Updated on 2026/05/20

写真a

 
SHIDOJI Eiji
 
Organization
Institutes of Innovation for Future Society Designated Professor
Title
Designated Professor
Contact information
メールアドレス

Degree 1

  1. Ph.d. （ 2001.2   Keio University ） 

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Education 2

  1. Kyushu University

    1986.4 - 1988.3

  2. Kyushu University

    1982.4 - 1986.3

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Papers 1

  1. Three-Dimensional Simulation of Target Erosion in DC Magnetron Sputtering Reviewed

    Eiji Shidoji, Masaharu Nemoto, Takuji Nomura Takuji Nomura, Yukio Yoshikawa Yukio Yoshikawa

    Japanese Journal of Applied Physics   Vol. 33 ( 7S ) page： 4281 - 4281   1994.7

    　More details

    Authorship：Lead author   Publishing type：Research paper (scientific journal)   Publisher：IOP Publishing  

    We simulate the erosion profiles of a rectangular planar target in the DC magnetron sputtering system. The simulation model assumes time-independent magnetic and electric fields that are not disturbed by the magnetron plasma. The electron trajectories are obtained by integrating partial orbits. The Monte Carlo technique, taking account of the differential cross section, is used to discriminate the ionization collision from the excitation and elastic collisions. Thus we determine the coordinates where an argon ion and an electron appear to indicate the erosion profiles. The calculated 3D erosion profiles are in very good agreement with those of the target actually used. This simulation technique for the sputtering process will be valuable in designing the magnet arrangement of a magnetron sputter target.

    DOI： 10.1143/jjap.33.4281

    Other Link： https://iopscience.iop.org/article/10.1143/JJAP.33.4281/pdf

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