Updated on 2023/04/02

写真a

 
OKA Chiemi
 
Organization
Graduate School of Engineering Micro-Nano Mechanical Science and Engineering 2 Assistant Professor
Graduate School
Graduate School of Engineering
Undergraduate School
School of Engineering Mechanical and Aerospace Engineering
Title
Assistant Professor
Contact information
メールアドレス
External link

Degree 1

  1. Doctor of Engineering ( 2016.3   Tokyo Institute of Technology ) 

Research Interests 4

  1. Soft material

  2. Nano and micro structure

  3. Composite

  4. Magnetic nanoparticle

Research Areas 4

  1. Nanotechnology/Materials / Nano/micro-systems

  2. Nanotechnology/Materials / Nanomaterials

  3. Nanotechnology/Materials / Composite materials and interfaces

  4. Natural Science / Magnetism, superconductivity and strongly correlated systems

Current Research Project and SDGs 2

  1. 熱輸送デバイスの性能向上に資する一方向性多孔体作製

  2. Wirelessマイクロバルブの開発

Research History 1

  1. Nagoya University   Researcher

    2016.4 - 2018.3

Education 2

  1. Tokyo Institute of Technology   Graduate School, Division of Integrated Science and Engineering

    2011.3 - 2016.3

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    Country: Japan

  2. Utsunomiya University

    2007.4 - 2011.3

Professional Memberships 2

  1. The Magnetics Society of Japan

  2. The Japan Society of Mechanical Engineers

Committee Memberships 1

  1.   男女共同参画推進専門委員会委員  

    2018   

Awards 10

  1. 日本機械学会 機械材料・材料加工部門 若手優秀講演フェロー賞受賞

    2022   日本機械学会 機械材料・材料加工部門   高磁歪・高磁化率を両立した複相磁性材料の創製に向けた検討

    佐野光哉,山崎貴大,岡智絵美,櫻井淳平,秦誠一

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    Award type:Award from Japanese society, conference, symposium, etc. 

  2. Best Paper Award of MHS2021

    2021.12   32nd 2021 International Symposium on Micro-NanoMechatronics and Human Science   Combinatorial search of new Ti-Ni-Hf high formable shape memory alloys

    S. Inoue, T. Yamazaki, C. Oka, S. Hata and J. Sakurai

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    Award type:Award from international society, conference, symposium, etc. 

  3. 2020年度日本機械学会東海支部功労賞

    2021.3   日本機械学会東海支部  

  4. 日本機械学会2020年度年次大会マイクロ・ナノ工学部門 若手優秀講演フェロー賞受賞

    2021.2   日本機械学会マイクロ・ナノ工学部門   テクスチャ基板による色素増感太陽電池における変換効率への影響

    西保 裕司,楊 娜,岡 智絵美,秦 誠一,櫻井 淳平

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    Award type:Award from Japanese society, conference, symposium, etc. 

  5. 日本機械学会 機械材料・材料加工部門 若手優秀講演フェロー賞受賞

    2021   日本機械学会 機械材料・材料加工部門   逆リフトオフ法を用いた MEMS ミラーデバイスの作製

    高瀬 駿,山田 恭平,中川 優希,山崎 貴大,岡 智絵美,櫻井 淳平,秦 誠一

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    Award type:Award from Japanese society, conference, symposium, etc. 

  6. ポスター最優秀賞

    2020.3   形状記憶合金協会 第11期定時総会   Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

    井上 慎,岡 智絵美,秦 誠一,櫻井 淳平

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    Award type:Award from Japanese society, conference, symposium, etc. 

  7. 日本機械学会2019年度年次大会マイクロ・ナノ工学部門 優秀講演論文表彰

    2020.2   日本機械学会マイクロ・ナノ工学部門  

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  8. 日本磁気学会平成28年度学術奨励賞 (内山賞)

    2016.9   日本磁気学会  

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    Country:Japan

  9. 12th Conference for BioSignal and Medicine(CBSM2013)優秀ポスター賞

    2013.7  

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  10. 平成24年度土肥賞 (修士論文発表会優秀発表賞)

    2013.3   東京工業大学大学院総合理工学研究科物質科学創造専攻  

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Papers 47

  1. Effect of structural relaxation at bellow crystallization temperature on internal stress of Ni-Nb-Zr thin film amorphous alloys diaphragm for micro electromechanical systems sensors

    Haga Fuyuki, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Hoshino Yuto, Sakurai Junpei

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( SD )   2022.6

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Japanese Journal of Applied Physics  

    In this paper, the effect of structural relaxation at temperatures below crystallization on internal stress of Ni-Nb-Zr thin film amorphous alloy (including thin film metallic glass: TFMG) diaphragms was investigated. We fabiricated the Ni-Nb-Zr diaphragm samples with four compositions. Before fabrication of diaphragm structure by etching, Ni-Nb-Zr thin films on Si substrate were annealed at a temperature below crystallization (473, 523, and 573 K) for structural relaxation. By performing bulge tests on annealed Ni-Nb-Zr diaphragms, we were able to determine their mechanical properties. As the result, Young’s modulus of all samples increased slightly with increasing annealing temperature because of the decrease of the free volumes during structural relaxation. Based on the results of internal stress, structural relaxation of all samples occurred below 473 K. Moreover, the effects of annealing temperature on internal stress differed by compositions. They were thought to be caused by the rate of structural relaxation.

    DOI: 10.35848/1347-4065/ac5d12

    Web of Science

    Scopus

  2. Combinatorial search for Ti-Ni-Hf high formable shape memory alloys

    Inoue Shin, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( 6 )   2022.6

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Japanese Journal of Applied Physics  

    In this study, we searched for Ti-Ni-Hf high formable shape memory alloys (HFSMAs) using combinatorial methods. By adding Hf to Ti-Ni SMAs, the potential is that Ti-Ni SMAs become metallic glasses. For efficient material search, the glass transition temperature was evaluated through combinatorial measurement of electrical resistance during crystallization. From the results, we searched for Ti-Ni-Hf HFSMAs, which undergo glass transition in the amorphous state. Ni-rich Ti-Ni-Hf thin-film amorphous alloys with more than 10 at% Hf content became thin film metallic glasses, whereas Ni-poor samples did not. Further, we evaluated the effect of annealing temperature on the martensitic transformation temperature of Ti-Ni-Hf SMAs using combinatorial methods. From the results, we measured the reverse transformation start temperature A s at 368-404 K, and it varied with the annealing temperature and Hf composition.

    DOI: 10.35848/1347-4065/ac6a97

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  3. Examination of Mechanical Properties and Photoelastic Properties of Gel Material for Blood Vesssel Mimics

    Yamada Daichi, Hori Simon, Abe Shuhe, Kumeno Yuki, Yamazaki Takahiro, Oka Chiemi, Sakurai Junpei, Hata Seiichi

    JOURNAL OF MEDICAL DEVICES-TRANSACTIONS OF THE ASME   Vol. 15 ( 3 )   2021.9

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Journal of Medical Devices, Transactions of the ASME  

    Catheter surgery is a minimally invasive treatment in which visual information is limited to a two-dimensional image generated by an X-ray camera. This results in the possibility that stress applied by the catheter onto a blood vessel wall damages the vessel. Doctors must therefore be skillful at catheter surgery. We proposed a catheter surgery simulator that visualizes the stress applied to the blood vessel wall using photoelasticity. The manufacture of this simulator requires creating blood vessel mimics that reproduce the physical properties of blood vessel tissue using photoelasticity. This study investigated the mechanical and photoelastic properties of gel materials and selected a gel composition suitable for making blood vessel mimics. The mechanical properties of polyvinyl alcohol (PVA) hydrogel changed in the range 70–335 kPa by changing the composition ratio, and double network (DN) gel changed in the range 0.13–1.06 MPa by changing the composition ratio. These gels could be adjusted by changing the material composition to provide Young’s moduli similar to that of blood vessels. The photoelastic properties of PVA hydrogel changed in the range 1.38–2.76 109/Pa by changing the composition ratio, and DN gel changed in the range 0.012–0.029 109/Pa by changing the composition ratio.

    DOI: 10.1115/1.4051516

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    Scopus

  4. Fabrication and Evaluation of Actuators for Reaction Force Variable Passive-type Tactile Displays

    Nambara Keita, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    IEEJ Transactions on Sensors and Micromachines   Vol. 141 ( 9 ) page: 304 - 309   2021.9

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Institute of Electrical Engineers of Japan  

    <p>In this paper, we report on the fabrication and evaluation of actuator for reaction force variable passive-type tactile display using high formable Ti-Ni-Cu shape memory alloy. This actuator is driven by the superelastic effect and superior in force expression, responsiveness, and miniaturization compared to conventional tactile displays using shape memory alloys. This actuator was fabricated in a convex shape by utilizing a viscous flow of Ti-Ni-Cu metallic glass. After crystallization, the metallic glass was changed to the shape memory alloy. In this manner, we successfully acquired the desired convex cross structure with a height of 123 µm at the center of cross. Additionally, while pushing 100 µm, we successfully varied the reaction force ranged from 40 to 80 mN, necessary to deform the skin and electrical resistance linearly by controlling the temperature. From these results, we showed that the actuator of this study can be used as tactile display that can express desired hardness and softness by temperature control. We also showed the possibility that the temperature of each actuator can be controlled individually by electrical heating using the linear relationship between temperature and electrical resistance.</p>

    DOI: 10.1541/ieejsmas.141.304

    Scopus

    CiNii Research

  5. Combinatorial synthesis of nanocrystalline FeSiBPCuC-Ni-(Nb,Mo) soft magnetic alloys with high corrosion resistance

    Yamazaki Takahiro, Tomita Tatsuya, Uji Katsutoshi, Kuwata Hidenori, Sano Kohya, Oka Chiemi, Sakurai Junpei, Hata Seiichi

    JOURNAL OF NON-CRYSTALLINE SOLIDS   Vol. 563   2021.7

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Journal of Non-Crystalline Solids  

    Fe-based nanocrystalline FeSiBPCuC alloys (NANOMET®) with a combination of high magnetic flux density, high permeability, and low iron loss have attracted much attention for use in magnetic core devices such as small power supplies, motors, and transformers. However, further improvement of the corrosion resistance is still required because surface oxidation during the water atomization process inevitably deteriorates the magnetic properties of these alloys. Here, we use a combinatorial magnetron sputtering system to fabricate new (FeSiBPCuC)100−x−yNix(Nb,Mo)y (0 ≤ x ≤ 10, 0 ≤ y ≤ 2 at%) amorphous thin films with enhanced corrosion resistance. We found that the co-presence of Ni (2–4 at%) and Mo (1–2 at%) in the FeSiBPCuC amorphous thin films promoted a further improvement of the corrosion resistance. The magnetic coercivity of (FeSiBPCuC)95.5Ni4.0Nb0.5 and (FeSiBPCuC)97.0Ni2.0Mo1.0 thin films was deteriorated compared with that of a FeSiBPCuC ribbon.

    DOI: 10.1016/j.jnoncrysol.2021.120808

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  6. Thermo-fluid dynamic analysis in a micro-textured evaporator based on microscale infrared/visible observations for loop heat pipes

    Odagiri Kimihide, Oka Chiemi, Kondou Chieko, Nagano Hosei

    INTERNATIONAL JOURNAL OF MULTIPHASE FLOW   Vol. 140   2021.7

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:International Journal of Multiphase Flow  

    This paper presents a thermo-fluid dynamic analysis in a micro-textured evaporator for loop heat pipes (LHPs) that has a super wetting surface with ethanol on the basis of an experiment and modeling. In the experiment, three kinds of stainless steel plates with various morphologies of heat transfer surfaces were tested: a normal flat plate, a sandblasted plate, and a micro-groove plate. The measured contact angles between the surfaces and ethanol were 8.2° ± 1.3°, 0°, and 0°, respectively. Evaluation of the heat transfer performance and liquid-vapor interface behavior was conducted using microscale infrared and visible observations. As a result, it was revealed that the sandblasted plate and the micro-groove plate showed 7 times and 20 times higher heat transfer coefficient under high heat flux conditions respectively, compared with the normal flat plate. Different liquid-vapor interface behaviors were found between the plate types. In the modeling, the heat transfer coefficient was predicted for each case. It was found that nucleate boiling heat transfer induced by rough surface increased the heat transfer performance in the case of the sandblasted plate. In addition, it was revealed that the thin film evaporation at the long triple-phase contact line significantly enhanced heat transfer performance in the case of the micro-groove plate. The findings indicate a new promising approach to enhance the heat transfer coefficient of LHP evaporators.

    DOI: 10.1016/j.ijmultiphaseflow.2021.103623

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  7. Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding

    Ryo Morisaki, Takahiro Yamazaki, Chiemi Oka, Junpei Sakurai, Takami Hirai, Tomonori Takahashi, Hiroyuki Tsuji, Noriyasu Ohno, and Seiichi Hata

    Japanese Journal of Applied Physics   Vol. 60 ( SC ) page: SCCB01   2021.6

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/abe683

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  8. Nanoscale silica coating of porous stainless steel and its impact on water wettability

    Oka Chiemi, Odagiri Kimihide, Nagano Hosei

    JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH   Vol. 18 ( 2 ) page: 601 - 609   2021.3

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Journal of Coatings Technology and Research  

    The water wettability of porous stainless steel specimens was enhanced via a nanoscaled silica coating for application to passive two-phase heat transfer devices. A combination of porous stainless steel and water has attracted attention in the area of the heat transfer devices. However, the water wettability of stainless steel is poor, limiting the performance of the devices. In the present study, the silica coating of the specimens was conducted via a reaction of tetraethyl orthosilicate (TEOS) after pretreatment using NaOH aq. or HCl aq. Energy-dispersive X-ray spectrometry revealed that the amount of silica deposited on the surface was dependent on the pretreatment conditions and the composition of the silica-coating solutions. Measurement of porous properties indicated that the silica coating did not affect pore diameter and gas permeability since the coating was in nanoscale. Microscale contact angles were directly evaluated using an environmental SEM. The specimens showed excellent water wettability when they were covered with numerous tiny silica bumps. When the specimen was pretreated with 2 M NaOH aq. and coated in weak alkaline TEOS solution, the contact angle of the porous stainless steel decreased from 87° to 54° after silica coating. The excellent water wettability originated from the relatively smooth surface and a sufficient coverage ratio, which resulted from the moderate strength of chemical etching of the NaOH aq. and the mild silica-coating condition in the weak alkaline solution.

    DOI: 10.1007/s11998-020-00417-1

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  9. FABRICATION AND EVALUATION OF A NOVEL ACTUATOR FOR REACTION FORCE VARIABLE PASSIVE-TYPE TACTILE DISPLAYS

    Murase Masanori, Nambara Keita, Yamazaki Takahiro, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)     page: 663 - 666   2021

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021  

    In this paper, we report the fabrication and evaluation of an actuator for reaction force variable passive-type tactile displays using a highly formable Ti-Ni-Cu shape-memory alloy. The actuator relies on the superelastic effect of SMAs and can influence the applied reaction force. We successfully fabricated the desired convex cross structure with a height of 123 m, varied the reaction force between 40 and 80 mN at a depth of 100 m, and controlled the electrical resistance linearly with temperature.

    DOI: 10.1109/TRANSDUCERS50396.2021.9495608

    Web of Science

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  10. Measurement of internal stress in thin films using MEMS structures

    TAKASE Shun, YAMAZAKI Takahiro, OKA Chiemi, SAKURAI Junpei, HATA Seiichi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2021 ( 0 ) page: J221-07   2021

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>In this research, we aimed to establish a new measurement method of internal stress using MEMS structures. The measurement sample was a thin film metallic glass, which has higher strength and lower Young's modulus compared to Poly-Si. The thin film metallic glass samples were formed by sputtering, and their shape was a fixed beam at both ends. In order to avoid the deterioration of the cross-sectional shape of the structure caused by the film thickening, we used a reverse lift-off method. It is the method that forms film on a desired pattern and remove the others to obtain the flat and uniform thickness structure. We devised a process to fabricate devices to measure the internal stress of a thin film metallic glass samples and confirmed the feasibility of fabricating the devices by carrying out the process. We also tried to measure the displacement of the devices that were successfully fabricated devices.</p>

    DOI: 10.1299/jsmemecj.2021.j221-07

    CiNii Research

  11. New Long Life Fast Atom Beam Source for Surface Activated Bonding

    Morisaki R., Sakurai J., Oka C., Yamazaki T., Akao T., Takahashi T., Tsuji H., Ohno N., Hata S.

    2021 7TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)     page: 8 - 8   2021

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/LTB-3D53950.2021.9598414

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  12. Development of a fast atom beam gun for surface-activated bonding

    Morisaki R.

    Precision Engineering   Vol. 62   page: 106 - 112   2020.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.precisioneng.2019.11.006

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  13. Fabrication of Novel Microvalves Driven by Heat From Magnetic Nanoparticles

    Daiki Miwa, Junpei Sakurai, Seiichi Hata, Chiemi Oka

    PROCEEDINGS PAPER,JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing     page: LEMP2020-8529, V001T08A005   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1115/LEMP2020-8529

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  14. Basic study of Ti-Ni-Cu high formable shape memory alloy for soft actuator

    ASAI Taihei, AOYAMA Ryosuke, OKA Chiemi, SAKURAI Junpei, HATA Seiichi

    The Proceedings of the Materials and processing conference   Vol. 2020.28 ( 0 ) page: 267   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmemp.2020.28.267

    CiNii Research

  15. Fabrication of MEMS Mirror Device Using Reverse Lift-off Process

    TAKASE Shun, YAMADA Kyohei, NAKAGAWA Yuki, YAMAZAKI Takahiro, OKA Chiemi, SAKURAI Junpei, HATA Seiichi

    The Proceedings of the Materials and processing conference   Vol. 2020.28 ( 0 ) page: 158   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmemp.2020.28.158

    CiNii Research

  16. Fabrication of Novel Microvalves Utilizing Heat from Magnetic Nanoparticles

    MIWA Daiki, SAKURAI Junpei, HATA Seiichi, OKA Chiemi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2020 ( 0 ) page: J22204   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>Most microvalves need electrical wiring on each one, and the need will disturb further integration and miniaturization of microfluidic systems soon. The present study proposes new remotely controlled microvalves without the electrical wiring on each valve. The microvalves consist of thermo-responsive gels and magnetic nanoparticles, and they run with heat dissipation from the magnetic nanoparticles in an alternating magnetic field. The microvalves open via shrinking of the thermo-responsive gels through the heat dissipation. In this paper, the microvalves were fabricated using Fe<sub>3</sub>O<sub>4</sub> nanoparticles and patternable thermo-responsive gels mainly made from poly(<i>N</i>-isopropyl acrylamide) (PNIPA). The gels incorporating the magnetic nanoparticles were installed in Poly(dimethylsiloxane) (PDMS) microchannels. The microchannels were fabricated using a mold made of SU-8. The fabricated microvalve could perfectly block the flow of water under conditions without any external magnetic fields. When the closing microvalve was exposed to an alternating magnetic field (2 MHz, 50 Oe), the microvalve was opened and the water flow was observed. When the alternating magnetic field was stopped, the microvalve was closed again and the water flow was stopped. The proposed microvalves were successfully fabricated, and the microvalves could be operated by the alternating magnetic field as expected.</p>

    DOI: 10.1299/jsmemecj.2020.j22204

    CiNii Research

  17. Development of 3D stress measurement system for surgical simulator

    YAMADA Daichi, HORI Simon, YAMAZAKI Takahiro, OKA Chiemi, SAKURAI Junpei, HATA Seiichi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2020 ( 0 ) page: J24111   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>In recent years, minimally invasive treatment has attracted attention, and catheter surgery is one of them. On the other hand, there is a problem that stress is applied to the blood vessel wall and it is damaged, so doctors are required the skill of catheter surgery. In order to improve the skill of catheter surgery, the authors have proposed a surgical simulator that realizes real-time visualization of stress by the photoelasticity. Photoelasticity is a property in which an isotropic elastic body such as glass or acrylic that receives an external force causes birefringence. It is often used as an experimental method to analyze the stress distribution of materials. In this study, it is proposed a measurement system for surgical simulator that can measure three-dimensional stress. The shape of the blood vessel model applicable to the proposed measurement system is determined and introduce a stress correction that guarantees constant accuracy. Finally, it is showed that the stress can be visualized in real time.</p>

    DOI: 10.1299/jsmemecj.2020.j24111

    CiNii Research

  18. Preparation of blood vessel model with two-layer structure for a surgical simulator

    YAMADA Daichi, HORI Simon, YAMAZAKI Takahiro, OKA Chiemi, SAKURAI Junpei, HATA Seiichi

    The Proceedings of the Materials and processing conference   Vol. 2020.28 ( 0 ) page: 156   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>This study creates a blood vessel model for a catheter surgery simulator. In previous study was succeeded in producing a blood vessel model applicable to a surgical simulator using PVA hydrogel. On the other hand, the problem with the blood vessel model is that the reproducibility of the mechanical properties of blood vessels, which is important for the actual catheter operation sensation, is low. Therefore, in this study, creates a blood vessel model with a two-layer structure that reproduces the mechanical properties of the blood vessel wall and adipose tissue. In the proposed blood vessel model, it is shown that the mechanical properties can be reproduced by changing the compounding ratio of powdered PVA and the mass ratio of water and DMSO as a solvent. Furthermore, this study proposes a method for producing a two-layer structure and show that it is possible to produce a blood vessel model with a two-layer structure.</p>

    DOI: 10.1299/jsmemp.2020.28.156

    CiNii Research

  19. High performance of proposed FAB source for surface-activated bonding by plasma analysis

    MORISAKI Ryo, SAKURAI Jumpei, OKA Chiemi, YAMAZAKI Takahiro, HIRAI Takami, TAKAHASHI Tomonori, TSUJI Hiroyuki, OHNO Noriyasu, HATA Seiichi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2020 ( 0 ) page: J13105   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>The novel fast atom beam source (FAB) for surface-activated bonding (SAB) method was proposed in order to improve the lifetime of FAB sources. The proposed FAB source achieved the higher efficiency of Ar-FAB irradiation and less wear on the electrodes. This previously study indicated that the applied magnetic fields made the Ar ions converge on the irradiation port, increasing Ar irradiation efficiency. However, it was not measured and not clearly why the proposed FAB source achieved higher performance. In this study, we aim to reveal the factor of achievement high performance and to propose the new structure of the FAB source with much higher performance by plasma analysis. Electrostatic probe studies and the simulation for Ar plasma in the proposed source show that the electron and Ar<sup>+</sup> density increase near the irradiation port. Moreover, increasing Ar<sup>+</sup> flux only to the wall with irradiation port indicates improving Ar-FAB irradiation efficiency and suppressing Ar+ sputtering and carbon agglomerates on inside wall of the source.</p>

    DOI: 10.1299/jsmemecj.2020.j13105

    CiNii Research

  20. Effect of texture substrates on conversion efficiency in dye-sensitized solar cells

    NISHIYASU Yuji, YANG Na, Oka Chiemi, Hata Seiichi, SAKURAI Junpei

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2020 ( 0 ) page: J22207   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>In this paper, we fabricated three types of optical textured glass substrates by a polydimethylsiloxane (PDMS) nanoimprint lithography (NIL) on the front glass to enhance conversion efficiency of dye-sensitized solar cells (DSSCs). Three types of master molds for micro-texture (M-Tx), nano-texture (N-Tx), and micro-nano-double texture (D-Tx) were prepared by an aluminum anodic oxidation. Finally, we fabricated DSSCs with textured glass. The used dye was red N719. The cell size was 6 mm square. As the results, the conversion efficiency of DSSCs with textured glasses increased by 7.5% for M-Tx (<i>η</i> of 2.74%), 18% for N-Tx (<i>η</i> of 3.01%) and 26% for D-Tx (<i>η</i> of 3.22%) compared to DSSC with flat glass (<i>η</i> of 2.55%).</p>

    DOI: 10.1299/jsmemecj.2020.j22207

    CiNii Research

  21. Fabrication and drive evaluation of tactile pins for reaction force variable passive type tactile displays using Ti-Ni-Cu high formable shape memory alloys

    NAMBARA Keita, IKI Keiichirou, OKA Chiemi, HATA Seiichi, SAKURAI Junpei

    The Proceedings of the Materials and processing conference   Vol. 2020.28 ( 0 ) page: 266   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmemp.2020.28.266

    CiNii Research

  22. Fabriation of tactile pins for reaction force variable passive type tactile displays using high formable shape memory alloys

    NAMBARA Keita, IKI Keiichirou, OKA Chiemi, HATA Seiichi, SAKURAI Junpei

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2020 ( 0 ) page: J22210   2020

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>We reported on the fabrication of tactile pins for reaction force variable passive type tactile displays using Ti-Ni-Cu high formable shape memory alloys. These devices take advantage of the temperature controllability of the resilience of the superelasticity effect and present hardness and softness tactile sensation. After the tactile pins being formed into three-dimensional shape by viscous flow of metallic glasses, they became shape memory alloys by annealing for crystallization. The height of tactile pin formed by conventional method was about 110 μm. However, when tactile pin was pushed by the finger, it was insufficient deformation for the stable superelasticity effect to appear. Therefore, we attempted to increase the height of tactile pin by the improving deformation method using rapidly temperature raising during forming for decreasing viscosity of metallic glasses. As a result, we successfully increased the height of tactile pin to 237 μm.</p>

    DOI: 10.1299/jsmemecj.2020.j22210

    CiNii Research

  23. Enhanced conversion efficiency in dye-sensitized solar cells using optical textured glass substrates

    Nishiyasu Y., Yang N., Oka C., Hata S., Sakurai J.

    MHS 2019 - 30th 2019 International Symposium on Micro-NanoMechatronics and Human Science     2019.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:MHS 2019 - 30th 2019 International Symposium on Micro-NanoMechatronics and Human Science  

    In this paper, we fabricated optical textured glass substrates by a polydimethylsiloxane (PDMS) nanoimprint lithography (NIL) on the front glass to enhance conversion efficiency of dye-sensitized solar cells (DSSCs). Two types of nano-texture (N-Tx) and micro-nano-double texture (D-Tx) were prepared. Finally, we fabricated DSSCs with textured glass. The used dye was red N719. The cell size was 6 mm square. As the results, the conversion efficiency of DSSCs with textured glasses increased by 26% for N-Tx and 19% for D-Tx compared to DSSC with flat glass.

    DOI: 10.1109/MHS48134.2019.9249295

    Scopus

  24. Microvalves Utilizing Heat Generation of Magnetic Nanoparticles

    Miwa D., Sakurai J., Hata S., Oka C.

    MHS 2019 - 30th 2019 International Symposium on Micro-NanoMechatronics and Human Science     2019.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:MHS 2019 - 30th 2019 International Symposium on Micro-NanoMechatronics and Human Science  

    Most microvalves need electrical wiring on each one, and the need prevents further integration and miniaturization of microfluidic systems. Hence, we propose novel microvalves remotely controlled without the wiring on each valve. The proposed microvalves are driven by heat from magnetic nanoparticles in an alternating magnetic field. The nano-scale magnetic particles, which possess superparamagnetic behavior, generate heat in the alternating magnetic field. There is a theoretical formula for the heat generation. However, few reports are available on comparing experimental values of the heat generation with theoretical values. In this study, the experimental heating power was compared with the theoretical values, and the possibility of the proposed microvalves was verified.

    DOI: 10.1109/MHS48134.2019.9249321

    Scopus

  25. Photoelastic stress measurement in real-time for surgery simulator using gel materials

    Yamada D., Hori S., Oka C., Sakurai J., Hata S.

    MHS 2019 - 30th 2019 International Symposium on Micro-NanoMechatronics and Human Science     2019.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:MHS 2019 - 30th 2019 International Symposium on Micro-NanoMechatronics and Human Science  

    In recent years, minimally invasive treatment aimed at reducing the physical and mental burden of patients as well as treating diseases has attracted attention. Catheter surgery is one of the minimally invasive treatments. This surgical technique can reduce invasion compared to incision and replacement with artificial vessels. Furthermore, it is known to be superior in terms of safety. On the other hand, in catheter surgery, visual information is limited to only a two-dimensional image by an X-ray camera. Therefore, there is a problem that stress is applied to the blood vessel wall and it is damaged, so doctors are required the skill of catheter surgery. This study is proposed a catheter surgery simulator that visualizes the stress applied to the blood vessel wall in realtime using photoelasticity. The blood vessel model used for the surgery simulator focused on PVA hydrogel. Previous experiments by our group have shown that PVA hydrogel can be applied to a surgical simulator. This study has developed an image processing program to measure stress in real-time. It has verified that the application to a surgery simulator is possible by this image processing program.

    DOI: 10.1109/MHS48134.2019.9249277

    Scopus

  26. Fabrication of textured substrates for dye-sensitized solar cells using polydimethylsiloxane nanoimprint lithography

    Yang Na, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    ADVANCED OPTICAL TECHNOLOGIES   Vol. 8 ( 6 ) page: 491 - 497   2019.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1515/aot-2019-0010

    Web of Science

    Scopus

  27. 薄膜金属ガラスの大気中結晶化評価の基礎検討

    鬼頭 直希, 櫻井 淳平, 岡 智絵美, 林 裕美, 山崎 宏明, 秦 誠一

    精密工学会学術講演会講演論文集   Vol. 2019A ( 0 ) page: 5 - 6   2019.8

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:公益社団法人 精密工学会  

    <p>本研究では,サンプルとして,ガラス基板上に長さ4 mm,幅1 mm,厚さ500 nmの薄膜金属ガラスPd<sub>77</sub>Cu<sub>7</sub>Si<sub>16</sub> at.%を10 mm間隔に成膜し,試作した温度傾斜加熱装置により,543 K以下,471 K以上の異なる温度で同時加熱試験を行った.この時の各温度での大気中における結晶化度の時間変化を,放射率変化としてサーモグラフィで捉えることに成功し,XRDにより結晶化度を測定した.</p>

    DOI: 10.11522/pscjspe.2019a.0_5

    CiNii Research

  28. 表面活性化接合用新規高速原子ビームガン

    森崎 諒, 岡 智絵美, 櫻井 淳平, 平井 隆巳, 高橋 知典, 辻 裕之, 秦 誠一

    精密工学会学術講演会講演論文集   Vol. 2019A ( 0 ) page: 687 - 688   2019.8

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:公益社団法人 精密工学会  

    <p>表面活性化接合は半導体分野における三次元積層技術として利用されている.しかし,表面活性化接合に用いられる高速原子ビームガンは,短時間の使用で内部が磨耗してしまう.そこで,高速原子ビームの高効率な照射により,接合回数に対する相対的な長寿命化を目指す新規高速原子ビームガンの開発を行った.また,新規高速原子ビームガンを用いて,その照射特性を評価し,更なる高性能化を目指した設計指針の確立を目指した.</p>

    DOI: 10.11522/pscjspe.2019a.0_687

    CiNii Research

  29. Fabrication and Evaluation of Tactile Pins for Passive Type Tactile Displays using High Formability Shape Memory Alloys

    Nambara K., Iki K., Oka C., Hata S., Sakurai J.

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII     page: 1854 - 1857   2019.6

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII  

    We report on the fabrication and evaluation of tactile pins for passive-type tactile displays using high formable Ti-Ni-Cu shape memory alloy. These pins were fabricated by utilizing a viscous flow of Ti-Ni-Cu metallic glass. After crystallization, the material transformed to a shape memory alloy and was driven by the superelastic effect. In this manner, we successfully acquired the desired three-dimensional structure and measured a reaction force of 20 mN or larger, necessary to deform the skin. Additionally, we successfully varied the reaction force by controlling the temperature and demonstrated the potential application of these tactile pins.

    DOI: 10.1109/TRANSDUCERS.2019.8808618

    Scopus

  30. Fabrication of MEMS mirror using reverse lift-off process

    YAMADA Kyohei, NAKAGAWA Yuki, OKA Chiemi, SAKURAI Junpei, YOSHIDA Saori, KIYOMOTO Tomofumi, HATA Seiichi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2019 ( 0 ) page: J22208P   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>MEMS mirror device is a device that reflects and scans a laser by the torsion of the beam structure. By miniaturization of the device, the reduction of the deflection angle of the mirror becomes to be an issue. In this research, we fabricated a MEMS mirror structure using film metallic glass formed by sputtering as a new material for the beam structure. In order to avoid the deterioration of the cross-sectional shape of the structure caused by the film thickening, a reverse lift-off method was used in the fabrication process. It is the method that forms film on a desired pattern and remove the others to obtain the flat and uniform thickness structure. Several conditions of the anneal was tested and the structure annealed at 200 ℃ shows less deflection than others. The fabricated structure was driven by external excitation, and it was confirmed that the resonance frequency was almost as designed.</p>

    DOI: 10.1299/jsmemecj.2019.j22208p

    CiNii Research

  31. Novel Microvalves Driven by Heat Generation from Magnetic Nanoparticles

    MIWA Daiki, SAKURAI Junpei, HATA Seiichi, OKA Chiemi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2019 ( 0 ) page: J22207P   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>Microvalves are used in microfluidic systems such as micro reactors, and micro-total analysis systems (μ-TAS). Most microvalves need electrical wiring on each one, and the need prevents further integration and miniaturization of the microfluidic systems. Hence, we suggest new microvalves remotely controlled without the wiring on each valve. The proposed microvalves are driven by heat from magnetic nanoparticles in an alternating magnetic field. The proposed microvalves consist of thermo-responsive gels and the magnetic nanoparticles with a diameter of 20 nm or less. The nano-scale magnetic particles with superparamagnetic behavior generate heat in an alternating magnetic field. The aim of this study is to verify possibility of the new microvalves. First, Fe<sub>3</sub>O<sub>4</sub> magnetic nanoparticles were synthesized and characterized with an X-ray diffractometer, a transmission electron microscope, and a magnetic property measurement system. Then, the heat generation of the synthesized magnetic nanoparticles was measured in an alternating magnetic field. From the measurement, the possibility of the proposed microvalves was verified calculating how long it require to shrink the thermo-responsive gels by heat generated from the magnetic nanoparticles.</p>

    DOI: 10.1299/jsmemecj.2019.j22207p

    CiNii Research

  32. FABRICATION AND EVALUATION OF TACTILE PINS FOR PASSIVE TYPE TACTILE DISPLAYS USING HIGH FORMABILITY SHAPE MEMORY ALLOYS

    Nambara Keita, Iki Keiichirou, Oka Chiemi, Hata Seiichi, Sakurai Junpei

    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)     page: 1854 - 1857   2019

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  33. Combinatorial Evaluation for corrosion resistance of High Formable Shape Memory Alloys

    CHIZUWA Kaname, OKA Chiemi, HATA Seiichi, SAKURAI Junpei

    The Proceedings of the Materials and processing conference   Vol. 2019.27 ( 0 ) page: 207   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>In this study, we propose a combinatorial evaluation method for evaluating the corrosion resistance of the Ti-Ni-based high formable shape memory alloys (HFSMAs) based on anodic polarization tests. The proposed evaluation substrates compose nine samples which have different compositions. These samples are deposited on a glass substrate by carousel sputtering system and microelectromechanical processes. Further, we performed anodic polarization tests on the Ti–Ni–Zr and Ti–Ni–Cu HFSMAs samples. The polarization curves are obtained by sweeping the potential and the current density at the passive state (<i>i</i><sub>ps</sub>) of each composition tested is compared. In case of the Ti–Ni–Zr alloy, <i>i</i><sub>ps</sub> varied depending on the Zr content. When the Zr content ranged from 10 to 15 at.%, their <i>i</i><sub>ps</sub> were comparable with that of Ti<sub>48</sub>Ni<sub>52</sub> used in medical devices. On the other hand, in case of the Ti-Ni-Cu alloy, their <i>i</i><sub>ps</sub> were similar to that of Ti<sub>48</sub>Ni<sub>52</sub> regardless of Cu content. We obtained Ti–Ni–Zr and Ti–Ni–Cu HFSMAs having a corrosion resistance equivalent to that of Ti<sub>48</sub>Ni<sub>52</sub>. Furthermore, we conducted XPS analysis to investigate the passive film of HFSMAs. The thin surface film of Ti-Ni-Zr alloys were composed of TiO<sub>2</sub> and ZrO<sub>2</sub>, while that of Ti-Ni-Cu alloys were composed of only TiO<sub>2</sub>. We have concluded that the formation of TiO<sub>2</sub> enriched protective thin surface film might have been responsible for the high corrosion resistance.</p>

    DOI: 10.1299/jsmemp.2019.27.207

    CiNii Research

  34. Development of real-time photoelastic 3D stress measurement system for surgical simulator

    YAMADA Daichi, HORI Simon, OKA Chiemi, SAKURAI Junpei, HATA Seiichi

    The Proceedings of the Materials and processing conference   Vol. 2019.27 ( 0 ) page: P01   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>In recent years, minimally invasive treatment has attracted attention, and catheter surgery is one of them. On the other hand, in catheter surgery, visual information is limited to only a two-dimensional image by an X-ray camera. Therefore, there is a problem that stress is applied to the blood vessel wall and it is damaged, so doctors are required the skill of catheter surgery. In order to improve the surgeon's surgical technique, the authors have proposed a surgical simulator that realizes real-time visualization of stress by the photoelastic method. In this study, we propose a measurement system using a photoelastic method that can visualize stress in three dimensions and examine the blood vessel model shape applicable to the proposed measurement system.</p>

    DOI: 10.1299/jsmemp.2019.27.p01

    CiNii Research

  35. Improvement of conversion efficiency of dye-sensitized solar cell by textured substrates

    NISHIYASU Yuji, YANG Na, OKA Chiemi, HATA Seiichi, SAKURAI Junpei

    The Proceedings of the Materials and processing conference   Vol. 2019.27 ( 0 ) page: P04   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>In this paper, we fabricated two types of optical textured glass substrates by a polydimethylsiloxane (PDMS) nanoimprint lithography (NIL) on the front glass to enhance conversion efficiency of dye-sensitized solar cells (DSSCs). Two types of master molds for nano-texture (N-Tx) and micro-nano-double texture (D-Tx) were prepared by an aluminum anodic oxidation. Both N-Tx and D-Tx showed higher total transmittance and lower reflectance than bare glass. Finally, we fabricated DSSCs with textured glass. The used dye was red N719. The cell size was 6 mm square. As the results, the conversion efficiency of DSSCs with textured glasses increased by 26% for N-Tx (<i>η</i> of 3.67%) and 19% for D-Tx (<i>η</i> of 3.47%) compared to DSSC with flat glass (<i>η</i> of 2.91%).</p>

    DOI: 10.1299/jsmemp.2019.27.p04

    CiNii Research

  36. Development and evaluation of the novel FAB gun

    Morisaki R., Hirai Y., Sakurai J., Mizoshiri M., Oka C., Hirai T., Takahashi T., Tsuji H., Hata S.

    European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019     page: 104 - 105   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019  

    Argon fast atom beam (FAB) gun is used as a neutral atom beam irradiation source for surface activated bonding (SAB). Since SAB does not require any heat treatments, stress due to difference in thermal expansion coefficients does not occur, and the bonding between not only the same material but also different materials is realizable. However, the conventional FAB gun can be used for only short time because carbon abrasion powders are generated from the worn part of the inside walls of the gun due to argon ion sputtering. We developed the novel FAB gun applied magnetic fields and new position of the anodes in the gun to control the motion of the argon ions and reduce the sputtering. The design concept is that the magnetic fields guide both argon ions and electrons to the irradiation port of the gun and the argon atoms for the irradiation increased. In this study, we investigated the influence of the positions of the magnetic fields and the anodes on the plasma generation, the argon irradiation and the sputtering. With the novel FAB gun, the stable plasma is generated in the vicinity of the irradiation port, and the maximum irradiation amount is 3 times in comparison with the conventional design. Less sputtering of the inside walls of the gun was observed after the irradiation for more than thousands of minutes, while the sputtering with the conventional gun is more observed at the same condition.

    Scopus

  37. Basic research on micro processing characteristics of reverse lift-off process

    Nakagawa Y., Yamada K., Mizoshiri M., Oka C., Sakurai J., Hata S.

    MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science     2018.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science  

    In micro electromechanical systems(MEMS) technology, lift-off processes are general patterning methods for the formation of amorphous alloy thick film structures. However, thicknesses of structures fabricated in this method are not uniform and cross-sectional shapes are not flat because sputtered particles are blocked by the sidewalls of the lift-off layer. In order to solve this problem, a reverse lift-off process is proposed as a new patterning method [1]. In the reverse lift-off process, the desired structure is formed on the top of the convex pattern such as the substrate. In contrast to the lift-off process, the thickness of the structure is uniform and the cross-sectional shape is rectangular because sputtered particles are not blocked by the sidewalls. In this research, thick film structures were fabricated in reverse lift-off processes from the width of the convex pattern on the order of micrometers. And the film thickness and the cross-sectional shape of the fabricated structure are measured, and the micro processing characteristics of the reverse lift-off process, which had not yet been elucidated, were investigated. This demonstrates the usefulness of fabricating the thick film micro structures in the reverse lift-off process.

    DOI: 10.1109/MHS.2018.8886962

    Scopus

  38. Fabrication of miniaturized capacitive pressure sensor using thin film metallic glass

    Uejima S., Oka C., Hata S., Sakurai J.

    MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science     2018.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:MHS 2018 - 2018 29th International Symposium on Micro-NanoMechatronics and Human Science  

    In this paper, we proposed the process of the diaphragm for miniaturizing MEMS capacitive pressure sensor and controlling its sensitivity. We fabricated micro diaphragm using a Ru65Zr30Al5(at.%) thin film metallic glass (TFMG). The as-sputtered TFMG on Si substrate were annealed at 315-440°C for 5 minutes in vacuum. After annealing, micro diaphragms were fabricated by an etching Si substrate using a reactive ion etching system. Although the diaphragm without annealing had dome structure, the diaphragm annealed above 340°C formed a flat structure. The deflection of the diaphragm against applied pressure depended on the annealing temperature and decreased at higher temperatures. The pressure sensor was modeled using this diaphragms. The pressure measurement range and sensitivity were 250 Pa and 6.4×10-3 pF/Pa, respectively, for annealed at 340°C, and 1800 Pa, and 8.1 × 10-4 pF/Pa, respectively for annealed at 440°C.

    DOI: 10.1109/MHS.2018.8887020

    Scopus

  39. Study of a high heat transport Loop Heat Pipe for the automobile thermal management

    AONO Yoshitada, NAGANO Hosei, YAMASHITA Seiji, ISHIKIRIYAMA Mamoru, HOSHINO Yu

    The Proceedings of Conference of Tokai Branch   Vol. 2018.67 ( 0 ) page: 519   2018

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmetokai.2018.67.519

    CiNii Research

  40. Fabrication of micro diaphragm using thin film metallic glass

    ISHIKI Ryuji, Uejima Syohei, Oka Chiemi, SAKURAI Junpei, LIN Yu-Ching, Hata Seiichi

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2018 ( 0 ) page: J2220303   2018

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>A diaphragm structure is a fundamental structure in a micro machine such as MEMS. Conventionally, Si has used as a diaphragm material. However, in recent years, in order to make the diaphragm structure more sophisticated and miniaturized, high sensitivity difficult to realize by using Si is required. Therefore, in this study, we aim to create a highly precise diaphragm structure by using the thin film metallic glass which is an amorphous alloy shown glass transition as a new material which meets these demands. Pd<sub>77</sub>Cu<sub>6</sub>Si<sub>17</sub> (at. %) and Ru<sub>65</sub>Zr<sub>30</sub>Al<sub>5</sub> (at. %) are used for thin film metallic glass. The thin film metallic glasses are deposited on the Si substrates by sputtering. Internal stress of each film is controlled by adjusting Ar pressure during sputtering and annealing after sputtering. The internal stress of the Pd<sub>77</sub>Cu<sub>6</sub>Si<sub>17</sub> (at. %) thin film is always tensile stress and it is minimum at an Ar pressure of 0.5 Pa, and its value is 23.6 MPa. Under this condition, we can create a highly precise diaphragm. On the contrary, the internal stress of Ru<sub>65</sub>Zr<sub>30</sub>Al<sub>5</sub> (at. %) thin film is always compressive stress in the range of sputtering Ar pressure. So, we try to relax the internal stress of Ru<sub>65</sub>Zr<sub>30</sub>Al<sub>5</sub> (at. %) thin film by annealing. In the proper annealing conditions, a diaphragm having the same flatness level as Pd<sub>77</sub>Cu<sub>6</sub>Si<sub>17</sub> (at. %) is realized.</p>

    DOI: 10.1299/jsmemecj.2018.j2220303

    CiNii Research

  41. Fabrication of Miniaturized Capacitive Pressure Sensor Using Thin Film Metallic Glass

    UEJIMA Shohei, OKA Chiemi, HATA Seiichi, SAKURAI Junpei

    The Proceedings of Mechanical Engineering Congress, Japan   Vol. 2018 ( 0 ) page: J2220304   2018

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    <p>Further miniaturization of the diaphragm for capacitive pressure sensor requires thinner structures to deform micro diaphragm sufficiently by small differential pressure. Since stiffness of thinner structures decrease, the influence of internal stress introduced during processing cannot be ignored. In this paper, we proposed methods of controlling the internal stress for micro diaphragm using thin film metallic glasses (TFMGs). We fabricated micro diaphragms using Ru67Zr25Al8 [at.%] TFMGs. The TFMGs were fabricated by a r.f. sputtering system, and then as sputtered TFMGs had compressive internal stress. Subsequently, the as-sputtered TFMGs on Si substrate were annealed at 315-440°C for 5 minutes in vacuum. After annealing, micro diaphragms were fabricated by etching Si substrate using a reactive ion etching system. Although annealing temperatures were lower than glass transition temperature, initial internal stress was relaxed partially by the structural relaxation of the TFMGs during annealing process. While the tensile thermal stress was induced during cooling process at the interface between the substrate and TFMG. Although micro diaphragm was not induced thermal stress at interface between the substrate and TFMG, the tensile stress applied to diaphragm in the radial direction at the edge. When annealing temperatures were between 320°C and 340°C, the internal stress changed from compressive to tensile. A flat diaphragm was obtained when annealed at 330°C or higher. The pressure sensor modeled by diaphragm annealed at 340°C and the virtual electrode plate showed a linearity of 6.48 [%F.S.]. By proposed method, we succeeded the flat diaphragm and showed the method of tension control of the diaphragm.</p>

    DOI: 10.1299/jsmemecj.2018.j2220304

    CiNii Research

  42. Evaluation of the bonding methods of Ti-Ni based high formable shape memory alloys

    AOYAMA Ryosuke, OKA Chiemi, HATA Seiichi, SAKURAI Junpei

    The Proceedings of the Materials and processing conference   Vol. 2018.26 ( 0 ) page: 901   2018

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmemp.2018.26.901

    CiNii Research

  43. Effect of wettability of a porous stainless steel on thermally induced liquid-vapor interface behavior

    Oka C., Odagiri K., Nagano H.

    SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES   Vol. 5 ( 4 )   2017.12

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/2051-672X/aa9499

    Web of Science

    Scopus

  44. The role of Bgl2p in the transition to filamentous cells during biofilm formation by Candida albicans.

    Chen X, Zhang R, Takada A, Iwatani S, Oka C, Kitamoto T, Kajiwara S

    Mycoses   Vol. 60 ( 2 ) page: 96-103   2017.2

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1111/myc.12554

    PubMed

  45. Biodegradable and magnetic core-shell composite particle prepared by emulsion solvent diffusion method Reviewed

    Chiemi Oka, Kazunori Ushimaru, Nanao Horiishi, Takeharu Tsuge, Yoshitaka Kitamoto

    Japanese Journal of Applied Physics   Vol. 55   page: 02BE01   2016

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  46. Heat generation of core-shell particles composed of biodegradable polymer and iron oxide Reviewed

    C. Oka, K. Ushimaru, N. Horiishi, T. Tsuge, Y. Kitamoto

    Journal of the Magnetics Society of Japan   Vol. 40   page: 126-131   2016

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  47. Core-shell composite particles composed of biodegradable polymer particles and magnetic iron oxide nanoparticles for targeted drug delivery Reviewed

    Chiemi Oka, Kazunori Ushimaru, Nanao Horiishi, Takeharu Tsuge, Yoshitaka Kitamoto

    Journal of Magnetism and Magnetic Materials   Vol. 381   page: 278-284   2015.1

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Presentations 78

  1. 磁性酸化鉄ナノ粒⼦の発熱特性と医療応⽤ Invited

    岡 智絵美

    東海 NFRW・若⼿チャプタージョイントワークショップ  2022.11.2  応用物理学会東海地区若手チャプター

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

  2. がんを治癒する鉄さびナノ粒子

    岡 智絵美

    夢ナビ  2022 

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    Event date: 2022.7

  3. 磁性ナノ粒子鎖形成の多孔体作製への応用

    岡智絵美,小林京貴,櫻井淳平,長野方星,秦誠一

    2022年度磁性流体連合講演会  2022.12.8  磁性流体研究連絡会

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    Event date: 2022.12

  4. 鉄さびナノ粒子を日常に Invited

    岡 智絵美

    若手からの研究紹介『アカデミックフラッシュ第8報』  2022.3.11  名古屋大学 学術研究・産学官連携推進本部

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    Event date: 2022.3

    Language:Japanese  

    Venue:名古屋大学  

  5. Characteristics of Ni-Nb-Zr thin film amorphous alloy diaphragms annealed below crystallization temperature International conference

    F. Haga, T. Yamazaki, C. Oka, S. Hata, Y. Hoshino and J. Sakurai

    34th International Microprocesses and Nanotechnology Conference (MNC2021) 

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    Event date: 2021.10

    Language:English   Presentation type:Poster presentation  

  6. Characterization of Ar beam from the new fast atom beam source International conference

    R. Morisaki, T. Yamazaki, C. Oka, J. Sakurai, T. Akao, T. Takahashi, H. Tsuji, N. Ohno, and S. Hata

    34th International Microprocesses and Nanotechnology Conference (MNC2021) 

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    Event date: 2021.10

    Language:English   Presentation type:Oral presentation (general)  

  7. 磁性ナノ粒子の特性を活用したデバイス・プロセス開発 Invited

    岡智絵美

    東海NFRW・東海地区若手チャプタージョイントワークショップ  2021.10.19 

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    Event date: 2021.10

    Language:Japanese   Presentation type:Poster presentation  

  8. New Long Life Fast Atom Beam Source for Surface Activated Bonding International conference

    R. Morisaki, J. Sakurai, C. Oka, T. Yamazaki, T. Akao, T. Takahashi, H. Tsuji, N. Ohno, and S. Hata

    2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2021) 

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    Event date: 2021.10

    Language:English   Presentation type:Oral presentation (general)  

  9. 表面活性化接合用新形高速原子ビーム源内部のプラズマ解析

    森崎 諒,櫻井 淳平,岡 智絵美,山崎 貴大,赤尾 隆嘉,高橋 知典,辻 裕之,大野 哲靖,秦 誠一

    第82回応用物理学会秋季学術講演会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  10. 反力可変受動形触覚ディスプレイ用新規アクチュエータの駆動特性

    村瀬正憲,南原圭汰,山崎貴大,岡智絵美,秦 誠一,櫻井 淳平

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  11. コンビナトリアル手法を用いたTi-Ni-Hf高成形性形状記憶合金の探索

    井上 慎,山崎 貴大,岡 智絵美,秦 誠一,櫻井 淳平

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  12. 薄膜非晶質合金Ni-Nb-Zrの機械的特性に及ぼす構造緩和の影響

    羽賀 冬樹,山崎 貴大,岡 智絵美,秦 誠一,星野 雄斗,櫻井 淳平

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  13. 温度応答性ゲルと磁性ナノ粒子からなる遠隔駆動マイクロバルブの特性評価

    谷平光一,秦 誠一,櫻井 淳平,岡 智絵美

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  14. 磁性ナノ粒子の自己組織化を利用した一方向性多孔体作製

    小林 京貴,櫻井 淳平,秦 誠一,岡 智絵美

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  15. HFSMAを用いたナノ繊毛構造体の作製

    佐藤 寛太,山崎 貴大,岡 智絵美,秦 誠一,櫻井 淳平

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  16. フルフリルアルコール樹脂/磁性ナノ粒子複合体の作製

    永易 大地,櫻井 淳平,秦 誠一,岡 智絵美

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  17. シリカ被覆磁性酸化鉄ナノ粒子の磁気発熱量評価

    木村 優介,櫻井 淳平,秦 誠一,岡 智絵美

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  18. MEMS構造体を利用した薄膜内部応力の測定

    高瀬 駿,山崎 貴大,岡 智絵美,櫻井 淳平,秦 誠一

    日本機械学会2021年度年次大会 

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  19. シリカ被覆磁性ナノ粒子の磁気発熱量評価

    木村 優介,櫻井 淳平,秦 誠一,岡 智絵美

    第45回 日本磁気学会学術講演会 

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    Event date: 2021.8 - 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  20. ナノ結晶軟磁性材料の高磁歪化に向けた合金設計

    佐野 光哉,冨田 龍也,岡 智絵美,櫻井 淳平,山崎 貴大,秦 誠一

    第45回 日本磁気学会学術講演会 

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    Event date: 2021.8 - 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  21. FABRICATION AND EVALUATION OF A NOVEL ACTUATOR FOR REACTION FORCE VARIABLE PASSIVE-TYPE TACTILE DISPLAYS International conference

    Masanori Murase, Keita Nambara, Takahiro Yamazaki, Chiemi Oka, Seiichi Hata, and Junpei Sakurai

    Transducers 2021 

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    Event date: 2021.6

    Language:English   Presentation type:Poster presentation  

  22. Simpler Microstructural Estimation Using Machine Learning-assisted Magnetic Barkhausen Noise Analysis International conference

    Kanna Omae, Chiemi Oka, Junpei Sakurai, Seiichi Hata, Takahiro Yamazaki

    The Eighth International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO2021) 

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    Event date: 2021.6

    Language:English   Presentation type:Poster presentation  

  23. Production of unidirectional porous materials utilizing self-assembly of magnetic nanoparticles International conference

    Atsuki Kobayashi, Junpei Sakurai, Seiichi Hata, Chiemi Oka

    The Eighth International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO2021) 

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    Event date: 2021.6

    Language:English   Presentation type:Poster presentation  

  24. New soft magnetostrictive materials design based on nanocrystalline/amorphous mixed-phase structure International conference

    Kohya Sano, Tatsuya Tomita, Chiemi Oka, Junpei Sakurai, Seiichi Hata, Takahiro Yamazaki

    The Eighth International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO2021) 

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    Event date: 2021.6

    Language:English   Presentation type:Poster presentation  

  25. Microvalves Utilizing Heat Generation of Magnetic Nanoparticles International conference

    Daiki Miwa, Junpei Sakurai, Seiichi Hata, and Chiemi Oka

    MHS2019 

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    Event date: 2019.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  26. Enhanced conversion efficiency in dye-sensitized solar sells using optical textured glass substrates International conference

    Yuji Nishiyasu, Na Yang, Chiemi Oka, Seiichi Hata, Junpei Sakurai

    MHS2019 

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    Event date: 2019.12

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  27. Photoelastic stress measurement in real time for surgery simulator using gel materials International conference

    Daichi Yamada, Simon Hori, Chiemi Oka, Junpei Sakurai, Seiichi Hata

    MHS2019 

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    Event date: 2019.12

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  28. 高成形性形状記憶合金の耐食性のコンビナトリアル評価

    千須和 要,岡 智絵美,秦 誠一,櫻井 淳平

    日本機械学会第27回機械材料・材料加工技術講演会(M&P2019) 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  29. テクスチャ基板による色素増感太陽電池の変換効率の向上

    西保 裕司,楊 娜,岡 智絵美,秦 誠一,櫻井 淳平

    日本機械学会第27回機械材料・材料加工技術講演会(M&P2019) 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  30. 手術シミュレータ用リアルタイム光弾性3次元応力測定系の開発

    山田 大地,堀 史門,岡 智絵美,櫻井 淳平,秦 誠一

    日本機械学会第27回機械材料・材料加工技術講演会(M&P2019) 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  31. Ti-Ni-Cu高成形性形状記憶合金を用いた,受動形触覚ディスプレイ用触知ピンの作製と評価

    南原 圭汰,伊木 啓一郎,岡 智絵美,秦 誠一,櫻井 淳平

    第36回「センサ・マイクロマシンと応用システム」シンポジウム 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  32. 単ロール急冷凝固法により作製したTi-Ni-Cu高成形性形状記憶合金リボン材の特性評価

    西谷 健太,青山 椋祐,岡 智絵美,秦 誠一,馬伏 弘恭,網谷 健児,櫻井 淳平

    SMAシンポジウム2019 

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    Event date: 2019.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  33. Combinatorial Evaluation for Corrosion Resistance of Ti-Ni-based High Formable Shape Memory Alloys International conference

    Kaname Chizuwa, Chiemi Oka, Seiichi Hata Junpei Sakurai and Hideki Hosoda

    ISBE2019 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  34. Heating efficiency and dipolar interaction in magnetic nanoparticle ensembles International conference

    Chiemi Oka, Horiishi Nanao and Yoshitaka Kitamoto

    12th International Conference on Ferrite (ICF12) 

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    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  35. 単ロール急冷凝固法により作製した高成形性形状記憶合金の特性評価

    西谷 健太,青山 椋祐,岡 智絵美,秦 誠一,馬伏 弘恭,網谷 健児,櫻井 淳平

    日本金属学会2019年秋期講演大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  36. 逆リフトオフ法を用いたMEMSミラー構造体の作製

    山田 恭平,中川 優希,岡 智絵美,櫻井 淳平,吉田 沙織,清元 智文,秦 誠一

    日本機械学会2019年度年次大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  37. 磁性ナノ粒子の発熱を利用した新規マイクロバルブの提案

    三輪 大貴,櫻井 淳平,秦 誠一,岡 智絵美

    日本機械学会2019年度年次大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  38. 薄膜金属ガラスの大気中結晶化評価法の基礎検討

    鬼頭 直希,櫻井 淳平,岡 智絵美,林 裕美,山崎 宏明,秦 誠一

    精密工学会2019年度秋季大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  39. 表面活性化接合用新規高速原子ビームガン

    森崎 諒,岡 智絵美,櫻井 淳平,平井 隆巳,高橋 知典,辻 裕之,秦 誠一

    精密工学会2019年度秋季大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  40. Combinatorial Evaluation for Biocompatibility of High Formable Shape Memory Alloys International conference

    Kaname Chizuwa, Chiemi Oka, Seiichi Hata and Junpei Sakurai

    PRICM10 

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    Event date: 2019.8

    Language:English   Presentation type:Poster presentation  

    Country:China  

  41. Fabrication and Evaluation of Tactile Pins for Passive Type Tactile Displays using High Formability Shape Memory Alloys International conference

    Keita Nambara, Keiichirou Iki, Chiemi Oka, Seiichi Hata and Junpei Sakurai

    Transducers2019 

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    Event date: 2019.6

    Language:English   Presentation type:Poster presentation  

    Country:Germany  

    DOI: 10.1109/TRANSDUCERS.2019.8808618

    Scopus

  42. Development and evaluation of the novel FAB gun International conference

    Ryo Morisaki, Yuuki Hirai, Junpei Sakurai, Mizue Mizoshiri, Chiemi Oka, Takami Hirai, Tomonori Takahashi, Hiroyuki Tsuji and Seiichi Hata

    19th International Conference and Exhibition, EUSPEN 2019 

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    Event date: 2019.6

    Language:English   Presentation type:Poster presentation  

    Country:Spain  

    Scopus

  43. ナノインプリントテクスチャ基板の作製と色素増感型太陽電池への応用

    櫻井淳平,楊娜,岡智絵美,秦誠一

    精密工学会,2019年春季大会学術講演会 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  44. ナノインプリント基板の色素増感太陽電池への適用

    櫻井淳平,楊娜,岡智絵美,秦誠一

    第4回日本機械学会イノベーション講演会 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  45. 高成形性形状記憶合金の生体適合性のコンビナトリアル評価

    千須和 要,岡 智絵美,秦 誠一,櫻井 淳平,細田 秀樹

    第4回日本機械学会イノベーション講演会 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  46. 高精度マイクロダイアフラム構造体の作製とその特性

    一色 隆司,岡 智絵美,櫻井 淳平,林 育菁,秦 誠一

    第4回日本機械学会イノベーション講演会 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  47. 高成形性形状記憶合金の接合法による接合強度評価

    青山 椋祐,岡 智絵美,櫻井 淳平,秦 誠一

    第4回日本機械学会イノベーション講演会 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  48. エレクトレットと形状記憶合金を用いた静電振動型エナジーハーベスタの提案

    西谷健太,南原圭汰,岡智絵美,秦誠一,櫻井淳平

    第4回日本機械学会イノベーション講演会 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  49. 表面活性化接合の問題解決を図る長寿命化新形高速原子ビーム源の開発

    森崎諒,平井友喜,岡智絵美,櫻井淳平,平井隆巳,高橋知典,辻裕之,秦誠一

    第4回日本機械学会イノベーション講演会 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  50. Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass International conference

    Shohei Uejima, Chiemi Oka, Seiichi Hata, Junpei Sakurai

    29th 2018 International Symposium on Micro-NanoMechatronics and Human Science 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  51. Fabrication of Foldable Pipe Structures Using Ti-Ni Based High Formable Shape Memory Alloys International conference

    Ryosuke Aoyama, Hiroto Watanabe, Chiemi Oka, Seiichi Hata, Junpei Sakurai

    The 5th Asian Symposium on Material and Processing 2018 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Thailand  

  52. Basic research on micro processing characteristics of reverse lift-off process International conference

    Yuki Nakagawa, Kyohei Yamada, Mizue Mizoshiri, Chiemi Oka, Junpei Sakurai, Seiichi Hata

    29th 2018 International Symposium on Micro-NanoMechatronics and Human Science 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  53. Internal stress control of diaphragm structure made of the thin film metallic glasses International conference

    Ryuji Ishiki,Chiemi Oka,Junpei Sakurai,Yu-Ching Lin,Seiichi Hata

    The 5th Asian Symposium on Material and Processing 2018 

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Thailand  

  54. Combinatorial Evaluation for Biocompatibility of High Formable Shape Memory Alloys International conference

    Kaname Chizuwa, Chiemi Oka, Seiichi Hata, Junpei Sakurai, Hideki Hosoda

    The 3rd International Symposium on Biomedical Engineering 

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    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  55. 逆リフトオフ法のマイクロ加工特性

    中川優希,山田恭平,岡智絵美,溝尻瑞枝,櫻井淳平,秦誠一

    第35回「センサ・マイクロマシンと応用システム」シンポジウム 

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    Event date: 2018.10

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  56. Combinatorial Search for IrO2-RuO2-TiO2 system for Chlorine Evolution Electrode Catalyst International conference

    Junpei Sakurai, Shingo Takagi, Masashi Miyamoto, Kimihiko Sugiura, Chiemi Oka, Mizue Mizoshiri, Seiichi Hata

    10th International Workshop on Combinatorial Materials Science 

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    Event date: 2018.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  57. Development of evaluation substrate for biocompatibility combinatorial evaluation of high formable shape memory alloys International conference

    Kaname Chizuwa, Chiemi Oka, Seiichi Hata, Junpei Sakurai

    10th International Workshop on Combinatorial Materials Science and Technology 

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    Event date: 2018.10

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  58. 熱輸送デバイスへの3Dプリント技術の適用と多孔体の濡れ性改善 Invited

    岡智絵美,小田切公秀,長野方星,秦誠一

    第67回高分子討論会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  59. 薄膜金属を用いたマイクロダイアフラムの作製

    一色隆司,上嶋祥平,岡智絵美,櫻井淳平,林育菁,秦誠一

    日本機械学会2018年度年次大会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  60. Thermo-fluid dynamics in a wettability-enhanced evaporator based on microscale infrared / visible observations International conference

    K. Odagiri, C. Oka, C. Kondou, H. Nagano

    Joint 19th International Heat Pipe Conference and 13th International Heat Pipe Symposium (Joint 19th IHPC and 13th IHPS) 

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    Event date: 2018.6

    Language:English   Presentation type:Oral presentation (general)  

    Country:Italy  

  61. Improving water wettability of porous sintered stainless steel fibers for development of heat transfer performance International conference

    Chiemi Oka, Odagiri Kimihide, Hosei Nagano, Seiichi Hata

    The 2nd Taiwan-Japan Joint Symposium in Taiwan 

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    Event date: 2018.6

    Language:English   Presentation type:Poster presentation  

    Country:Taiwan, Province of China  

  62. Processing characteristics of reverse lift-off process International conference

    Kyohei Yamada, Yuki Nakagawa, Chiemi Oka, Junpei Sakurai, and Seiichi Hata

    The 2nd Taiwan-Japan Joint Symposium in Taiwan 

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    Event date: 2018.6

    Language:English   Presentation type:Poster presentation  

    Country:Taiwan, Province of China  

  63. Improving Wettability of Porous Stainless Steel for Innovation of Heat Transfer Devices International conference

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    Event date: 2018.5

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Taiwan, Province of China  

  64. Enhanced conversion efficiency in dye-sensitized solar cells using optical textured glass substrates

    2019.12.1 

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  65. Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

    井上 慎,岡 智絵美,秦 誠一,櫻井 淳平

    形状記憶合金協会 第11期定時総会  2021.3 

  66. 新規医療用Ti-Ni-Hf高成形性形状記憶合金のコンビナトリアル探索

    井上 慎,岡 智絵美,秦 誠一,細田 秀樹 ,櫻井 淳平

    生体医歯工学共同研究拠点 令和2年度成果報告会  2021.3 

  67. 逆リフトオフ法を用いた MEMS ミラーデバイスの作製

    高瀬 駿,山田 恭平,中川 優希,山崎 貴大,岡 智絵美,櫻井 淳平,秦 誠一

    第28回機械材料・材料加工技術講演会  2020.11 

  68. Ti-Ni-Cu高成形性形状記憶合金のソフトアクチュエータへの基礎検討

    浅井 泰平,青山 椋佑,岡 智絵美,秦 誠一,櫻井 淳平

    第28回機械材料・材料加工技術講演会  2020.11 

  69. 二層構造を有した手術シミュレータ用血管モデルの作製

    山田 大地,堀 史門,山崎 貴大,岡 智絵美,櫻井 淳平,秦 誠一

    第28回機械材料・材料加工技術講演会  2020.11 

  70. Ti-Ni-Cu高成形性形状記憶合金を用いた,反力可変受動形触覚ディスプレイ用触知ピンの作製及び駆動評価

    南原 圭汰,伊木 啓一郎,岡 智絵美,秦 誠一,櫻井 淳平

    第28回機械材料・材料加工技術講演会  2020.11 

  71. 磁性ナノ粒子の発熱を利用した新規マイクロバルブの作製

    三輪 大貴,櫻井 淳平,秦 誠一,岡 智絵美

    日本機械学会2020年度年次大会  2020.9 

  72. プラズマ解析による表面活性化接合用FAB源の高性能化

    森崎 諒,櫻井 淳平,岡 智絵美,山崎 貴大,平井 隆巳,高橋 知典,辻 裕之,大野 哲靖,秦 誠一

    日本機械学会2020年度年次大会  2020.9 

  73. テクスチャ基板による色素増感太陽電池における変換効率への影響

    西保 裕司,楊 娜,岡 智絵美,秦 誠一,櫻井 淳平

    日本機械学会2020年度年次大会  2020.9 

  74. 手術シミュレータ用3次元次元応力測定系の開発

    山田 大地,堀 史門,山崎 貴大,岡 智絵美,櫻井 淳平,秦 誠一

    日本機械学会2020年度年次大会  2020.9 

  75. Ti-Ni-Cu高成形性形状記憶合金を用いた,反力可変受動形触覚ディスプレイ用触知ピンの作製

    南原 圭汰,伊木 啓一郎,岡 智絵美,秦 誠一,櫻井 淳平

    日本機械学会2020年度年次大会  2020.9 

  76. Plasma analysis of the FAB source for the SAB process by PIC-MCC simulation

    R. Morisaki, J. Sakurai, C. Oka, T. Yamazaki, T. Hirai, T. Takahashi, H. Tsuji, N. Ohno, and S. Hata

    33rd International Microprocesses and Nanotechnology Conference  2020.11 

  77. Photoelastic stress measurement in real-time for surgery simulator using gel materials

    2019.12.1 

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  78. Microvalves Utilizing Heat Generation of Magnetic Nanoparticles

    2019.12.1 

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Research Project for Joint Research, Competitive Funding, etc. 6

  1. 大変形変位量可変マイクロアクチュエータ開発に向けた熱応答性ゲルの収縮挙動観察

    2022.8 - 2023.7

    2022年度研究助成金 

    岡 智絵美

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    Authorship:Principal investigator 

    Grant amount:\1000000

  2. 交流磁場暴露により収縮する磁性酸化鉄ナノ粒子混合熱応答性ゲルの収縮膨潤挙動解明

    2021.12 - 2023.3

    公益財団法人大倉和親記念財団  2021年度「研究助成」女性研究者部門 

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    Authorship:Principal investigator 

  3. 一様磁場中における磁性ナノ粒子の鎖状自己配向を利用した無電力熱輸送デバイス用多孔体作製

    2021.11 - 2023.3

    公益財団法人 日東学術振興財団  第38回(2021年度)研究助成 

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    Authorship:Principal investigator 

  4. 磁性ナノ粒子を用いたマイクロバルブ制御技術の確立

    2019.9 - 2021.2

    立松財団2019年度研究助成 

    岡 智絵美

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    Grant type:Competitive

  5. 高性能熱輸送デバイス開発にむけた研究-磁性ナノ粒子の自己配向を利用した多孔体作製-

    2017.4 - 2018.2

    平成29年度笹川科学研究助成 

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    Grant type:Competitive

  6. 生分解性ポリマー粒子をコアとした磁性ナノ粒子複合体の作製

    2012.4 - 2013.3

    平成24年度公益財団法人加藤科学振興会研究奨励金 

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    Grant type:Competitive

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KAKENHI (Grants-in-Aid for Scientific Research) 4

  1. 磁性ナノ粒子磁気発熱量の実験的予測とその応用

    Grant number:21K14512  2021.4 - 2023.3

    科学研究費助成事業  若手研究

    岡 智絵美

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    Authorship:Principal investigator 

    Grant amount:\4680000 ( Direct Cost: \3600000 、 Indirect Cost:\1080000 )

    磁性ナノ粒子は交流磁場中で発熱する特性を有しており,この発熱特性はがん温熱療法,ドラッグデリバリー,マイクロシステム遠隔駆動へ応用可能である.磁性ナノ粒子の発熱特性応用では,実際の発熱量を予測した粒子設計が重要となるが,発熱量を正確に予測する式はまだない.そこで本研究では,理論式では考慮されていない磁性ナノ粒子間距離および磁気的相互作用の大きさが,発熱量にどのような影響を及ぼすのかを解明し,理論式を補正した実験式の導出と,その応用を目指す.

  2. 化学修飾ポーラス界面の熱流体物理解明に基づく新しい熱輸送機能発現

    Grant number:20H02085  2020.4 - 2023.3

    科学研究費助成事業  基盤研究(B)

    長野 方星, 岡 智絵美

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    Authorship:Coinvestigator(s) 

    化学修飾を多孔体に施すことで濡れ性が大きく制御できることに着目し,溶液プロセスによる多孔体の内部まで親水化する手法を構築するとともに,これまで確立されていないナノスケールでの濡れ性・熱伝達性能を評価できる手法を新たに構築する。次に構築した手法を用いて化学修飾キャピラリーの濡れ特性制御メカニズムを実験的に明らかにすることで,化学的濡れ性が蒸発熱伝達に与える影響を明らかにする。さらに,多孔体への浸透圧効果を直接観察し,熱輸送機構への効果を実験的に検証することで,多孔体界面での蒸発熱伝達の理論限界を超える新たな熱輸送メカニズムの創出を目指す。
    多孔体界面における蒸発素過程は,キャピラリー力,固気液三相界面積,多孔体と固体壁の濡れ性に支配されるため,界面熱物質輸送の促進には支配物性の制御と精密計測が不可欠となる。本研究は化学修飾を多孔体に施すことで濡れ性が大きく制御できることに着目し,溶液プロセスによる多孔体の内部まで親水化する手法を構築するとともに,これまで確立されていないナノスケールでの濡れ性・熱伝達性能を評価できる手法を新たに構築する。次に構築した手法を用いて化学修飾キャピラリーの濡れ特性制御メカニズムを実験的に明らかにすることで,化学的濡れ性が蒸発熱伝達に与える影響を明らかにする。さらに,多孔体への浸透圧効果を直接観察し,熱輸送機構への効果を実験的に検証することで,多孔体界面での蒸発熱伝達の理論限界を超える新たな熱輸送メカニズムの創出を目指す。
    2年度は昨年度得られた高性能な多孔体特性および相界面幾何学形状に基づいて多孔体を製作し,熱輸送デバイスに組み込むことでシステムとしての性能を明らかにした。熱輸送デバイスとしては薄型,小型,大型と異なるシステムに基づく最適条件を設定し,指針に基づくデバイス設計,製作を行った。また,新たな多孔体粒子配向制御方法として磁性ナノ粒子を鋳型とした一方向性多孔体製造方法を提案し,異なる樹脂および製造条件で複数の多孔体試作を行った。その結果,磁場の印加条件,磁性ナノ粒子鎖除去条件により多孔体特性が大きく異なることが明らかとなった。また,熱輸送デバイスとして好ましい特性が得られる多孔体製造条件を見出した。
    化学修飾による多孔体特性改善に加え,熱輸送デバイスとしての性能を明らかにすることができた。また,新たに磁性ナノ粒子を用いた一方向性多孔体製造方法を提案し,多孔体の試作評価,製作条件の確立が行えたため。
    得られた知見に基づいてさらに高精度化が期待できる多孔体の製作およびデバイスとしての性能実証を行う。また,磁性ナノ粒子を用いた多孔体についても熱流体デバイスに組み込んだ状態での性能を明らかにする予定である。

  3. Measurement and control of internal stress in thin film metallic glass using combinatorial technology

    Grant number:19H02040  2019.4 - 2023.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

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    Authorship:Coinvestigator(s) 

  4. 無配線・遠隔制御可能な交流磁場応答アクチュエータ群の基礎研究

    Grant number:19K21069  2018.4 - 2020.3

    科学研究費補助金  研究活動スタート支援

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    Authorship:Principal investigator 

 

Teaching Experience (On-campus) 26

  1. Seminar on Micro/Nano Processing 2A

    2021

  2. Exercises in Micro/Nano Processing A

    2021

  3. Seminar on Micro/Nano Processing 1C

    2021

  4. Seminar on Micro/Nano Processing 1A

    2021

  5. Seminar on Micro/Nano Processing 2C

    2021

  6. Seminar on Micro/Nano Processing 2E

    2021

  7. 機械・航空宇宙工学実験第1

    2021

  8. 機械・航空宇宙工学実験第2

    2021

  9. 電気回路工学及び演習

    2021

  10. マイクロ・ナノ機械理工学特別講義

    2021

  11. G30 学生実験

    2021

  12. 機械・航空宇宙工学実験第1

    2020

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    実験テーマ名:解析力学による回転体の力学

  13. マイクロ・ナノプロセス工学セミナー(秋)

    2020

  14. マイクロ・ナノプロセス工学特別実験及び演習(秋)

    2020

  15. マイクロ・ナノ機械理工学特別講義

    2020

  16. マイクロ・ナノプロセス工学特別実験及び演習(春)

    2020

  17. マイクロ・ナノプロセス工学セミナー(春)

    2020

  18. 機械・航空宇宙工学実験第2

    2020

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    実験テーマ名:解析力学による回転体の力学

  19. 電気回路工学及び演習

    2020

  20. G30 学生実験

    2020

  21. 機械・航空工学科学実験

    2019

  22. 電気回路工学演習

    2019

  23. G30 学生実験

    2019

  24. 電気回路工学演習

    2018

  25. 機械・航空工学科学実験

    2018

  26. G30 学生実験

    2018

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Social Contribution 1

  1. テクノWebinar名大 工学女子の人生デザイン,座談会パネリスト

    Role(s):Panelist

    2020.11