研究者詳細 - 青木学聡

論文 - 青木学聡

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Development and Deployment of Research Data Preservation Policy at a Japanese Research University in 2016 国際誌

Aoki, T; Kajita, S; Akasaka, H; Takeda, H

2017 6TH IIAI INTERNATIONAL CONGRESS ON ADVANCED APPLIED INFORMATICS (IIAI-AAI) 頁： 120 - 123 2017年7月

担当区分：筆頭著者記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）出版者・発行元：Proceedings - 2017 6th IIAI International Congress on Advanced Applied Informatics, IIAI-AAI 2017

This paper reviews the policy development and deployment for research data preservation at Kyoto University, Japan, during fiscal year (FY) 2016. The universitys regulations and guidelines for research integrity and data preservation were formulated in FY2014 and 2015, in response to statements from the Ministry of Education, Culture, Sports, Science and Technology, and supplemental comments by Science Council of Japan (in FY2014). In FY2016, several departments at KU developed a prototype system for research data preservation using open source web frameworks with preference to agility of deployment rather than robustness. The prototype system also worked as the proof of concept for a full-service research data preservation system, which is due to be deployed by KUs central IT department in FY2017 for university-wide use.

DOI： 10.1109/iiai-aai.2017.129

研究ライフサイクルに沿ったアカデミックデータマネジメント支援環境による全学研究基盤強化構想

梶田将司, 青木学聡

情報処理学会研究報告 2017-IOT-38 巻 ( 4 ) 頁： 1 - 6 2017年6月

Angled etching of Si by ClF3–Ar gas cluster injection 査読有り国際誌

Toshio Seki, Hiroki Yamamoto, Takahiro Kozawa, Tadashi Shojo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo

Japanese Journal of Applied Physics 56 巻 ( 6S2 ) 頁： 06HB02 2017年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Japan Society of Applied Physics

Reactive gas cluster injection is an etching method that uses a neutral cluster beam without ions. This process can avoid damage caused by energetic ion irradiation and vacuum UV light from plasma. ClF3-Ar gas cluster injection was performed using a nozzle placed at various angles in the range of 0-78° from the normal to the sample. The Si substrate was anisotropically etched in the direction of the cluster beam, although the incident angle of the cluster beam was oblique. Oblique holes of 100nm diameter and oblique square pillars of 3 μm width were fabricated with a high aspect ratio by angled cluster injection. It is expected that this process will create unprecedented structures for use in micro-electromechanical systems (MEMSs) or photonic crystals.

DOI： 10.7567/jjap.56.06hb02

Fabrication of a Si lever structure made by double-angled etching with reactive gas cluster injection 査読有り国際誌

Seki, T; Yamamoto, H; Kozawa, T; Koike, K; Aoki, T; Matsuo, J

APPLIED PHYSICS LETTERS 110 巻 ( 18 ) 2017年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Applied Physics Letters

The reactive gas cluster injection process is an etching method that uses a neutral cluster beam without plasma. Low-damage Si etching can be realized with this method because of the very low irradiation energy; the product is free of charge-up problems and vacuum UV light damage. The ClF3-Ar neutral cluster injection system for angled etching was constructed with a nozzle that was placed at 45° from the sample normal. The angled anisotropic Si etching is demonstrated with a high aspect ratio. The lever structure, which is often used in microelectromechanical systems (MEMSs), was fabricated by double-angled etching with reactive gas cluster injection. A simple fabrication process for the lever structure was achieved by double-angled etching with reactive gas cluster injection. These results show that various three-dimensional (3D) structures can be fabricated by repeated anisotropic etching with varying angles and directions. It is expected that the angled anisotropic etching process will enable the creation of unprecedented structures for use in MEMSs or photonic crystals.

DOI： 10.1063/1.4982970

BYOD-PCとコース管理システムを活用した電気電子回路演習科目の実施

青木学聡, 久門尚史, 木村真之, 蛯原義雄, 下田宏

研究報告教育学習支援情報システム(CLE) 2017 巻 ( 3 ) 頁： 1 - 5 2017年3月

記述言語：日本語掲載種別：研究論文（学術雑誌）出版者・発行元：情報処理学会

京都大学電気電子工学科は 2016 年度に BYOD-PC を前提とした電気電子回路演習科目を必修科目として開始した．必修科目として演習を成立させるために「ソフトウェア，ハードウェアの選定」, 「必修科目のためのセーフティネット構築」を準備段階において検討し, これに合わせて演習カリキュラムを設計した. 一方, 演習の実施時段階においては, 京都大学のコース管理システムを積極的に活用し, 「テキスト, 各種資料の配布」, 「課題提出と個々の進捗確認」をすべて電子的に行った. BYOD-PC とコース管理システムを活用することで, 演習科目における反転学習の導入, 個人単位のスキルの習得とグループワークによるプロジェクト的活動の連携といった, 新しい形態での演習科目を実現できた.

研究データ管理(RDM)トレーニングツールの構築と展開査読有り

常川真央, 天野絵里子, 大園隼彦, 西薗由依, 前田翔太, 松本侑子, 南山泰之, 三角太郎, 青木学聡, 尾城孝一, 山地一禎

情報知識学会誌 27 巻 ( 4 ) 頁： 362 - 365 2017年

記述言語：日本語掲載種別：研究論文（学術雑誌）出版者・発行元：情報知識学会

<p>　研究データ管理は，研究プロセスの透明性を高め不正を防止する目的とともに，オープンサイエンスにおける研究データ共有を支える重要なプロセスである．しかし，研究データ管理のスキルを持つ人材はまだまだ少ないのが実状である．そこでオープンアクセスリポジトリ推進協会(JPCOAR)は，研究データタスクフォースを組織し，研究データ管理(RDM)のスキルを習得するためのトレーニングツールを開発し，2017年6月6日にWeb上で公開した．さらに，国立情報学研究所に協力し，オンライン講座「オープンサイエンス時代の研究データ管理」を11月15日に開講する予定である．本発表では，こうしたRDMの習得を支援する一連の活動について紹介したうえで，今後の研究データ管理業務を担当する人材育成について論じる.</p>

DOI： 10.2964/jsik_2017_042

Development and Deployment of Research Data Preservation Policy at a Japanese Research University in 2016

Aoki Takaaki, Kajita Shoji, Akasaka Hirokazu, Takeda Hagane

2017 6th IIAI International Congress on Advanced Applied Informatics (IIAI-AAI) 頁： 120 - 123 2017年

記述言語：英語掲載種別：研究論文（学術雑誌）

This paper reviews the policy development and deployment for research data preservation at Kyoto University, Japan, during fiscal year (FY) 2016. The universitys regulations and guidelines for research integrity and data preservation were formulated in FY2014 and 2015, in response to statements from the Ministry of Education, Culture, Sports, Science and Technology, and supplemental comments by Science Council of Japan (in FY2014). In FY2016, several departments at KU developed a prototype system for research data preservation using open source web frameworks with preference to agility of deployment rather than robustness. The prototype system also worked as the proof of concept for a full-service research data preservation system, which is due to be deployed by KUs central IT department in FY2017 for university-wide use.

エンタープライズコンテント管理システムと光ディスクストレージによるデジタルデータ長期保存の検討

青木学聡, 梶田将司, 赤坂浩一, 武田鋼

大学ICT推進協議会2016年度年次大会 2016年12月

利用者側での CMS の運用改善 -- Sakai における課題ツールを例に

青木学聡, 喜多一

大学ICT推進協議会2016年度年次大会 2016年12月

記述言語：日本語掲載種別：研究論文（学術雑誌）

AXIES: 大学ICT推進協議会 2016年度年次大会Webベースの情報システムは操作面での改善をユーザサイドでは行いにくいという欠点がある．コース管理システム(CMS)も教員が本格的に利用する上では授業を受講する多くの学生と個々にインタラクションする場合の操作量が相当に多いという課題があるがこれを実運用するサーバ側で改善することは管理上の問題なども発生する．本報告では Sakai の課題ツールで回答を一括ダウンロードできることを利用し，回答を効果的に閲覧するプログラムを作成することでユーザ側での運用を改善する試みについて報告する．

Molecular dynamics simulations study of nano particle migration by cluster impact 査読有り

Takaaki Aoki, Toshio Seki, Jiro Matsuo

Surface and Coatings Technology 306 巻頁： 63 - 68 2016年11月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Elsevier {BV}

© 2016 Elsevier B.V.Molecular dynamics (MD) simulations are performed in order to investigate the radiation effects of a huge and slow gas cluster for the surface cleaning process. When a large argon cluster with the size ranging from 20,000 to 300,000 is accelerated with a total of 30. keV, each constituent atom carries very low energy ranging from 1.5. eV/atom to 0.1. eV/atom. In many cases, the cluster does not penetrate the solid target surface but is deflected in a lateral direction. This collisional process results in a high density particle flow spreading along the surface plane due to cohesion of the cluster, which suggests the capability to modify the irregular surface structure, without damage in the target. The MD simulations demonstrate that such a huge cluster sweeps a nano particle (NP, 3. nm in radius) attached on a planar silicon target's surface. From the investigation of various conditions of cluster impact, it is found that the migration distance is correlated with the kinetic energy applied on the NP by the impact of cluster atoms. Additionally, the MD results suggest the existence of optimized parameters for the maximum migration distance for the offset distance between the cluster and the NP, and the cluster size for constant total energy (equivalent to energy per atom or kinetic energy density). The optimized offset distance was estimated as the summation of radii of the incident cluster and the NP. The optimized energy per atom was suggested around 0.6. eV/atom, where the cluster efficiently spreads in lateral direction keeping higher kinetic energy density of particle flow.

DOI： 10.1016/j.surfcoat.2016.04.053

その他リンク： http://orcid.org/0000-0002-5926-4903

Reactive etching by ClF

Seki Toshio, Yoshino Yu, Senoo Takehiko, Koike Kunihiko, Aoki Takaaki, Matsuo Jiro

Jpn. J. Appl. Phys. 55 巻 ( 6 ) 頁： 06HB01 2016年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Institute of Physics

A reactive gas cluster injection system with a scanning function was developed in order to increase the processing area. High-precision anisotropic etching with an aspect ratio of 7 was achieved for ClF<inf>3</inf>cluster etching without scanning. However, with scanning, the aspect ratio for etching decreased to 1.5 because the side walls were etched by the gas retained in the trench. By reducing the source gas pressure, increasing the target distance, and mixing He in the source gas, anisotropic etching with an aspect ratio of about 6.3 was achieved with this apparatus.

DOI： 10.7567/JJAP.55.06HB01

Development of ambient SIMS using mega-electron-volt-energy ion probe 査読有り

Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 34 巻 ( 3 ) 2016年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：American Institute of Physics Inc.

A new secondary ion mass spectrometry device using an ion probe in the heavy mega-electron-volt (MeV) energy range was developed for detecting large intact molecules with high sensitivity under ambient conditions. The instrument is based on the characteristics induced by the MeV-energy heavy ions, namely, electronic excitation induced in the near-surface region and the high transmission capability under ambient conditions. The secondary ions were transported to the mass analyzer effectively by an electric field and atmospheric gas flow, whereas the chemical impurities from the gas were cleared by using an electric field. In addition, this new ambient analysis approach enables evaluation not only of solid samples, but also of liquid samples that were evaporated under advanced vacuum. In this study, liquid water and samples of a benzoic acid solution were measured under ambient conditions.

DOI： 10.1116/1.4941724

Development of ambient SIMS using mega-electron-volt-energy ion probe 査読有り

Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34 巻 ( 3 ) 頁： 4 2016年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：A V S AMER INST PHYSICS

A new secondary ion mass spectrometry device using an ion probe in the heavy mega-electron-volt (MeV) energy range was developed for detecting large intact molecules with high sensitivity under ambient conditions. The instrument is based on the characteristics induced by the MeV-energy heavy ions, namely, electronic excitation induced in the near-surface region and the high transmission capability under ambient conditions. The secondary ions were transported to the mass analyzer effectively by an electric field and atmospheric gas flow, whereas the chemical impurities from the gas were cleared by using an electric field. In addition, this new ambient analysis approach enables evaluation not only of solid samples, but also of liquid samples that were evaporated under advanced vacuum. In this study, liquid water and samples of a benzoic acid solution were measured under ambient conditions. (C) 2016 American Vacuum Society.

DOI： 10.1116/1.4941724

Secondary ion emission from leucine and isoleucine under argon gas-cluster ion bombardment 査読有り

Hubert Gnaser, Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34 巻 ( 3 ) 2016年5月

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：A V S AMER INST PHYSICS

The emission of sputtered ions from isoleucine and leucine specimens under bombardment by 10 keV argon gas-cluster ions Ar-1000(+) was investigated by orthogonal time-of-flight secondary ion mass spectrometry, in an attempt to examine the possibility of discriminating these amino acids by means of specific differences in their mass spectra. Apart from of the protonated molecular ions (M+H)(+) a prolific flux of singly charged and doubly charged molecular cluster ions, (M-n+H)(+) (1 <= n <= 15) and (M-n+2H)(2+) (8 <= n <= 29) was observed. The distributions of the cluster yields Y-n as a function of their size n were found to be very similar for both amino acids. In addition, the fraction of emitted fragment and other ion species is typically low, and no distinct differences were detected for isoleucine and leucine. Therefore, the present data seem to indicate that a discrimination of isoleucine and leucine via mass spectrometric means is not possible. (C) 2016 American Vacuum Society.

DOI： 10.1116/1.4939497

Observation of Liquid Water with Ambient SIMS

Kusakari M., Fujii M., Seki T., Aoki T., Matsuo J.

Transactions of the Materials Research Society of Japan 41 巻 ( 3 ) 頁： 309 - 311 2016年

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：一般社団法人日本MRS

<p> Secondary ion mass spectrometry (SIMS) is powerful method for obtaining component information from solid samples, such as semiconductor devices and biological tissue. Moreover, SIMS has high surface sensitivity because of the use of a primary ion probe. The keV-energy ion probe is, however, unstable under low vacuum conditions and this makes evaluation of volatile liquid samples difficult. A new SIMS technique that uses an MeV-energy heavy ion probe, called ambient SIMS, enables measuring volatile liquid samples under ambient conditions by high transmission capability of the primary probe. In this study, water in liquid form, which has a relatively high vapor pressure (2,339 Pa at 20℃), was evaluated by ambient SIMS and gave some cluster ions with high intensity. This result suggests that ambient SIMS has significant potential for evaluating both solid and liquid samples with high sensitivity.</p>

DOI： 10.14723/tmrsj.41.309

Ambient analysis of liquid materials with Wet-SIMS 査読有り

Toshio Seki, Masakazu Kusakari, Makiko Fujii, Takaaki Aoki, Takaaki Aoki, Jiro Matsuo

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 371 巻頁： 189 - 193 2016年

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

© 2015 Elsevier B.V. All rights reserved.Secondary ion mass spectrometry (SIMS) is a method with high surface sensitivity that allows both elemental and molecular analysis. However, volatile liquid (wet) samples are difficult to measure using conventional SIMS, because samples must be dried and introduced into a high vacuum chamber. The mean free path of ions with energy in the keV range is very short in low vacuum and these ions cannot penetrate the surface. In contrast, ions in the MeV-energy range have high transmission capability in low vacuum and wet samples can be measured using heavy ions without dry sample preparation. Ion beams in the MeV-energy range also excite electrons near the surface and enhance the ionization of high-mass molecules and thus fragment-suppressed SIMS spectra of ionized molecules can be obtained. We have developed an ambient analysis system with secondary ion mass spectrometry for wet samples (Wet-SIMS) that operates from low vacuum to 30 kPa using MeV-energy heavy ion beams. The system is equipped with fine apertures that avoid vacuum degradation at both the primary beam incidence and the secondary ion measurement sides, even when the target chamber is filled with He gas at 30 kPa. Water evaporation was suppressed in a He atmosphere of 16.5 kPa and a solution of benzoic acid could be measured using MeV-energy heavy ions.

DOI： 10.1016/j.nimb.2015.09.046

Development of Low-vacuum SIMS instruments with large cluster Ion beam 査読有り

Suzuki K, Kusakari M, Fujii M, Seki T, Aoki T, Matsuo J

Surface and Interface Analysis 48 巻 ( 11 ) 頁： 1121 - 1121 2016年

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Surface and Interface Analysis

Large cluster ions such as Arn+ (n > 1000) are expected to have a better transmission factor than monomer ions or other small cluster ions because of their large mass, and thus they might be used as a probe in secondary ion mass spectrometry measurements even at low vacuum pressure. In this study, we examined the transmission and sputtering properties of Ar gas cluster ion beam under low vacuum. Current images of a Ni mesh (400 line/inch) obtained with varying target chamber pressure under low vacuum (<50 Pa) indicated that cluster ions could reach the target without wide divergence. Furthermore, it was demonstrated that cluster ions could sputter organic samples even at 80 Pa. Although the sputtering efficiency decreased by two orders of magnitude at 80 Pa, beam focusing (~20 µm) was achieved with a beam current of 4 nA, that is, one or two orders of magnitude higher than the conventional Ar gas cluster ion beam source. From these results, we concluded that low-vacuum secondary ion mass spectrometry measurements (<80 Pa) might be achievable. Copyright © 2016 John Wiley & Sons, Ltd.

DOI： 10.1002/sia.6121

Development of ambient SIMS using mega-electron-volt-energy ion probe 査読有り

Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 34 巻 ( 3 ) 2016年

Secondary ion emission from leucine and isoleucine under argon gas-cluster ion bombardment 査読有り

Hubert Gnaser, Hubert Gnaser, Masakazu Kusakari, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 34 巻 ( 3 ) 頁： 5 2016年

記述言語：英語掲載種別：研究論文（学術雑誌）

© 2016 American Vacuum Society.The emission of sputtered ions from isoleucine and leucine specimens under bombardment by 10 keV argon gas-cluster ions Ar 1000 + was investigated by orthogonal time-of-flight secondary ion mass spectrometry, in an attempt to examine the possibility of discriminating these amino acids by means of specific differences in their mass spectra. Apart from of the protonated molecular ions (M+H)+ a prolific flux of singly charged and doubly charged molecular cluster ions, (Mn+H)+ (1 ≤ n ≤ 15) and (Mn+2H)2+ (8 ≤ n ≤ 29) was observed. The distributions of the cluster yields Yn as a function of their size n were found to be very similar for both amino acids. In addition, the fraction of emitted fragment and other ion species is typically low, and no distinct differences were detected for isoleucine and leucine. Therefore, the present data seem to indicate that a discrimination of isoleucine and leucine via mass spectrometric means is not possible.

DOI： 10.1116/1.4939497

Yields and images of secondary ions from organic materials by different primary Bi ions in time-of-flight secondary ion mass spectrometry 査読有り

Rie Shishido, Makiko Fujii, Toshio Seki, Takaaki Aoki, Jiro Matsuo, Shigeru Suzuki

Rapid Communications in Mass Spectrometry 30 巻 ( 4 ) 頁： 476 - 482 2016年

記述言語：英語掲載種別：研究論文（学術雑誌）出版者・発行元：Rapid Communications in Mass Spectrometry

© 2016 John Wiley & Sons, Ltd.Rationale Bi cluster ions are used as a source of primary ions for time-of-flight secondary ion mass spectrometry (TOF-SIMS), and it has been recognized that secondary ion yields of macromolecules are higher with Bi cluster ions than with monomer ions or other cluster ions such as Cs+, Ga+ and Aun+. However, the analysis conditions of Bi cluster TOF-SIMS are not sufficiently established. This study provides information on the secondary ion yields, damage cross-section and spatial resolution obtained with different primary Bi ions. Methods We investigated the secondary ion yields, damage cross-section and spatial resolution using three different primary Bi ions in TOF-SIMS. The primary ions selected were Bi1+, Bi3+ and Bi32+ that were accelerated with 25 kV and the positively charged secondary ions were analyzed. The samples were 1, 2-distearoyl-sn-glycero-3-phosphocholine (C44H88NO8P, DSPC), which is a typical lipid, and N,N'-di(1-naphthyl)-N,N'-diphenylbenzidine (C44H32N2, NPD) and 4,4',4"-tris[2-naphthyl(phenyl)amino]triphenylamine (C66H48N4, 2-TNATA), which are organic functional materials. Results Although the secondary ion yields of DSPC were highest when measured with Bi3+, the spatial resolution obtained from all DSPC analyses could not be evaluated because of the low intensity of the secondary molecular ions. On the other hand, for both NPD and 2-TNATA, the secondary ion yields were highest when imaged with Bi32+. Also, we obtained the highest spatial resolution using Bi32+. In the analysis of all molecules, the damage cross-section obtained with Bi32+ was also the highest. Conclusions When secondary ions were sensitively detected, images of the high spatial resolution were obtained by using Bi32+. On the other hand, when the secondary ion sensitivity was low, the spatial resolution depended on the yields of secondary ions, implying that the selection of the primary ion species is crucial for SIMS analysis of large molecules.

DOI： 10.1002/rcm.7455

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