論文 - 堤 隆嘉
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Selective etching of SiN against SiO2 and poly-Si films in hydrofluoroethane chemistry with a mixture of CH2FCHF2, O-2, and Ar 査読有り
Hsiao Shih-Nan, Ishikawa Kenji, Hayashi Toshio, Ni Jiwei, Tsutsumi Takayoshi, Sekine Makoto, Hori Masaru
APPLIED SURFACE SCIENCE 541 巻 2021年3月
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Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature 査読有り
Sugiura Hirotsugu, Kondo Hiroki, Higuchi Kimitaka, Arai Shigeo, Hamaji Ryo, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru
CARBON 170 巻 頁: 93 - 99 2020年12月
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Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H-2/Ar plasma at atmospheric pressure 査読有り
Thi-Thuy-Nga Nguyen, Sasaki Minoru, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru
SCIENTIFIC REPORTS 10 巻 ( 1 ) 2020年10月
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Measurements of nitrogen atom density in a microwave-excited plasma jet produced under moderate pressures 査読有り
Kim Jaeho, Takeda Keigo, Itagaki Hirotomo, Wang Xue-lun, Hirose Shingo, Ogiso Hisato, Shimizu Tetsuji, Kumagai Naoto, Tsutsumi Takayoshi, Kondo Hiroki, Hori Masaru, Sakakita Hajime
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING 15 巻 ( 9 ) 頁: 1281 - 1287 2020年9月
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Numerical analysis of coaxial dielectric barrier helium discharges: three-stage mode transitions and internal bullet propagation 査読有り
Sato Yosuke, Ishikawa Kenji, Tsutsumi Takayoshi, Hori Masaru
APPLIED PHYSICS EXPRESS 13 巻 ( 8 ) 頁: . 2020年8月
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Atomic nitrogen density measurements by actinometry method in the toroidal device NAGDIS-T 査読有り
Kajita Shin, Asaoka Koji, Tanaka Hirohiko, Nishio Ryosuke, Tsutsumi Takayoshi, Hori Masaru, Ohno Noriyasu
JAPANESE JOURNAL OF APPLIED PHYSICS 59 巻 ( 8 ) 頁: . 2020年8月
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In situ surface analysis of an ion-energy-dependent chlorination layer on GaN during cyclic etching using Ar+ ions and Cl radicals 査読有り
Hasegawa Masaki, Tsutsumi Takayoshi, Tanide Atsushi, Nakamura Shohei, Kondo Hiroki, Ishikawa Kenji, Sekine Makoto, Hori Masaru
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 38 巻 ( 4 ) 2020年7月
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Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity 査読有り
Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi, Akio Ui, Masato Akita, Shotaro Oka, Masaru Hori
Journal of Physics D: Applied Physics 2020年4月
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Generation and Diagnostics of Ambient Air Glow Discharge in Centimeter-Order Gaps 査読有り
Gamaleev Vladislav, Tsutsumi Takayoshi, Hiramatsu Mined, Ito Masafumi, Hori Masaru
IEEE ACCESS 8 巻 頁: 72607 - 72619 2020年4月
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Electron and negative ion dynamics in a pulsed 100 MHz capacitive discharge produced in an O-2 and Ar/O-2/C4F8 gas mixture 査読有り
Sirse N., Tsutsumi T., Sekine M., Hori M., Ellingboe A. R.
PLASMA SOURCES SCIENCE & TECHNOLOGY 29 巻 ( 3 ) 2020年3月
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Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study 査読有り
Fukunaga Yusuke, Longo Roberto C., Ventzek Peter L. G., Lane Barton, Ranjan Alok, Hwang Gyeong S., Hartmann Greg, Tsutsumi Takayoshi, Ishikawa Kenji, Kondo Hiroki, Sekine Makoto, Hori Masaru
JOURNAL OF APPLIED PHYSICS 127 巻 ( 2 ) 2020年1月
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Hsiao, SN; Nguyen, TTN; Tsutsumi, T; Ishikawa, K; Sekine, M; Hori, M
2020 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) 2020年
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Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures 査読有り
Hirotsugu Sugiura, Yasuyuki Ohashi, Kenji Ishikawa, Hiroki Kondo, Toshiaki Kato, Toshiro Kaneko, Keigo Takeda, Takayoshi Tsutsumi, Toshio Hayashi, Makoto Sekine, Masaru Hori
Diamond and Related Materials 104 巻 頁: 107651 2019年12月
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In Situ Monitoring of Surface Reactions during Atomic Layer Etching of Silicon Nitride Using Hydrogen Plasma and Fluorine Radicals 査読有り
Nakane Kazuya, Vervuurt Rene H. J., Tsutsumi Takayoshi, Kobayashi Nobuyoshi, Hori Masaru
ACS APPLIED MATERIALS & INTERFACES 11 巻 ( 40 ) 頁: 37263 - 37269 2019年10月
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Ichikawa, T; Kondo, H; Ishikawa, K; Tsutsumi, T; Tanaka, H; Sekine, M; Hori, M
ACS APPLIED BIO MATERIALS 2 巻 ( 7 ) 頁: 2698 - 2702 2019年7月
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Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? 査読有り
Iwase Taku, Kamaji Yoshito, Kang Song Yun, Koga Kazunori, Kuboi Nobuyuki, Nakamura Moritaka, Negishi Nobuyuki, Nozaki Tomohiro, Nunomura Shota, Ogawa Daisuke, Omura Mitsuhiro, Shimizu Tetsuji, Shinoda Kazunori, Sonoda Yasushi, Suzuki Haruka, Takahashi Kazuo, Tsutsumi Takayoshi, Yoshikawa Kenichi, Ishijima Tatsuo, Ishikawa Kenji
JAPANESE JOURNAL OF APPLIED PHYSICS 58 巻 2019年6月
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Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation 査読有り
Iwase Taku, Kamaji Yoshito, Kang Song Yun, Koga Kazunori, Kuboi Nobuyuki, Nakamura Moritaka, Negishi Nobuyuki, Nozaki Tomohiro, Nunomura Shota, Ogawa Daisuke, Omura Mitsuhiro, Shimizu Tetsuji, Shinoda Kazunori, Sonoda Yasushi, Suzuki Haruka, Takahashi Kazuo, Tsutsumi Takayoshi, Yoshikawa Kenichi, Ishijima Tatsuo, Ishikawa Kenji
JAPANESE JOURNAL OF APPLIED PHYSICS 58 巻 2019年6月
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Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development 査読有り
Iwase Taku, Kamaji Yoshito, Kang Song Yun, Koga Kazunori, Kuboi Nobuyuki, Nakamura Moritaka, Negishi Nobuyuki, Nozaki Tomohiro, Nunomura Shota, Ogawa Daisuke, Omura Mitsuhiro, Shimizu Tetsuji, Shinoda Kazunori, Sonoda Yasushi, Suzuki Haruka, Takahashi Kazuo, Tsutsumi Takayoshi, Yoshikawa Kenichi, Ishijima Tatsuo, Ishikawa Kenji
JAPANESE JOURNAL OF APPLIED PHYSICS 58 巻 2019年6月
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Facile synthesis of SnO2-graphene composites employing nonthermal plasma and SnO2 nanoparticles-dispersed ethanol 査読有り
Borude Ranjit R., Sugiura Hirotsugu, Ishikawa Kenji, Tsutsumi Takayoshi, Kondo Hiroki, Hori Masaru
JOURNAL OF PHYSICS D-APPLIED PHYSICS 52 巻 ( 17 ) 2019年4月
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Imai, S; Naito, K; Kondo, H; Cho, HJ; Ishikawa, K; Tsutsumi, T; Sekine, M; Hiramatsu, M; Hori, M
JOURNAL OF PHYSICS D-APPLIED PHYSICS 52 巻 ( 10 ) 頁: 105503 - 105503 2019年3月