NU-SKKU　先端プラズマナノ材料研究所（韓国）研究所長

2011年11月 - 2019年9月

名古屋大学大学院工学研究科付属プラズマナノ工学研究センター長

2009年4月 - 2013年3月

名古屋大学教授

2004年4月 - 現在

英国ケンブリッジ大学キャベンディシュ研究所客員研究員

1997年8月 - 1997年12月

名古屋大学助教授（工学部）

1996年7月 - 2004年3月

名古屋大学講師（工学部）

1994年4月 - 1996年6月

名古屋大学助手(工学部）

1992年4月 - 1994年3月

(株）東芝 総合研究所　超LSI研究所

1986年4月 - 1992年3月

日本表面技術科学会

ISPC25   Organizing Committee  

2023年5月   

ICRP-11 / GEC 2022, 11th International Conference on Reactive Plasma / 2022 Gaseous Electronics Conference / 40th Symposium on Plasma Processing (SPP-40) / 35th Symposium on Plasma Science for Materials (SPSM35)   Advisory Committee  

2022年10月   

9th International Symposium on Control of Semiconductor Interfaces(ISCSI-IX)   International Technical Program Committee.  

2022年9月   

5th International Symposium on Plasmas for Catalysis and Energy Materials (ISPCEM)   International Advisory Committee  

2022年7月   

The International Symposium of the Vacuum Society of the Philippines (ISVSP 2022) conference   Scientific Program Committee  

2022年2月   

The 13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2021)   International Scientific Committee (ISC)  

2022年2月   

The 43rd International Symposium on Dry Process (DPS2022)   Organizing Committee  

2022年   

42nd International Symposium on Dry Process (DPS2021)   Organizing Committee  

2021年11月   

Interfinish2020   Chair of International Organizing Committee  

2021年9月   

The 2nd Plasma Thin films International Union Meeting (PLATHINIUM 2021)   International Scientific Committee  

2021年9月   

The 2nd International Workshop on Plasma Agriculture (IWOPA-3)   International Organizing Committee  

2021年3月   

ISplasma2021/IC-PLANTS2021   Organizing Committee.  

2021年3月   

The 8th International Conference on Plasma Medicine (ICPM-8)   Board & International Scientific Committee  

2020年11月   

The 10th Global Nanotechnology Congress and Expo (Nano-2020)   Organizing Committee  

2020年11月   

The 11th International Symposium on Plasma Nanoscience (iPlasmaNano-XI)   Executive Committee  

2020年9月   

ISplasma2020/IC-PLANTS2020   Advisory Committee.  

2020年3月   

41st International Symposium on Dry Process Symposium (DPS2019)   Vice Chair of Executive Committee and Organizing Committee  

2019年11月   

41st International Symposium on Dry Process (DPS2019)   Organizing Committee.  

2019年11月   

8th International Symposium on Control of Semiconductor Interfaces   International Technical Program Committee  

2019年11月   

Plasma Thin film International Union Meeting, PLATHINIUM   International Scientific Committee  

2019年9月   

The 10th International Symposium on Plasma Nanoscience (iPlasmaNano-X)   Executive Committee  

2019年9月   

The 12th Asian-European International Conference on Plasma Surface Engineering(AEPSE 2019)   International Program Committee  

2019年9月   

International Symposium on Plasma Chemistry (ISPC24)   International Organizing Committee  

2019年6月   

6th International Workshop on Plasma for Cancer Treatment (IWPCT 2019)   International Scientific Committee  

2019年4月   

ISplasma2019/IC-PLANTS2019,   Organizing Committee  

2019年3月   

40th International Symposium on Dry Process Symposium (DPS2018)   Chair of Executive Committee and Organizing Committee  

2018年11月   

40th International Symposium on Dry Process (DPS2018)   Executive Committee Chair / Organizing Committee  

2018年11月   

2018 International Symposium on Plasmas for Catalysts and Energy Materials (ISPCEM-2018)   International Advisory Board  

2018年10月   

The 8th International Workshop on Plasma Spectroscopy (IPS 2018)   International Scientific Committee  

2018年9月   

The 9th International Symposium on Plasma Nanoscience (iPlasmaNano-IX)   Executive Committee  

2018年8月   

2018 Asia-Pacific Conference on Plasma and Terahertz Science (APCOPTS)   International Advisory Committee  

2018年8月   

The 7th International Conference on Microelectronics and Plasma Technology (ICMAP 2018)   International Advisory Committee  

2018年7月   

7th International Conference on Microelectronics and Plasma Technology (ICMAP 2018)   International Advisory Committee  

2018年7月   

Joint International Conference on ICMAP 2018, APCPST 2018, and ISPB 2018   International Advisory Committee  

2018年6月   

7th International Conference on Plasma Medicine (ICPM-7)   Board & International Scientific Committee  

2018年6月   

The 2nd International Workshop on Plasma Agriculture (IWOPA-2)   International Organizing Committee  

2018年3月   

ISplasma2018/IC-PLANTS2018   Organizing Committee.  

2018年3月   

5th International Workshop on Plasma for Cancer Treatment (IWPCT 2018)   International Scientific Committee  

2018年3月   

39th International Symposium on Dry Process Symposium (DPS2017)   Organizing Committee  

2017年11月   

The 8th International Symposium on Plasma Nanoscience (iPlasmaNano-IIIV)   Executive Committee  

2017年9月 - 2017年10月   

The 11th Asian-European International Conference on Plasma Surface Engineering(AEPSE 2017)   Organizing Committee Co-Chair.  

2017年9月   

2017 International Forum on Functional Materials (IFFM2017)   International Advisory Board  

2017年6月   

Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials   Co-Chair  

2017年4月   

ISplasma2017/IC-PLANTS2017, March 1-5 2017   Organizing Committee  

2017年3月   

The 3rd International Workshop on Advanced Plasma Technology and Applications   Organizing Committee  

2017年1月   

38th International Symposium on Dry Process Symposium (DPS2016)   Organizing Committee  

2016年11月   

The 3rd International Conference on Universal Village (UV 2016)   Session Chair (Intelligent Healthcare)  

2016年10月   

The 3rd International Conference on Universal Village (UV 2016)   Session Chair (Intelligent Healthcare)  

2016年10月   

The 7th International Symposium on Plasma Nanoscience (iPlasmaNano-IIV)   Executive Committee.  

2016年9月 - 2016年10月   

・The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016), September 26-29, 2016, Gyeongju Dream Center, Gyeongju, Korea. International Advisory Committee,   International Advisory Committee  

2016年9月   

The 6th International Conference on Plasma Medicine (ICPM-6)   Board & International Scientific Committee.  

2016年9月   

15th International Conference on Plasma Surface Engineering (PSE 2016)   Conference Co-chairman  

2016年9月   

20th International Vacuum Congress (IVC-20)   International Scientific Committee in Plasma Science and Technique Division  

2016年8月   

・2016 International Symposium on Plasma for Catalysts and Energy Materials (ISPCEM-2016)   International Advisory Board.  

2016年6月 - 2016年7月   

7th International Workshop on Plasma Spectroscopy (IPS 2016)   International Scientific Committee.  

2016年6月   

43rd IEEE International Conference on Plasma Science   Session Organizer  

2016年6月   

ISplasma2016/IC-PLANTS2016, March 6-10, 2016   Organizing Committee  

2016年3月   

The 3rd International Workshop on Plasma for Cancer Treatment, 2016   International Scientific Committee.  

2016年   

37th International Symposium on Dry Process Symposium (DPS2015)   Organizing  

2015年11月   

9th International Conference on Reactive Plasmas / 68th Gaseous Electronics Conference/ 33rd Symposium on Processing Plasmas   Advisory Committee  

2015年10月   

21th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials   Co-Chair  

2015年10月   

The 6th International Symposium on Plasma Nanoscience (iPlasmaNano-IV)   Executive Committee  

2015年9月 - 2015年10月   

The 10th Asian-European International Conference on Plasma Surface Engineering(AEPSE 2015)   Organizing Committee Chair  

2015年9月   

The 32nd International Conference on Phenomena in Ionized Gases (ICPIG2015)   International Organizing Committee  

2015年7月   

22th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics, The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials & The 1st International Workshop on Advanced Plasma Technology and Application   Chair  

2015年7月   

ISplasma2015/IC-PLANTS2015, March 26-31, 2016   Organizing Committee  

2015年3月   

・20th Workshop on Advanced Plasma Processes and Diagnostics & The 7th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials, Jan. 27 ~ 29, 2015. Hokkaido University, Sapporo, Japan, Chair.   Chair  

2015年1月   

The 2nd International Workshop on Plasma for Cancer Treatment (Nagoya 2015)   Chair of Organizing Committee & International Scientific Committee  

2015年   

36th International Symposium on Dry Process Symposium (DPS2014)   Organizing Committee  

2014年11月   

The 5th International Symposium on Plasma Nanoscience (iPlasmaNano-V)   Executive Committee  

2014年9月 - 2014年10月   

14th International Conference on Plasma Surface Engineering (PSE 2012)   International Advisory Board  

2014年9月   

International Symposium on Plasmas for Catalysts and Energy Materials (ISPCEM-2014)   International Advisory Board  

2014年9月   

14th international conference on Plasma Surface Engineering (PSE 2014)   International Advisory Board  

2014年9月   

The 5th International Conference on Microelectronics and Plasma Technology (ICMAP 2014)   International Advisory Committee  

2014年7月   

ISplasma2014/IC-PLANTS2014   Organizing Committee  

2014年3月   

8th International Conference on Reactive Plasmas / 31st Symposium on Plasma Processing   aaaaa  

2014年2月   

18th Korea - Japan Workshop on Advanced Plasma Processes and Diagnostics   Chair  

2014年2月   

The first International Workshop on Plasma for Cancer Treatment   International Scientific Committee  

2014年   

International Conference on Plasma Medicine (ISPM)   Board & International Scientific Committee  

2014年   

The 4th International Symposium on Plasma Nanoscience (iPlasmaNano-IV)   Executive Committee  

2013年9月 - 2013年10月   

35th International Symposium on Dry Process Symposium (DPS2013)   Organizing Committee  

2013年8月   

The 31st International Conference on Phenomena in Ionized Gases (ICPIG2013)   International Organizing Committee  

2013年7月   

17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & 4th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials   Co-Chair  

2013年5月   

The 6th International Conference on Plasma-Nano Technology & Science, IC-PLANTS 2013   Organizing Committee  

2013年2月   

ISplasma2013   Organizing Committee Chair  

2013年1月 - 2013年2月   

16th International Workshop on Advanced Plasma Processing and Diagnostics   Chair  

2013年1月   

34th International Symposium on Dry Process Symposium (DPS2012)   Organizing Committee  

2012年11月   

The 11th Asia Pacific Conference on Plasma Science and Technology (APCPST) / The 25th Symposium on Plasma Science for Materials(SPSM)   Chair of Executive Committee  

2012年10月   

13th International conference on Plasma Surface Engineering (PSE 2012)   International Advisory Board  

2012年9月   

2012 International Symposium on Plasmas for Catalysts and Energy Materials (ISPCEM-2012)   International Advisory Board  

2012年9月   

The 2nd International Symposium for Plasma Biosciences (SPB 2012)   Chair of Organizing Committee  

2012年8月   

The 4th International Conference on Microelectronics and Plasma Technology (ICMAP 2012)   International Advisory Committee  

2012年7月   

15th Korea- Japan workshop for Advanced Plasma Process and Diagnostics   Co-Chair  

2012年6月   

The 5th International Conference on Plasma-Nano Technology & Science, IC-PLANTS 2012   Organizing Committee  

2012年3月   

ISplasma2012   Organizing Committee Chair  

2012年3月   

The 3rd International Symposium on Plasma Nanoscience (iPlasmaNano-III)   International Consultative and Program Committee Executive Committee  

2012年2月 - 2012年3月   

14th International Workshop of Advanced Plasma Processing and Diagnostics & 2nd Workshop for NU- SKKU Joint Institute for Plasma-Nano Materials   Chair  

2012年1月   

33rd International Symposium on Dry Process Symposium (DPS2011)   Organizing Committee  

2011年11月   

The 15th International Conference on Thin Films (ICTF-15)   Organizing Committee  

2011年11月   

The 4th International Symposium on Plasma Nanoscience (iPlasmaNano-IV)   Executive Committee  

2011年9月 - 2011年10月   

The 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE2011)   International Organizing Committee  

2011年9月   

112 IUVSTA Executive Council Meeting and 4th International Conference on Advanced Plasma Technologies with Workshop   Program Committee  

2011年9月   

The 30th International Conference on Phenomena in Ionized Gases (ICPIG2011)   International Scientific Committee  

2011年8月 - 2011年9月   

The 1st International Symposium for Plasma Biosciences / The 1st Annual Workshop for Plasma Bioscinece Research Center   Chair of Organizing Committee  

2011年8月   

Advanced Plasma Technology for Green Energy and Biomedical Applications (APT 2011)   International Organizing Committee  

2011年8月   

International Symposium on Plasma Chemistry (ISPC20)   Board of Director of the International Plasma Chemistry Society (IPCS)  

2011年7月   

13th International Workshop on Advanced Plasma Processing and Diagnostics   Chair  

2011年7月   

The 6th International Symposium on Control of Semiconductor Interfaces(ISCSI-VI)   Technical program committee  

2011年5月   

実行委員長  

2011年4月 - 2012年3月   

2nd International Workshop on Plasma nano-Interface and Plasma Characterization   Organizing Committee  

2011年3月   

第５８回応用物理学会関係連合講演会   運営委員長  

2011年3月   

The 4th International Conference on Plasma-Nano Technology & Science, IC-PLANTS 2013   Organizing Committee  

2011年3月   

The 4th International Conference on Plasma-Nano Technology & Science (IC-PLANTS 2011)   Organizing Committee  

2011年3月   

ISplasma2011   Organizing Committee Chair  

2011年3月   

12th International Workshop of Advanced Plasma Processing and Diagnostics   Chair  

2011年1月   

2011 International Conference on Solid State device and materials (SSDM2011)   Chair of Steering Committee  

2011年   

32nd International Symposium on Dry Process Symposium (DPS2010)   Organizing Committee  

2010年11月   

7th International Conference on Reactive Plasmas / 63rd Gaseous Electronics Conference/28th Symposium on Processing Plasmas   Chair of Organize Committee  

2010年10月   

The 2nd International Symposium on Plasma Nanoscience (iPlasmaNano-II)   Executive Committee  

2010年9月 - 2010年10月   

2010 International Conference on Solid State device and materials (SSDM)   Vice Chair of Steering Committee  

2010年9月   

第７１回応用物理学会学術講演会   運営委員長  

2010年9月   

11th International Workshop on Advanced Plasma Processing and Diagnostics   Co-Chair  

2010年7月   

10th Asia-Pacific Conference on Plasma Science and Technology (APCPST) and 23rd Symposium on Plasma Science for Materials (SPSM)   Program Committee  

2010年7月   

The 3rd International Conference on Plasma-Nano Technology & Science (IC-PLANTS 2010)   Organizing Committee Chair  

2010年3月   

The 3rd International Conference on Plasma-Nano Technology & Science, IC-PLANTS 2010   Organizing Committee Chair  

2010年3月   

ISplasma2010   Organizing Committee Chair  

2010年3月   

10th International Workshop of Advanced Plasma Processing and Diagnostics   Chair  

2010年1月   

The 3rd International Conference on Microelectronics and Plasma Technology (ICMAP 2011)   International Advisory Committee  

2009年9月   

The 2nd International Symposium on Plasma Nanoscience (iPlasmaNano-II)   Executive Committee  

2009年9月   

7th International Workshop on Microwave Discharges: Fundamentals and Applications (MD7)   Steering Committee  

2009年9月   

31st International Symposium on Dry Process Symposium (DPS2009)   Organizing Committee  

2009年9月   

Joint International Conference of Asian-European International Conference on Plasma and Ion surface Engineering (AEPSE) / The 2nd International Conference on Microelectronics and Plasma Technology (ICMAP) /DPS   International Organizing Committee and Scientific Program Committee  

2009年9月   

The 2nd International Conference on Microelectronics and Plasma Technology (ICMAP 2009)   International Advisory Committee  

2009年9月   

The 29th International Conference on Phenomena in Ionized Gases (ICPIG2015)   International Organizing Committee  

2009年9月   

19th International Symposium on Plasma Chemistry   International Plasma Chemistry Society (IPCS) Board of Directors  

2009年7月   

9th Korea-Japan Workshop on Thin Film and Plasma Process for Green Technology Advanced Plasma Diagnostics for Plasma-Nano Processing   Co-Chair  

2009年7月   

ISplasma2009   Organizing Committee Chair  

2009年3月   

The 2nd International Conference on Plasma-Nano Technology & Science, IC-PLANTS 2009   Organizing Committee Vice Chair  

2009年1月   

8th International Workshop of Advanced Plasma Processing and Diagnostics, Joint Workshop with Plasma Application Monodzukuri(PLAM)   Chair  

2009年1月   

30th International Symposium on Dry Process Symposium (DPS2008)   Organizing Committee  

2008年11月   

2008 International Microprocess and Nanotechnology Conference (MNC)   Executive Committee  

2008年10月   

The 1st International Conference on Microelectronics and Plasma Technology (ICMAP 2008)   Executive Committee  

2008年8月   

The 3rd International School of Advanced Plasma Technology   Scientific Organizing Committee  

2008年7月   

7th Korea-Japan Workshop on Plasma Technology Thin Film and Plasma Technology for Next Generation Energy Advanced Plasma Diagnostics for Plasma-Nano Processing   Co-Chair  

2008年7月   

The 1st International Conference on Plasma-Nano Technology & Science, IC-PLANTS 2008   Organizing Committee Vice Chair  

2008年3月   

29th International Symposium on Dry Process Symposium (DPS2007)   Organizing Committee  

2007年11月   

Fifth International Symposium on Control of Semiconductor Interfaces―for Next Generation ULSI Process Integrations―   Program Committee  

2007年11月   

The 6th Asian-European International Conference on Plasma Surface Engineering (AEPSE)   International Organizing Committee  

2007年9月   

The 18th International Symposium on Plasma Chemistry (ISPC-18)   Local Executive Committee  

2007年8月   

The 16th International Colloquium on Plasma Processes (CIP)   International Science Committee  

2007年6月   

5th International Symposium on Advanced Plasma Processes and Diagnostics & The 1st International Symposium on Flexible Electronics Technology   Co-Chair  

2007年4月   

6th International Workshop on Advanced Plasma Processing and Diagnostics & The 3rd Plasma Application Monodzukuri (PLAM)   Chair  

2007年1月   

2nd International workshop on Infrared plasma diagnostics   International Science Committee  

2007年   

4th Workshop on Advanced Plasma Processing and Diagnostics   Chair  

2006年12月   

28th International Symposium on Dry Process Symposium (DPS2006)   Chair of Executive Committee and Organizing Committee  

2006年11月 - 2006年12月   

38th International Symposium on Dry Process Symposium (DPS2016)   Organizing Committee  

2006年11月   

The 1st International Workshop on Infrared Plasma Spectroscopy   International Scientific Committee  

2006年6月   

3rd Workshop on Advanced Plasma Processing and Diagnostics   Co-Chair  

2006年4月   

The 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP-6/SPP-23)   Organizing Committee / Program Committee / Vice Chair of Fundraising Committee  

2006年1月   

8th Asia-Pacific Conference on Plasma Science and Technology / 19th Symposium on Plasma Science for Materials ASCPST   International Program Committee  

2006年   

The Ist International workshop on Infrared plasma diagnostics   International Science Committee  

2006年   

The 6th Korea-Japan Symposium on Plasma and Thin Film Technology   Advisory Committee  

2006年   

2nd Workshop on Advanced Plasma Processing and Diagnostics   Co-Chair  

2005年12月   

27th International Symposium on Dry Process Symposium (DPS2005)   Chair of Executive Committee and Organizing Committee  

2005年11月   

International Symposium on EcoTopia Science 2005 (ISETS05)   Secretariats  

2005年8月   

15th International Colloquium on Plasma Process (CIP 05)   International Scientific Committee  

2005年6月   

応用物理学会   東海支部長  

2005年4月 - 2007年3月   

1st Workshop on Advanced Plasma Processing and Diagnostics   Chair  

2005年4月   

International Symposium on EcoTopia Science (ISETS05)   Session Organizer  

2005年   

26th International Symposium on Dry Process Symposium (DPS2004)   Chair of Executive Committee and Organizing Committee  

2004年11月 - 2004年12月   

The 2nd International School of Advanced Plasma Technology   Scientific Organizing Committee  

2004年9月 - 2004年10月   

International COE Forum on Plasma Science and Technology,   Local Organizing Committee  

2004年4月   

International Workshop on Plasma Nano-Technology and Its Future Vision   Vice Chair of Organizing Committee and Chair of Local Organizing Committee  

2004年2月   

25th International Symposium on Dry Process Symposium (DPS2003)   Chair of Executive Committee and Organizing Committee  

2003年11月   

2003 International Microprocess and nanotechnology Conference,   Program Committee, Etching and Deposition Technologies, Section Head  

2003年10月   

24th International Symposium on Dry Process Symposium (DPS2002)   Organizing Committee  

2002年11月   

23th International Symposium on Dry Process Symposium (DPS2001)   Chair of Program Committee and Organizing Committee  

2001年11月   

The Best Short Presentation (poster) Awards

2022年3月   14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）   Enhanced Bioremediation of 4-Chlorophenol by Oxygen Radical Treatment Based on Non-Thermal Atmospheric Pressure Plasma

Hiroyuki Kato, Kiyota Sakai, Shou Ito, Naoyuki Iwata, Masafumi Ito, Masaru Hori, Motoyuki Shimizu and Masashi Kato

The Best Short Presentation (poster) Awards

2022年3月   14th International Symposium on Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials / 15th International Conference on Plasma-Nano Technology & Science （ISPlasma2022/IC-PLANTS2022）   Carbon Layer Formation on Boron Nitride via a Plasma in Hydroquinone Solution

Kenichi Inoue, Noritaka Sakakibara, Taku Goto, Tsuyohito Ito, Yoshiki Shimizu, Kenji Ishikawa, Masaru Hori and Kazuo Terashima

DPS Paper Award

2021年11月   DPS（International Symposium on Dry Process)   Formation mechanism of sidewall striation in high-aspect-ratio hole etching

DPS Nishizawa Award 2020

2021年11月   DPS（International Symposium on Dry Process)  

The Best Short Presentation Awards, ISPlasma2021/IC-PLANTS2021

2021年3月   13th anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2021) / 14th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2021)   Study of Etching Process Using Gas Condensed Layer at Cryogenic Temperature 2

Masahiro Hazumi, Suganthamalar Selvaraj, Shih-Nan Hsiao, Chihiro Abe, Toshiyuki Sasaki, Hisataka Hayashi, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

The Best Oral Presentation Awards, ISPlasma2021/IC-PLANTS2021

2021年3月   13th anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2021) / 14th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2021)   Dependency of bactericidal effect in oxygen-radical-exposed E. coli suspension containing L-tryptophan on its concentration

N. Iwata, K. Ishikawa, H. Hashizume, H. Tanaka, J.-S. Oh, M. Ito, M. Hori

The Best Short Presentation Awards, ISPlasma2021/IC-PLANTS2021

2021年3月   13th anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2021) / 14th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2021)   Apoptosis-inducing Activity through Caspase-9 of Radical-Activated Lactate Ringers Solution for Melanoma Cells

Yuki Hori, Tomiyasu Murata, Hiromasa Tanaka, Masaru Hori and Masafumi Ito

The Best Oral Presentation Award, ISPlasma2021/IC-PLANTS2021

2021年3月   13th anniversary International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlsma2021) / 14th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2021)   Design of Removal Process of SnO2 on Glass by H2/Ar Plasma at Atmospheric Pressure and Medium Pressure

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori

第２回AAPPS-DPPプラズマイノベーション賞

2020年10月   アジア・太平洋物理学会連合プラズマ物理分科会  

堀　勝

第18回　プラズマエレクトロニクス賞

2020年3月   公益社団法人　応用物理学会　プラズマエレクトロニクス分科会  

大村光広、橋本惇一、足立昴拓、近藤祐介、石川勝朗、阿部淳子、酒井伊都子、林久貴、関根誠、堀勝

Honorary Chair Professor

2020年1月   Taiwan National Tsing Hua UniTaiwan  

IAAM Award Lecture

2019年10月   International Association of Advanced material (IAAM)   Carbon Nanowalls Propelling Social Innovations

Masaru Hori

K-T Rie Award for the year 2019

2019年9月   Asian-European International Conference on Plasma Surface Engineering (AEPSE2019)  

Masaru Hori

The Best Poster Presentation Awards, ISPlasma2019/IC-PLANTS2019

2019年3月   ISPlasma2019 / IC-PLANTS2019   Cytotoxicity of Plasma-Activated Glucose and Amino Acids

Maho Yamada, Nanami Ito, Yugo Hosoi, Hiromasa Tanaka, Kenji Ishikawa and Masaru Hori

The Best Oral Presentation Awards in the area of Plasma Science, ISPlasma2019/IC-PLANTS2019

2019年3月   ISPlasma2019 / IC-PLANTS2019   Control of sp2-C Fraction and Hardness of Amorphous Carbon Films by Formation of Precursor Radicals Depending on a Residence Time

Hirotsugu Sugiura, Yasuyuki Ohashi, Lingyun Jia, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Toshio Hayashi, Keigo Takeda, Makoto Sekine and Masaru Hori

The Best Oral Presentation Awards, ISPlasma2019/IC-PLANTS2019

2019年3月   ISPlasma2019 / IC-PLANTS2019   The Best Oral Presentation Awards in the area of Bio Applications, ISPlasma2019/IC-PLANTS2019

Naoyuki Iwata, Vladislav Gamaleeve, Jun-SeokOh, Hiroshi Hashizume, Takayuki Ohta, Kenji Ishikawa, Masaru Hori and Masafumi Ito

The Best Poster Presentation Awards, ISPlasma2019/IC-PLANTS2019

2019年3月   ISPlasma2019 / IC-PLANTS2019   Morphological Dynamics of Dying Cells Incubated in Plasma-Activated Medium

Nanami Ito, Maho Yamada, Yugo Hosoi, Hiromasa Tanaka, Kenji Ishikawa and Masaru Hori

2018 The Plasma Medical Award

2018年6月   ICPM7  

Best Presentation Award

2016年3月   ISPlasma2016/10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials  

第３７回（２０１５年度）応用物理学会論文賞

2015年9月   応用物理学会  

第１１回プラズマエレクトロニクス賞

2013年3月   応物理学会プラズマエレクトロニクス分科会  

ISPlasma2013 Best Poster Presentation Award

2013年2月   5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2013)  

五大成果（全2,000件のうちトップ５）

2013年2月   文部科学省ナノテクノロジーネットワーク事業（平成19年～24年）  

応用物理学会東海支部貢献賞

2013年1月   応用物理学会  

11th APCPST and 25th SPSM Plasma Science Award

2012年10月   11th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 25th SPSM (Symposium on Plasma Science for Materials)  

応用物理学会　第6回（2012年度）フェロー表彰

2012年9月   公益社団法人応用物理学会  

第14回プラズマ材料科学賞（基礎部門賞）

2012年8月   日本学術振興会  

The Distinguished Professor Award

2012年6月  

高温学会　論文賞

2012年3月   社団法人高温学会  

第9回産学官連携功労者表彰（科学技術政策担当大臣賞）

2011年9月   第10回産学官連携推進会議  

平成22年度科学技術分野の文部科学大臣表彰・科学技術賞（研究部門）

2010年4月   文部科学省  

プラズマ材料科学賞（奨励部門賞）

2004年   日本学術振興会  

JJAP編集貢献賞

2004年  

プラズマエレクトロニクス賞

2003年   公益社団法人応用物理学会プラズマエレクトロニクス分科会  

マイクロプロセスナノテクノロジー国際会議2000 Award（最優秀発表賞）

2001年   マイクロプロセスナノテクノロジー国際会議  

Plasma-generated nitric oxide radical (NO•) promotes the proliferation of fibroblast cells in liquid 査読有り

Yasumasa Mori, Kazane Oguri, Naoyuki Iwata, Tomiyasu Murata, Masaru HORI and Masafumi ITO

Japanese Journal of Applied Physics   62 巻 ( SL ) 頁： SL1016   2023年6月

Development of an experimental system for cell viability assays of yeasts using gas-temperature controllable plasma jets 査読有り

Yoshimura, Shinji; Otsubo, Yoko; Yamashita, Akira; Johzuka, Katsuki; TSUTSUMI, Takayoshi; Ishikawa, Kenji; HORI, Masaru

Japanese Journal of Applied Physics   62 巻 ( Number SL )   2023年6月

Diagnostics of a nanosecond atmospheric plasma jet. Ionization waves, plasma density and electric field dynamics 査読有り

Nikolay Britun, Peter Raj Dennis Christy, Vladislav Gamaleev, Shih-Nan Hsiao, Masaru Hori

Journal of Applied Physics   133 巻 ( 18 )   2023年5月

Selective isotropic atomic-layer etching of thin films by using dry chemical removal tool 招待有り 査読有り

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Masaru Izawa, Kenji Ishikawa, Masaru Hori

Advanced Etch Technology and Process Integration for Nanopatterning XII; 124990E (2023)   12499 巻   2023年5月

Synthesis of highly dense and multi-branched carbon nanowalls by two-step growth combining different plasma chemical vapor deposition methods 査読有り

Ngo Quang Minh, Ngo Van Nong , Ma Shanlene. Dela Vega, Osamu Oda, Masaru Hori

Vacuum   213 巻   2023年4月

Cancer-specific cytotoxicity of Ringer’s acetate solution irradiated by cold atmospheric pressure plasma 査読有り

Camelia Miron , Kenji Ishikawa, Satoshi Kashiwagura, Yuki Suda, Hiromasa Tanaka, Kae Nakamura, Hiroaki Kajiyama, Shinya Toyokuni, Masaaki Mizuno, Masaru Hori

Free Radical Research   57 巻 ( 2 ) 頁： 91 - 104   2023年4月

Exposure of low-temperature plasma after vaccination in 6 tongue promotessystemic IgM induction against spike protein 7 of SARS-CoV-2 査読有り

Kotaro Sato, Kouki Fujii, Hiromasa Tanaka, Masaru Hori, Hideharu Hibi and Shinya Toyokuni

Free Radical Research   57 巻 ( 1 ) 頁： 30 - 37   2023年3月

High-performance glass filters for capturing and culturing circulating tumor cells and cancer-associated fibroblasts 査読有り

Hiromasa Tanaka, Daijiro Iwata, Yuki Shibata, Tetsunari Hase, Daisuke Onoshima, Naoyuki Yogo, Hirofumi Shibata, Mitsuo Sato, Kenji Ishikawa, Ikuo Nagasawa, Yoshinori Hasegawa, Makoto Ishii, Yoshinobu Baba, Masaru Hori

Scientific Reports   13 巻   2023年3月

Plasma activated Ringer’s lactate solution 査読有り

Hiromasa Tanaka,Masaaki Mizuno,Kenji Ishikawa,Camelia Miron,Yasumasa Okazaki,Shinya Toyokuni,Kae Nakamura,Hiroaki Kajiyama &Masaru Hori

Free Radical Research   57 巻 ( 1 ) 頁： 14 - 20   2023年2月

Organic decomposition and synthesis reactions in lactated solution exposed to non-equilibrium atmospheric pressure plasma 査読有り

Yang Liu, Kenji Ishikawa, Hiromasa Tanaka, Camelia Miron, Takashi Kondo, Kae Nakamura, Masaaki Mizuno, Hiroaki Kajiyama, Shinya Toyokuni, Masaru Hori

Plasma Processes and Polymers   20 巻 ( 5 )   2023年2月

低温大気圧プラズマによるフリーラジカル生成とその生物学的意義-放射線との比較- 査読有り

近藤隆、橋爪博司、田中比呂間瀬　石川健治、堀勝

化学工業   74 巻 ( 2 ) 頁： 120 - 126   2023年2月

GaN damage-free cyclic etching by sequential exposure to Cl2 plasma and Ar plasma with low Ar+-ion energy at substrate temperature of 400 °C 査読有り

Shohei Nakamura, Atsushi Tanide, Takahiro Kimura, Soichi Nadahara, Kenji Ishikawa, Osamu Oda, and Masaru Hori

Journal of Applied Physics   133 巻 ( 4 )   2023年1月

Manipulation of etch selectivity of silicon nitride over silicon dioxide to a-carbon by controlling substate temperature with a CF4/H2 plasma 査読有り

Shih-Nan Hsiao, Nikolay Britun, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

Vacuum   210 巻   頁： 111863   2023年1月

Diagnostics of a nanosecond atmospheric plasma jet. II. Ionization waves, plasma density and electric field dynamics 査読有り

Nikolay Britun, Peter Raj Dennis Christy, Vladislav Gamaleev and Masaru Hori

Plasma Sources Science and Technology   31 巻 ( 12 )   2023年1月

Effects of plasma-activated Ringer’s lactate solution on cancer cells: evaluation of genotoxicity 査読有り

Yang Liu , Yoshimichi Nakatsu, Hiromasa Tanaka, Kazunori Koga, Kenji Ishikawa, Masaharu Shiratani & Masaru Hori

Genes and Environment   45 巻   2023年1月

Role of insoluble atoms in the formation of a three-dimensional buffer layer in inverted Stranski–Krastanov mode 査読有り

Naoto Yamashita, Ryo Mitsuishi, Yuta Nakamura, Keigo Takeda, Masaru Hori, Kunihiro Kamataki, Takamasa Okumura, Kazunori Koga & Masaharu Shiratani

Journal of Materials Research   38 巻   頁： 1178 - 1185   2023年1月

Substrates on Surface-Assisted Laser Desorption/Ionization Mass Spectrometry Performance 査読有り

Ryusei Sakai ,Hiroki Kondo ,Kenji Ishikawa,Takayuki Ohta, Mineo Hiramatsu, Hiromasa Tanaka and Masaru Hori

Nanomaterials   13 巻 ( 1 )   2022年12月

Non-thermal plasma elicits ferrous chloride-catalyzed DMPO-OH 査読有り

Yasumasa Okazaki, Nanami Ito, Hiromasa Tanaka, Masaru Hori & Shinya Toyokuni

Free Radical Research   56 巻 ( 9-10 ) 頁： 595 - 606   2022年12月

Indoor floor heel mark removal using spark discharges and pressurized airflow 査読有り

Yoshihiro Sakamoto, Takayoshi Tsutsumi, Hiromasa Tanaka, Kenji Ishikawa, Hiroshi Hashizume and Masaru Hori

Coatings 2022   12 巻 ( 12 )   2022年12月

Leukocyte Depletion and Size-Based Enrichment of Circulating Tumor Cells Using a Pressure-Sensing Microfiltration Device 査読有り

Daisuke Onoshima, Tetsunari Hase, Naoto Kihara, Daiki Kuboyama, Daiki Kuboyama, Hiromasa Tanaka, Naoya Ozawa, Hiroshi Yukawa, Mitsuo Sato, Kenji Ishikawa, Yoshinori Hasegawa, Makoto Ishii, Masaru Hori, and Yoshinobu Baba

ACS Meas. Sci. Au   3 巻   頁： 113 - 119   2022年12月

Mechanical properties of maze-like carbon nanowalls synthesized by the radial injection plasma enhanced chemical vapor deposition method 査読有り

Swapnil Ghodke, Motoyuki Murashim, Dennis Christy, Ngo Van Nong, Kenji Ishikawa, Osamu Oda, Noritsugu Umehara, Masaru Horia

Materials Science & Engineering A   862 巻 ( 18 ) 頁： 1 - 8   2022年11月

Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma 査読有り

Thi‑Thuy‑Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, KenetsuYokogawa, Masaru Izawa, Kenji Ishikawa, Masaru Hor

Scientific Reports   12 巻   頁： 1 - 13   2022年11月

Carbon Layer Formation on Hexagonal Boron Nitride by Plasma Processing in Hydroquinone Aqueous Solution 査読有り

Inoue, Kenichi; Sakakibara, Noritaka; Goto, Taku; Ito, Tsuyohito; Shimizu, Yoshiki; Hakuta, Yukiya; Ishikawa, Kenji; Hori, Masaru; Terashima, Kazuo Terashima

ACS Applied Materials & Interfaces   14 巻 ( 17 ) 頁： 53413 - 53420   2022年11月

Creation of unique shapes by coordination of alumina nanopores and carbon nanowalls 査読有り

Yerassyl Yerlanuly, Dennis Christy, Ngo Van Nong, Hiroki Kondo, Balaussa Ye. Alpysbayeva, Rakhymzhan Zhumadilov, Renata R. Nemkayeva, Tlekkabul S. Ramazanov, Masaru Hori, Maratbek T. Gabdullin

Fullerenes, nanotubes, and carbon nanostructures   31 巻 ( 4 ) 頁： 295 - 301   2022年11月

Biocompatibility of conformal silicon carbide on carbon nanowall scaffolds 査読有り

Koki Ono, Takashi Koide, Kenji Ishikawa, Hiromasa Tanaka, HIROKI KONDO, Ayae Sugawara-Narutaki, Yong Jin, Shigeno Yasuhara, Masaru HORI and Wakana Takeuchi

Japanese Journal of Applied Physics (Special Issues)   62 巻 ( SA )   2022年11月

Radical-controlled plasma processes 査読有り

Masaru Hori

Reviews of Modern Plasma Physics   6 巻 ( 1 ) 頁： 1 - 117   2022年11月

Area-selective plasma-enhanced atomic layer etching (PE-ALE) of silicon dioxide using a silane coupling agent 査読有り

Osonio, Airah P. ; Tsutsumi, Takayoshi ; Oda, Yoshinari ; Mukherjee, Bablu ; Borude, Ranjit ; Kobayashi, Nobuyoshi ; Hori, Masaru

Journal of Vacuum Science & Technology A,   40 巻 ( 6 )   2022年10月

Dissociation channels of c-C4F8to C2F4in reactive plasma 査読有り

Hayashi, Toshioa;Ishikawa, Kenjia;Iwayama, Hiroshib;Sekine, Makotoa;Hori, Masarua

Japanese Journal of Applied Physics   61 巻 ( 10 )   2022年10月

液中プラズマ法によるナノグラフェン合成に及ぼす超音波の影響

安藤　啓司、長谷川　健太、近藤　博基、堀　勝

超音波テクノ   34 巻 ( 5 ) 頁： 42 - 46   2022年10月

Power Generation Characteristics of Polymer Electrolyte Fuel Cell Using Carbon Nanowalls for Catalyst-Support-Materials 査読有り

Takayuki Ohta , Hiroaki Iwata, Mineo Hiramatsu, Hiroki Kondo, Masaru Hori

C - Journal of Carbon Research   8 巻 ( 3 )   2022年8月

Effects of deposition precursors of hydrogenated amorphous carbon films on the plasma etching resistance based on mass spectrometer measurements and machine learning analysis 査読有り

Jumpei Kurokawa, Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

Vacuum   205 巻   2022年8月

The 2022 Plasma Roadmap: low temperature plasma science and technology 査読有り

I Adamovich, S Agarwal, E Ahedo, L L Alves, S Baalrud, N Babaeva, A Bogaerts, A Bourdon, P J Bruggeman, C Canal, E H Choi, S Coulombe, Z Donkó, D B Graves, S Hamaguchi, D Hegemann, M Hori, H-H Kim, G M W Kroesen, M J Kushner, A Laricchiuta, X Li, T E Magin, S Mededovic Thagard, V Miller, A B Murphy, G S Oehrlein, N Puac, R M Sankaran, S Samukawa, M Shiratani, M Šimek, N Tarasenko, K Terashima, E Thomas Jr, J Trieschmann, S Tsikata, M M Turner, I J van der Walt, M C M van de Sanden and T von Woedtke

Journal of Physics D: Applied Physics   55 巻 ( 37 )   2022年7月

Wide range applications of process plasma diagnostics using vacuum ultraviolet absorption spectroscopy 査読有り

Keigo Takeda, Kenji Ishikawa, Masaru Hori

Reviews of Modern Plasma Physics   6 巻 ( 1 )   2022年7月

低温プラズマの農業応用への可能性と進展

橋爪 博司・堀　勝

アグリバイオ   6 巻 ( 6 ) 頁： 47 - 51   2022年6月

Study of optical emission spectroscopy using modified Boltzmann plot in dual-frequency synchronized pulsed capacitively coupled discharges with DC bias at low-pressure in Ar/O2/C4F8 plasma etching process 査読有り

Bibhuti Bhusan Sahu, Kazuya Nakane, Kenji Ishikawa, Makoto Sekine, Takayoshi Tsutsumi, Taku Gohira, Yoshinobu Ohya, Noriyasu Ohnoad and Masaru Hori

Physical Chemistry Chemical Physics   22 巻   頁： 13883 - 13896   2022年5月

Nanosecond-scale impulse generator for biomedical applications of atmospheric-pressure plasma technology 査読有り

Vladislav Gamaleev, Naohiro Shimizu, and Masaru Hori

Review of Scientific Instruments   93 巻 ( 5 ) 頁： 053503-1 - 053503-10   2022年5月

High-Efficient Hydrogen Generation Study by a Reverse Tailing Pulsed-Plasma Water Dissociation Applying Wet Electrode Method 査読有り

Naohiro Shimizu, Ranjit R Borude, Reiko Tanaka, Osamu Oda, Hiroki Hosoe, Satoshi Inou, Yousuke Inoue and Masaru Hori

Journal of The Electrochemical Society   169 巻 ( 5 ) 頁： 054507   2022年5月

Ion-induced interface defects in a-Si:H/c-Si heterojunction: possible roles and kinetics of hot mobile hydrogens 査読有り

Shota Nunomura, Takayoshi Tsutsumi, Kazuya Nakane, Aiko Sato, Isao Sakata and Masaru Hori

Japanese Journal of Applied Physics   61 巻 ( 5 ) 頁： 056003-1 - 056003-11   2022年5月

Enhanced Bioremediation of 4-Chlorophenol by Electrically Neutral Reactive Species Generated from Nonthermal Atmospheric-Pressure Plasma 査読有り

Hiroyuki Kato, Kiyota Sakai, Shou Itoh, Naoyuki Iwata, Masafumi Ito, Masaru Hori, Masashi Kato, and Motoyuki Shimizu

ACS OMEGA   7 巻   頁： 16197 - 16203   2022年4月

Cytotoxicity of plasma-irradiated lactate solution produced under atmospheric airtight conditions and generation of the methyl amino group 査読有り

Daiki Ito, Naoyuki Iwata, Kenji Ishikawa, Kae Nakamura, Hiroshi Hashizume, Camelia Miron, Hiromasa Tanaka, Hiroaki Kajiyama, Shinya Toyokuni, Masaaki Mizuno and Masaru Hori

Applied Physics Express   15 巻 ( 5 ) 頁： 56001   2022年4月

プラズマによるカーボンナノウォールの合成と応用 査読有り

平 松 美 根 男，竹 田 圭 吾，近 藤 博 基，堀 勝

プラズマ・核融合学会誌   98 巻 ( 4 ) 頁： 158 - 164   2022年4月

In-liquid plasma synthesis of iron–nitrogen-doped carbon nanoflakes with high catalytic activity 査読有り

Hiroki Kondo,Ryo Hamaji,Tomoki Amano,Kenji Ishikawa,Makoto Sekine,Mineo Hiramatsu,Masaru Hori

Plasma Processes and Polymers   19 巻 ( 8 )   2022年4月

Low-temperature reduction of SnO2 by floating wire-assisted medium-pressure H2/Ar plasma 査読有り

Nguyen, Thi-Thuy-Nga; Sasaki, Minoru; Hsiao, Shih-Nan; Tsutsumi, Takayoshi; Ishikawa, Kenji; Hori, Masaru

Plasma Processes and Polymers     2022年2月

Scaffolds with isolated carbon nanowalls promote osteogenic differentiation through Runt-related transcription factor 2 and osteocalcin gene expression of osteoblast-like cells 査読有り

Tomonori Ichikawa, Kenji Ishikawa, Hiromasa Tanaka, Naohiro Shimizu, and Masaru Hori

AIP Advances   12 巻 ( 2 )   2022年2月

Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride, 査読有り

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Yuko Hanaoka, Masaru Izawa, Kenji Ishikawa, and Masaru Hori

Journal of Vacuum Science & Technology B   40 巻 ( 2 )   2022年2月

Tetrachloroaurate (III)-induced oxidation increases non-thermal plasma-induced oxidative stress 査読有り

Yasumasa Okazaki, Kanako Sasaki, Nanami Ito, Hiromasa Tanaka, Ken-Ichiro Matsumoto, Masaru Hori & Shinya Toyokuni

Free Radical Research   55 巻 ( 8 )   2022年1月

Nitrogen Atom Density Measurements in NAGDIS-T Using Vacuum Ultraviolet Absorption Spectroscopy

Nishio Ryosuke, Kajita Shin, Tanaka Hirohiko, Asaoka Koji, Tsutsumi Takayoshi, Hori Masaru, Ohno Noriyasu

PLASMA AND FUSION RESEARCH   17 巻   2022年1月

Enhancement of ethanol production and cell growth in budding yeast by direct irradiation of low-temperature plasma 査読有り

Tanaka Hiromasa, Matsumura Shogo, Ishikawa Kenji, Hashizume Hiroshi, Ito Masafumi, Nakamura Kae, Kajiyama Hiroaki, Kikkawa Fumitaka, Ito Mikako, Ohno Kinji, Okazaki Yasumasa, Toyokuni Shinya, Mizuno Masaaki, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   61 巻 ( SA )   2022年1月

プラズマ生命エレクトロニクスの幕開 招待有り 査読有り

堀　勝

化学工業   ( 863 ) 頁： 1 - 5   2022年1月

低温プラズマバイオサイエンスの未来 査読有り

堀　勝

プラズマ・核融合学会誌エレクトロニクス分化会会報   75 巻   頁： 9 - 13   2021年12月

ハイパーサーミアがん治療への相乗効果―プラズマ活性酢酸リンゲル液との併用 査読有り

田中 宏昌, 堀 勝

日本ハイパーサーミア学会誌   37 巻 ( 4 ) 頁： 141 - 142   2021年12月

On the etching mechanism of highly hydrogenated sin films by CF4/D2 plasma: Comparison with CF4/H2 査読有り

Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

Coatings   11 巻 ( 12 )   2021年12月

Low Temperature Plasma for Biology, Hygiene, and Medicine: Perspective and Roadmap 査読有り

Mounir Laroussi, Sander Bekeschus, Michael Keidar, Annemie Bogaerts, Alexander Fridman, XinPei Lu, Kostya (Ken)Ostrikov, Masaru Hori, Katharina Stapelmann, Vandana Miller, Stephan Reuter, Christophe Laux, Ali Mesbah, James Walsh, Chunqi Jiang, Selma Mededovic Thagard, Hiromasa

IEEE Transaction on Radiation and Plasma Medical Sciences   6 巻 ( 2 )   2021年12月

プラズマによるがん治療 －2021年の状況と将来展望－ 査読有り

石川　健治、 堀　勝

静電気学会誌   45 巻 ( 6 ) 頁： 2 - 8   2021年12月

Reaction Mechanism & Selectivity Control of Si-Compound ALE Based on Plasma Modification and F-radical Exposure 査読有り

Vervuurt Ren, Mukherjee Bablu, Nakane Kazuya, Tsutsumi Takayoshi, Hori, Masaru, Kobayashi, Nobuyoshi

LANGMUIR   37 巻 ( 43 ) 頁： 12519 - 12766   2021年10月

窒化物半導体プラズマエッチングにおける原子層反応制御と低ダメージプロセス 査読有り

堤　隆嘉、石川　健治、近藤　博基、関根　誠、堀　勝

プラズマ・核融合学会誌   97 巻 ( 9 ) 頁： 517 - 521   2021年9月

Low temperature plasma irradiation products of sodium lactate solution that induce cell death on U251SP glioblastoma cells were identified. 査読有り

HiromasaTanaka, Yugo Hosoi, Kenji Ishikawa, JunYoshitake, Takahiro Shibata, Koji Uchida, Hiroshi Hashizume, Masaaki Mizuno, Yasumasa Okazaki, ShinyaToyokuni, Kae Nakamura, Hiroaki Kajiyama, Fumitaka Kikkawa, Masaru Hori

Scientific Reports     2021年9月

先端プラズマプロセスが実現するバイオ・ライフテクノロジー 査読有り

堀　勝

化学工学   85 巻 ( 9 ) 頁： 478 - 479   2021年9月

Novel Method of Rebound Tailing Pulse (RTP) for Water Dissociation 査読有り

Naohiro Shimizu; Ranjit R. Borude; Reiko Tanaka; Kenji Ishikawa; Osamu Oda; Hiroki Hosoe; Satoshi Ino; Yosuke Inoue; Masaru Hori

IEEE Transactions on Plasma Science   49 巻 ( 9 ) 頁： 2893 - 2900   2021年8月

Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H2 plasma at different substrate temperatures 査読有り

Shih-Nan Hsiao,Nikolay Britun,Thi-Thuy-Nga Nguyen,Takayoshi Tsutsumi,Kenji Ishikawa,Makoto Sekine,Masaru Hori,

Plasma Processes and Polymers   18 巻 ( 11 )   2021年8月

Evidence of near-the-limit energy cost NO formation in atmospheric spark discharge 査読有り

Nikolay Britun, Vladislav Gamaleev and Masaru Hori

Plasma Sources Science and Technology   30 巻 ( 8 )   2021年8月

Plasma-activated Ringer's lactate solution inhibits the cellular respiratory system in HeLa cells 査読有り

Hiromasa Tanaka,Shogo Maeda,Kae Nakamura,Hiroshi Hashizume,Kenji Ishikawa,Mikako Ito,Kinji Ohno,Masaaki Mizuno,Yashiro Motooka,Yasumasa Okazaki,Shinya Toyokuni,Hiroaki Kajiyama,Fumitaka Kikkawa,Masaru Hori

PLASMA PROCESSES AND POLYMERS   18 巻 ( 10 )   2021年7月

Non-thermal plasma-induced DMPO-OH yields hydrogen peroxide 査読有り

Yasumasa Okazaki HiromasaTanaka Ken-Ichiro Matsumoto Masaru Hori ShinyaToyokuni

Archives of Biochemistry and Biophysics   705 巻   2021年7月

Brain cell proliferation in adult rats after irradiation with nonequilibrium atmospheric pressure plasma 査読有り

Yamato Masanori, Tamura Yasuhisa, Tanaka Hiromasa, Ishikawa Kenji, Ikehara Yuzuru, Hori Masaru, Kataoka Yosky

Applied Physics Express   14 巻 ( 36 )   2021年7月

Cancer Treatments Using Low-Temperature Plasma 査読有り

Hiromasa Tanaka , Masaaki Mizuno , Kenji Ishikawa , Shinya Toyokuni , Hiroaki Kajiyama , Fumitaka Kikkawa , Masaru Hori

Current Medicinal Chemistry   28 巻 ( 41 ) 頁： 8549 - 8558   2021年6月

Lysosomal nitric oxide determines transition from autophagy to ferroptosis after exposure to plasma-activated Ringer's lactate 査読有り

LiJianga, Hao Zhenga, Qinying Lyua Shotaro Hayashi, Kotaro Satoa, Yoshitaka Sekido, Kae Nakamura, Hiromasa Tanaka, Kenji Ishikawa, Hiroaki Kajiyama, Masaaki Mizuno, Masaru Hori, ShinyaToyokuni

Redox Biology   43 巻   2021年4月

Hydrogen peroxide in lactate solutions irradiated by non-equilibrium atmospheric pressure plasma 査読有り

Yang Liu, Kenji Ishikawa, Camelia Miron, Hiroshi Hashizume, Hiromasa Tanaka and Masaru Hori

Plasma Sources Science and Technology   30 巻   2021年4月

Plasma-Treated Solutions (PTS) in Cancer Therapy 査読有り

Hiromasa Tanaka, Sander Bekeschus, Dayun Yan, Masaru Hori, Michael Keidar and Mounir Laroussi

Cancer   13 巻 ( 7 )   2021年4月

Differential data on the responsiveness of multiple cell types to cell death induced by non-thermal atmospheric pressure plasma-activated solutions 査読有り

Ko Eto, Chiaki Ishinada, Takuya Suemoto, Keiichiro Hyakutake, Hiromasa Tanaka, Masaru Hori

Data in Brief   36 巻   2021年3月

Preclinical Verification of the Efficacy and Safety of Aqueous Plasma for Ovarian Cancer Therapy 査読有り

Kae Nakamura, Nobuhisa Yoshikawa, Yuko Mizuno, Miwa Ito, Hiromasa Tanaka, Masaaki Mizuno, Shinya Toyokuni, Masaru Hori, Fumitaka Kikkawa and Hiroaki Kajiyama

Cancer   13 巻 ( 5 )   2021年3月

小特集 大気圧低温プラズマに対する細胞応答とがん治療への展開 ２．プラズマ照射溶液が誘発する細胞死 査読有り

田 中 宏 昌，堀 勝

プラズマ・核融合学会誌   97 巻 ( 3 ) 頁： 119 - 122   2021年3月

小特集 大気圧低温プラズマに対する細胞応答とがん治療への展開 １．はじめに 査読有り

田 中 宏 昌，堀 勝

プラズマ・核融合学会誌   97 巻 ( 3 ) 頁： 117 - 118   2021年3月

低温プラズマを用いたウイルスの不活性化（－ウイルス滅のプラズマ刃－） 査読有り

堀 勝，伊藤 昌文

応用物理学会 特別WEBコラム　新型コロナウィルス禍に学ぶ応用物理     2021年2月

Cyclic C4F8 and O2 plasma etching of TiO2 for high-aspect-ratio three-dimensional devices 査読有り

Tsubasa Imamura, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   60 巻 ( 3 )   2021年2月

A novel and distinctive mode of cell death revealed by using non-thermal atmospheric pressure plasma: The involvements of reactive oxygen species and the translation inhibitor Pdcd4 査読有り

Ko Eto, Chiaki Ishinada, Takuya Suemoto, Keiichiro Hyakutake, Hiromasa Tanaka, Masaru Hori

Chemico-Biological Interactions   338 巻   2021年2月

Identification of key neutral species in atmospheric‐pressure plasma for promoting proliferation of fibroblast cells 査読有り

Yuki Hori, Naoyuki Iwata, Vladislav Gamaleev, Jun‐Seok Oh, Tomiyasu Murata, Masaru Hori, Masafumi Ito

Plasma Processes and Polymers   18 巻 ( 4 )   2021年1月

L-Dehydroascorbate efficiently degrades non-thermal plasma-induced hydrogen peroxide 査読有り

Yasumasa Okazaki, Yuuri Ishidzu, Fumiya Itoa, Hiromasa Tanaka, Masaru Hori, Shinya Toyokuni

Archives of Biochemistry and Biophysics   700 巻   2021年1月

Effects of Carbon Nanowalls (CNWs) Substrates on Soft Ionization of Low-Molecular-Weight Organic Compounds in Surface-Assisted Laser Desorption/Ionization Mass Spectrometry (SALDI-MS) 査読有り

Ryusei Sakai, Tomonori Ichikawa, Hiroki Kondo , Kenji Ishikawa, Naohiro Shimizu, Takayuki Ohta, Mineo Hiramatsu, Masaru Hori

Nanomaterials    11 巻 ( 262 )   2021年1月

Growth inhibition effect on Trypanosoma brucei gambiense by the oxidative stress supplied from low-temperature plasma at atmospheric pressure 査読有り

Naoaki Yokoyama, Thillaiampalam Sivakumar, Sanae Ikehara, Yoshihiro Akimoto, Takashi Yamaguchi, Ken Wakai, Kenji Ishikawa, Masaru Hori, Tetsuji Shimizu, Hajime Sakakita and Yuzuru Ikehara

Japanese Journal of Applied Physics   60 巻 ( 2 )   2021年1月

Reduction in photon-induced interface defects by optimal pulse repetition rate in the pulse-modulated inductively coupled plasma 査読有り

Yasufumi Miyoshi, Kenji Ishikawa, Makoto Sekine, Masaru Hori and Tetsuya Tatsumi

Japanese Journal of Applied Physics   60 巻 ( 1 )   2020年12月

大気圧低温プラズマとバイオ技術応用 査読有り

堀　勝

応用物理　   89 巻 ( 12 ) 頁： 701-706   2020年12月

Inactivation mechanism of fungal spores through oxygen radicals in atmospheric-pressure plasma 査読有り

Masafumi Ito, Hiroshi Hashizume, Jun-Seok Oh, Kenji Ishikawa, Takayuki Ohta and Masaru Hori

Japanese Journal of Applied Physics   60 巻 ( 1 )   2020年12月

Influences of substrate temperatures on etch rates of PECVD-SiN thin films with a CF4/H2 plasma 査読有り

Shih-NanHsiao, Kazuya Nakane, Takayoshi Tsutsumi, KenjiI shikawa, Makoto Sekine, Masaru Hori

Applied Surface Science   542 巻   2020年11月

Selective etching of SiN against SiO2 and poly-Si films in hydrofluoroethane chemistry with a mixture of CH2FCHF2, O2, and Ar 査読有り

Shih-Nan Hsiao, Kenji Ishikawa, Toshio Hayashi, Jiwei Ni, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori

Applied Surface Science   541 巻   2020年11月

Novel Epitaxy for Nitride Semiconductors Using Plasma Technology 査読有り

Osamu Oda, Masaru Hori

physica status solidi (a)   218 巻 ( 1 )   2020年10月

Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H2/Ar plasma at atmospheric pressure 査読有り

Thi-Thuy-Nga Nguyen, Minoru Sasaki, Takayoshi Tsutsumi, Kenji Ishikawa & Masaru Hori

Scientific Reports   10 巻   2020年10月

Improvement of yield and grain quality by periodic cold plasma treatment with rice plants in a paddy field 査読有り

Hiroshi Hashizume Hidemi Kitano Hiroko Mizuno Akiko Abe Genki Yuasa Satoe Tohno Hiromasa Tanaka Kenji Ishikawa Shogo Matsumoto

Plasma Processes and Polymers   18 巻 ( 1 )   2020年10月

Roles of Atomic Nitrogen/Hydrogen in GaN Film Growth by Chemically Assisted Sputtering with Dual Plasma Sources 査読有り

Atsushi Tanide, Shohei Nakamura, Akira Horikoshi, Shigeru Takatsuji, Takahiro Kimura, Kazuo Kinose, Soichi Nadahara, Masazumi Nishikawa, Akinori Ebe, Kenji Ishikawa, Osamu Oda, and Masaru Hori

ACS omega   5 巻 ( 41 ) 頁： 26297-26956   2020年10月

Laser-induced-plasma-activated medium enables killing of HeLa cells 査読有り

Yukihiro Kurokawa, Keigo Takeda, Kenji Ishikawa, Hiromasa Tanaka and Masaru Hori

Applied Physics Express   13 巻 ( 10 )   2020年9月

Small size gold nanoparticles enhance apoptosis-induced by cold atmospheric plasma via depletion of intracellular GSH and modification of oxidative stress 査読有り

Mati Ur Rehman, Paras Jawaid, Qing Zhao, Masaki Misawa, Kenji Ishikawa, Masaru Hori, Tadamichi Shimizu, Jun ichi Saitoh, Kyo Noguchi, and Takashi Kondo

Cell Death Discovery   6 巻   2020年9月

Influence of chamber pressure on the crystal quality of homo-epitaxial GaN grown by radical-enhanced MOCVD (REMOCVD) 査読有り

Frank Wilson Amalraj, NaohiroShimizu, OsamuOda, KenjiIshikawa, MasaruHori

Journal of Crystal Growth   549 巻   2020年8月

Silver film etching using halogen gas plasma 査読有り

Toshiyuki Sasaki, Kenichi Yoshikawa, Kazuhito Furumoto, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine, and Masaru Hori

Journal of Vacuum Science & Technology A   38 巻 ( 5 ) 頁： 1-12   2020年8月

Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature temperature 査読有り

Hirotsugu Sugiura, Hiroki Kondo, Kimitaka Higuchi, Shigeo Arai, Ryo Hamaji, Takayoshi Tsutsumi, Kenji Ishikawa, Masaru Hori

Carbon   170 巻   頁： 93-99   2020年8月

Steering of surface discharges on Through-Glass-Vias (TGVs) combined with high-density nonequilibrium atmospheric pressure plasma generation 査読有り

Yoichiro Sato, Kaede Katsuno, Hidefumi Odaka, Nobuhiko Imajyo, Kenji Ishikawa and Masaru Hori

Journal of Physics D: Applied Physics   53 巻 ( 43 ) 頁： 1-11   2020年7月

Atomic nitrogen density measurements by actinometry method in the toroidal device NAGDIS-T 査読有り

Shin Kajita, Koji Asaoka, Hirohiko Tanaka, Ryosuke Nishio, Takayoshi Tsutsumi, Masaru Hori, and Noriyasu Ohno

Japanese Journal of Applied Physics   59 巻 ( 8 ) 頁： 1-6   2020年7月

Measurements of nitrogen atom density in a microwave-excited plasma jet produced under moderate 査読有り

Jaeho Kim, Keigo Takeda, Hirotomo Itagaki, Xue-lun Wang, Shingo Hirose, Hisato Ogiso, Tetsuji Shimizu, Naoto Kumagai, Takayoshi Tsutsumi, Hiroki Kondo, Masaru Hori, Hajime Sakakita

IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   15 巻 ( 9 )   2020年7月

Numerical analysis of coaxial dielectric barrier helium discharges: Three-stage mode transitions and internal bullet propagation 査読有り

Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi and Masaru Hori

Applied Physics Express   13 巻 ( 8 ) 頁： 1-5   2020年7月

Adjusted multiple gases in the plasma flow induce differential antitumor potentials of plasma activated solutions 査読有り

Kae Nakamura Nobuhisa Yoshikawa Masato Yoshihara Yoshiki Ikeda Akihiro Higashida Akihiro Niwa Takahiro Jindo Hiromasa Tanaka Kenji Ishikawa Masaaki Mizuno Shinya Toyokuni Masaru Hori Fumitaka Kikkawa Hiroaki Kajiyama

Plasma Processes and Polymers   17 巻 ( 10 )   2020年7月

In situ surface analysis of an ion-energy-dependent chlorination layer on GaN during cyclic etching using Ar+ ions and Cl radicals 査読有り

Masaki Hasegawa Takayoshi Tsutsumi, Atsushi Tanide, Shohei Nakamura, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

Journal of Vacuum Science & Technology A   38 巻 ( 4 ) 頁： 1-11   2020年6月

Study of the effect of normal load on friction coefficient and wear properties of CNx thin films 査読有り

Satyananda Kar, Bibhuti Bhusan Sahu, Hiroyuki Kousaka, Jeon Geon Han, and Masaru Hori

AIP Advances   10 巻 ( 6 ) 頁： 1-8   2020年6月

Atomic oxygen radical induced intracellular oxidization of mould spore 査読有り

Yuta Tanaka, Jun Seok Oh, Hiroshi Hashizume, Takayuki Ohta, Masashi Kato, Masaru Hori, Masafumi Ito

Plasma Processes and Polymers   17 巻 ( 10 )   2020年6月

Non-thermal plasma-activated lactate solution kills U251SP glioblastoma cells in an innate reductive manner with altered metabolism 査読有り

Kenji Ishikawa, Yugo Hosoi, Hiromasa Tanaka, Li Jiang, ShinyaToyokuni, Kae Nakamura, Hiroaki Kajiyama, Fumitaka Kikkawa, Masaaki Mizuno, Masaru Hori

Archives of Biochemistry and Biophysics   688 巻   頁： 1-9   2020年5月

In-plane modification of hexagonal boron nitride particles via plasma in solution 査読有り

Tsuyohito Ito, Taku Goto, Kenichi Inoue, Kenji Ishikawa, Hiroki Kondo, Masaru Hori, Yoshiki Shimizu, Yukiya Hakuta and Kazuo

Applied Physics Express   13 巻 ( 6 ) 頁： 1-3   2020年5月

Electronic properties and primarily dissociation channels of fluoromethane 査読有り

Toshio Hayashi, Kenji Ishikawa, Makoto Sekine and Masaru

Japanese Journal of Applied Physics   59 巻 ( SJ ) 頁： 1-12   2020年5月

Numerical simulations of stable, high-electron-density atmospheric pressure argon plasma under pin-to-plane electrode geometry: effects of applied voltage polarity 査読有り

Yosuke Sato, Kenji Ishikawa, Takayoshi Tsutsumi, Akio Ui1, Masato Akita, Shotaro Oka and Masaru

Journal of Physics D: Applied Physics   53 巻 ( 26 ) 頁： 1-14   2020年4月

Synthesis of carbon nanowalls on the surface of nanoporous alumina membranes by RI-PECVD method 査読有り

Yerassyl Yerlanuly, Dennis Christy, Ngo Van Nong, Hiroki Kondo, Balaussa Alpysbayeva, Renata Nemkayeva, Meruert Kadyr, Tlekkabul Ramazanov, Maratbek Gabdullin, Didar Batryshev, Masaru Hori

Applied Surface Science   523 巻   頁： 1-6   2020年4月

Characterization of a microsecond pulsed non-equilibrium atmospheric pressure Ar plasma using laser scattering and optical emission spectroscopy 査読有り

Fengdong JIA, Yong WU, Qi MIN, Maogen SU, Keigo TAKEDA, Kenji ISHIKAWA, Hiroki KONDO,Makoto SEKINE, Masaru HORI and Zhiping ZHONG

Plasma Science and Technology   22 巻 ( 6 ) 頁： 1-8   2020年4月

Generation and diagnostics of ambient air glow discharge in centimeter-order gaps 査読有り

Vladislav Gamaleev, Takayoshi Tsutsumi, Mineo Hiramatsu, Masafumi Ito, and Masaru Hori

IEEE Access   8 巻   頁： 72607 - 72619   2020年4月

Transparent elongation and compressive strain sensors based on aligned carbon nanowalls embedded in polyurethane

Slobodian Petr, Riha Pavel, Kondo Hiroki, Cvelbar Uros, Olejnik Robert, Matyas Jiri, Sekine Makoto, Hori Masaru

SENSORS AND ACTUATORS A-PHYSICAL   306 巻   2020年3月

Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition 査読有り

Naho Itagaki, Yuta Nakamura, Ryota Narishige, Keigo Takeda, Kunihiro Kamataki, Kazunori Koga, Masaru Hori & Masaharu Shiratani

Scientific Reports   10 巻   2020年3月

Electron and negative ions dynamics in a pulsed 100 MHz capacitive discharge produced in O2 and Ar/O2/C4F8 gas mixture 査読有り

N Sirse, T Tsutsumi, M Sekine, M Hori and A R Ellingboe

Plasma Sources Science and Technology   29 巻 ( 3 ) 頁： 1-   2020年3月

N-Graphene Nanowalls via Plasma Nitrogen Incorporation and Substitution: The Experimental Evidence 査読有り

Neelakandan M. Santhosh, Gregor Filipič, Eva Kovacevic, Andrea Jagodar, Johannes Berndt, Thomas Strunskus, Hiroki Kondo, Masaru Hori, Elena Tatarova & Uroš Cvelbar

Nano-Micro Letters   12 巻   頁： 1-17   2020年2月

Plasma-activated medium promotes autophagic cell death along with alteration of the mTOR pathway 査読有り

Nobuhisa Yoshikawa, Wenting Liu, Kae Nakamura, Kosuke Yoshida, Yoshiki Ikeda, Hiromasa Tanaka, Masaaki Mizuno, Shinya Toyokuni, Masaru Hori, Fumitaka Kikkawa & Hiroaki Kajiyama

Scientific Reports   10 巻   頁： 1-8   2020年1月

Oxygen radical based on non-thermal atmospheric pressure plasma alleviates ligninderived phenolic toxicity in yeast 査読有り

Shou Ito, Kiyota Sakai, Vladislav Gamaleev, Masafumi Ito, Masaru Hori, Masashi Kato, Motoyuki Shimizu

Biotechnology for Biofuels   13 巻   頁： 1-13   2020年1月

Scalable Treatment of Flowing Organic Liquids Using Ambient-Air Glow Discharge for Agricultural Applications 査読有り

Vladislav Gamaleev, Naoyuki Iwata, Ginji Ito, Masaru Hori, Mineo Hiramatsu and Masafumi Ito

Applied Sciences   10 巻 ( 3 ) 頁： 1-17   2020年1月

Synthesis of isolated carbon nanowalls via high-voltage nanosecond pulses in conjunction with CH4/H2 plasma enhanced chemical vapor deposition 査読有り

Tomonori Ichikawa, Naohiro Shimizu, Kenji Ishikawa, Mineo Hiramatsu, and Masaru Hori

Carbon   161 巻   頁： 403-412   2020年1月

Interaction of oxygen with polystyrene and polyethylene polymer films: A mechanistic study 査読有り

Yusuke Fukunaga, Roberto C. Longo, Peter L. G. Ventzek, Barton Lane, Alok Ranjan, Gyeong S. Hwang, Gregory Hartmann, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, and Masaru Hori

Journal of Applied Physics   127 巻 ( 2 )   2020年1月

Initial growth analysis of ALD Al2O3 film on hydrogen-terminated Si substrate via in situ XPS 査読有り

Hiroyuki Fukumizu, Makoto Sekine, Masaru Hori and Paul C. McIntyre

Japanese Journal of Applied Physics   59 巻 ( 1 ) 頁： 1-6   2020年1月

In-liquid plasma synthesis of nanographene with a mixture of methanol and 1-butanol 査読有り

Atsushi Ando, Kenji Ishikawa, Keigo Takeda, Takayuki Ohta, Masafumi Ito, Mineo Hiramatsu, Hiroki Kondo, Makoto Sekine, Masaru Hori

  Volume6 巻 ( Issue4 )   2019年12月

Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures 査読有り

Hirotsugu Sugiura, Yasuyuki Ohashi, Kenji Ishikawa, Hiroki Kondo, Toshiaki Kato, Toshiro Kaneko, Keigo Takeda, Takayoshi Tsutsumi, Toshio Hayashi, Makoto Sekine, Masaru Hori

Diamond & Related Materials   104 巻   頁： 1-10   2019年12月

Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate 査読有り

Yasuhiro Isobe, Takayuki Sakai, Kyoichi Suguro, Naoto Miyashita, Hiroki Kondo, Kenji Ishikawa, Amalraj Frank Wilson, Naohiro Shimizu, Osamu Oda, Makoto Sekine, and Masaru Hori

Journal of Vacuum Science & Technology B   37 巻 ( 6 )   2019年12月

Exosomal Analysis of ALK Rearrangements by Spin Column with Porous Glass Filter

Hatta T., Hase T., Ozawa N., Yogo N., Yukawa H., Tanaka H., Onoshima D., Sato M., Hori M., Baba Y., Hasegawa Y.

JOURNAL OF THORACIC ONCOLOGY   14 巻 ( 10 ) 頁： S676-S676   2019年10月

Oxidative stress-dependent and -independent death of glioblastoma cells induced by non-thermal plasma-exposed solutions 査読有り

Tanaka Hiromasa, Mizuno Masaaki, Katsumata Yuko, Ishikawa Kenji, Kondo Hiroki, Hashizume Hiroshi, Okazaki Yasumasa, Toyokuni Shinya, Nakamura Kae, Yoshikawa Nobuhisa, Kajiyama Hiroaki, Kikkawa Fumitaka, Hori Masaru

SCIENTIFIC REPORTS   9 巻   2019年9月

In Situ Monitoring of Surface Reactions during Atomic Layer Etching of Silicon Nitride Using Hydrogen Plasma and Fluorine Radicals 査読有り

Kazuya Nakane, René H. J. Vervuurt, Takayoshi Tsutsumi, Nobuyoshi Kobayashi, and Masaru Hori

ACS Applied Materials & Interfaces   11 巻 ( 40 )   2019年9月

Rapid thermal-cyclic atomic-layer etching of titanium nitride in CHF3/O-2 downstream plasma 査読有り

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Masaru Izawa, Kenji Ishikawa and Masaru Hori

Journal of Physics D: Applied Physics   52 巻 ( 47 )   2019年9月

Direct Treatment of Liquids Using Low-Current Arc in Ambient Air for Biomedical Applications 査読有り

Gamaleev Vladislav, Iwata Naoyuki, Hori Masaru, Hiramatsu Mineo, Ito Masafumi

APPLIED SCIENCES-BASEL   9 巻 ( 17 )   2019年8月

Self-limiting reactions of ammonium salt in CHF3/O2 downstream plasma for thermal-cyclic atomic layer etching of silicon nitride 査読有り

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi, Masaru Izawa, Tomonori Saeki, Kenji Ishikawa, and Masaru Hori

Journal of Vacuum Science & Technology A   37 巻 ( 5 )   2019年8月

Atmospheric Pressure Plasma-Treated Carbon Nanowalls' Surface-Assisted Laser Desorption/Ionization Time-of-Flight Mass Spectrometry (CNW-SALDI-MS) 査読有り

Takayuki Ohta , Hironori Ito , Kenji Ishikawa , Hiroki Kondo , Mineo Hiramatsu and Masaru Hori

Special Issue "Plasma Processing for Carbon-based Materials   5 巻 ( 3 )   2019年7月

l-Dehydroascorbic acid recycled by thiols efficiently scavenges non-thermal plasma-induced hydroxyl radicals 査読有り

Yasumasa Okazaki, Hiromasa Tanaka, Masaru Hori, Shinya Toyokuni

Archives of Biochemistry and Biophysics   669 巻   頁： 87-95   2019年7月

Review of methods for the mitigation of plasma-induced damage to low-dielectric-constant interlar dielectrics used for semiconductor logic device interconnects 査読有り

Hideshi Miyajima , Kenji Ishikawa, Makoto Sekine , Masaru Hori

Plasma Processes and Polymers   16 巻 ( 9 )   2019年6月

Investigation on the long-term bactericidal effect and chemical composition of radical-activated water 査読有り

Naoyuki Iwata, Vladislav Gamaleev, Jun-Seok Oh, Takayuki Ohta, Masaru Hori, Masafumi Ito

Plasma Processes and Polymers   16 巻 ( 10 )   2019年6月

Gene Expression of Osteoblast-like Cells on Carbon-Nanowall as Scaffolds during Incubation with Electrical Stimulation 査読有り

Tomonori Ichikawa, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Hiromasa Tanaka, Makoto Sekine, Masaru Hori

ACS Applied Bio Materials   2 巻 ( 8 )   2019年6月

Non-thermal plasma specifically kills oral squamous cell carcinoma cells in a catalytic Fe(II)-dependent manner 査読有り

Kotaro Sato, Lei Shi, Fumiya Ito, Yuuki Ohara, Yashiro Motooka, Hiromasa Tanaka, Masaaki Mizuno, Masaru Hori, Tasuku Hirayama, Hideharu Hibi and Shinya Toyokuni

Journal of Clinical Biochemistry and Nutrition   65 巻 ( 1 ) 頁： 8-15   2019年6月

Simultaneous Achievement of Antimicrobial Property and Plant Growth Promotion using Plasma Activated Benzoic Compound Solution 査読有り

Naoyuki Iwata, Vladislav Gamaleev, Hiroshi Hashizume, Jun-Seok Oh, Takayuki Ohta, Kenji Ishikawa, Masaru Hori, and Masafumi Ito

Plasma Processes and Polymers   16 巻 ( 8 )   2019年5月

Formation mechanism of sidewall striation in high-aspect-ratio hole etching 査読有り

Mitsuhiro Omura, Junichi Hashimoto, Takahiro Adachi, Yusuke Kondo, Masao Ishikawa, Junko Abe, Itsuko Sakai, Hisataka Hayashi, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   58 巻 ( SE )   2019年5月

Plasma-activated solution alters the morphological dynamics of supported lipid bilayers observed by high-speed atomic force microscopy 査読有り

Sotaro Yamaoka, Hiroki Kondo, Hiroshi Hashizume, Kenji Ishikawa, Hiromasa Tanaka and Masaru Hori

Applied Physics Express   12 巻 ( 6 )   2019年5月

Electronic properties and primarily dissociation channels of fluoroethane compounds 査読有り

Toshio Hayashi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   58 巻 ( SE )   2019年5月

プラズマプロセスにおける吸収分光計測の基礎

竹田圭吾、高島成剛、堀　勝

プラズマ・核融合学会誌   195 巻 ( 4 ) 頁： 180-186   2019年4月

Facile synthesis of SnO2-graphene composites employing nonthermal plasma and SnO2 nanoparticles-dispersed ethanol

Borude Ranjit R., Sugiura Hirotsugu, Ishikawa Kenji, Tsutsumi Takayoshi, Kondo Hiroki, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   52 巻 ( 17 )   2019年4月

Laser-drilling formation of through-glass-via (TGV) on polymer-laminated glass 査読有り

Yoichiro Sato, Nobuhiko Imajyo, Kenji Ishikawa, Rao Tummala, Masaru Hori

Journal of Materials Science: Materials in Electronics   30 巻 ( 11 ) 頁： pp10183-10190   2019年4月

Systematic diagnostics of the electrical, optical, and physicochemical characteristics of low-temperature atmospheric-pressure helium plasma sources

Takeda Keigo, Yamada Hiromasa, Ishikawa Kenji, Sakakita Hajime, Kim Jaeho, Ueda Masashi, Ikeda Jun-ichiro, Akimoto Yoshihiro, Kataoka Yosky, Yokoyama Naoaki, Ikehara Yuzuru, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   52 巻 ( 16 )   2019年4月

Effects of plasma shield plate design on epitaxial GaN films grown for large-sized wafers in radical-enhanced metalorganic chemical vapor deposition 査読有り

Yasuhiro Isobe, Takayuki Sakai, Naoharu Sugiyama, Ichiro Mizushima, Kyoichi Suguro, Naoto Miyashita, Yi Lu, Amalraj Frank Wilson, Dhasiyan Arun Kumar, Nobuyuki Ikarashi, Hiroki Kondo, Kenji Ishikawa, Naohiro Shimizu, Osamu Oda, Makoto Sekine, and Masaru Hori

Journal of Vacuum Science & Technology B   37 巻 ( 3 )   2019年4月

A 65-nm CMOS Fully Integrated Analysis Platform Using an On-Chip Vector Network Analyzer and a Transmission-Line-Based Detection Window for Analyzing Circulating Tumor Cell and Exosome

Niitsu Kiichi, Nakanishi Taiki, Murakami Shunya, Matsunaga Maya, Kobayashi Atsuki, Karim Nissar Mohammad, Ito Jun, Ozawa Naoya, Hase Tetsunari, Tanaka Hiromasa, Sato Mitsuo, Kondo Hiroki, Ishikawa Kenji, Odaka Hidefumi, Hasegawa Yoshinori, Hori Masaru, Nakazato Kazuo

IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS   13 巻 ( 2 ) 頁： 470-479   2019年4月

Effects of 3D structure on electrochemical oxygen reduction characteristics of Pt- nanoparticle-supported carbon nanowalls

Imai Shun, Naito Kenichi, Kondo Hiroki, Cho Hyung Jun, Ishikawa Kenji, Tsutsumi Takayoshi, Sekine Makoto, Hiramatsu Mineo, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   52 巻 ( 10 )   2019年3月

Chemical bonding structure in porous SiOC films (k<2.4) with high plasma-induced damage resistance 査読有り

Hideshi Miyajima, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

Micro and Nano Engineering   3 巻   頁： 1-6   2019年3月

Atomic layer etching of AlGaN using Cl-2 and Ar gas chemistry and UV damage evaluation

Fukumizu Hiroyuki, Sekine Makoto, Hori Masaru, Kanomaru Koji, Kikuchi Takuo

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   37 巻 ( 2 )   2019年3月

Effects of BCl3 addition to Cl-2 gas on etching characteristics of GaN at high temperature

Tanide Atsushi, Nakamura Shohei, Horikoshi Akira, Takatsuji Shigeru, Kohno Motohiro, Kinose Kazuo, Nadahara Soichi, Ishikawa Kenji, Sekine Makoto, Hori Masaru

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   37 巻 ( 2 )   2019年3月

Real-time control of a wafer temperature for uniform plasma process

T. Tsutsumi, Y. Fuknaga, K. Ishikawa, H. Kondo, M. Sekine, M. Hori

2018 International Symposium on Semiconductor Manufacturing (ISSM)     2019年2月

Non-thermal plasma-activated medium modified metabolomic profiles in the glycolysis of U251SP glioblastoma 査読有り

Naoyuki Kurake, Kenji Ishikawa, Hiromasa Tanaka, Hiroshi Hashizume, Kae Nakamura, Hiroaki Kajiyama, Shinya Toyokuni, Fumitaka Kikkawa, Masaaki Mizuno, Masaru Hori

Archives of Biochemistry and Biophysics   662 巻   頁： 83-92   2019年2月

Remotely floating wire-assisted generation of high-density atmospheric pressure plasma and SF6-added plasma etching of quartz glass

Thi-Thuy-Nga Nguyen, Sasaki Minoru, Odaka Hidefumi, Tsutsumi Takayoshi, Ishikawa Kenji, Hori Masaru

JOURNAL OF APPLIED PHYSICS   125 巻 ( 6 )   2019年2月

Control of sp2-C cluster incorporation of amorphous carbon films grown by H-radical-injection CH4/H2 plasma-enhanced chemical vapor deposition 査読有り

Hirotsugu Sugiura, Lingyun Jia, Yasuyuki Ohashi, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Toshio Hayashi, Keigo Takeda, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   58 巻 ( 3 )   2019年2月

Single-Step, Low-Temperature Simultaneous Formations and in Situ Binding of Tin Oxide Nanoparticles to Graphene Nanosheets by In-Liquid Plasma for Potential Applications in Gas Sensing and Lithium-Ion Batteries 査読有り

Ranjit R. Borude, Hirotsugu Sugiura, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Nobuyuki Ikarashi, and Masaru Hori

ACS Applied Nano Materials   2 巻 ( 2 ) 頁： 649-654   2019年2月

Adhesion enhancement and amine reduction using film redeposited at the interface of a stack of plasma-enhanced CVD dielectrics for Cu/low-k interconnects

Miyajima Hideshi, Watanabe Kei, Ishikawa Kenji, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   58 巻 ( 2 )   2019年2月

Hetero-epitaxial growth of a GaN film by the combination of magnetron sputtering with Ar/Cl-2 gas mixtures and a separate supply of nitrogen precursors from a high density radical source

Tanide Atsushi, Nakamura Shohei, Horikoshi Akira, Takatsuji Shigeru, Kohno Motohiro, Kinose Kazuo, Nadahara Soichi, Nishikawa Masazumi, Ebe Akinori, Ishikawa Kenji, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   58 巻 ( SA )   2019年2月

Narrow free-standing features fabricated by top-down self-limited trimming of organic materials using precisely temperature-controlled plasma etching system

Fukunaga Yusuke, Tsutsumi Takayoshi, Kondo Hiroki, Ishikawa Kenji, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   58 巻 ( 2 )   2019年2月

Effects of Ion Bombardment Energy Flux on Chemical Compositions and Structures of Hydrogenated Amorphous Carbon Films Grown by a Radical-Injection Plasma-Enhanced Chemical Vapor Deposition 査読有り

Hirotsugu Sugiura , Hiroki Kondo, Takayoshi Tsutsumi, Kenji Ishikawa and Masaru Hori

C-Journal of Carbon Research   5 巻 ( 1 )   2019年1月

Electrochemical Reaction in Hydrogen Peroxide and Structural Change of Platinum Nanoparticle-Supported Carbon Nanowalls Grown Using Plasma-Enhanced Chemical Vapor Deposition 査読有り

Masakazu Tomatsu 1, Mineo Hiramatsu, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine and Masaru Hori

Journal of Carbon Research   5 巻 ( 1 )   2019年1月

Effect of electrical stimulation on proliferation and bone-formation by osteoblast-like cells cultured on carbon nanowalls scaffolds 査読有り

Tomonori Ichikawa, Suiki Tanaka, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine and Masaru Hori

Applied Physics Express   12 巻 ( 2 )   2019年1月

Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma 査読有り

Ranjit R. Borude, Hirotsugu Sugiura, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Jeon Geon Han and Masaru Hori

Japanese Journal of Applied Physics   58 巻 ( SA )   2019年1月

Polyethylene terephthalate (PET) surface modification by VUV and neutral active species in remote oxygen or hydrogen plasmas 査読有り

Yan Zhang, Kenji Ishikawa, Miran Mozetič, Takayoshi Tsutsumi, Hiroki Kondo , Makoto Sekine, Masaru Hori

Plasma Processes and Polymers   16 巻 ( 6 )   2019年1月

Batch Fabrication of Nano-Gap Electrode Array Using Photo-Patterning and Resist UV-Curing 査読有り

Hai Minh Nguyer, Mako Kumeuchi, Shinya Kumagai, Kenji Ishikawa, Masaru Hori, Minoru Sasaki

IEEJ Transactions on Sensors and Micromachines   139 巻 ( 1 ) 頁： 27-28   2019年1月

Liquid dynamics in response to an impinging low-temperature plasma jet 査読有り

Timothy R. Brubaker, Kenji Ishikawa, Hiroki Kondo, Takayoshi Tsutsumi, Hiroshi Hashizume, Hiromasa Tanaka, Sean D. Knecht, Sven G. Bilen, and Masaru Hori

Journal of Physics D: Applied Physics   52 巻 ( 7 )   2018年12月

Pt nanoparticle-supported carbon nanowalls electrode with improved durability for fuel cell applications using C2F6/H2 plasma-enhanced chemical vapor deposition 査読有り

Shun Imai, Hiroki Kondo, Cho Hyungjun, Kenji Ishikawa, Takayoshi Tsutsumi, Makoto Sekine, Mineo Hiramatsu and Masaru Hori

Applied Physics Express   12 巻 ( 1 )   2018年12月

大気圧プラズマを用いたがん治療へ向けた基礎研究

田中宏昌、堀勝

腎とフリーラジカル　第13集     頁： 46-49   2018年11月

Effect of N2/H2 plasma on GaN substrate cleaning for homoepitaxial GaN growth by radical-enhanced metalorganic chemical vapor deposition (REMOCVD) 査読有り

Frank Wilson Amalraj, Arun Kumar Dhasiyan, Yi Lu1, Naohiro Shimizu, Osamu Oda, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, Nobuyuki Ikarashi, and Masaru Hori

AIP Advances   8 巻 ( 11 )   2018年11月

Oriented Carbon Nanostructures by Plasma Processing: Recent Advances and Future Challenges

Santhosh Neelakandan M., Filipic Gregor, Tatarova Elena, Baranov Oleg, Kondo Hiroki, Sekine Makoto, Hori Masaru, Ostrikov Kostya (Ken), Cvelbar Uros

MICROMACHINES   9 巻 ( 11 )   2018年11月

Time Evolution Of Reactive Oxygen Nitrogen Species in Plasma-Activated Essential Media and Water

Brubaker Timothy, Ishikawa Kenji, Takeda Keigo, Hashizume Hiroshi, Tanaka Hiromasa, Kondo Hiroki, Sekine Makoto, Hori Masaru

2017 IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS)     2018年10月

Molecular mechanisms of non-thermal plasma-induced effects in cancer cells 査読有り

Tanaka, Hiromasa; Mizuno, Masaaki; Ishikawa, Kenji; Toyokuni, Shinya; Kajiyama, Hiroaki; Kikkawa, Fumitaka; Hori, Masaru

Biological Chemistry     2018年10月

大気圧プラズマ処理による異種材料接合

近藤博基、堤隆嘉、石川健治、関根　誠、堀　勝　

化学工学（公益社団法人　化学工学会）   82 巻 ( 9 ) 頁： 487-490   2018年9月

Mechanism of asymmetric etched profiles in trimming process 査読有り

Nobuyuki Negishi, Masatoshi Miyake, Keigo Takeda, and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 10 )   2018年9月

Reaction mechanisms between chlorine plasma and a spin-on-type polymer mask for high-temperature plasma etching 査読有り

Yan Zhang, Masato Imamura, Kenji Ishikawa, Takayoshi Tsutsumi, Hiroki Kondo, Makoto Sekine, Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 10 )   2018年8月

New hopes for plasma-based cancer treatment 査読有り

Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Shinya Toyokuni, Hiroaki Kajiyama, Fumitaka Kikkawa, Masaru Hori

Plasma 2018   1 巻   頁： 150-155   2018年8月

Cytotoxic effects of plasma-irradiated fullerenol 査読有り

Daiki Kanno, Hiromasa Tanaka, Kenji Ishikawa, Hiroshi Hashizume and Masaru Hori

Journal of Physics D: Applied Physics   51 巻 ( 37 )   2018年8月

Effect of substrate temperature on sidewall erosion in high-aspect-ratio Si hole etching employing HBr/SF6/O2 plasma 査読有り

Itsuko Sakai, Katsunori Yahashi, Satoshi Shimonishi, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 9 )   2018年8月

Elevated-temperature etching of gallium nitride (GaN) in dual-frequency capacitively coupled plasma of CH4/H2 at 300-500°C 査読有り

Takashi Kako, Zecheng Liu, Kenji Ishikawa, Hiroki Kondo, Osamu Oda, Makoto Sekine, and Masaru Hori

Vacuum   156 巻   頁： 219-223   2018年7月

プラズマ技術概論

堀　勝

自動車技術   72 巻   頁： Ｐ12-17   2018年6月

Cell Deposition Microchip with Micropipette Control over Liquid Interface Motion 査読有り

Onoshima Daisuke, Hattori Yuya, Yukawa Hiroshi, Ishikawa Kenji, Hori Masaru, Baba Yoshinobu

CELL MEDICINE   10 巻   2018年5月

Imaging Differences between Neuromyelitis Optica Spectrum Disorders and Multiple Sclerosis: A Multi-Institutional Study in Japan 査読有り

Tatekawa H., Sakamoto S., Hori M., Kaichi Y., Kunimatsu A., Akazawa K., Miyasaka T., Oba H., Okubo T., Hasuo K., Yamada K., Taoka T., Doishita S., Shimono T., Miki Y.

AMERICAN JOURNAL OF NEURORADIOLOGY   39 巻 ( 7 ) 頁： 1239-1247   2018年5月

Effects of gas residence time of CH4/H2 on sp2 fraction of amorphous carbon films and dissociated methyl density during radical-injection plasma-enhanced chemical vapor deposition 査読有り

Hirotsugu Sugiura, Lingyun Jia, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Toshio Hayashi, Keigo Takeda, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 6s2 )   2018年5月

Low-autofluorescence fluoropolymer membrane filters for cell filtration 査読有り

Naoto Kihara, Daiki Kuboyama, Daisuke Onoshima, Kenji Ishikawa, Hiromasa Tanaka, Naoya Ozawa, Tetsunari Hase, Ryohei Koguchi, Hiroshi Yukawa, Hidefumi Odaka, Yoshinori Hasegawa, Yoshinobu Baba and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 6s2 )   2018年5月

Temperature dependence on plasma-induced damage and chemical reactions in GaN etching processes using chlorine plasma 査読有り

Zecheng Liu, Kenji Ishikawa, Masato Imamura, Takayoshi Tsutsumi, Hiroki Kondo, Osamu Oda, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 6s2 )   2018年5月

Plasma Activated Medium

Hiromasa Tanaka, and Masaru Hori

Comprehensive Clinical Plasma Medicine     頁： 431-440   2018年5月

Dissociative properties of 1,1,1,2-tetrafluoroethane obtained by computational chemistry 査読有り

Toshio Hayashi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 6s2 )   2018年4月

Impact of helium pressures in arc plasma synthesis on crystallinity of single-walled carbon nanotubes 査読有り

Atsushi Ando, Keigo Takeda, Takayuki Ohta, Masafumi Ito, Mineo Hiramatsu, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, Tomoko Suzuki, Sakae Inoue, Yoshinori Ando, and Masaru Hori

Japanese Journal of Applied Physics   57 巻 ( 6Ｓ2 )   2018年4月

Isotropic atomic level etching of tungsten using formation and desorption of tungsten fluoride 査読有り

Shinoda Kazunori, Miyoshi Nobuya, Kobayashi Hiroyuki, Hanaoka Yuko, Kawamura Kohei, Izawa Masaru, Ishikawa Kenji, Hori Masaru

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VII   10589 巻   2018年3月

Nanographene synthesized in triple-phase plasmas as a highly durable support of catalysts for polymer electrolyte fuel cells 査読有り

Amano Tomoki, Kondo Hiroki, Takeda Keigo, Ishikawa Kenji, Hiramatsu Mineo, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   57 巻 ( 4 )   2018年3月

Disruption of the pacemaker activity of interstitial cells of Cajal via nitric oxide contributes to postoperative ileus 査読有り

Kaji N., Nakayama S., Horiguchi K., Iino S., Ozaki H., Hori M.

NEUROGASTROENTEROLOGY AND MOTILITY   30 巻 ( 8 )   2018年3月

Reduced HeLa cell viability in methionine-containing cell culture medium irradiated with microwave-excited atmospheric-pressure plasma

Takahashi Yohei, Taki Yusuke, Takeda Keigo, Hashizume Hiroshi, Tanaka Hiromasa, Ishikawa Kenji, Hori Masaru

PLASMA PROCESSES AND POLYMERS   15 巻 ( 3 )   2018年3月

Glioblastoma Cell Lines Display Different Sensitivities to Plasma-Activated Medium

Tanaka Hiromasa, Mizuno Masaaki, Ishikawa Kenji, Takeda Keigo, Hashizume Hiroshi, Nakamura Kae, Utsumi Fumi, Kajiyama Hiroaki, Okazaki Yasumasa, Toyokuni Shinya, Akiyama Shinichi, Maruyama Shoichi, Kikkawa Fumitaka, Hori Masaru

IEEE TRANSACTIONS ON RADIATION AND PLASMA MEDICAL SCIENCES   2 巻 ( 2 ) 頁： 99-102   2018年3月

NHM-SMAP: spatially and temporally high-resolution nonhydrostatic atmospheric model coupled with detailed snow process model for Greenland Ice Sheet 査読有り

Niwano Masashi, Aoki Teruo, Hashimoto Akihiro, Matoba Sumito, Yamaguchi Satoru, Tanikawa Tomonori, Fujita Koji, Tsushima Akane, Iizuka Yoshinori, Shimada Rigen, Hori Masahiro

CRYOSPHERE   12 巻 ( 2 ) 頁： 635-655   2018年2月

Cytotoxicity of cancer HeLa cells sensitivity to normal MCF10A cells in cultivations with cell culture medium treated by microwave-excited atmospheric pressure plasmas 査読有り

Takahashi Yohei, Taki Yusuke, Takeda Keigo, Hashizume Hiroshi, Tanaka Hiromasa, Ishikawa Kenji, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   51 巻 ( 11 )   2018年2月

Oxygen reduction reaction properties of nitrogen-incorporated nanographenes synthesized using in-liquid plasma from mixture of ethanol and iron phthalocyanine 査読有り

Amano Tomoki, Kondo Hiroki, Takeda Keigo, Ishikawa Kenji, Hiramatsu Mineo, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   57 巻 ( 4 )   2018年2月

Free radical generation by non-equilibrium atmospheric pressure plasma in alcohol-water mixtures: an EPR-spin trapping study 査読有り

Uchiyama Hidefumi, Ishikawa Kenji, Zhao Qing-Li, Andocs Gabor, Nojima Nobuyuki, Takeda Keigo, Krishna Murali C., Ishijima Tatsuo, Matsuya Yuji, Hori Masaru, Noguchi Kyo, Kondo Takashi

JOURNAL OF PHYSICS D-APPLIED PHYSICS   51 巻 ( 9 )   2018年2月

Intraperitoneal Treatment With Plasma-Activated Liquid Inhibits Peritoneal Metastasis In Ovarian Cancer Mouse Model 査読有り

Kae Nakamura, Hiroaki Kajiyama, Yang Peng, Fumi Utsumi, Nobuhisa Yoshikawa, Hiromasa Tanaka, Masaaki Mizuno, Shinya Toyokuni, Masaru Hori, and Fumitaka Kikkawa

Clinical Plasma Medicine   9 巻   頁： 47-48   2018年2月

Plasma-Activated Medium Inhibites Metastatic Activities Of Ovarian Cancer Cells In Vitro Via Repressing Mapk Pathway 査読有り

Yang Peng, Hiroaki Kajiyama, Kae Nakamura, Fumi Utsumi, Nobuhisa Yoshikawa, Hiromasa Tanaka, Masaaki Mizuno, Shinya Toyokuni, Masaru Hori, and Fumitaka Kikkawa

Clinical Plasma Medicine   9 巻   頁： 41-42   2018年2月

Similarities And Differences In The Cellular Resposnses Between Plasma-Activated Medium-Treated Glioblastomas And Plasma-Activated Ringer's Lactate Solution-Treated Glioblastomas 査読有り

Hiromasa Tanaka, Masaaki Mizuno, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Makoto Sekine, Hiroshi Hashizume, Kae Nakamura, Hiroaki Kajiyama, Yasumasa Okazaki, Shinya Toyokuni, Shinichi Akiyama, Shoichi Maruyama, Fumitaka Kikkawa, and Masaru Hori

Clinical Plasma Medicine   9 巻   頁： 42-43   2018年2月

Current status and future prospects of agricultural applications using atmospheric-pressure plasma technologies

Ito Masafumi, Oh Jun-Seok, Ohta Takayuki, Shiratani Masaharu, Hori Masaru

PLASMA PROCESSES AND POLYMERS   15 巻 ( 2 )   2018年2月

Facile fabrication of a poly(ethylene terephthalate) membrane filter with precise arrangement of through-holes 査読有り

Kihara Naoto, Odaka Hidefumi, Kuboyama Daiki, Onoshima Daisuke, Ishikawa Kenji, Baba Yoshinobu, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   57 巻 ( 3 )   2018年1月

Effect of Plasma-Activated Lactated Ringer's Solution on Pancreatic Cancer Cells In Vitro and In Vivo 査読有り

Sato Yusuke, Yamada Suguru, Takeda Shigeomi, Hattori Norifumi, Nakamura Kae, Tanaka Hiromasa, Mizuno Masaaki, Hori Masaru, Kodera Yasuhiro

ANNALS OF SURGICAL ONCOLOGY   25 巻 ( 1 ) 頁： 299-307   2018年1月

Nanographene synthesis employing in-liquid plasmas with alcohols or hydrocarbons 査読有り

Atsushi Ando, Kenji Ishikawa, Hiroki Kondo, Takayoshi Tsutsumi, Keigo Takeda, Takayuki Ohta, Masafumi Ito, Mineo Hiramatsu, Makoto Sekine and Masaru Hori

The Japan Society of Applied Physics   57 巻 ( 2 )   2018年1月

Nanographene synthesis employing in-liquid plasmas with alcohols or hydrocarbons 査読有り

Ando Atsushi, Ishikawa Kenji, Kondo Hiroki, Tsutsumi Takayoshi, Takeda Keigo, Ohta Takayuki, Ito Masafumi, Hiramatsu Mineo, Sekine Makoto, Hori Masaru

JAPANESE JOURNAL OF APPLIED PHYSICS   57 巻 ( 2 )   2018年1月

Electron impact ionization of perfluoro-methyl-vinyl-ether C3F6O

Kondo Yusuke, Ishikawa Kenji, Hayashi Toshio, Sekine Makoto, Hori Masaru

PLASMA SOURCES SCIENCE & TECHNOLOGY   27 巻 ( 1 )   2018年1月

Rapid growth of micron-sized graphene flakes using in-liquid plasma employing iron phthalocyanine-added ethanol 査読有り

Tomoki Amano, Hiroki Kondo, Kenji Ishikawa, Takayoshi Tsutsumi, Keigo Takeda, Mineo Hiramatsu, Makoto Sekine and Masaru Hori

The Japan Society of Applied Physics   11 巻 ( 1 )   2017年12月

Plasma-activated medium (PAM) kills human cancer-initiating cells 査読有り

Ikeda Jun-ichiro, Tanaka Hiromasa, Ishikawa Kenji, Sakakita Hajime, Ikehara Yuzuru, Hori Masaru

PATHOLOGY INTERNATIONAL   68 巻 ( 1 ) 頁： 23-30   2017年12月

Dynamic analysis of reactive oxygen nitrogen species in plasma-activated culture medium by UV absorption spectroscopy 査読有り

Timothy Ryan Brubaker, Kenji Ishikawa, Keigo Takeda, Jun-Seok Oh, Hiroki KONDO, Hiroshi Hashizume, Hiromasa Tanaka, Sean David Knecht, Sven Bilén, and Masaru Hori

Journal of Applied Physics   122 巻 ( 21 )   2017年12月

Oxygen-radical pretreatment promotes cellulose degradation by cellulolytic enzymes 査読有り

Kiyota Sakai, Saki Kojiya, Junya Kamijo, Yuta Tanaka, Kenta Tanaka, Masahiro Maebayashi, Jun-Seok Oh, Masafumi Ito, Masaru Hori, Motoyuki Shimizu, and Masashi Kato

Biotechnology for Biofuels   10 巻   2017年12月

Abstract 18: Therapeutic potential of cold physical plasma in palliative cancer care: Introduction and perspectives 査読有り

Christian Seebauer, Thomas von Woedtke, Klaus-Dieter Weltmann, Vandana Miller, Masaru Hori and Hans-Robert Metelmann

CLINICAL CANCER RESEARCH 23(23 supplement) pp. 18 (December, 2017)     2017年12月

Intracellular responses to reactive oxygen and nitrogen species, and lipid peroxidation: Induction of apoptotic death in HeLa cells following cultivation in non-equilibrium (cold) atmospheric pressure plasma-activated medium 査読有り

Ryo Furuta, Naoyuki Kurake, Kenji Ishikawa, Keigo Takeda, Hiromasa Tanaka, Hiroshi Hashizume, Hiroki Kondo, Makoto Sekine and Masaru Hori

Plasma Process and Polymers   14 巻 ( 11 )   2017年11月

Dependence of absolute photon flux on infrared absorbance alteration and surface roughness on photoresist polymers irradiated with vacuum ultraviolet photons emitted from HBr plasma 査読有り

Yan Zhang, Takuya Takeuchi, Kenji Ishikawa, Toshio Hayashi, Keigo Takeda, Makoto Sekine, and Masaru Hori

Japanese Journal of Applied Physics   56 巻 ( 12 )   2017年11月

Selective production of reactive oxygen and nitrogen species in the plasma-treated water by using a nonthermal high-frequency plasma jet 査読有り

Uchida Giichiro, Takenaka Kosuke, Takeda Keigo, Ishikawa Kenji, Hori Masaru, Setsuhara Yuichi

JAPANESE JOURNAL OF APPLIED PHYSICS   57 巻 ( 1 )   2017年10月

Crystallization of calcium oxalate dihydrate in a buffered calcium-containing glucose 査読有り

Naoyuki Kurake, Hiromasa Tanaka, Kenji Ishikawa, Kae Nakamura, Hiroaki Kajiyama,

Journal of Applied Physics   122 巻 ( 14 )   2017年10月

大気圧プラズマ処理における殺菌・医療・バイオ分野への応用

橋爪博司、田中宏昌、堀勝、伊藤昌文

工業材料   Vol.65. 巻 ( No.10 ) 頁： 27-30   2017年10月

Clinical Experience with Cold Plasma in the Treatment of Locally Advanced Head and Neck Cancer 査読有り

Hans-Robert Metelmann, Christian Seebauer,Vandana Miller, Alexander Fridman, Georg Bauer, David B.Graves, Jean-Michel Pouvesle Rico Rutkowski, Matthias Schuster Sander Bekeschus, Kristian Wende, Kai Masur, Sybille Hasse, Torsten Gerling, Masaru Hori, Hiromasa Tanaka, Eun Ha Choi, Klaus-Dieter Weltmann, and Thomas von Woedtke

Clinical Plasma Medicine,     2017年9月

Thermal Cyclic Atomic-Level Etching of Nitride Films: A Novel Way for Atomic-Scale Nanofabrication 査読有り

Kazunori Shinodaa, Nobuya Miyoshia, Hiroyuki Kobayashia, Masaru Kuriharaa, Masaru Izawa, Kenji Ishikawa, and Masaru Hori

ECS Transactions     2017年9月

Cold atmospheric helium plasma causes synergistic enhancement in cell death with hyperthermia and an additive enhancement with radiation 査読有り

Moniruzzaman Rohan, Qing-Li Zhao, Paras Jawaid, Keigo Takeda, Kenji Ishikawa, Masaru Hori, Kei Tomihara, Noguchi Kyo, Takashi Kondo, and Makoto Noguchi

Scientific Reports   7 巻   2017年9月

Surface roughening of photoresist after change of the photon/radical and ion treatment sequence 査読有り

Yan Zhanga, Takuya Takeuchi, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Makoto Sekine, and Masaru Hori

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films J.   135 巻 ( 6 )   2017年9月

High-durability catalytic electrode composed of Pt nanoparticle-supported carbon nanowalls synthesized by radical-injection plasma-enhanced chemical vapor deposition 査読有り

Shun Imai, Hiroki Kondo, Hyungjun Cho, Hiroyuki Kano, Kenji Ishikawa, Makoto Sekine, Mineo Hiramatsu, Masafumi Ito, Masaru Hori

Journal of Physics D: Applied Physics,   Vol 50 巻 ( 40 )   2017年9月

Thermally enhanced formation of photon-induced damage on GaN films in Cl2 plasma 査読有り

Zecheng Liu*, Atsuki Asano, Masato Imamura, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo,

Japanese Journal of Applied Physics   56 巻   2017年8月

Palliative Plasmabehandlung von Kopf-Hals-Tumoren und kurative Konzepte

Christian Seebauer, Hiromasa Tanaka, Masaru Hori, Hans Robert Metelmann

Plasmamedizin (in German)     頁： 99-109   2017年8月

The 2017 Plasma Roadmap: Low temperature plasma science and technology

Adamovich I., Baalrud S. D., Bogaerts A., Bruggeman P. J., Cappelli M., Colombo V., Czarnetzki U., Ebert U., Eden J. G., Favia P., Graves D. B., Hamaguchi S., Hieftje G., Hori M., Kaganovich I. D., Kortshagen U., Kushner M. J., Mason N. J., Mazouffre S., Thagard S. Mededovic, Metelmann H-R, Mizuno A., Moreau E., Murphy A. B., Niemira B. A., Oehrlein G. S., Petrovic Z. Lj, Pitchford L. C., Pu Y-K, Rauf S., Sakai O., Samukawa S., Starikovskaia S., Tennyson J., Terashima K., Turner M. M., van de Sanden M. C. M., Vardelle A.

JOURNAL OF PHYSICS D-APPLIED PHYSICS   50 巻 ( 32 )   2017年8月

Reduction of chlorine radical chemical etching of GaN under simultaneous plasma-emitted photon irradiation 査読有り

Zecheng Liu, Masato Imamura, Atsuki Asano, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Osamu Oda, Makoto Sekine, and Masaru Hori

Applied Physics Express   10 巻   2017年8月

Lipid Droplets Exhaustion with Caspases Activation in HeLa Cells Cultured in Plasma-Activated Medium (PAM) Observed By Multiplex Coherent Anti-Stokes Raman Scattering (CARS) Microscopy 査読有り

Ryo Furuta, Naoyuki Kurake, Keigo Takeda, Kenji Ishikawa, Takayuki Ohta, Masafumi Ito, Hiroshi Hashizume, Hiromasa Tanaka, Hiroki Kondo, Makoto Sekine and Masaru Hori

Biointerphases   12 巻 ( 3 )   2017年8月

Measurement of F-, O- and CF3- densities in 60 and 100 MHz asymmetric capacitively coupled plasma discharge produced in an Ar/O2/C4F8 gas mixture 査読有り

N Sirse, T Tsutsumi, M Sekine, M Hori and A R Ellingboe

Journal of Physics D: Applied Physics   50 巻 ( 33 )   2017年7月

Novel Intraperitoneal Treatment With Non-Thermal Plasma-Activated Medium Inhibits Metastatic Potential of Ovarian Cancer Cells 査読有り

Kae Nakamura, Yang Peng, Fumi Utsumi, Hiromasa Tanaka, Masaaki Mizuno, Shinya Toyokuni, Masaru Hori, Fumitaka Kikkawa & Hiroaki Kajiyama

Scientific Reports   7 巻   2017年7月

State of the art in medical applications using non-thermal atmospheric pressure plasma 査読有り

Hiromasa Tanaka, Kenji Ishikawa, Masaaki Mizuno, Shinya Toyokuni, Hiroaki Kajiyama, Fumitaka Kikkawa, Hans-Robert Metelmann, Masaru Hori

Plasma Physics, Association of Asia Pacific Physical Societies 2017   1 巻   2017年7月

Non-thermal plasma induces a stress response in mesothelioma cells resulting in increased endocytosis, lysosome biogenesis and autophagy 査読有り

Lei Shi, Fumiya Ito, Yue Wang, Yasumasa Okazaki, Hiromasa Tanaka, Masaaki Mizuno, Masaru Hori, Tasuku Hirayama, Hideko Nagasawa, Des R. Richardson, Shinya Toyokuni

Free Rad. Biol. Med   108 巻   頁： 904-917   2017年7月

Temperature dependence of protection layer formation on organic trench sidewall in H2/N2 plasma etching with control of substrate temperature 査読有り

Yusuke Fukunaga, Takayoshi Tsutsumi, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, and Masaru Hori

Japanese Journal of Applied Physics   56 巻 ( 21 )   2017年6月

Intracellular-Molecular Changes in Plasma-irradiated Budding Yeast Cells Studied Using Multiplex Coherent Anti-Stokes Raman Scattering Microscopy 査読有り

Ryo Furuta, Naoyuki Kurake, Kenji Ishikawa, Keigo Takeda, Hiroshi Hashizume, Hiroki Kondo, Takayuki Ohta, Masafumi Ito, Makoto, Sekine, and Masaru Hori

Physical Chemistry Chemical Physics   19 巻 ( 21 )   2017年6月

Hydrogen peroxide sensor based on carbon nanowalls grown by plasma-enhanced chemical vapor deposition 査読有り

Masakazu Tomatsu, Mineo Hiramatsu, John S. Foord, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Keigo Takeda and Masaru Hori

Journal of Applied Physics   56 巻 ( 6S2 )   2017年6月

Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions? 査読有り

K. Ishikawa, K. Karahashi, T. Ichiki, J. P. Chang, S. M. George, W. M. M. Kessels, H. J. Lee, S. Tinck, J. H. Um, K. Kinoshita

Japanese Journal of Applied Physics   56 巻 ( 6S2 )   2017年6月

Micro-Coordination of Pacemaker Potentials in the Intestine of the Mouse

Morishita Hirotaka, Iwata Naoko, Takai Chiho, Mochizuki Naoto, Kaji Noriyuki, Hori Masatoshi, Kajioka Shunichi, Nakayama Shinsuke

GASTROENTEROLOGY   152 巻 ( 8 ) 頁： 1831-+   2017年6月

Electron behaviors in afterglow of synchronized dc-imposed pulsed fluorocarbon-based plasmas 査読有り

Toshinari Ueyama, Yusuke Fukunaga, Takayoshi Tsutsumi, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Manabu Iwata, Yoshinobu Ohya, Hideo Sugai, and Masaru Hori

Journal of Applied Physics   56 巻 ( 6S2 )   2017年5月

Advanced Plasma Etching Processing: Atomic Layer Etching for Nanoscale Devices 査読有り

Takayoshi Tsutsumi, M. Zaitsu, Akiko Kobayashi, N. Kobayashi, and Masaru Hori

ECS Transactions   77 巻 ( 3 )   2017年5月

Growth of InN firms by radical-enhanced metal organic chemical vapor deposition at a low temperature of 200 °C 査読有り

S. Takai, Y. Lu, O. Oda, K. Takeda, H. Kondo, K. Ishikawa, M. Sekine and M. Hori

Journal of Applied Physics   56 巻 ( 6S2 )   2017年5月

電子スピン共鳴法を活用したプラズマバイオ反応プロセスの診断

石川健治　近藤隆　竹田圭吾　呉準席　橋爪博司　田中宏昌　近藤博基　太田貴之　伊藤昌文　関根誠　堀勝

プラズマ・核融合学会誌   93 巻 ( 5 ) 頁： 246-252   2017年5月

Selective atomic-level etching using two heating procedures, infrared irradiation and ion bombardment, for next-generation semiconductor device manufacturing

Shinoda K., Miyoshi N., Kobayashi H., Miura M., Kurihara M., Maeda K., Negishi N., Sonoda Y., Tanaka M., Yasui N., Izawa M., Ishii Y., Okuma K., Saldana T., Manos J., Ishikawa K., Hori M.

JOURNAL OF PHYSICS D-APPLIED PHYSICS   50 巻 ( 19 )   2017年5月

Intraperitoneal Administration of Plasma-Activated Medium: Proposal of a Novel Treatment Option for Peritoneal Metastasis From Gastric Cancer 査読有り

Shigeomi Takeda, Suguru Yamada, Norifumi Hattori, Kae Nakamura, Hiromasa Tanaka, Hiroaki Kajiyama, Mitsuro Kanda, Daisuke Kobayashi, Chie Tanaka, Tsutomu Fujii, Michitaka Fujiwara, Masaaki Mizuno, Masaru Hori, Yasuhiro Kodera

Annals of Surgical Oncology   24 巻 ( 5 )   2017年5月

Effect of plasma-activated medium on the decrease of tumorigenic population in lymphoma 査読有り

N. Wada, J. Ikeda, H. Tanaka, H. Sakakita, M. Hori, Y. Ikehara, E. Morii

Pathology - Researchand Practice   213 巻   2017年4月

Bactericidal pathway of Escherichia coli in buffered saline treated with oxygen radicals 査読有り

Tsuyoshi Kobayashi, Natsumi Iwata, Jun-Seok Oh, Hiroshi Hashizume, Takayuki Ohta, Keigo Takeda, Kenji Ishikawa, 20Masaru Hori, and Masafumi Ito

J. Phys. D: Appl. Phys   50 巻 ( 15 )   2017年4月

Absolute density of precursor SiH3 radicals and H atoms in H2-diluted SiH4 gas plasma for deposition of microcrystalline silicon films 査読有り

Yusuke Abe , Kenji Ishikawa , Keigo Takeda , Takayoshi Tsutsumi , Atsushi Fukushima , Hiroki KONDO , Makoto Sekine , Masaru Hori

Journal of Physics D: Applied Physics   50 巻 ( 19 )   2017年4月

Spatial distributions of O, N, NO, OH and vacuum ultraviolet light along gas flow direction in an AC-excited atmospheric pressure Ar plasma jet generated in open air 査読有り

Keigo Takeda, Kenji Ishikawa, Hiromasa Tanaka, Makoto Sekine, and Masaru Hori

Journal of Physics D: Applied Physics   50 巻 ( 19 )   2017年4月

Investigation of the radially resolved oxygen dissociation degree and local mean electron energy in oxygen plasmas in contact with different surface materials 査読有り

T. Tsutsumi, A. Greb, A. R. Gibson, M. Hori, D. OConnell, T. Gans

Journal of Physics D: Applied Physics   50 巻 ( 19 )   2017年4月

Bactericidal pathway of Escherichia coli in buffered saline treated with oxygen radicals 査読有り

Tsuyoshi Kobayashi, Natsumi Iwata, Jun-Seok Oh, Hiroshi Hahizume, Takayuki Ohta, Keigo Takeda, Kenji Ishikawa, Masaru Hori and Masafumi Ito

Journal of Physics D: Applied Physics   50 巻 ( 15 )   2017年3月

Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas 査読有り

Yoshinobu Ohya, Kenji Ishikawa, Tatsuya Komuro, Tsuyoshi Yamaguchi, Keigo Takeda, Hiroki Kondo, Makoto Sekine and Masaru Hori

Journal of Physics D: Applied Physics   50 巻 ( 15 )   2017年3月

Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas 査読有り

Ohya Yoshinobu, Ishikawa Kenji, Komuro Tatsuya, Yamaguchi Tsuyoshi, Takeda Keigo, Kondo Hiroki, Sekine Makoto, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   50 巻 ( 15 )   2017年3月

Effects of center dot OH and center dot NO radicals in the aqueous phase on H2O2 and NO2- generated in plasma-activated medium

Kurake Naoyuki, Tanaka Hiromasa, Ishikawa Kenji, Takeda Keigo, Hashizume Hiroshi, Nakamura Kae, Kajiyama Hiroaki, Kondo Takashi, Kikkawa Fumitaka, Mizuno Masaaki, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   50 巻 ( 15 )   2017年3月

Effects of OH and NO radicals in the aqueous phase on H2O2 and NO2-generated in plasma-activated medium 査読有り

Naoyuki Kurake, Hiromasa Tanaka, Kenji Ishikawa, Keigo Takeda, Hiroshi Hashizume, Kae Nakamura, Hiroaki Kajiyama, Takashi Kondo, Fumitaka Kikkawa, Masaaki Mizuno and Masaru Hori

Journal of Physics D: Applied Physics   50 巻 ( 15 )   2017年3月

Postpartum atypical hemolytic uremic syndrome with complement factor H mutation complicated by reversible cerebrovascular constriction syndrome successfully treated with eculizumab 査読有り

Yamaguchi Makoto, Hori Mayuko, Hiroshi Nagaya, Maruyama Shoichi

THROMBOSIS RESEARCH   151 巻   頁： 79-81   2017年3月

Behavior of absolute densities of atomic oxygen in the gas phase near an object surface in an AC-excited atmospheric pressure He plasma jet 査読有り

Keigo Takeda, Takumi Kumakura, Kenji Ishikawa, Hiromasa Tanaka, Makoto Sekine and Masaru Hori

Applied Physics Express   10 巻 ( 3 )   2017年2月

Characteristics of optical emissions of arc plasma processing for high-rate synthesis of highly crystalline single-walled carbon nanotubes 査読有り

A. Ando, K. Takeda, T. Ohta, M. Ito, M. Hiramatsu, K. Ishikawa, H. Kondo, M. Sekine, T. Suzuki, S. Inoue, Y. Ando, M. Hori

Japanese Journal of Applied Physics   56 巻 ( 3 )   2017年2月

Investigation of effects of ion energies on both plasma-induced damage and surface morphologies and optimization of high-temperature Cl2 plasma etching of GaN 査読有り

Zecheng Liu, Jialin Pan, Atsuki Asano, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo, Osamu Oda, Makoto Sekine and Masaru Hori

"Japanese Journal of Applied   56 巻   2017年1月

Absolute density of precursor SiH3 radicals and H atoms in H2-diluted SiH4 gas plasma for deposition of microcrystalline silicon films

Yusuke Abe , Kenji Ishikawa , Keigo Takeda , Takayoshi Tsutsumi , Atsushi Fukushima , Hiroki KONDO , Makoto Sekine , Masaru Hori

Applied Physics Letters (2017)     2017年1月

Densities and Surface Reaction Probabilities of Oxygen and Nitrogen Atoms During Sputter Deposition of ZnInON on ZnO 査読有り

Matsushima Koichi, Ide Tomoaki, Takeda Keigo, Hori Masaru, Yamashita Daisuke, Seo Hyunwoong, Koga Kazunori, Shiratani Masaharu, Itagaki Naho

IEEE TRANSACTIONS ON PLASMA SCIENCE   45 巻 ( 2 ) 頁： 323-327   2017年1月

Intraperitoneal Administration of Plasma-Activated Medium: Proposal of a Novel Treatment Option for Peritoneal Metastasis From Gastric Cancer 査読有り

Shigeomi Takeda, Suguru Yamada, Norifumi Hattori, Kae Nakamura, Hiromasa Tanaka, Hiroaki Kajiyama, Mitsuro Kanda, Daisuke Kobayashi, Chie Tanaka, Tsutomu Fujii, Michitaka Fujiwara, Masaaki Mizuno, Masaru Hori, Yasuhiro Kodera

Annals of Surgical Oncology   24 巻 ( 5 ) 頁： 1-7   2017年1月

Annual shell growth pattern of the Stimpson's hard clam Mercenaria stimpsoni as revealed by sclerochronological and oxygen stable isotope measurements

Kubota Kaoru, Shirai Kotaro, Murakami-Sugihara Naoko, Seike Koji, Hori Masako, Tanabe Kazushige

PALAEOGEOGRAPHY PALAEOCLIMATOLOGY PALAEOECOLOGY   465 巻   頁： 307-315   2017年1月

Medical applications of non-thermal atmospheric pressure plasma

Tanaka Hiromasa, Hori Masaru

JOURNAL OF CLINICAL BIOCHEMISTRY AND NUTRITION   60 巻 ( 1 ) 頁： 29-32   2017年1月

Thermal Cyclic Atomic-Level Etching of Nitride Films: A Novel Way for Atomic-Scale Nanofabrication

Shinoda K., Miyoshi N., Kobayashi H., Kurihara M., Izawa M., Ishikawa K., Hori M.

ATOMIC LAYER DEPOSITION APPLICATIONS 13   80 巻 ( 3 ) 頁： 3-14   2017年

Plasma-inspired biomaterials 査読有り

Cvelbar Uros, Canal Cristina, Hori Masaru

JOURNAL OF PHYSICS D-APPLIED PHYSICS   50 巻 ( 4 )   2016年12月

Medical applications of non-thermal atmospheric pressure plasma

Hiromasa Tanaka, Masaru Hori

J. Clin. Biochem. Nutr.   60 巻 ( 1 ) 頁： 29-32   2016年12月

Future perspective of strategic non-thermal plasma therapy for cancer treatment

Hiroaki Kajiyama, fumi Utsumi, Kae Nakamura, Hiromasa Tanaka, Shinya Toyokuni, Masaru Hori, Fumitaka Kikkawa

J. Clin. Biochem. Nutr.   60 巻 ( 1 ) 頁： 33-38   2016年12月

Atomic layer etching of SiO2 by alternating an O2 plasma with fluorocarbon film deposition

Takayoshi Tsutsumi, Hiroki Kondo, Masaru Hori, Masaru Zaitsu, Akiko Kobayashi, Toshihisa Nozawa, Nobuyoshi Kobayashi

Journal of Vacuum Science & Technology   35 巻   2016年11月

Non-Thermal atmospheric pressure plasma activated lactate in Ringer's solution for anti-tumor effects

H.Tanaka, K.Nakamura, M.Mizuno, K.Ishikawa, K.Takeda, h.Kajiyama, F.Utsumi, F.Kikkawa, M.Hori

Scientific Report   35 巻   2016年11月

Effects of assisted magnetic field to an atomospheric-pressure plasma jet on radical generation at the plasma-surface interface and bactericidal function 査読有り

Chih-Tung Liu, Takumi Kumakura, Kenji Ishikawa, Hiroshi Hashizume, Keigo Takeda, Masafumi Ito, Masaru Hori, Jong-Shinn Wu

Plasam Source Science and Technology   25 巻 ( 6 )   2016年10月

Cell survival of glioblastoma grown in medium containing hydrogen peroxide and/or nitrite, or in plasma-activated medium

Naoyuki Kurake,Hiromasa Tanaka, Kenji Ishikawa, Takashi Kondo, Makoto Sekine, Kae Nakamura, Hiroaki Kajiyama, Fumitaka Kikkawa, Masaaki Mizuno, Masaru Hori

Archives of Biochemistry and Biophysics   605 巻   頁： 102-108   2016年9月

Low temperature plasma processing for cell growth inspired carbon thin films fabrication 査読有り

M. Kumar, J. X. Piao, S. B. Jin, J. H. Lee, S. Tajima, M. Hori, and J. G. Han

Archives of Biochemistry and Biophysics   605 巻   頁： 41–48   2016年9月

Low-temperature plasma in biology and medicine

Masaru Hori, Eun Ha Choi, Shinya Toyokuni

Archives of Biochemistry and Biophysics   605 巻   頁： 1-2   2016年9月

Red Blood Cell Coagulation Induced by Low-temperature Plasma Treatment

K. Miyamoto, S. Ikehara, H. Takei, Y. Akimoto, H. Sakakita, K. Ishikawa, M. Ueda, J. Ikeda, M. Yamagishi, J. Kim, T. Yamaguchi, H. Nakanishi, T. Shimizu, N. Shimizu, M. Hori, and Y. Ikehara

Arch. Biochem. Biophys   605 巻   頁： 95–101   2016年9月

Galectin expression in healing wounded skin treated with low-temperature plasma: Comparison with treatment by electronical coagulation

Y. Akimoto, S. Ikehara, T. Yamaguchi, J. Kim, H. Kawakami, N. Shimizu, M. Hori, H. Sakakita, and Y. Ikehara

Arch. Biochem. Biophys.   605 巻   頁： 1-9   2016年9月

Feedback Control System of Wafer Temperature for Advanced Plasma Processing and its Application to Organic Film Etching

T. Tsutsumi, Y. Fukunaga, K. Ishikawa, K. Takeda, H. Kondo, T. Ohta, M. Ito, M. Sekine, M. Hori

IEEE Trans. Semicond. Manuf. 28 (4)     頁： pp. 515-520   2016年8月

Synthesis of calcium oxalate crystals in culture medium irradiated with non-equilibrium atmospheric-pressure plasma 査読有り

Naoyuki Kurake, Hiromasa Tanaka, Kenji Ishikawa, Kae Nakamura, Hiroaki Kajiyama, Fumitaka Kikkawa, Masaaki Mizuno, Yoko Yamanishi and Masaru Hori

Applied Physics Express   9 巻 ( 9 )   2016年8月

Rapid electron density decay observed by surface-wave probe in afterglow of pulsed fluorocarbon-based plasma

Y. Ohya, M. Iwata, K. Ishikawa, M.Sekine, M.Hori and H.Sugai

Japanese Journal of Applied Physics   55 巻 ( 8 ) 頁： 10.7567/JJAP.55.080309   2016年7月

Non-thermal plasma prevents progression of endometriosis in mice

Chiharu Ishida, Masahiko Mori, Kae Nakamura, Hiromasa Tanaka, Masaaki Mizuno, Masaru Hori, Akira Iwase, Fumitaka Kikkawa and Shinya Toyokuni

    頁： 111   2016年7月

Possible therapeutic option of aqueous plasma for refractory ovarian cancer

H. Kajiyama, F. Utsumi, K. Nakamura, H. Tanaka, M. Mizuno, S. Toyokuni, M. Hori, and F. Kikkawa

Clinical Plasma Medicine   4 巻 ( 1 ) 頁： 14-18   2016年7月

Plasma-Activated Medium Selectively Eliminates Undifferentiated Human Induced Pluripotent Stem Cells

R. Matsumoto, K. Shimizu, T. Nagashima, H. Tanaka, M. Mizuno, F. Kikkawa, M. Hori, and H. Honda

Regenerative Therapy   5 巻   頁： 55-63   2016年7月

Microfluidic Transport Through Microsized Holes Treated by Nonequilibrium Atmospheric-Pressure Plasma

Takumi Ito, Kenji Ishikawa,Daisuke Onoshima, Naoto Kihara,Kentaro Tatsukoshi Hidefumi Odaka, Hiroshi Hashizume,Hiromasa Tanaka,Hiroshi Yukawa, Keigo Takeda Hiroki Kondo, Makoto Sekine, Yoshinobu Baba, Masaru Hori

IEEE Transactions on Plasma Science     2016年6月

Computational study on SiH4 dissociation channels and H abstraction reactions 査読有り

Toshio Hayashi, Kenji Ishikawa, Makoto Sekine and Masaru Hori

Japanese Journal of Applied Physics   55 巻 ( 7S2 )   2016年6月

Helium-based cold atmospheric plasma-induced reactive oxygen species-mediated apoptotic pathway attenuated by platinum nanoparticles 査読有り

Jawaid P, Rehman MU, Zhao QL, Takeda K, Ishikawa K, Hori M, Shimizu T, Kondo T.

J Cell Mol Med     2016年6月

Role of surface-electrical properties on the cell-viability of carbon thin films grown in nanodomain morphology

Amjed Javid,, Manish Kumar, Seokyoung Yoon, Jung Heon Lee,Satomi Tajima, Masaru Hori and Jeon Geon Han

J. Phys. D: Appl. Phys.   49 巻 ( 26 )   2016年5月

Biphasic effects of l-ascorbate on the tumoricidal activity of non-thermal plasma against malignant mesothelioma cells

L. Shi, Y.Wang, F.Ito, Y.Okazaki, H.Tanaka, M.Mizuno, M.Hori, D.R.Richardson, S.Toyokuni

Archives of Biochemistry and Biophysics   605 巻   頁： 109-116   2016年5月

Nanopore formation process in artificial cell membrane induced by plasma-generated reactive oxygen species

R.Tero, R.Yamashita, H.Hashizume, Y.Suda, H.Takikawa, M.Hori, M.Ito

Archives of Biochemistry and Biophysics   605 巻   頁： 26-33   2016年5月

Formation of a SiOF reaction intermixing layer on SiO2 etching using C4F6/O2/Ar plasmas 査読有り

Y. Ohya, M. Tomura, K. Ishikawa, M. Sekine, and M. Hori

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films   34 巻 ( 4 )   2016年5月

The role of plasma chemistry on functional silicon nitride film properties deposited at low-temperature by mixing two frequency powers using PECVD

B. B. Sahu,Y. Y. Yin,T. Tsutsumi, M. Hori, Jeon G. Han

Phys. Chem. Chem. Phys     2016年4月

Effects of nitrogen on the apoptosis of and changes in gene expression in human lymphoma U937 cells exposed to argon-based cold atmospheric pressure plasma

Yoshikawa Tabuchi, Hidefumi Uchiyama, Quing-Li XZhao, Tatsuya Yunoki, Gabor Andocs, Nobuyuki Nojima, Kengo Takeda, Kenji Ishikawa, Masaru Hori, Takashi Kondo

International Journal of Molecular Medicine   37 巻 ( 6 ) 頁： 1706-1714   2016年4月

Variable susceptibility of ovarian cancer cells to non-thermal plasma-activated medium 査読有り

F. Utsumi, H. Kajiyama, K. Nakamura, H. Tanaka, M. Mizuno, S. Toyokuni, M. Hori, and F. Kikkawa

Oncology Report   35 巻 ( 6 ) 頁： 3169–3177   2016年4月

Low temperature plasma processing for cell growth inspired carbon thin films fabrication

M.Kumar, J.X.Piao, S.B.Jin, J.H.Lee, S.Tajima, M.Hori, J.G.Han

Archives of Biochemistry and Biophysics   605 巻   頁： 41-48   2016年3月

Red blood cell coagulation induced by low-temperature plasma treatment

K,Miyamoto, S.Ikehara, H.Takei, Y.Akimoto, H.Sakakita, K. Ishikawa, M.Ueda, J.Ikeda, M.Yamagishi, J.Kim, T. Yamaguchi, H. Nakanishi, T.Shimizu, N.Shimizu, M.Hori, Y.Ikehara

Archives of Biochemistry and Biophysics   605 巻   頁： 95-101   2016年3月

Galectin expression in healing wounded skin treated with low-temperature plasma: Comparison with treatment by electronical coagulation

Y.Akimoto, S.Ikehara, T.Yamaguchi, J.Kim, H. Kawakami, N.Shimizu, M.Hori, H. Sakakita, Y.Ikehara

Archives of Biochemistry and Biophysics   305 巻   頁： 86-94   2016年1月

Synthesis of calcium oxalate crystals in culture medium irradiated with non-equilibrium atmospheric-pressure plasma

M. Hori, N.Kurake, Y.Yamanishi, M.Mizuno, K.Nakamura, K.Ishikawa, H.Tanaka

    頁： 111   2016年

Plasma-Activated Medium Selectively Eliminates Undifferentiated Human Induced Pluripotent Stem Cells

Ryo Matsumoto, Kazunori Shimizu, Takunori Nagashima, Hiromasa Tanaka, Masaaki Mizuno, Fumitaka Kikkawa, Masaru Hori, Hiroyuki Honda

Regenerative Therapy     頁： 111   2016年

Effects of assisted magnetic field to an atmospheric-pressure plasma jet on radical generation at the plasma-surface interface and bactericidal function

Liu, Chih-Tung; Kumakura, Takumi; Ishikawa, Kenji; Hashizume, Hiroshi; Takeda, Keigo; Ito, Masafumi; Hori, Masaru; Wu, Jong-Shinn

Plasma Sources Science and Technology     頁： 111   2016年

Plasma with high electron density and plasma-activated medium for cancer treatment

H. Tanaka, M. Mizuno, K. Ishikawa, H. Kondo, K. Takeda, H. Hashizume, K. Nakamura, F. Utsumi, H. Kajiyama, H. Kano, Y. Okazaki, S. Toyokuni, S. Akiyama, S. Maruyama, S. Yamada, Y. Kodera, H. Kaneko, H. Terasaki, H. Hara, T. Adachi, M. Iida, I. Yajima, M. Kato, F. Kikkawa, M. Hori

Clinical Plasma Medicine 3     頁： pp. 72-76   2015年12月

Histological and Nuclear Medical Comparison of Inflammation After Hemostasis with Non-Thermal Plasma and Thermal Coagulation

Masashi Ueda, Daiki Yamagami, Keiko Watanabe, Asami Mori,Hiroyuki Kimura, Kohei Sano, Hideo Saji, Kenji Ishikawa, Masaru Hori,Hajime Sakakita, Yuzuru Ikehara, Shuichi Enomoto

Plasma Process and Polymers     2015年12月

Plasma and Cancer

Masashi Ueda, Daiki Yamagami, Keiko watanabe, Asami Mori, Hiroyuki Kimura, Masaru Hori, Mounir Laroussi, Kai Masur, Yuzuru Ikehara ,

Plasma Processes and Polymers 12,No. 12     頁： p.p. 1329-1469   2015年12月

プラズマ医療の可能性と今後の展望

田中宏昌、堀　勝

ファルマシア／メカノバイオロジーと薬の融合   51 巻 ( 11 ) 頁： 1053   2015年11月

Effects of deposition rate and ion bombardment on properties of a-C:H films deposited by H-assisted plasma CVD method 査読有り

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Jpn. J. Appl. Phys. 55 (1S)   55 巻 ( 1S ) 頁： 01AA11   2015年11月

Real-time temperature-monitoring of Si substrate during plasma processing and its heat-flux analysis

T. Tsutsumi, K. Ishikawa, K. Takeda, H. Kondo, T. Ohta, M. Ito, M. Sekine, M. Hori

Jpn. J. Appl. Phys. 55 (1S)     頁： 01AB04:1-4   2015年11月

Cancer therapy using non-thermal atmospheric pressure plasma with ultra-highelectron density

H. Tanaka, M. Mizuno, S. Toyokuni, S. Maruyama, Y. Kodera, H. Terasaki, T. Adachi, M. Kato, F. Kikkawa, M. Hori

Phys Plasmas     頁： 122004   2015年10月

Development of Microelectrode Arrays Using Electroless Plating for CMOS-Based Direct Counting of Bacterial and HeLa Cells

Niitsu K, Ota S, Gamo K, Kondo H, Hori M, Nakazato K

IEEE TRANSACTIONS ON BIOMEDICAL CIRCUITS AND SYSTEMS, VOL. 9, NO. 5     頁： p.p.607-619   2015年10月

Raman Spectroscopy of a-C:H Films Deposited Using Ar + H2+ C7H8 Plasma CVD 査読有り

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Proc. 68th GEC/9th ICRP/33rd SPP   60 巻 ( 9 ) 頁： GT1.145   2015年10月

Measurement of absolute density of N atom in sputtering plasma for epitaxial growth ZnO films via nitrogen mediated crystallization 査読有り

T. Ide, K. Matsushima, T. Takasaki, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 巻 ( 9 ) 頁： GT1.155   2015年10月

Measurements of nitrogen atom density in N2/Ar sputtering plasma for fabrication of high-mobility amorphous In2O3:Sn films 査読有り

T. Takasaki, T. Ide, K. Matsushima, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 巻 ( 9 ) 頁： GT1.150   2015年10月

Measurements of absolute densities of nitrogen and oxygen atoms in sputtering plasma for fabrication of ZnInON films 査読有り

K. Matsushima, T. Ide, K. Takeda, M. Hori, D. Yamashita, H. Seo, K. Koga, M, Shiratani, N. Itagaki

Proc. 68th GEC/9th ICRP/33rd SPP   60 巻 ( 9 ) 頁： GT1.154   2015年10月

Effectiveness of plasma treatment on pancreatic cancer cells

N. Hattori, S. Yamada, K. Torii, S. Takeda, K. Nakamura, H. Tanaka, H. Kajiyama, M. Kanda, T. Fujii, G. Nakayama, H. Sugimoto, M. Koike, S. Nomoto, M. Fujiwara, M. Mizuno, M. Hori, Y. Kodera

International journal of oncology, 47     頁： pp. 1655-1662   2015年9月

Growth control of Saccharomyces cerevisiae through dose of oxygen atoms

Hiroshi Hashizume, Takayuki Ohta, Masaru Hori, and Masafumi Ito

APPLIED PHYSICS LETTERS     2015年9月

EPR-Spin Trapping and Flow Cytometric Studies of Free Radicals Generated Using Cold Atmospheric Argon Plasma and X-Ray Irradiation in Aqueous Solutions and Intracellular Milieu 査読有り

Hidefumi Uchiyama, Qing-Li Zhao, Mariame Ai Hassan, Gabor Andocs, Nobuyuki Nojima, Keigo Takeda, Kenji ishikawa, Masaru Hori, Takashi Kondo

PLOS one     2015年8月

Wavelength dependence for silicon-wafer temperature measurement by autocorrelationtype frequency-domain low-coherence interferometry

T. Tsutsumi, T. Ohta, K. Takeda, M. Ito, M. Hori

Appl. Opt. 54 (23)     頁： pp. 7088-7093   2015年8月

Effects of discharge voltage on the characteristics of a-C:H films prepared by H-assisted Plasma CVD method 査読有り

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Trans. Mater. Res. Soc. Jpn.   40 巻 ( 2 ) 頁： 123-128   2015年7月

Utility of dual frequency hybrid source for plasma and radical generation

Kyung Sik Shin, Bibhuti Bhusan Sahu, Jeon Geon Han, and Masaru Hori

Japanese Journal of Applied Physics     2015年6月

Emission spectroscopy of Ar + H-2+ C7H8 plasmas: C7H8 flow rate dependence and pressure dependence 査読有り

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine and M. Hori

J. Phys. : Conf. Series (SPSM26)   518 巻 ( 1 ) 頁： 012010   2015年6月

Suppression of plasma-induced damage on GaN etched by a Cl2 plasma at high temperatures

Zecheng Liu, Jialin Pan, Takashi Kako, Kenji Ishikawa, Keigo Takeda, Hiroki Kondo,Osamu Oda, Makoto Sekine, and Masaru Hori

Jpn. J. Appl. Phys. 54 (6S2)     頁： 06GB04   2015年6月

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