbe
Proceedings of CPT2002 頁： 162-167 2002年10月