Presentations -
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スパッタリング法によるアモルファスシリコン薄膜の膜特性のタグチメソッドによる最適化の検討
味田晧平、田畑彰守
令和5年電気学会全国大会 2023.3.17
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SiC:H薄膜を界面層に用いたヘテロ接合素子の特性
水谷 凌、田畑 彰守
第18回 Cat-CVD研究会 2021.7.10
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スパッタリング法によるp型アモルファスシリコン薄膜のヘテロ接合素子への応用
小島弘道、田畑彰守
電気・電子・情報関係学会東海支部連合大会
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nc-3C-SiC:H/c-Siヘテロ接合素子に与えるバッファ層納入の影響
亀山航太、田畑彰守
第１６回Cat-CVD研究会
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Admittance characteristics of nanocrystalline SiC:H/crystalline Si heterojunction diodes fabricated by hot-wire chemical vapor deposition International conference
A. Tabata, Y. Imori, H. Ozeki
8th International Conference on Hot-Wire CVD (Cat-CVD) process
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nc-3C-SiC:H/c-Siヘテロ接合素子特性に与える電極金属の影響
尾関浩幸、田畑彰守
第11回Cat-CVD研究会
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Electrical properties of nc-3C-SiC:H/c-Si heterojunction diodes prepared by HW-CVD International conference
Y. Imori, A. Tabata
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Effect of film thickness on electrical properties of nc-3C-SiC:H/c-Si heterojunction diodes prepared by HW-CVD International conference
Y. Imori, A. Tabata
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c-Si/nc-3C-SiC:H heterojunction diodes with buffer layer International conference
R. Ushikusa, A. Tabata
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HW-CVD法によるnc-3C-SiC:H/c-Siヘテロ接合ダイオードの特性に与える水素ガス流量の影響
井森嘉一、田畑彰守
第10回Cat-CVD研究会
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Structural and electrical properties of μc-Si:H/nc-3C-SiC:H two-layered thin films prepared by hot-wire CVD methhod International conference
7th International Conference on Hot-Wire Chemical Vapor Deposition
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Thickness dependence of structural and electrical properties of HWCVD nc-3C-SiC:H/c-Si heterojunctions International conference
7th International Conference on Hot-Wire Chemical Vapor Deposition
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HW-CVD法を用いたμc-Si:H/nc-3C-SiC:H二層膜の膜構造及び電気的特性
渡邉卓也、田畑彰守
第９回Cat-CVD研究会
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Heterojunction diodes of N-doped nanocrystalline 3C-SiC:H prepared on p-type c-Si from SiH4/CH4/N2 with varying H2 dilution ratios International conference
S. Sato, A. Tabata
24th International Conference on Amorphous and Nanocrystalline Semiconductors
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ナノ結晶3C-SiC:H薄膜を用いたヘテロ接合の素子特性への水素希釈ガスの与える影響
佐藤慎一郎、田畑彰守
第８回Cat-CVD研究会
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N2 post-deposition treatment on silicon thin films with a hot-wire chemical vapor method at a low wire-temperature International conference
6th International Conference on Hot-Wire CVD (Cat-CVD) process
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Structural changes in tungsten wire and their effect on the properties of hydrogenated nanocrystalline cubic silicon carbide thin films International conference
6th International Conference on Hot-Wire CVD (Cat-CVD) process
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HW-CVD（Cat-CVD）法によるナノ結晶3C-SiC:H薄膜の低温形成（依頼講演）
田畑彰守
第7回Cat-CVD研究会
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Formation of silicon nitride layer on microcrystalline silicon thin films by hot-wire chemical vapor method using nitrogen and hydrogen gases International conference
17th European Conference on Chemical Vapor Deposition and CVD-XVII
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Influences of N2 and H2 gas flow rates on properties of n-type nanocrystalline 3C-SiC:H thin films prepared by hot-wire chemical vapor deposition International conference
17th European Conference on Chemical Vapor Deposition and CVD-XVII