Updated on 2022/03/30

写真a

 
松山 智至
 
Organization
Graduate School of Engineering Materials Physics 2 Associate professor
Graduate School
Graduate School of Engineering
Undergraduate School
School of Engineering Physical Science and Engineering
Title
Associate professor

Degree 1

  1. 博士(工学) ( 2007.2   大阪大学 ) 

Research Interests 5

  1. Deformable mirror

  2. X-ray interferometer

  3. X-ray nanobeam

  4. X-ray mirror

  5. X-ray microscope

Research Areas 2

  1. Nanotechnology/Materials / Optical engineering and photon science  / X-ray optics

  2. Energy Engineering / Quantum beam science  / synchrotron X-ray

Current Research Project and SDGs 2

  1. Development of high-resolution X-ray microscope

  2. Nanofocusing of X-ray free electron laser

Research History 2

  1. Osaka University Graduate School of Engineering .   Assistant Professor

    2020.9

  2. Osaka University Graduate School of Engineering Division of Precision Science & Technology and Applied Physics   Assistant Professor

    2007.3 - 2020.3

Professional Memberships 2

  1. The Japan Society for Precision Engineering

  2. The Japanese Society for Synchrotron Radiation Research

Awards 7

  1. SPRUC 2015 Young Scientist Award

    2015.7   SPring-8ユーザー協同体  

    松山智至

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    Award type:International academic award (Japan or overseas)  Country:Japan

  2. 精密工学会技術奨励賞

    2012.9   精密工学会  

    松山智至

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  3. 2017年秋季大会ベストオーガナイザー賞

    2017.9   精密工学会  

    松山智至,湯本博勝

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  4. The 24th Congress of the International Comission for Optics (ICO-24), OSA/SPIE Student Paper Award

    2017.8   The 24th Congress of the International Comission for Optics  

    J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

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    Country:Japan

  5. 第30回日本放射光学会年会・放射光科学合同シンポジウムJSR2017学生発表賞

    2017.1   日本放射光学会  

    山田純平, 松山智至, 安田周平, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

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    Country:Japan

  6. 平成24年度コニカミノルタ画像科学奨励賞

    2013.3   コニカミノルタ科学技術振興財団  

    松山智至

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    Award type:Award from publisher, newspaper, foundation, etc.  Country:Japan

  7. 飛翔研究フェロー(‘飛翔30’若手プログラム)

    2010.9   大阪大学  

    松山智至

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    Country:Japan

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Papers 89

  1. Generation of an X-ray nanobeam of free electron laser using reflective optics with speckle interferometry Reviewed

    T. Inoue, S. Matsuyama, J. Yamada, N. Nakamura, T. Osaka, I. Inoue, Y. Inubushi, K. Tono, H. Yumoto, T. Koyama, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    Journal of Synchrotron Radiation   Vol. 27 ( Pt 4 ) page: 883 - 889   2020.7

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:INT UNION CRYSTALLOGRAPHY  

    Ultimate focusing of an X-ray free-electron laser (XFEL) enables the generation of ultrahigh-intensity X-ray pulses. Although sub-10 nm focusing has already been achieved using synchrotron light sources, the sub-10 nm focusing of XFEL beams remains difficult mainly because the insufficient stability of the light source hinders the evaluation of a focused beam profile. This problem is specifically disadvantageous for the Kirkpatrick-Baez (KB) mirror focusing system, in which a slight misalignment of similar to 300 nrad can degrade the focused beam. In this work, an X-ray nanobeam of a free-electron laser was generated using reflective KB focusing optics combined with speckle interferometry. The speckle profiles generated by 2 nm platinum particles were systematically investigated on a single-shot basis by changing the alignment of the multilayer KB mirror system installed at the SPring-8 Angstrom Compact Free-Electron Laser, in combination with computer simulations. It was verified that the KB mirror alignments were optimized with the required accuracy, and a focused vertical beam of 5.8 nm (+/- 1.2 nm) was achieved after optimization. The speckle interferometry reported in this study is expected to be an effective tool for optimizing the alignment of nano-focusing systems and for generating an unprecedented intensity of up to 10(22) W cm(-2) using XFEL sources.

    DOI: 10.1107/S1600577520006980

    Web of Science

    PubMed

  2. Full-field X-ray fluorescence microscope based on total-reflection advanced Kirkpatrick-Baez mirror optics Reviewed

    S. Matsuyama, J. Yamada, Y. Kohmura, M. Yambashi, T. Ishikawa, K. Yamauchi

    Optics Express   Vol. 27 ( 13 ) page: 18318 - 18328   2019.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1364/OE.27.018318

    PubMed

  3. Compact reflective imaging optics in hard X-ray region based on concave and convex mirrors Reviewed

    J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    Optics Express   Vol. 27 ( 3 ) page: 3429 - 3438   2019.2

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1364/OE.27.003429

    PubMed

  4. Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors Reviewed

    S. Matsuyama, T. Inoue, J. Yamada, J. Kim, H. Yumoto, Y. Inubushi, T. Osaka, I. Inoue, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    Scientific Reports   Vol. 8   2018.11

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:NATURE PUBLISHING GROUP  

    A method of fabricating multilayer focusing mirrors that can focus X-rays down to 10 nm or less was established in this study. The wavefront aberration induced by multilayer Kirkpatrick-Baez mirror optics was measured using a single grating interferometer at a photon energy of 9.1 keV at SPring-8 Angstrom Compact Free Electron Laser (SACLA), and the mirror shape was then directly corrected by employing a differential deposition method. The accuracies of these processes were carefully investigated, considering the accuracy required for diffraction-limited focusing. The wavefront produced by the corrected multilayer focusing mirrors was characterized again in the same manner, revealing that the root mean square of the wavefront aberration was improved from 2.7 (3.3) rad to 0.52 (0.82) rad in the vertical (horizontal) direction. A wave-optical simulator indicated that these wavefront-corrected multilayer focusing mirrors are capable of achieving sub-10-nm X-ray focusing.

    DOI: 10.1038/s41598-018-35611-0

    Web of Science

  5. High-throughput deterministic plasma etching using array-type plasma generator system

    Sano Yasuhisa, Nishida Ken, Asada Ryohei, Okayama Shinya, Toh Daisetsu, Matsuyama Satoshi, Yamauchi Kazuto

    REVIEW OF SCIENTIFIC INSTRUMENTS   Vol. 92 ( 12 ) page: 125107   2021.12

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    Language:Japanese   Publisher:Review of Scientific Instruments  

    A deterministic processing method is a high-precision finishing method, where the to-be-removed amount of material at each point of the work surface is calculated based on an accurately measured present surface shape and is removed precisely using a numerically controlled (NC) processing system. Although this method has achieved nanometer-scale accuracy, the method requires considerable time to scan the work surface, leading to low productivity. Therefore, using an individual on-off controllable array-type plasma generator covering the entire work surface, enabling simultaneous NC plasma processing is proposed herein. A novel intermittent gas flow system was constructed using cyclic on-off control of the gas supply and exhaust valves instead of the commonly used continuous gas flow to achieve uniform in-plane plasma etching. It was found that uniform removal could be achieved by combining it with a pulse-modulated high-frequency power supply and setting the plasma generation time in one cycle to be sufficiently short. Furthermore, a power control approach was developed for maintaining a constant plasma state, even while varying the plasma-generating array elements, which resulted in a demonstration experiment of NC plasma etching that successfully reduced the thickness variation of a silicon substrate.

    DOI: 10.1063/5.0071623

    Web of Science

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  6. Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

    Inoue Takato, Nishioka Yuka, Matsuyama Satoshi, Sonoyama Junki, Akiyama Kazuteru, Nakamori Hiroki, Ichii Yoshio, Sano Yasuhisa, Shi Xianbo, Shu Deming, Wyman Max D., Harder Ross, Kohmura Yoshiki, Yabashi Makina, Assoufid Lahsen, Ishikawa Tetsuya, Yamauchi Kazuto

    REVIEW OF SCIENTIFIC INSTRUMENTS   Vol. 92 ( 12 ) page: 123706   2021.12

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    Language:Japanese   Publisher:Review of Scientific Instruments  

    A hybrid deformable x-ray mirror consisting of a mechanical bender and a bimorph deformable mirror has been developed to realize adaptive optical systems, such as zoom condenser optics, for synchrotron-radiation-based x-ray microscopy. In the developed system, both bending mechanisms comprehensively contribute to the formation of the target mirror shape and can narrow the role of piezoelectric actuators, thereby enabling a more stable operation. In this study, the behavior of the bimorph mirror under the clamped condition was investigated, and the sharing of the deformation amount for each bending mechanism was optimized to minimize the amplitude of the voltage distribution of the bimorph mirror.

    DOI: 10.1063/5.0070465

    Web of Science

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  7. Hard X-ray nanoprobe scanner

    Jumpei Yamada, Ichiro Inoue, Taito Osaka, Takato Inoue, Satoshi Matsuyama, Kazuto Yamauchi, Makina Yabashi

    IUCrJ   Vol. 8 ( Pt 5 ) page: 713 - 718   2021.9

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:International Union of Crystallography (IUCr)  

    X-ray scientists are continually striving to improve the quality of X-ray microscopy, due to the fact that the information obtained from X-ray microscopy of materials can be complementary to that obtained from optical and electron microscopes. In contrast to the ease with which one can deflect electron beams, the relative difficulty to deflect X-ray has constrained the development of scanning X-ray microscopes (SXMs) based on a scan of an X-ray small probe. This restriction has caused severe complications that hinder progress toward achieving ultimate resolution. Here, a simple and innovative method for constructing an SXM equipped with a nanoprobe scanner is proposed. The nanoprobe scanner combines X-ray prisms and advanced Kirkpatrick–Baez focusing mirrors. By rotating the prisms on the order of degrees, X-ray probe scanning with single-nanometre accuracy can be easily achieved. The validity of the concept was verified by acquiring an SXM image of a test pattern at a photon energy of 10 keV, where 50 nm line-and-space structures were resolved. This method is readily applicable to an SXM with a single-nanometre resolution and will assist effective utilization of increasing brightness of fourth-generation synchrotron radiation sources.

    DOI: 10.1107/S2052252521007004

    Web of Science

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  8. Introduction to Synchrotron Radiation X-Ray Experiment

    MATSUYAMA Satoshi

    Journal of the Japan Society for Precision Engineering   Vol. 87 ( 7 ) page: 7_618 - 7_621   2021.7

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    DOI: 10.2493/jjspe.87.7_618

    CiNii Research

  9. X-ray adaptive zoom condenser utilizing an intermediate virtual focus

    Satoshi Matsuyama, Hiroyuki Yamaguchi, Takato Inoue, Yuka Nishioka, Jumpei Yamada, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

    Optics Express   Vol. 29 ( 10 ) page: 15604 - 15615   2021.5

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Optical Society  

    DOI: 10.1364/OE.422723

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    Other Link: https://www.osapublishing.org/viewmedia.cfm?URI=oe-29-10-15604&seq=0

  10. 圧電素子駆動型形状可変ミラーを用いたX線sub-5nm集光システムの開発

    井上 陽登, 松山 智至, 田中 優人, 二村 浩平, 一井 愛雄, 山田 純平, 佐野 泰久, 香村 芳樹, 矢橋 牧名, 石川 哲也, 山内 和人

    精密工学会学術講演会講演論文集   Vol. 2021S ( 0 ) page: 668 - 668   2021.3

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    <p>大型放射光施設が発振する高強度X線をより小さく集光することで,高光子密度を活かしたX線非線形光学や,小さなスポット径を利用したナノ構造解析の発展が期待される.求める集光径が小さくなるほどミラーに必要な形状精度は厳しくなる.そこで我々は形状可変ミラーを導入し,有限要素法を用いて修正可能な形状を計算した.6周期までの正弦波型の初期形状誤差がPV-3 nm以上存在した場合においても修正可能であることがわかった.</p>

    DOI: 10.11522/pscjspe.2021s.0_668

    CiNii Research

  11. 複数の凸面鏡を持つ高度な硬X線結像光学系の開発(第一報)

    松山 智至, 波多 健太郎, 山内 和人

    精密工学会学術講演会講演論文集   Vol. 2021S ( 0 ) page: 672 - 672   2021.3

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    <p>4枚のミラーから成るAdvanced Kirkpatrick-Baezミラーは硬X線領域における有望な結像光学系である.我々は様々な光学系を実際に開発し,30nmの空間分解能を持つX線顕微鏡をすでに実現した.この光学系に複数の凸面鏡を組み入れることで,さらに高度な光学系が構築可能であることを見出した.本発表では,いくつかの設計例とシミュレーションを示し,結像特性について調査した結果を示す.</p>

    DOI: 10.11522/pscjspe.2021s.0_672

    CiNii Research

  12. 結像型X線顕微鏡における波面計測手法の開発

    田中 優人, 山内 和人, 松山 智至, 井上 陽登, 中村 南美, 山田 純平, 香村 芳樹, 矢橋 牧名, 表 和彦, 石川 哲也

    精密工学会学術講演会講演論文集   Vol. 2021 ( 0 ) page: 671 - 671   2021

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    <p>X線ミラーを用いた結像型X線顕微鏡は,色収差が無くスループットが高い点で優れているが,許容アライメント誤差が厳しく,高空間分解能画像を得るためには,拡大結像配置にて光学素子由来の波面収差を計測しなければならない.我々は,フレネルゾーンプレートの集光点を試料とし,その拡大像を複数枚取得した上で反復的位相回復計算を施すことで波面を計測した.本手法を用いてアライメントを調整し,空間分解能23 nmを達成した.</p>

    DOI: 10.11522/pscjspe.2021S.0_671

  13. X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors Reviewed

    Jumpei Yamada, Takato Inoue, Nami Nakamura, Takashi Kameshima, Kazuto Yamauchi, Satoshi Matsuyama, Makina Yabashi

    Sensors   Vol. 20 ( 24 ) page: 7356 - 7356   2020.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:MDPI AG  

    X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value.

    DOI: 10.3390/s20247356

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  14. hv2-concept breaks the photon-count limit of RIXS instrumentation. Reviewed International coauthorship

    Zhou KJ, Matsuyama S, Strocov VN

    Journal of synchrotron radiation   Vol. 27 ( Pt 5 ) page: 1235 - 1239   2020.9

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    DOI: 10.1107/S1600577520008607

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  15. Focus characterization of an X-ray free-electron laser by intensity correlation measurement of X-ray fluorescence. Reviewed

    Nakamura N, Matsuyama S, Inoue T, Inoue I, Yamada J, Osaka T, Yabashi M, Ishikawa T, Yamauchi K

    Journal of synchrotron radiation   Vol. 27 ( Pt 5 ) page: 1366 - 1371   2020.9

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    DOI: 10.1107/S1600577520009868

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  16. High-resolution micro channel-cut crystal monochromator processed by plasma chemical vaporization machining for a reflection self-seeded X-ray free-electron laser.

    Matsumura S, Osaka T, Inoue I, Matsuyama S, Yabashi M, Yamauchi K, Sano Y

    Optics express   Vol. 28 ( 18 ) page: 25706-25715   2020.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1364/OE.398590

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  17. An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating.

    Toh D, Van Bui P, Isohashi A, Matsuyama S, Yamauchi K, Sano Y

    The Review of scientific instruments   Vol. 91 ( 4 ) page: 045108   2020.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.5141381

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  18. An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating Reviewed

    D. Toh, P. V. Bui, A. Isohashi, S. Matsuyama, K. Yamauchi, Y. Sano

    Review of Scientific Instruments   Vol. 91 ( 4 ) page: 045108   2020.4

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  19. Development of an Experimental Platform for Combinative Use of an XFEL and a High-Power Nanosecond Laser Reviewed

    Y. Inubushi, T. Yabuuchi, T. Togashi, K. Sueda, K. Miyanishi, Y. Tange, N. Ozaki, T. Matsuoka, R. Kodama, T. Osaka, S. Matsuyama, K. Yamauchi, H. Yumoto, T. Koyama, H. Ohashi, K. Tono, M. Yabashi

    Applied Science   Vol. 10 ( 7 ) page: 2224 - 2224   2020.3

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:MDPI AG  

    © 2020 by the authors. We developed an experimental platform for combinative use of an X-ray free electron laser (XFEL) and a high-power nanosecond laser. The main target of the platform is an investigation of matter under high-pressure states produced by a laser-shock compression. In this paper, we show details of the experimental platform, including XFEL parameters and the focusing optics, the laser irradiation system and X-ray diagnostics. As a demonstration of the high-power laser-pump XFEL-probe experiment, we performed an X-ray diffraction measurement. An in-situ single-shot X-ray diffraction pattern expands to a large angle side, which shows a corundum was compressed by laser irradiation.

    DOI: 10.3390/app10072224

    Scopus

  20. Catalyzed chemical polishing of SiO2 glasses in pure water Reviewed

    Daisetsu Toh, Pho Van Bui, Ai Isohashi, Naotaka Kidani, Satoshi Matsuyama, Yasuhisa Sano, Yoshitada Morikawa, Kazuto Yamauchi

    REVIEW OF SCIENTIFIC INSTRUMENTS   Vol. 90 ( 4 ) page: 045115   2019.4

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:AMER INST PHYSICS  

    A catalytically assisted etching system was developed for the ultra-precision fabrication of optical components, such as X-ray mirrors and extreme-ultraviolet mask blanks. This study demonstrates that an atomically smooth surface with a sub-Angstrom root-mean-square roughness could be achieved on a SiO2 glass substrate using pure water and Pt as the etching solution and catalyst, respectively. Density functional theory calculations confirmed that the mechanistic pathway was involved in catalyzed hydrolysis. The significant roles of the catalyst were clarified to be the dissociation of water molecules and the stabilization of a meta-stable state, in which a hypervalent silicate state is induced, and the Si-O backbond is elongated and loosened. To confirm the role of the catalyst, the Pt metal was replaced by Au, and the observed drastic difference in the removal rate was attributed to the degree of stabilization of the metastable state. Published under license by AIP Publishing.

    DOI: 10.1063/1.5090320

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  21. 多層膜結像ミラーを用いた高分解能X線顕微鏡の開発

    松山智至, 山田純平, 波多健太郎, 萩原拓, 表和彦, 廣瀬雷太, 武田佳彦, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

    精密工学会春季大会     2019.3

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    Language:Japanese  

  22. Surface Finishing Method using Plasma Chemical Vaporization Machining for Narrow Channel Walls of X-ray Crystal Monochromators Reviewed

    T. Hirano, Y. Morioka, S. Matsumura, Y. Sano, T. Osaka, S. Matsuyama, M. Yabashi, K. Yamauchi

    Int. J. Automation Technol.   Vol. 13 ( 2 ) page: 246 - 253   2019.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.20965/ijat.2019.p0246

  23. Development of a glue-free bimorph mirror for use in vacuum chambers Reviewed

    Y. Ichii, H. Okada, H. Nakamori, A. Ueda, H. Yamaguchi, S. Matsuyama, K. Yamauchi

    Review of Scientific Instruments   Vol. 90 ( 2 ) page: 021702   2019.2

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.5066105

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  24. High-efficiency planarization of GaN wafer by catalyst-referred etching with positive-biased photo-electrochemical oxidation

    Ryosuke Ohnishi, Daisetsu Toh, Satoshi Matsuyama, Ai Isohashi, Yasuhisa Sano, Kazuto Yamauchi

    Proceedings - 34th ASPE Annual Meeting     page: 79 - 83   2019

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    Publishing type:Research paper (international conference proceedings)  

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  25. High-efficiency planarization of SIC wafers by water-CARE (Catalyst-referred etching) employing photoelectrochemical oxidation

    H. Kida, D. Toh, P. V. Bui, A. Isohashi, R. Ohnishi, S. Matsuyama, K. Yamauchi, Y. Sano

    Materials Science Forum   Vol. 963 MSF   page: 525 - 529   2019

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    Publishing type:Research paper (international conference proceedings)  

    © 2019 Trans Tech Publications Ltd, Switzerland. Catalyst-referred etching (CARE) is an abrasive-free and damage-free polishing method that involves applying a catalytic reaction at the contact point of the catalyst surface and workpiece in a chemical solution. An atomically flat silicon carbide (SiC) wafer surface can be obtained by the CARE process. Recently, it was found that water can be used as a chemical solution, even in the case of SiC polishing. However, its current removal rate of 4H-SiC (0001) 4°off-axis substrate is only 2 nm/h and is expected to increase. In this study, the use of photoelectrochemical oxidation in combination with the CARE process using water was investigated, successfully increasing the removal rate up to approximately 100 nm/h.

    DOI: 10.4028/www.scientific.net/MSF.963.525

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  26. Development of adaptive Kirkpatrick-Baez mirrors based on mechanical and piezoelectric bending

    H. Nakamori, T. Goto, S. Matsuyama, H. Hayashi, H. Yamaguchi, J. Sonoyama, K. Akiyama, Y. Sano, Y, Kohmura, M. Yabashi, T. Ishikawa, H. Okada, K. Yamauchi

        2018.8

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  27. Reflective Imaging Optics using Concave and Convex Mirrors for A Compact and Achromatic Full-field X-ray Microscope Invited Reviewed

    J. Yamada, S. Matsuyama, K. Hata, R. Hirose, Y. Takeda, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, K. Yamauchi

    Microscopy and Microanalysis   Vol. 24 ( S2 ) page: 274 - 275   2018.8

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1017/S1431927618013715

  28. High-resolution full-field X-ray microscope for 20-keV X-rays with multilayer imaging mirrors Reviewed

    S. Matsuyama

    Microscopy and Microanalysis   Vol. 24 ( S2 ) page: 284 - 285   2018.8

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1017/S1431927618013764

  29. Development of new diagnostics based on LiF detector for pump-probe experiments Reviewed

    T.A. Pikuz, A.Ya.Faenov, N. Ozaki, T. Matsuoka, B. Albertazzi, N. Hartley, K. Miyanishi, K. Katagiri, S. Matsuyama, K. Yamauchi, H. Habara, Y. Inubushi, T. Togashi, H. Yumoto, H. Ohashi, Y. Tange, T. Yabuuchi, M. Yabashi, A. Grum-Grzhimailo, A. Casner, I. Skobelev, S. Makarov, S. Pikuz, G. Rigon, M. Koenig, K.A. Tanaka, T. Ishikawa, R. Kodama

        2018.7

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  30. Nearly diffraction-limited hard X-ray line focusing with hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation Reviewed

    Takumi Goto, Satoshi Matsuyama, Hiroki Hayashi, Hiroyuki Yamaguchi, Junki Sonoyama, Kazuteru Akiyama, Hiroki Nakamori, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

    Optics Express   Vol. 26 ( 13 ) page: 17477 - 17486   2018.6

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    We have developed the new hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation to realize precise shape controllability on a long-length mirror. The mechanical bender approximately provides the required ellipse, while the piezoelectric actuators attached to the mirror correct very small residual errors to satisfy the diffraction-limited condition. The mechanical bender significantly reduces the role of the piezoelectric actuator, resulting in the suppression of accuracy degradation due to the drift and/or junction effect of the piezoelectric actuators. In addition, line focusing was demonstrated with two different numerical apertures at SPring-8, and the obtained beam sizes were 127 and 253 nm (FWHM), which agree well with the diffraction-limited sizes.

    DOI: 10.1364/OE.26.017477

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  31. Development of a multilayer Kirkpatrick-Baez mirror optics for X-ray free electron laser

    T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, T. Osaka, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Conference on Synchrotron Radiation Instrumentation (SRI 2018)     2018.6

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  32. Hard-x-ray imaging mirror optics using concave and convex mirrors Invited

    J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Conference on Synchrotron Radiation Instrumentation (SRI 2018)     2018.6

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  33. Full‐field imaging and focusing with advanced mirror‐based optics Invited

    S. Matsuyama

    International Conference on Synchrotron Radiation Instrumentation (SRI 2018)     2018.6

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  34. Fabrication of ultraprecise multilayer focusing mirrors using an X-ray grating interferometer and differential deposition technique

    T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, T. Osaka, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)     2018.6

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  35. Development of reflective imaging optics using concave and convex mirrors

    J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)     2018.6

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  36. Development of hybrid X-ray adaptive optical system based on piezo-driven deformable mirror and a mechanical mirror bender

    H. Yamaguchi, T. Goto, H. Hayashi, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Conference on Synchrotron Radiation Instrumentation (SRI 2018)     2018.6

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  37. Development of adaptive Kirkpatrick-Baez mirrors based on bimorph and mechanical bending

    H. Nakamori, T. Goto, S. Matsuyama, H. Hayashi, H. Yamaguchi, J. Sonoyama, K. Akiyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, H. Okada, K. Yamauchi

    International Workshop on X-ray Optics and Metrology Satellite Meeting of SRI 2018 (IWXM 2018)     2018.6

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  38. Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study Reviewed

    Pho Van Bui, Daisetsu Toh, Ai Isohashi, Satoshi Matsuyama, Kouji Inagaki, Yasuhisa Sano, Kazuto Yamauchi, Yoshitada Morikawa

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 57 ( 5 ) page: 055703-1 - 055703-5   2018.5

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    A comprehensive study of the physicochemical interactions and the reaction mechanism of SiC etching with water by Pt catalysts can reveal key details about the surface treatment and catalytic phenomena at interfaces. Therefore, density functional theory simulations were performed to study the kinetics of Pt-assisted water dissociation and breaking of a Si-C bond compared to the HF-assisted mechanism. These calculations carefully considered the elastic and chemical interaction energies at the Pt-SiC interface, activation barriers of Si-C bond dissociation, and the catalytic role of Pt. It was found that the Pt-catalyzed etching of SiC in water is initiated via hydrolysis reactions that break the topmost Si-C bonds. The activation barrier strongly depends on the elastic and chemical interactions. However, chemical interactions are a dominant factor and mainly contribute to the lowering of the activation barrier, resulting in an increased rate of reaction. (C) 2018 The Japan Society of Applied Physics

    DOI: 10.7567/JJAP.57.055703

    Web of Science

  39. Systematic-error-free wavefront measurement using an X-ray single-grating interferometer

    Takato Inoue, Satoshi Matsuyama, Shogo Kawai, Hirokatsu Yumoto, Yuichi Inubushi, Taito Osaka, Ichiro Inoue, Takahisa Koyama, Kensuke Tono, Haruhiko Ohashi, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

    Review of Scientific Instruments   Vol. 89 ( 4 ) page: 043106 - 043106-7   2018.4

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    In this study, the systematic errors of an X-ray single-grating interferometer based on the Talbot effect were investigated in detail. Non-negligible systematic errors induced by an X-ray camera were identified and a method to eliminate the systematic error was proposed. Systematic-error-free measurements of the wavefront error produced by multilayer focusing mirrors with large numerical apertures were demonstrated at the SPring-8 Angstrom Compact free electron LAser. Consequently, wavefront aberration obtained with two different cameras was found to be consistent with an accuracy better than λ/12.

    DOI: 10.1063/1.5026440

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  40. Development of nanofocusing system for X-ray free electron Laser (Study of nanobeam characterization)

    T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, T. Osaka, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Conference on X-ray Optics and Applications 2018 (XOPT2018)     2018.4

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  41. Development of high-resolution X-ray imaging optical system using multilayer imaging mirrors

    K. Hata, J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Conference on X-ray Optics and Applications 2018 (XOPT2018)     2018.4

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  42. Compact and large-magnification full-field X-ray microscope using concave-convex imaging mirrors

    J. Yamada, S. Matsuyama, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    International Conference on X-ray Optics and Applications 2018 (XOPT2018)     2018.4

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  43. Performance of a hard X-ray split-and-delay optical system with a wavefront division Reviewed

    Takashi Hirano, Taito Osaka, Yuki Morioka, Yasuhisa Sano, Yuichi Inubushi, Tadashi Togashi, Ichiro Inoue, Satoshi Matsuyama, Kensuke Tono, Aymeric Robert, Jerome B. Hastings, Kazuto Yamauchi, Makina Yabashi

    Journal of Synchrotron Radiation   Vol. 25 ( Pt 1 ) page: 20 - 25   2018.1

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    The performance of a hard X-ray split-and-delay optical (SDO) system with a wavefront division scheme was investigated at the hard X-ray free-electron laser facility SACLA. For the wavefront division, beam splitters made of edge-polished perfect Si(220) crystals were employed. We characterized the beam properties of the SDO system, and investigated its capabilities for beam manipulation and diagnostics. First, it was confirmed that shot-to-shot non-invasive diagnostics of pulse energies for both branches in the SDO system was feasible. Second, nearly ideal and identical focal profiles for both branches were obtained with a spot size of â1/41.5μm in full width at half-maximum. Third, a spatial overlap of the two focused beams with a sub-μm accuracy was achieved by fine tuning of the SDO system. Finally, a reliable tunability of the delay time between two pulses was confirmed. The time interval was measured with an X-ray streak camera by changing the path length of the variable-delay branch. Errors from the fitted line were evaluated to be as small as ±0.4ps over a time range of 60ps.The performance of a hard X-ray split-and-delay optical system with a wavefront division scheme has been investigated at SACLA.

    DOI: 10.1107/S1600577517014023

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  44. Development of new diagnostics based on LiF detector for pump-probe experiments Reviewed

    T. Pikuz, A. Faenov, N. Ozaki, T. Matsuoka, B. Albertazzi, N. J. Hartley, K. Miyanishi, K. Katagiri, S. Matsuyama, K. Yamauchi, H. Habara, Y. Inubushi, T. Togashi, H. Yumoto, H. Ohashi, Y. Tange, T. Yabuuchi, M. Yabashi, A. N. Grum-Grzhimailo, A. Casner, I. Skobelev, S. Makarov, S. Pikuz, G. Rigon, M. Koenig, K. A. Tanaka, T. Ishikawa, R. Kodama

    Matter and Radiation at Extremes   Vol. 3 ( 4 ) page: 197 - 206   2018.1

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    We present new diagnostics for use in optical laser pump - X-ray Free Electron Laser (XFEL) probe experiments to monitor dimensions, intensity profile and focusability of the XFEL beam and to control initial quality and homogeneity of targets to be driven by optical laser pulse. By developing X-ray imaging, based on the use of an LiF crystal detector, we were able to measure the distribution of energy inside a hard X-ray beam with unprecedented high spatial resolution (∼1 μm) and across a field of view larger than some millimetres. This diagnostic can be used in situ, provides a very high dynamic range, has an extremely limited cost, and is relatively easy to be implemented in pump-probe experiments. The proposed methods were successfully applied in pump-probe experiments at the SPring-8 Angstrom Compact free electron LAser (SACLA) XFEL facility and its potential was demonstrated for current and future High Energy Density Science experiments.

    DOI: 10.1016/j.mre.2018.01.006

    Scopus

  45. 超精密X線ミラーが拓く次世代X線集光・結像 Invited

    松山智至

        2018.1

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  46. Wavefront sensing for nano-focusing characterization

    S. Matsuyama

    9th Hard X-ray FEL Collaboration Meeting (5-way meeting 2017)     2017.12

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  47. Ellipsoidal mirror for two-dimensional 100-nm focusing in hard X-ray region Reviewed

    H. Yumoto, T. Koyama, S. Matsuyama, Y. Kohmura, K. Yamauchi, T. Ishikawa, H. Ohashi

    Scientific Reports   Vol. 7 ( 1 ) page: 16408   2017.11

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    Cutting-edge hard X-ray microscopy strongly depends on sophisticated focusing optics and ultrabright X-ray sources at synchrotron-radiation and X-ray free-electron laser (XFEL) facilities. These facilities typically provide two-dimensional nanofocusing X-ray beams by combining one-dimensional focusing mirrors. However, single-reflecting two-dimensional focusing mirrors with an ellipsoidal surface, which are well-known to possess high efficiency, have limited microfocusing applications. In this paper, we present an ultrahigh-precision ellipsoidal mirror for two-dimensional X-ray nanofocusing by overcoming the difficulties faced in the manufacturing process of its aspherical surface, including the surface-processing methods and surface metrology. The developed mirror has nanoscale accuracy, and it achieves focus size of 85 nm x 125 nm (full width at half maximum) using 7-keV X-rays. Two-dimensional focus was demonstrated in the same focal plane by resolving 50-nm test structures by scanning X-ray microscopy using a focusing beam. These achievements represent an important first step toward realizing two-dimensional aspherical mirrors with complex designs, in addition to ultralow loss and unprecedented small focusing property for extensive optical applications in synchrotron-radiation and XFEL facilities as well as in other scientific fields that require ultraprecision optical surfaces.

    DOI: 10.1038/s41598-017-16468-1

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  48. 全反射ミラーを用いた色収差のない結像光学系の開発 Invited

    松山智至

        2017.11

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  49. 衝撃圧縮された多結晶コランダムの時分割XFELその場観察

    丹下 慶範, 尾崎 典雅, 瀬戸 雄介, 佐藤 友子, 奥地 拓生, 松岡 健之, 高橋 謙次郎, 宮西 宏併, ALBERTAZZI Bruno・HARTLEY Nicholas, 梅田 悠平, 西川 豊人, 松山 智至, 山内 和人, 関根 利守, 田中 和夫, 兒玉 了祐, 籔内 俊毅, 矢橋 牧名

        2017.11

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  50. Fabrication of X-ray imaging mirror for an achromatic and high-resolution full-field X-ray microscope

    J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, K. Yamauchi

        2017.10

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  51. Development of crystal-based split-and-delay optics with wavefront splitting at SACLA

    T. Hirano, T. Osaka, Y. Sano, Y. Inubushi, T. Togashi, I. Inoue, S. Matsuyama, K. Tono, K. Yamauchi, M. Yabashi

    SPIE Optics+Photonics2017     page: 187 - 187   2017.8

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  52. 高分解能かつ色収差のないX線顕微鏡の開発 Invited

    松山智至

    日本学術振興会,結晶加工と評価技術第145委員会,第154回研究会     2017.8

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  53. 高分解能かつ色収差のない X 線顕微鏡の開発 Invited

    松山智至

        2017.8

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  54. Full-field X-ray fluorescence imaging based on total-reflection imaging mirrors

    S. Matsuyama, S. Yasuda, J. Yamada, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    The 24th Congress of the International Comission for Optics, X-ray and High-energy Optics     2017.8

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  55. Development of precision Wolter mirrors for solar x-ray observations

    Taro Sakao, Satoshi Matsuyama, Takumi Goto, Jumpei Yamada, Shuhei Yasuda, Kazuto Yamauchi, Yoshiki Kohmura, Ayumi Kime, Akira Miyake, Tadakazu Maezawa, Hirokazu Hashizume, Yoshinori Suematsu, Noriyuki Narukage, Shin-nosuke Ishikawa

    Proceedings of SPIE   Vol. 10386   page: 103860E-1 - 103860E-11   2017.8

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    High resolution imagery of the Sun's X-ray corona provides an essential clue in understanding dynamics and heating processes of plasma particles there. However, X-ray imagery of the Sun with sub-arcsecond resolution has so far never been conducted due to severe technical difficulty in fabricating precision Wolter mirrors. For future X-ray observations of the solar corona, we are attempting to realize precision Wolter mirrors with sub-arcsecond resolution by adopting advanced surface polish and metrology methods to sector mirrors which consist of a portion of an entire annulus, by direct polishing onto the mirror substrate.
    Based on the knowledge obtained through fabrication of the first (in 2013) and second (in 2014) engineering Wolter mirrors and subsequent evaluations on their X-ray focusing performance, the third engineering mirror was made in 2015-2016. The primary target of improvement over the second mirror was to suppress figure error amplitude especially for spatial frequencies around 1 mm(-1) and to suppress the large astigmatism that was present in the second mirror, by introducing improved deterministic polish and smoothing on the precision mirror surfaces (32.5 mm x 10 mm in area for both parabola and hyperbola segments), as well as by careful characterization of the systematic error in the figure measurement system for the precision polish. Measurements on the focusing performance of thus-fabricated third Wolter mirror at SPring-8 synchrotron facility with 8 keV X-rays demonstrated that the mirror attained sub-arcsecond focusing performance with its HPD (half-power diameter) size reaching as small as similar to 0.2 arcsec for meridional focusing while similar to 0.1 arcsec for sagittal focusing. The meridional focusing achieved nearly diffraction limited performance (similar to 0.12 arcsec FWHM for the PSF core). We also confirmed that the large astigmatism noted in the second mirror was correctly removed in the third mirror with the correction of the above-mentioned systematic error.

    DOI: 10.1117/12.2273507

    Web of Science

  56. Development of Precise Wavefront Measurement Method for X-Ray Free Electron Laser Focusing System

    T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Osaka, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    The 24th Congress of the International Comission for Optics, X-ray and High-energy Optics     2017.8

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  57. Development of measurement system for ellipsoidal mirrors

    H. Nakamori, Y. Ichii, H. Okada, A. Ueda, T. Tsumura, S. Matsuyama, K. Yamauchi

    SPIE Optics+Photonics2017     page: 185 - 185   2017.8

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  58. Development of measurement system for ellipsoidal mirrors Reviewed

    H. Nakamori, Y. Ichii, H. Okada, A. Ueda, T. Tsumura, S. Matsuyama, K. Yamauchi

        2017.8

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  59. Development of hybrid adaptive x-ray focusing system based on piezoelectric bimorph mirror and mirror bender Reviewed

    T. Goto, S. Matsuyama, H. Hayashi, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, K. Yamauchi

    SPIE Optics+Photonics2017     page: 187 - 187   2017.8

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  60. Development of full-field x-ray fluorescence microscope using total-reflection mirrors Reviewed

    S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    SPIE Optics+Photonics2017     page: 193 - 193   2017.8

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  61. Shock response to solid germanium

    Kohei Miyanishi, Norimasa Ozaki, Takeshi Matsuoka, Satoshi Matsuyama, Kenjiro Takahashi, Hideaki Habara, Tatiana Pikuz, Anatoly Faenov, Kazuto Yamauchi, Ryosuke Kodama, Kazuo Tanaka, Yusuke Seto, Yoshinobu Tange, Toshinori Yabuuchi, Yuichi Inubushi, Tadashi Togashi, Makina Yabashi, Tetsuya Ishikawa, Michel Koenig, Tommaso Vinci, Takuo Okuchi, Nicholas Hartley, Osami Sakata, Toshimori Sekine, Emma McBride

        2017.7

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  62. Development of new diagnostics in the interests of pump-probe experiments Invited

    T. Pikuz, A. Faenov, N. Ozaki. T. Matsuoka, B. Albertazzi, N. Hartely, S. Matsuyama, K. Yamauchi, H. Habara, Y. Inubushi, T. Togashi, H. Yumoto, H. Ohashi, Y. Tange, T. Yabuuchi, M. Yabashi, A. Grum-Grzhimailo, A. Casner, G. Rigon, M. Koenig, K. A. Tanaka, T. Ishikawa, R. Kodama

        2017.6

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  63. Measurement of the X-ray Spectrum of a Free Electron Laser with a Wide-Range High-Resolution Single-Shot Spectrometer Reviewed

    Y. Inubushi, I. Inoue, J. Kim, A. Nishihara, S. Matsuyama, H. Yumoto, T. Koyama, K. Tono, H. Ohashi, K. Yamauchi, M. Yabashi

    Applied Sciences   Vol. 7 ( 6 ) page: 584-1 - 584-5   2017.6

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    We developed a single-shot X-ray spectrometer for wide-range high-resolution measurements of Self-Amplified Spontaneous Emission (SASE) X-ray Free Electron Laser (XFEL) pulses. The spectrometer consists of a multi-layer elliptical mirror for producing a large divergence of 22 mrad around 9070 eV and a silicon (553) analyzer crystal. We achieved a wide energy range of 55 eV with a fine spectral resolution of 80 meV, which enabled the observation of a whole SASE-XFEL spectrum with fully-resolved spike structures. We found that a SASE-XFEL pulse has around 60 longitudinal modes with a pulse duration of 7.7 +/- 1.1 fs.

    DOI: 10.3390/app7060584

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  64. Development of new diagnostics in the interests of pumpprobe experiments Invited

    T. Pikuz, A. Faenov, N. Ozaki, T. Matsuoka, B. Albertazzi, N.Hartely, S. Matsuyama, K. Yamauchi, H. Habara, Y. Inubushi, T. Togashi, H. Yumoto, H. Ohashi, Y. Tange, T. Yabuuchi, M. Yabashi, A. Grum-Grzhimailo, A. Casner, G. Rigon, M. Koenig, K. A. Tanaka, T. Ishikawa, R. Kodama

        2017.6

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  65. Chemical etching of silicon carbide in pure water by using platinum catalyst Reviewed

    A. Isohashi, P. V. Pho, S. Matsuyama, Y. Sano, K. Inagaki, Y. Morikawa, K. Yamauchi

    Applied Phsyics Letters   Vol. 110 ( 20 ) page: 201601   2017.5

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    Chemical etching of SiC was found to proceed in pure water with the assistance of a Pt catalyst. A 4H-SiC (0001) wafer was placed and slid on a polishing pad in pure water, on which a thin Pt film was deposited to give a catalytic nature. Etching of the wafer surface was observed to remove protrusions preferentially by interacting with the Pt film more frequently, thus flattening the surface. In the case of an on-axis wafer, a crystallographically ordered surface was obtained with a straight step-and-terrace structure, the height of which corresponds to that of an atomic bilayer of Si and C. The etching rate depended upon the electrochemical potential of Pt. The vicinal surface was observed at the potential at which the Pt surface was bare. The primary etching mechanism was hydrolysis with the assistance of a Pt catalyst. This method can, therefore, be used as an environmentally friendly and sustainable technology. Published by AIP Publishing.

    DOI: 10.1063/1.4983206

    Web of Science

  66. 50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors Reviewed

    S. Matsuyama, S. Yasuda, J. Yamada, H. Okada, Y. Kohmura, M Yabashi, T. Ishikawa, K. Yamauchi

    Scientific Reports   Vol. 7   page: 46358   2017.4

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    X-ray spectromicroscopy with a full-field imaging technique is a powerful method for chemical analysis of heterogeneous complex materials with a nano-scale spatial resolution. For imaging optics, an X-ray reflective optical system has excellent capabilities with highly efficient, achromatic, and long-workingdistance properties. An advanced Kirkpatrick-Baez geometry that combines four independent mirrors with elliptic and hyperbolic shapes in both horizontal and vertical directions was developed for this purpose, although the complexity of the system has a limited applicable range. Here, we present an optical system consisting of two monolithic imaging mirrors. Elliptic and hyperbolic shapes were formed on a single substrate to achieve both high resolution and sufficient stability. The mirrors were finished with a similar to 1-nm shape accuracy using elastic emission machining. The performance was tested at SPring-8 with a photon energy of approximately 10 keV. We could clearly resolve 50-nm features in a Siemens star without chromatic aberration and with high stability over 20 h. We applied this system to X-ray absorption fine structure spectromicroscopy and identified elements and chemical states in specimens of zinc and tungsten micron-size particles.

    DOI: 10.1038/srep46358

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  67. 4枚の形状可変鏡に基づく開口数可変集光光学系を用いた回折限界X線集光

    松山智至

    X線結像光学ニューズレター     2017.4

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  68. High-magnification X-ray imaging mirror system consisting of elliptical concave and hyperbolic convex mirrors

    J. Yamada, S. Matsuyama, S. Yasuda, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017     page: 66 - 66   2017.4

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  69. Hard X-ray Split-and-Delay Optics with wavefront Division at SACLA

    T. Hirano, T. Osaka, Y. Sano, Y. Inubushi, T. Togashi, I. Inoue, S. Matsuyama, K. Tono, K. Yamauchi, M. Yabashi

    International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017     page: 34 - 34   2017.4

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  70. Development of calibration method for X-ray single-grating interferometry

    T. Inoue, S. Matsuyama, S. Kawai, H. Yumoto, Y. Inubushi, T. Koyama, K. Tono, H. Ohashi, T. Katayama, S. Goto, T. Ishikawa, M. Yabashi, K. Yamauchi

    International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017     page: 59 - 60   2017.4

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  71. Development of an adaptive x-ray focusing system based on the combination of piezoelectric bimorph mirror and mirror bender

    T. Goto, S. Matsuyama, H. Hayashi, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, K. Yamauchi

    International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017     page: 72 - 72   2017.4

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  72. Development of a multilayer KB mirror sysem for sub-10nm XFEL focusing

    S. Kawai, S. Matsuyama, T. Inoue, H. Yumoto, Y. Inubushi, T. Osaka, T. Koyama, K. Tono, H. Ohashi, M. Yabashi, T. Ishikawa, K. Yamauchi

    International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017     page: 61 - 62   2017.4

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  73. Achromatic and High-Resolution Full-Field X-ray Microscope and its Applicaiton

    S. Matsuyama, J. Yamada, S. Yasuda, Y. Kohmura, H. Okadam, Y. Sano, M. Yabashi, T. Ishikawa, K. Yamauchi

    International conference on X-ray optics and applications 2017 (XOPT'17) in OPIC2017     page: 10 - 11   2017.4

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  74. パワーレーザーとXFELを用いた動的超高圧下の物質変形・相転移に関する研究 Reviewed

    尾崎典雅

        2017.3

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    Language:Japanese  

  75. 全反射ミラーを用いた高分解能かつ色収差のない結像型X線顕微鏡の開発ー様々な観察法への応用ー

    松山智至, 安田周平, 山田純平, 佐野泰久, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

    アブストラクト集   Vol. P02   2017.3

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    Language:Japanese  

  76. 全反射ミラーを用いた高分解能かつ色収差のない結像型X線顕微鏡の開発ー様々な観察法への応用ー

    松山智至, 安田周平, 山田純平, 佐野泰久, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

    2017年度精密工学会春季大会学術講演会     2017.3

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  77. 高エネルギー密度科学のための新しい実験ステーション Reviewed

    松岡健之, 尾崎典雅

        2017.3

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    Language:Japanese  

  78. Simulation of concave-convex imaging mirror system for development of a compact and achromatic full-field x-ray microscope Reviewed

    J. Yamada, S. Matsuyama, Y. Sano, K. Yamauchi

    Applied Optics   Vol. 56 ( 4 ) page: 967 - 974   2017.2

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:OPTICAL SOC AMER  

    We propose the use of two pairs of concave-convex mirrors as imaging optics for the compact full-field x-ray microscope with high resolution and magnification factors. The optics consists of two pairs of hyperbolic convex and elliptical concave mirrors with the principal surface near the object, consequently enabling the focal length to be 10 times shorter than conventional advanced Kirkpatrick-Baez mirror optics. This paper describes characteristics of the optics calculated by ray-tracing and wave-optical simulators. The expected spatial resolution is approximately 40 nm with a wide field of view of more than 10 mu m and a total length of about 2 m, which may lead to the possibility of laboratory-sized, achromatic, and high-resolution full-field x-ray microscopes. (C) 2017 Optical Society of America

    DOI: 10.1364/AO.56.000967

    Web of Science

    PubMed

  79. Ultrafast observation of lattice dynamics in laser-irradiated gold foils Reviewed

    N. J. Hartley, N. Ozaki, T. Matsuoka, B. Albertazzi, A. Faenov, Y. Fujimoto, H. Habara, M. Harmand, Y. Inubushi, T. Katayama, M. Koenig, A. Krygier, P. Mabey, Y. Matsumura, S. Matsuyama, E. E. McBride, K. Miyanishi, G. Morard, T. Okuchi, T. Pikuz, O. Sakata, Y. Sano, T. Sato, T. Sekine, Y. Seto, K. Takahashi, K. A. Tanaka, Y. Tange, T. Togashi, Y. Umeda, T. Vinci, M. Yabashi, T. Yabuuchi, K. Yamauchi, R. Kodama

    Applied Physics Letters   Vol. 110 ( 7 ) page: 071905 - 071905   2017.2

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:AMER INST PHYSICS  

    We have observed the lattice expansion before the onset of compression in an optical-laser-driven target, using diffraction of femtosecond X-ray beams generated by the SPring-8 Angstrom Compact Free-electron Laser. The change in diffraction angle provides a direct measure of the lattice spacing, allowing the density to be calculated with a precision of +/- 1%. From the known equation of state relations, this allows an estimation of the temperature responsible for the expansion as &lt;1000 K. The subsequent ablation-driven compression was observed with a clear rise in density at later times. This demonstrates the feasibility of studying the dynamics of preheating and shock formation with unprecedented detail. Published by AIP Publishing.

    DOI: 10.1063/1.4976541

    Web of Science

  80. Generation of apodized X-ray illumination and its application to scanning and diffraction microscopy Reviewed

    Krishna P. Khakurel, Takashi Kimura, Hiroki Nakamori, Takumi Goto, Satoshi Matsuyama, Tomoya Sasaki, Masashi Takei, Yoshiki Kohmura, Tetsuya Ishikawa, Kazuto Yamauchi, Yoshinori Nishino

    Journal of Synchrotron Radiation   Vol. 24 ( Pt 1 ) page: 142 - 149   2017.1

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:International Union of Crystallography  

    X-ray science has greatly benefited from the progress in X-ray optics. Advances in the design and the manufacturing techniques of X-ray optics are key to the success of various microscopic and spectroscopic techniques practiced today. Here the generation of apodized X-ray illumination using a two-stage deformable Kirkpatrick-Baez mirror system is presented. Such apodized illumination is marked by the suppression of the side-lobe intensities of the focused beam. Thus generated apodized illumination was employed to improve the image quality in scanning X-ray fluorescence microscopy. Imaging of a non-isolated object by coherent X-ray diffractive imaging with apodized illumination in a non-scanning mode is also presented.

    DOI: 10.1107/S1600577516017677

    Web of Science

    Scopus

    PubMed

  81. Visualization of intracellular elements using scanning X-ray fluorescence microscopy Reviewed

    Mari Shimura, Lukasz Szyrwiel, Satoshi Matsuyama, Kazuto Yamauchi

    Metallomics: Recent Analytical Techniques and Applications     page: 63 - 92   2017.1

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    Language:English   Publishing type:Part of collection (book)   Publisher:Springer Japan  

    Recent technological developments have enabled the imaging of chemical elements in cells, although quantitative analyses, such as by inductively coupled plasma mass spectrometry, were developed previously. Applications allowing high-resolution imaging at the single-cell level are anticipated in cell biology and medicine, where the roles of elements, especially in relation to intracellular molecules such as proteins, nucleic acids, lipids, and sugars, are essential for understanding cellular functions. The expression of proteins and genes varies depending on cellular function, and multiple elements are likely to be associated with biological molecules in the functioning of cell proliferation, differentiation, aging, and stress responses. In this review, we describe a scanning X-ray fluorescence microscopy system, which can reliably determine the cellular distribution of multiple elements by a sub-100-nm focusing approach, together with its applications. Visualizing intracellular elements and understanding their dynamics at the single-cell level may provide great insight into their behaviors.

    DOI: 10.1007/978-4-431-56463-8_3

    Scopus

  82. 全反射結像ミラーを使った色収差のないX線顕微鏡の開発と顕微分光への応用

    松山智至, 安田周平, 山田純平, 岡田浩巳, 香村芳樹, 矢橋牧名, 石川哲也, 山内和人

    アブストラクト集   Vol. 5D003   2017.1

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  83. The development of the dry planarization method with a reference plane by the transportation of active species

    Ryokume Reiji, Miyazaki Toshinobu, Sano Yasuhisa, Matsuyama Satoshi, Yamauchi Kazuto

    Proceedings of JSPE Semestrial Meeting   Vol. 2017   page: 541 - 542   2017

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    Language:Japanese   Publisher:The Japan Society for Precision Engineering  

    DOI: 10.11522/pscjspe.2017S.0_541

  84. 触媒表面基準エッチング法における水素水を用いた被毒除去法の提案

    中平 雄太, 礒橋 藍, Bui Pho, 稻田 辰昭, 藤 大雪, 木田 英香, 松山 智至, 佐野 泰久, 山内 和人

    精密工学会学術講演会講演論文集   Vol. 2017 ( 0 ) page: 1 - 2   2017

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    我々はこれまで触媒表面基準エッチング法の開発を行ってきた。本手法ではエッチング反応による加工が、触媒作用を有する研磨パッドの近傍のみで進行するため凸部からの選択的な加工が可能である。砥粒等の機械的作用によるダメージはなく効率的に基準面形状の転写が可能である。本研究では、水素水を用い触媒表面の加工生成物を除去することで加工速度の安定化を行い、加工液のpHを変化させることで加工速度の向上に成功した。

    DOI: 10.11522/pscjspe.2017A.0_1

  85. 高濃度SF<sub>6</sub>ガスを用いたサブ大気圧プラズマエッチングによるSiC基板の高能率薄化加工

    井上 裕貴, 田尻 光毅, 向井 莉紗, 佐野 泰久, 松山 智至, 山内 和人

    精密工学会学術講演会講演論文集   Vol. 2017   page: 975 - 976   2017

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    SiCデバイス製造工程においてサブ大気圧プラズマを用いたプラズマエッチング加工を検討している。今回、実用化を視野に入れた加工速度を達成することを目指した。SF6の供給量と投入電力を増大させ、反応種であるFラジカル数を増加させることで加工速度を向上させた。大電力の投入はこれまで困難であったが、新たな試料台を用いることで大電力を投入しても安定なプラズマの発生に成功し、2インチウエハ全面加工速度15.2 μm/minを達成した。

    DOI: 10.11522/pscjspe.2017S.0_975

  86. Change in surface morphology of Si (100) wafer after oxidation with atmospheric-pressure plasma Reviewed

    Hiroyasu Takei, Satoshi Kurio, Satoshi Matsuyama, Kazuto Yamauchi, Yasuhisa Sano

    Key Engineering Materials   Vol. 723   page: 242 - 246   2017

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Trans Tech Publications Ltd  

    Modern surface processing of semiconductors or oxide materials requires highly precise temporal control of each processing step. In addition, large wafers must be processed quickly for high throughput. We have developed a numerically controlled sacrificial oxidation method with atmospheric-pressure plasma using electrode arrays. In this method, we oxidized the surface of a wafer with atmospheric-pressure plasma applied precisely by an electrode array, and then dipped the wafer in HF solution to remove the surface oxide layer. The plasma process time can be controlled independently at each electrode area. The oxidation rate and surface profile of the treated wafer are crucial for precision processing. We investigated the oxidation rate of atmospheric-pressure plasma oxidation by spectroscopic ellipsometry and examined the surface morphologies of untreated and treated wafers by atomic force microscopy. The surface profile smoothness correlated with the plasma oxidation time and electrode voltage during oxidation. The surface roughness tended to increase when the sample was oxidized for longer times with higher electrode voltage. This correlation between surface roughness and oxidation time resembled the results of Si/SiO2 interfacial roughness in the case of thermal oxidation. In the plasma sacrificial oxidation process, the increase of surface roughness at the Si/SiO2 interface by plasma oxidation must be considered.

    DOI: 10.4028/www.scientific.net/KEM.723.242

    Scopus

  87. Planarization of SiC and oxide surfaces by using Catalyst-Referred Etching with water

    Pho Van Bui, Ai Isohashi, Daisetsu Toh, Satoshi Matsuyama, Kouji Inagaki, Yasuhisa Sano, Kazuto Yamauchi

    Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017     page: 157 - 158   2017

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    Publishing type:Research paper (international conference proceedings)  

    A novel abrasive-free planarization method called catalyst-referred etching (CARE) has been invented and developed in our group. In this method, a platinum film, which acts as a catalyst, is deposited on an elastic pad that is rotated in contact with a wafer surface in water. CARE can produce flat, undamaged, and smooth SiC and SiO2 surfaces with a root-mean-square (RMS) roughness of less than 0.1 nm over a whole wafer. The mechanism is considered a dissociative adsorption of water molecules onto the Si-C bonds at the topmost Si surface. The gross activation barrier strongly correlates with the stability of the metastable state and is reduced by the formation of Pt-O chemical bonds, leading to an enhancement of the etching reaction.

    Scopus

  88. 多層膜KBミラーを用いたX線自由電子レーザーナノ集光システムの開発

    川合 蕉吾, 松山 智至, 井上 陽登, 湯本 博勝, 犬伏 雄一, 小山 貴久, 登野 健介, 大橋 治彦, 大坂 泰斗, 矢橋 牧名, 石川 哲也, 山内 和人

    精密工学会学術講演会講演論文集   Vol. 2017   page: 959 - 960   2017

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    X線自由電子レーザーは超高強度という非常に優れた性質をもつ.その性能をより向上させるためには,高精度かつ大開口数であるX線集光光学系の開発が必要不可欠である.我々は,大開口数多層膜ミラーを用いた集光光学系をSPring-8に構築した.そして,X線グレーチング干渉計で波面計測を行うことによって多層膜ミラーの作製誤差を計測しさらにこれを修正した.&lambda;/4程度の精度で多層膜集光ミラーを完成させた.

    DOI: 10.11522/pscjspe.2017S.0_959

  89. ニッケル触媒を利用した純水ベースの触媒表面基準エッチング法の開発

    藤 大雪, 礒橋 藍, 稻田 辰昭, 中平 雄太, 木田 英香, 松山 智至, 佐野 泰久, 山内 和人

    精密工学会学術講演会講演論文集   Vol. 2017 ( 0 ) page: 35 - 36   2017

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    Language:Japanese   Publisher:公益社団法人 精密工学会  

    我々は機能性材料を平坦化する手法として触媒表面基準エッチング法を開発してきた.加工液に純水,触媒にPt,を用いる本手法は高精度表面の実現を可能にするがステップフロー型エッチングであるため加工速度は未だ不十分である.そこで本研究ではニッケルを触媒として利用し,加工速度の向上を図った.表面が酸化され化学的不活性になりやすいニッケルを電気化学的手法によりその触媒活性を安定させ超高速加工を実現した.

    DOI: 10.11522/pscjspe.2017A.0_35

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Books 5

  1. Cutting-edge Analytical Techniques, 2nd Edition

    ( Role: Contributor)

    2022.1  ( ISBN:978-4-86043-737-4

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    Language:Japanese Book type:Scholarly book

  2. 差分成膜法による高精度X線ミラー作製

    松山智至, 山内和人( Role: Sole author)

    精密工学会誌  2018.3 

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    Book type:Scholarly book

  3. 全反射結像ミラーを用いた色収差のないX線顕微鏡

    松山智至( Role: Sole author)

    日本放射光学会  2018.1 

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    Book type:Scholarly book

  4. 放射光X線のための超高精度X線ミラー開発の最前線

    松山 智至, 山内 和人( Role: Contributor)

    精密工学会誌  2017.4 

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    Book type:Scholarly book

  5. 4枚の形状可変鏡に基づく開口数可変集光光学系を用いた回折限界X線集光

    松山 智至( Role: Sole author)

    X線結像光学ニューズレター  2017.4 

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    Book type:Scholarly book

MISC 2

  1. はじめての放射光実験 Invited

    松山智至

    精密工学会誌   Vol. 87 ( 7 ) page: 618 - 621   2021.7

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)  

    DOI: 10.2493/jjspe.87.7_618

  2. X線スペックル干渉計を駆使したナノビーム形成 Invited

    松山智至

    光学   Vol. 50 ( 6 )   2021.6

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)  

Presentations 25

  1. 単結晶圧電素子を用いた形状可変ミラーの開発

    上松航太、中林荘太、井上陽登、松山智至

    2022精密工学会春季大会学術講演会  2022.3.15  精密工学会

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  2. 単結晶圧電素子を用いたX線用形状可変ミラーの開発

    中林荘太,上松航太,松山智至

    2022精密工学会春季大会学術講演会  2022.3.15  精密工学会

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  3. 機械学習を用いたX線顕微鏡像からの波面推定

    青戸仁志,田中優人,松山智至

    2022精密工学会春季大会学術講演会  2022.3.15  精密工学会

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  4. 機械学習を用いたX線顕微鏡像からの波面推定

    青戸仁志,田中優人,松山智至

    第35回日本放射光学会年会・放射光科学合同シンポジウム  2022.1.8  日本放射光学会

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    Event date: 2022.1

    Language:Japanese   Presentation type:Poster presentation  

    Venue:Online   Country:Japan  

  5. 単結晶圧電素子を用いた形状可変ミラーの開発

    上松航太、中林荘太、松山智至

    第35回日本放射光学会年会・放射光科学合同シンポジウム  2022.1.8  日本放射光学会

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    Event date: 2022.1

    Language:Japanese   Presentation type:Poster presentation  

    Venue:Online   Country:Japan  

  6. ミラーベースのX線結像光学システム Invited

    松山智至

    日本光学会年次学術講演会 Optics and Photonics Japan 2021  2021.10.28 

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    Event date: 2021.10

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:Online  

  7. 結像型 X 線顕微鏡を用いた位相イメージング手法の開発

    田中優人,松山智至,井上陽登,山田純平,木村隆志,志村まり,香村芳樹,矢橋牧名,石川哲也,山内和人

    日本光学会年次学術講演会 Optics and Photonics Japan 2021  2021.10.26 

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    Event date: 2021.10

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online  

  8. Optimization of mirror deformation strategy using mechanical and piezoelectric bending system International coauthorship International conference

    T. Inoue, Y. Nishioka, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, L. Assoufid, K. Yamauchi

    SPIE Optics+Photonics2021  2021.8.1 

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    Event date: 2021.8

    Language:English   Presentation type:Oral presentation (general)  

    Venue:online  

  9. Image-based wavefront measurement for full-field X-ray microscopy International conference

    Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, K. Yamauchi

    SPIE Optics+Photonics2021  2021.8.1 

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    Event date: 2021.8

    Language:English   Presentation type:Oral presentation (general)  

    Venue:online  

  10. ミラーベースのX線結像光学システム Invited

    松山智至

    SAGA-LSセミナー  2021.7.19  SAGA-LS

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    Event date: 2021.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:Online   Country:Japan  

  11. 結像型 X 線顕微鏡におけるマルチハイト位相回復法の開発

    田中優人,松山智至,井上陽登,山田純平,香村芳樹,矢橋牧名,石川哲也,山内和人

    2021年度関西地方定期学術講演会  2021.6.30 

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    Event date: 2021.6

    Language:Japanese   Presentation type:Poster presentation  

  12. 形状可変ミラーと多層膜の高次光反射を利用したX 線sub-5 nm集光光学系の開発

    二村浩平,井上陽登,松山智至,田中優人,一井愛雄,山田純平,佐野泰久,香村芳樹,矢橋牧名,石川哲也,山内和人

    2021年度関西地方定期学術講演会  2021.6.30 

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    Event date: 2021.6

    Language:Japanese   Presentation type:Poster presentation  

  13. Single-grating interferometer for hard X-ray sub-10 nm focusing mirror system International conference

    J. Yamada, S. Matsuyama, N. Nakamura, T. Inoue, T. Osaka, I. Inoue, H. Yumoto, T. Koyama, H. Ohashi, K. Yamauchi, and M. Yabashi

    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021)   2021.4.19 

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    Event date: 2021.4

    Language:English   Presentation type:Oral presentation (general)  

    Venue:online  

  14. Development of wavefront sensing in full-field X-ray microscopy International conference

    Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, and K. Yamauchi

    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021)   2021.4.19 

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    Event date: 2021.4

    Language:English   Presentation type:Oral presentation (general)  

    Venue:online  

  15. Optimization of mirror deformation method for hybrid bender combining mechanical and piezoelectric bending International conference

    Y. Nishioka, T. Inoue, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021)   2021.4.19 

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    Event date: 2021.4

    Language:English   Presentation type:Oral presentation (general)  

    Venue:online  

  16. Development of sub-5 nm focusing system based on precise deformable mirrors International conference

    T. Inoue, S. Matsuyama, Y. Tanaka, K. Futamura, Y. Ichii, J. Yamada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi

    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021)   2021.4.19 

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    Event date: 2021.4

    Language:English   Presentation type:Oral presentation (general)  

    Venue:online  

  17. 複数の凸⾯鏡を持つ⾼度な硬 X 線結像光学系の開発(第⼀報)

    松⼭智⾄,波多健太郎,⼭内和⼈

    2021年度精密工学会春季大会学術講演会  2021.3.16  精密工学会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  18. 結像型 X 線顕微鏡における波⾯計測⼿法の開発

    ⽥中優⼈,松⼭智⾄,井上陽登,中村南美,⼭⽥純平, ⾹村芳樹,⽮橋牧名,表和彦,⽯川哲也,⼭内和⼈

    2021年度精密工学会春季大会学術講演会  2021.3.16  精密工学会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  19. 圧電素⼦駆動型形状可変ミラーを⽤いた X 線 sub-5 nm 集光システムの開発

    井上陽登,松⼭智⾄,⽥中優⼈,⼆村浩平,⼀井愛雄,⼭⽥純平,佐野泰久,⾹村芳樹,⽮橋牧名(,⽯川哲也,⼭内和 ⼈

    2021年度精密工学会春季大会学術講演会  2021.3.16  精密工学会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  20. X 線結像ミラーベースの高分解能 X 線顕微鏡 Invited

    松山智至

    ISSPワークショッフ゜「先端軟X線科学への基幹技術」  2021.3.4  東京大学物性研究所

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:Online   Country:Japan  

  21. 結像型 X 線顕微鏡における in-situ 波面計測手法の開発

    田中優人,松山智至,井上陽登,中村南美,山田純平,香村芳樹,矢橋牧名,表和彦,石川哲也,山内和人

    第34回日本放射光学会年会・放射光科学合同シンポジウム  2021.1.8  日本放射光学会

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  22. コヒーレントX線散乱を用いたXFELナノビーム強度プロファイルの再構成

    中村南美,松山智至,山田純平,井上陽登,井上伊知郎,矢橋牧名,石川哲也,山内和人

    第34回日本放射光学会年会・放射光科学合同シンポジウム  2021.1.8  日本放射光学会

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  23. X線ミラーを用いたsub-5nm集光システムの開発

    井上陽登,松山智至,一井愛雄,山田純平,佐野泰久,山内和人

    第34回日本放射光学会年会・放射光科学合同シンポジウム  2021.1.8  日本放射光学会

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  24. XFELの反射型セルフシード用マイクロチャネルカット結晶の大気圧プラズマによる内壁無歪み化 -ワイヤ電極を用いた高能率エッチング条件の検討-

    松村正太郎, 中野勝太, 佐野泰久, 大坂泰斗, 井上伊知郎,松山智至,山内和人, 矢橋牧名

    第34回日本放射光学会年会・放射光科学合同シンポジウム  2021.1.8  日本放射光学会

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  25. Wolter III 型 advanced KBミラーによる XFEL sub-10 nm 集光光学系の開発

    山田純平,松山智至,井上陽登,中村南美,田中優人,大坂泰斗,井上伊知郎,犬伏雄一,湯本博勝,小山貴久,大橋治彦,山内和人,矢橋牧名

    第34回日本放射光学会年会・放射光科学合同シンポジウム  2021.1.8  日本放射光学会

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    Event date: 2021.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

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KAKENHI (Grants-in-Aid for Scientific Research) 34

  1. X線結像ミラーを用いた次世代X線結像顕微鏡の開発

    2017

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    Grant type:Collaborative (industry/university)

  2. 高精度反射結像レンズを用いたnmスケール分解能X線顕微鏡の開発

    2017

    科学技術振興機構 

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    Grant type:Other

  3. 色収差のない結像型X線顕微鏡の開発と顕微分光への応用

    2015

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    Grant type:Collaborative (industry/university)

  4. Development of X-ray nanobeam optics by precision wavefront control

    Grant number:21H05004  2021.7 - 2025.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (S)

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    Authorship:Coinvestigator(s) 

  5. X線顕微鏡のためのアダプティブ反射レンズの開発

    Grant number:20K21146  2020.7 - 2022.3

    科学研究費助成事業  挑戦的研究(萌芽)

    松山 智至

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    Authorship:Principal investigator 

    Grant amount:\6370000 ( Direct Cost: \4900000 、 Indirect Cost:\1470000 )

    X線顕微鏡は透過力が高いため,厚い試料の内部や水中・ガス中などの実環境下での観察に威力を発揮する.また,X線は波長が短いため原理的に高分解能を実現できる.さらに,その高いエネルギーを活かして分析も可能である.一方で,X線は短波長であるため,光学素子作製が難しい.また,分解能向上のためには開口数を大きく設計する必要があるが,開口数に比例して素子作製は難しくなる.本研究では,アダプティブ反射レンズを開発することで,この問題を解決する.本反射レンズは圧電素子が取り付けられており,形状を自由かつ高精度に変えられる.超高分解能X線顕微鏡を実現することを目指し,アダプティブ反射レンズを試作する.
    本研究では,X線用アダプティブ反射レンズを用いて波面収差を積極的に修正することで,超高分解能X線顕微鏡の実現可能性を検討している.初年度は,①光学系の設計,②形状可変ミラーの設計・解析,③波面計測法の検討,④形状可変ミラーの試作 を実施した.
    ①では,SPring-8のBL29XULに設置できる実用的な結像光学系を設計・性能予測を行った.光線追跡法と波動光学シミュレーションによってその性能予想を行い,広い視野と高い分解能を有することを確認した.
    ②では,形状可変ミラーの設計とその性能を有限要素法を使って解析した.予想される形状誤差の空間周波数とバンプ高さから,電極数と基板厚み等を決定した.また,各電極にかける電圧に対する応答関数(応答形状変形)を得ることで,形状誤差を修正するために必要な電圧分布をシミュレートした.
    ③では,有望な波面計測手法である,格子干渉計,微小点を用いる方法,反復的位相回復計算を用いる方法を様々な方向から検討した.格子干渉計では可能性のあるすべてのシステムエラー(格子作製誤差,カメラ作製誤差,格子のミスアライメント,カメラのミスアライメント)を検討した.微小点を用いる方法では,実際のX線顕微鏡を使たフィージビリティテストを実施した.また,すべての方法でシミュレーションを実施し,実現可能性の確認を行った.
    ④では形状可変ミラーを試作し,可視光干渉計を使って基礎特性の評価を行った.現在も更なる試作と評価を続けている途中である.
    X線ミラーの設計・シミュレーション・試作を行うことができ,また,並行して波面計測法についても調査が進んだことから,計画通り順調に進展している.
    今後は,SPring-8においてその性能の評価を進めるとともに,さらに高い性能を有するアダプティブミラーの設計・試作を進めていく.

  6. Development of zoom condenser system for X-ray free electron laser by high precision deformable reflective optics

    Grant number:16H06358  2020

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    Grant type:Collaborative (industry/university)

  7. Development of zoom condenser system for X-ray free electron laser by high precision deformable reflective optics

    Grant number:16H06358  2019

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    Grant type:Collaborative (industry/university)

  8. Development of next-generation full-field X-ray microscope based on X-ray mirrors

    Grant number:17H01073  2017.4 - 2022.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (A)

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    Authorship:Principal investigator 

    Grant amount:\41860000 ( Direct Cost: \32200000 、 Indirect Cost:\9660000 )

  9. 高精度形状可変ミラー光学系の構築とX線自由電子レーザーのアダプティブ集光

    Grant number:16H06358  2016.5 - 2021.3

    山内 和人

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    Authorship:Coinvestigator(s) 

    本年度は,目的達成のための要素技術である以下の5つの項目を中心に実施した.
    ①XFEL照射に対応可能な大面積ナノ精度加工の高度化:昨年度に引き続き,大型ミラー対応可能な3次元形状計測機や干渉計を高性能化した.これと数値制御EEMや差分成膜法を高度に連携させることで,ミラー形状を1nmの精度で修正する技術を確立した.大型形状可変ミラーだけでなく大型集光ミラーを高い形状精度で作製することが可能となった.
    ②XFELに最適化された2段集光光学系の提案とデモ実験:既存のズームコンデンサーは2組のアダプティブKBミラーで構成されていたが,新たにコンパクトかつ制御性のよい新規ズームコンデンサーを提案した.本光学系では,形状可変ミラーを凸面鏡から凹面鏡やその逆に変形させることでアダプティブ集光を行う.シミュレーションの結果,期待されるビーム径可変集光を実現できることが分かった.SPring-8にてデモ実験を実施したところ,予想したビーム径変化を確認した.
    ③ピエゾ素子の変形ドリフトの抑制法の高度化:形状可変ミラーに搭載しているピエゾ素子の変形ドリフトを抑制するために,特別な電圧パターンを印加する方法を研究した.また,単結晶圧電素子を用いた形状可変ミラーを試作しその動作を調べた.これらは変形ドリフトの抑制効果が見られ,形状可変ミラーのさらなる安定性向上が可能となった.
    ④波面計測法・集光ビーム径評価法の高度化:X線集光ミラーの形状誤差を高精度に決定するために必要となるX線波面計測法をテストした.ペンシルビーム法,グレーチング干渉計,タイコグラフィ法の精度を検証した.また,XFELにおける集光ビームの評価法として,スペックル計測法や蛍光X線の強度干渉計測などを試み,それぞれの精度について研究した.
    大型形状可変ミラーやそれに関わる要素技術の開発が順調に進んでいる.また,新型のズームコンデンサー光学系を提案し,そのデモ実験に成功した.これによって,本研究の応用範囲が広がった.
    今後の予定として,①新型形状可変ミラーを使ったアダプティブ集光のテスト,②新型形状可変ミラーの機械式ベント部分の高性能化,③波面計測法や集光ビーム径評価法の高度化 を中心に進める予定である.完成度の高い集光システムの完成を目指し,高精度かつユニークな要素技術の開発を進めていく.

  10. Development of zoom condenser system for X-ray free electron laser by high precision deformable reflective optics

    Grant number:16H06358  2016

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    Grant type:Collaborative (industry/university)

  11. コヒーレントX線による走査透過X線顕微鏡システムの構築と分析科学への応用

    2015

    JST 

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    Grant type:Other

  12. コヒーレントX線による走査透過X線顕微鏡システムの構築と分析科学への応用

    2014

    JST 

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    Grant type:Other

  13. 色収差のない結像型X線顕微鏡の開発と顕微分光への応用

    2014

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    Grant type:Collaborative (industry/university)

  14. 高精度X線ミラー作製のための新規形状創生プロセスの開発

    2014

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    Grant type:Collaborative (industry/university)

  15. XFELとパワーレーザーによる新極限物質材料の探索

    2014

    文部科学省, 科学技術振興機構 

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    Grant type:Other

  16. 新規2段非球面ミラーを用いた色収差のない結像型硬X線顕微鏡の開発

    2013

    コニカミノルタ科学技術振興財団 

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    Grant type:Collaborative (industry/university)

  17. コヒーレントX線による走査透過X線顕微鏡システムの構築と分析科学への応用

    2013

    JST 

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    Grant type:Other

  18. 高精度X線ミラー作製のための新規形状創生プロセスの開発

    2013

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    Grant type:Collaborative (industry/university)

  19. XFELとパワーレーザーによる新極限物質材料の探索

    2013

    文部科学省, 科学技術振興機構 

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    Grant type:Other

  20. コヒーレントX線による走査透過X線顕微鏡システムの構築と分析科学への応用

    2012

    JST 

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    Grant type:Other

  21. XFELとパワーレーザーによる新極限物質材料の探索

    2012

    文部科学省, 科学技術振興機構 

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    Grant type:Other

  22. コヒーレントX線による走査透過X線顕微鏡システムの構築と分析科学への応用

    2011

    JST 

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    Grant type:Other

  23. 高密度X線ナノビーム形成と走査型蛍光X線顕微鏡への応用

    2011

    日本学術振興会 

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    Grant type:Collaborative (industry/university)

  24. 補償光学系を駆使した多段光学系によるX線自由電子レーザーのナノメートル集光

    2011

    日本学術振興会 

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    Grant type:Collaborative (industry/university)

  25. 新規2段非球面ミラーを用いた高分解能X線結像光学系の開発

    2011

    大阪大学大学院工学研究科若手教員専門力アッププロジェクト 

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    Grant type:Other

  26. コヒーレントX線による走査透過X線顕微鏡システムの構築と分析科学への応用

    2010

    JST 

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    Grant type:Other

  27. 空間分解能30nmを持つアクロマティック硬X線顕微鏡の開発

    2010

    大阪大学,“飛翔30”若手プログラム 

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    Grant type:Collaborative (industry/university)

  28. 新規X線集光光学系による細胞内元素分布の高速・高感度イメージング

    2010

    日本学術振興会 

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    Grant type:Collaborative (industry/university)

  29. Development of achromatic X-ray imaging system for X-ray microscopy with a sub-50 nm resolution

    2010

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    Grant type:Other

  30. 4枚の非球面ミラーを用いた結像型硬X線顕微鏡の開発

    2010

    科学技術振興機構,産学イノベーション加速事業【先端計測分析技術・機器開発】要素技術プログラム 

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    Grant type:Other

  31. 新規X線集光光学系による細胞内元素分布の高速・高感度イメージング

    2009

    日本学術振興会 

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    Grant type:Collaborative (industry/university)

  32. 細胞イメージングのための30nmの分解能を持つ硬X線照射型可視共焦点顕微鏡の開発

    2008

    文部科学省 

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    Grant type:Collaborative (industry/university)

  33. 細胞内元素アレイ解析の臨床応用に向けた基盤研究

    2008

    厚生労働省 

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    Grant type:Other

  34. 細胞イメージングのための30nmの分解能を持つ硬X線照射型可視共焦点顕微鏡の開発

    2007

    文部科学省 

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    Grant type:Collaborative (industry/university)

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Teaching Experience (Off-campus) 9

  1. Seminar in Precision Science and Technology II

    2020

  2. Seminar in Precision Science and Technology I

    2020

  3. Seminar in Precision Science and Technology IV

    2020

  4. Seminar in Precision Science and Technology III

    2020

  5. Physics Experiments

    2017

  6. Scope of Precision Science and Technology I

    2015

  7. Scope of Precision Science and Technology I

    2014

  8. Information Literacy A

    2013

  9. Information Literacy A

    2012

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Social Contribution 1

  1. 放射光X線を用いた究極の分析技術

    Role(s):Lecturer

    豊田西高等学校  豊西総合大学  2021.11