論文 - 堤 隆嘉
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Sahu, BB; Nakane, K; Ishikawa, K; Sekine, M; Tsutsumi, T; Gohira, T; Ohya, Y; Ohno, N; Hori, M
PHYSICAL CHEMISTRY CHEMICAL PHYSICS 24 巻 ( 22 ) 頁： 13883 - 13896 2022年6月
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Nunomura, S; Tsutsumi, T; Nakane, K; Sato, A; Sakata, I; Hori, M
JAPANESE JOURNAL OF APPLIED PHYSICS 61 巻 ( 5 ) 2022年5月
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Low-temperature reduction of SnO2 by floating wire-assisted medium-pressure H-2/Ar plasma
Thi-Thuy-Nga Nguyen, Sasaki Minoru, Hsiao Shih-Nan, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru
PLASMA PROCESSES AND POLYMERS 2022年2月
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Nitrogen Atom Density Measurements in NAGDIS-T Using Vacuum Ultraviolet Absorption Spectroscopy
Nishio, R; Kajita, S; Tanaka, H; Asaoka, K; Tsutsumi, T; Hori, M; Ohno, N
PLASMA AND FUSION RESEARCH 17 巻 頁： 1201004 - 1 2022年1月
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Functional nitrogen science based on plasma processing: quantum devices, photocatalysts and activation of plant defense and immune systems
Kaneko Toshiro, Kato Hiromitsu, Yamada Hideaki, Yamamoto Muneaki, Yoshida Tomoko, Attri Pankaj, Koga Kazunori, Murakami Tomoyuki, Kuchitsu Kazuyuki, Ando Sugihiro, Nishikawa Yasuhiro, Tomita Kentaro, Ono Ryo, Ito Tsuyohito, Ito Atsushi M., Eriguchi Koji, Nozaki Tomohiro, Tsutsumi Takayoshi, Ishikawa Kenji
JAPANESE JOURNAL OF APPLIED PHYSICS 61 巻 ( SA ) 2022年1月
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Hsiao, SN; Nguyen, TTN; Tsutsumi, T; Ishikawa, K; Sekine, M; Hori, M
COATINGS 11 巻 ( 12 ) 2021年12月
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Reaction Mechanism and Selectivity Control of Si Compound ALE Based on Plasma Modification and F-Radical Exposure
Vervuurt R. H. J., Mukherjee B., Nakane K., Tsutsumi T., Hori M., Kobayashi N.
LANGMUIR 37 巻 ( 43 ) 頁： 12663 - 12672 2021年11月
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Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H-2 plasma at different substrate temperatures 査読有り
Hsiao Shih-Nan, Britun Nikolay, Thi-Thuy-Nga Nguyen, Tsutsumi Takayoshi, Ishikawa Kenji, Sekine Makoto, Hori Masaru
PLASMA PROCESSES AND POLYMERS 2021年8月
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Influences of substrate temperatures on etch rates of PECVD-SiN thin films with a CF4/H-2 plasma 査読有り
Hsiao Shih-Nan, Nakane Kazuya, Tsutsumi Takayoshi, Ishikawa Kenji, Sekine Makoto, Hori Masaru
APPLIED SURFACE SCIENCE 542 巻 2021年3月
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Selective etching of SiN against SiO2 and poly-Si films in hydrofluoroethane chemistry with a mixture of CH2FCHF2, O-2, and Ar 査読有り
Hsiao Shih-Nan, Ishikawa Kenji, Hayashi Toshio, Ni Jiwei, Tsutsumi Takayoshi, Sekine Makoto, Hori Masaru
APPLIED SURFACE SCIENCE 541 巻 2021年3月
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Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature 査読有り
Sugiura Hirotsugu, Kondo Hiroki, Higuchi Kimitaka, Arai Shigeo, Hamaji Ryo, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru
CARBON 170 巻 頁： 93 - 99 2020年12月
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Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H-2/Ar plasma at atmospheric pressure 査読有り
Thi-Thuy-Nga Nguyen, Sasaki Minoru, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru
SCIENTIFIC REPORTS 10 巻 ( 1 ) 2020年10月
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Measurements of nitrogen atom density in a microwave-excited plasma jet produced under moderate pressures 査読有り
Kim Jaeho, Takeda Keigo, Itagaki Hirotomo, Wang Xue-lun, Hirose Shingo, Ogiso Hisato, Shimizu Tetsuji, Kumagai Naoto, Tsutsumi Takayoshi, Kondo Hiroki, Hori Masaru, Sakakita Hajime
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING 15 巻 ( 9 ) 頁： 1281 - 1287 2020年9月
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Numerical analysis of coaxial dielectric barrier helium discharges: three-stage mode transitions and internal bullet propagation 査読有り
Sato Yosuke, Ishikawa Kenji, Tsutsumi Takayoshi, Hori Masaru
APPLIED PHYSICS EXPRESS 13 巻 ( 8 ) 頁： . 2020年8月
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Atomic nitrogen density measurements by actinometry method in the toroidal device NAGDIS-T 査読有り
Kajita Shin, Asaoka Koji, Tanaka Hirohiko, Nishio Ryosuke, Tsutsumi Takayoshi, Hori Masaru, Ohno Noriyasu
JAPANESE JOURNAL OF APPLIED PHYSICS 59 巻 ( 8 ) 頁： . 2020年8月
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In situ surface analysis of an ion-energy-dependent chlorination layer on GaN during cyclic etching using Ar+ ions and Cl radicals 査読有り
Hasegawa Masaki, Tsutsumi Takayoshi, Tanide Atsushi, Nakamura Shohei, Kondo Hiroki, Ishikawa Kenji, Sekine Makoto, Hori Masaru
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 38 巻 ( 4 ) 2020年7月
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Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity 査読有り
Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi, Akio Ui, Masato Akita, Shotaro Oka, Masaru Hori
Journal of Physics D: Applied Physics 2020年4月
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Generation and Diagnostics of Ambient Air Glow Discharge in Centimeter-Order Gaps 査読有り
Gamaleev Vladislav, Tsutsumi Takayoshi, Hiramatsu Mined, Ito Masafumi, Hori Masaru
IEEE ACCESS 8 巻 頁： 72607 - 72619 2020年4月
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Electron and negative ion dynamics in a pulsed 100 MHz capacitive discharge produced in an O-2 and Ar/O-2/C4F8 gas mixture 査読有り
Sirse N., Tsutsumi T., Sekine M., Hori M., Ellingboe A. R.
PLASMA SOURCES SCIENCE & TECHNOLOGY 29 巻 ( 3 ) 2020年3月
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Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study 査読有り
Fukunaga Yusuke, Longo Roberto C., Ventzek Peter L. G., Lane Barton, Ranjan Alok, Hwang Gyeong S., Hartmann Greg, Tsutsumi Takayoshi, Ishikawa Kenji, Kondo Hiroki, Sekine Makoto, Hori Masaru
JOURNAL OF APPLIED PHYSICS 127 巻 ( 2 ) 2020年1月