Presentations -
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Structure of hydrogenated amorphous silicon carbide films prepared by hot-wire chemical vapor deposition method International conference
12th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide
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Tungsten-Temperature Dependence of the Properties of Hydrogenated Amorphous Silicon Carbide Films Prepared by Hot-Wire CVD Method International conference
19th International Conference on Amorphous and Micro- crystalline Semiconductors
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Substrate-temperature-dependence of film structure of μc-Si:H prepared by rf magnetron sputtering International conference
6th International Symposium on Sputtering and Plasma Processes
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The changes of structural and electrical properties of hydrogenated amorphous silicon carbide films by pulse-modulated plasma
11th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide