Updated on 2022/03/28

写真a

 
SUZUKI Haruka
 
Organization
Graduate School of Engineering Electronics 1 Lecturer
Graduate School
Graduate School of Engineering
Undergraduate School
School of Engineering Electrical Engineering, Electronics, and Information Engineering
Title
Lecturer
Contact information
メールアドレス
External link

Degree 1

  1. Doctor of Engineering ( 2016.3   Nagoya University ) 

Research Interests 4

  1. プラズマプロセス

  2. プラズマ診断

  3. マイクロ波プラズマ

  4. 大気圧プラズマ

Research Areas 1

  1. Energy Engineering / Applied plasma science  / Plasma

Current Research Project and SDGs 1

  1. 新規プロセスプラズマの開発

Research History 4

  1. Nagoya University   Center for Low-temperature Plasma Sciences (cLPS)   Lecturer

    2022.3

      More details

    Country:Japan

  2. Nagoya University   Lecturer

    2022.3

      More details

    Country:Japan

  3. Nagoya University   Center for Low-temperature Plasma Sciences (cLPS)   Assistant Professor

    2019.4 - 2022.2

      More details

    Country:Japan

  4. Nagoya University   Assistant Professor

    2016.4 - 2022.2

      More details

    Country:Japan

Education 3

  1. Nagoya University   Graduate School, Division of Engineering

    2013.4 - 2016.3

      More details

    Country: Japan

  2. Nagoya University   Graduate School, Division of Engineering

    2011.4 - 2013.3

      More details

    Country: Japan

  3. Nagoya University   Faculty of Engineering

    2007.4 - 2011.3

      More details

    Country: Japan

Professional Memberships 3

  1. 電気学会

  2. プラズマ・核融合学会

  3. 応用物理学会

Committee Memberships 13

  1. ISPlasma2022/IC-PLANTS2022   Editorial Committee  

    2022.2   

  2. 一般社団法人 プラズマ・核融合学会   領域委員  

    2022.1   

  3. 一般社団法人 プラズマ・核融合学会   編集委員  

    2021.6   

  4. ISPlasma2022/IC-PLANTS2022   Executive Committee  

    2021   

  5. ISPlasma2022/IC-PLANTS2022   Program Committee  

    2021   

  6. ISPlasma2021/IC-PLANTS2021   Executive Committee  

    2020   

  7. ISPlasma2021/IC-PLANTS2021   Program Committee  

    2020   

  8. ISPlasma2020/IC-PLANTS2020   Executive Committee  

    2019   

  9. ISPlasma2019/IC-PLANTS2019   Executive Committee  

    2018   

  10. 40th International Symposium on Dry Process   Executive Committee  

    2018   

      More details

    Committee type:Academic society

  11. 40th International Symposium on Dry Process   Ad Hoc Committee for 40th Anniversary Project  

    2017.3 - 2018   

  12. ISPlasma2018/IC-PLANTS2018   Executive Committee  

    2017   

  13. ISPlasma2017/IC-PLANTS2017   Executive Committee  

    2016   

▼display all

Awards 6

  1. 2018年秋季学術講演会Poster Award

    2018.10   公益社団法人 応用物理学会  

     More details

    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  2. 2017年秋季学術講演会Poster Award

    2017.9   公益社団法人 応用物理学会  

     More details

    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  3. 講演奨励賞

    2017.3   公益社団法人 応用物理学会   改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成

     More details

    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  4. The Best Poster Award

    2016.9   ICMAP 2016   Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path

    Haruka Suzuki, Sho Takitou, Hirotaka Toyoda

     More details

    Award type:Award from international society, conference, symposium, etc.  Country:Korea, Republic of

  5. 若手学会発表賞

    2015.11   一般社団法人 プラズマ・核融合学会   大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性

     More details

    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  6. 電気学会優秀論文発表賞

    2012.1   一般社団法人 電気学会   パルスマイクロ波液中プラズマの時分解発光分光計測

     More details

    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

▼display all

 

Papers 21

  1. Enhancement of the ion flux to the substrate by high voltage biasing in an electron cyclotron resonance plasma and its application to high-speed deposition of conductive carbon film Reviewed

    Hansin Bae, Ikumi Hamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka toyoda

    Japanese Journal of Applied Physics   Vol. 60 ( 12 ) page: 126002   2021.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ac32b6/meta

  2. Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma Reviewed

    Keita Ichikawa, Manh Hung CHU, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Daiki Iino, Hiroyuki Fukumizu, Kazuaki Kurihara and Hirotaka Toyoda

    Applied Physics Express   Vol. 14 ( 12 ) page: 126001   2021.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1882-0786/ac33c4

  3. Quantitative evaluation of hydrogen retention of solid tin after exposure to hydrogen plasma Reviewed

    Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Hirotaka Toyoda

    Fusion Engineering and Design   Vol. 170   page: 112532   2021.9

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.fusengdes.2021.112532

  4. High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing Reviewed

    H. Bae, K. Sasai, H. Suzuki, and H. Toyoda

    Vacuum   Vol. 192   page: 110429   2021.7

     More details

    Language:English  

    DOI: 10.1016/j.vacuum.2021.110429

  5. Spatial uniformity evaluation of atmospheric-pressure microwave line plasma for wide-area surface treatment Reviewed

    Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Yosuke Koike, Hirotaka Toyoda

    Plasma and Fusion Research   Vol. 16   page: 1406046   2021.4

     More details

    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1585/pfr.16.1406046

  6. Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma Reviewed

    Makoto Moriyama, Naoya Nakahara, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, Haruka Suzuki, and Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 60 ( 1 ) page: 016001   2020.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/abd0ca

  7. Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma Reviewed

    Makoto Moriyama, Naoya Nakahara, Akihiro Mitsuya, Haruka Suzuki, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, and Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 59 ( SJ ) page: SJJB03   2020.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ab85af

  8. Atmospheric-pressure microwave line plasma with an asymmetric cross-section waveguide for long-scale N<sub>2</sub> plasma production Reviewed

    Haruka Suzuki, Yuto Tamura, Manh Hung Chu and Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 59 ( 1 ) page: 016002   2020.1

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab649e

  9. Rapid resist ashing by slot-excited atmospheric pressure microwave O<sub>2</sub> plasma Reviewed

    Hirotaka Toyoda, Shota Ishikawa, Haruka Suzuki, Takeshi Honda

    Japanese Journal of Applied Physics   Vol. 58 ( 12 ) page: 126001   2019.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

  10. Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow Reviewed

    Hikaru Senba, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 58   page: SAAC05   2018.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/aaeb3d

  11. Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment Reviewed

    Kensuke Sasai, Kazuki Keyamura, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 57   page: 066201   2018.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.57.066201

  12. Quantitative evaluation of high-energy O<sup>-</sup> ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target Reviewed

    Taku Suyama, Hansin Bae, Kenta Setaka, Hayato Ogawa, Yushi Fukuoka, Haruka Suzuki, Hirotaka Toyoda

    Journal of Physics D: Applied Physics   Vol. 50 ( 44 ) page: 445201   2017.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/1361-6463/aa87a1

  13. An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge Reviewed

    Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 56 ( 11 ) page: 116001   2017.9

     More details

    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.56.116001

  14. Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition Reviewed

    Kensuke Sasai, Toshiya Hagihara, Tomonori Noda, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 55 ( 8 ) page: 086202   2016.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.086202

  15. Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma Reviewed

    Takafumi Takaba, Haruka Suzuki, Hirotaka Toyoda

    Journal of Physics D: Applied Physics   Vol. 49 ( 29 ) page: 295202   2016.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/0022-3727/49/29/295202

  16. Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave Reviewed

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 55 ( 1S ) page: 01AH09   2015.12

     More details

    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.01AH09

  17. Low-pressure sustainment of surface-wave microwave plasma with modified microwave coupler Reviewed

    Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 55 ( 1 ) page: 016203   2015.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.016203

  18. New line plasma source excited by 2.45 GHz microwave at atmospheric pressure Reviewed

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    Applied Physics Express   Vol. 8 ( 3 ) page: 036001   2015.2

     More details

    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/APEX.8.036001

  19. Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation Reviewed

    Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

    Japanese Journal of Applied Physics   Vol. 58 ( SE ) page: SE802   2019.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab1638

  20. Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development Reviewed

    Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

    Japanese Journal of Applied Physics   Vol. 58 ( SE ) page: SE804   2019.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab163b

  21. Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? Reviewed

    Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

    Japanese Journal of Applied Physics   Vol. 58 ( SE ) page: SE803   2019.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab163a

▼display all

MISC 3

  1. ものづくりのための新規プラズマ源の開発を目指して

    鈴木 陽香

    静電気学会誌   Vol. 45 ( 3 ) page: 110 - 111   2021.5

     More details

    Authorship:Lead author, Last author, Corresponding author   Language:Japanese  

  2. 大気圧マイクロ波放電による高密度長尺ラインプラズマ

    豊田浩孝, 鈴木陽香

    応用物理   Vol. 88 ( 2 ) page: 101 - 104   2019.2

     More details

    Language:Japanese  

  3. マイクロ波励起メートル級プラズマの生成とその特性

    鈴木陽香

    プラズマエレクトロニクス分科会会報   ( 66 ) page: 29 - 30   2017.6

     More details

    Authorship:Lead author, Last author, Corresponding author   Language:Japanese  

Presentations 232

  1. 二周波重畳容量結合型プラズマから電極へ入射する高速粒子のイメージング法を用いた角度分布計測

    市川景太, 鈴木陽香, 豊田浩孝

    第69回応用物理学会春期学術講演会   2022.3.25  応用物理学会

     More details

    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  2. 水シールド環境下でのマイクロ波励起水蒸気プラズマの生成と応用

    鈴木陽香, 豊田浩孝

    第69回応用物理学会春期学術講演会   2022.3.23  応用物理学会

     More details

    Event date: 2022.3

    Language:Japanese   Presentation type:Symposium, workshop panel (nominated)  

    Venue:オンライン   Country:Japan  

  3. 質量分析法を用いた二周波容量結合型 Ar/C4F8/O2パルスプラズマ中イオンの時分解計測

    市関悠斗、加藤閣人、久保井宗一、鈴木陽香、豊田浩孝

    第69回応用物理学会春期学術講演会   2022.3.25  応用物理学会

     More details

    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  4. Ar/O2大気圧マイクロ波プラズマにより処理したポリイミドフィルムの表面分析

    岩田 悠揮,小笠原 知裕,鈴木 陽香,豊田 浩孝

    第69回応用物理学会春期学術講演会   2022.3.26  応用物理学会

     More details

    Event date: 2022.3

    Language:Japanese   Presentation type:Poster presentation  

    Venue:青山学院大学相模原キャンパス   Country:Japan  

  5. 電子サイクロトロン共鳴プラズマ中の基板ステージへの負パルスバイアス電圧印加によるプラズマ密度増加

    濱口育未,ベハンシン,笹井建典, 鈴木陽香,豊田浩孝

    第69回応用物理学会春期学術講演会   2022.3.22  応用物理学会

     More details

    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  6. Angular distribution of high-energy Ar ion and neutral in a 13.56 MHz capacitively-coupled plasma International conference

    Keita Ichikawa, Haruka Suzuki, Hirotaka Toyoda

    14th International Symposium on Advanced Plasma Science and its Applications for Nitride and Nanomaterials/15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)  2022.3.9 

     More details

    Event date: 2022.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  7. RF Voltage Division of in RF-biased High-density Plasma with Floating Liner International conference

    Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki, Hirotaka Toyoda

    14th International Symposium on Advanced Plasma Science and its Applications for Nitride and Nanomaterials/15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)  2022.3.7 

     More details

    Event date: 2022.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  8. Radical measurements of Ar/C4F8 dual frequency capacitively-coupled plasma International conference

    Yuto Seki, Haruhito Kato, Schuichi Kuboi, Haruka Suzuki, Hirotaka Toyoda

    14th International Symposium on Advanced Plasma Science and its Applications for Nitride and Nanomaterials/15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)  2022.3.8 

     More details

    Event date: 2022.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  9. Bubbling Phenomenon of Sn-Bi-Li-Er Alloy under H2 Plasma Exposure International conference

    Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Hirotaka Toyoda

    14th International Symposium on Advanced Plasma Science and its Applications for Nitride and Nanomaterials/15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)  2022.3.8 

     More details

    Event date: 2022.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  10. O Radical Measurement of Ar/O2 Microwave Plasma in Atmospheric Pressur International conference

    Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki, Hirotaka Toyoda

    14th International Symposium on Advanced Plasma Science and its Applications for Nitride and Nanomaterials/15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)  2022.3.7 

     More details

    Event date: 2022.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  11. Plasma density increase of electron cyclotron resonance plasma by high voltage pulse power application International conference

    Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    14th International Symposium on Advanced Plasma Science and its Applications for Nitride and Nanomaterials/15th International Conference on Plasma-Nano Technology & Science (ISPlasma2022/IC-PLANTS2022)  2022.3.7 

     More details

    Event date: 2022.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  12. 高電圧バイアス印加Ar/C6H6ECRプラズマを用いた導電性炭素膜堆積における磁場構造の影響

    濱口育未,ベハンシン, 笹井建典, 鈴木陽香,豊田浩孝

    第39回プラズマプロセシング研究会/第24回プラズマ材料科学シンポジウム  2022.1.25 

     More details

    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  13. 水素プラズマ照射下におけるスズ-ビスマス-リチウム-エルビウム 溶融合金の発泡現象

    田村晃汰,鈴木陽香,宮澤順一,増崎貴,時谷政行,豊田浩孝

    第39回プラズマプロセシング研究会/第24回プラズマ材料科学シンポジウム  2022.1.25 

     More details

    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  14. 真空紫外原子吸光分光法による 大気圧マイクロ波Ar/O2プラズマのO原子密度計測

    岩田悠揮,小笠原知裕,鈴木陽香,堤隆嘉,堀勝,豊田浩孝

    第39回プラズマプロセシング研究会/第24回プラズマ材料科学シンポジウム  2022.1.24 

     More details

    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  15. 容量結合型プラズマにおける電極入射高速粒子角度分布のイメージング計測

    市川景太,チュマンフン,森山誠,中原尚哉,鈴木陽香,豊田浩孝

    第39回プラズマプロセシング研究会/第24回プラズマ材料科学シンポジウム  2022.1.25 

     More details

    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  16. 超高周波容量結合型Ar/C4F8/O2プラズマにおける イオンおよび中性ラジカル種の測定

    関悠斗,加藤閣人,久保井宗一,鈴木陽香,豊田浩孝

    第39回プラズマプロセシング研究会/第24回プラズマ材料科学シンポジウム  2022.1.24 

     More details

    Event date: 2022.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  17. 大気圧長尺マイクロ波プラズマの連続・離散構造変化

    豊田浩孝、鈴木陽香

    「原子分子過程研究の最先端と先進的プラズマ分光計測」 「原子分子データ応用フォーラムセミナー」合同研究会  2021.12.24  核融合科学研究所

     More details

    Event date: 2021.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン  

  18. Conductive carbon film deposition by microwave plasma with high voltage biasing International conference

    Ikumi Hamaguchi, Hansin Bae, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    Material Research Meeting 2021 (MRM2021)  2021.12.16 

     More details

    Event date: 2021.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  19. High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device International conference

    Kazuya Yamaguchi, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    Material Research Meeting 2021 (MRM2021)  2021.12.14 

     More details

    Event date: 2021.12

    Language:English   Presentation type:Poster presentation  

    Venue:Online   Country:Japan  

  20. Influence of metal exposure on the plasma potential in RF-biased high-density plasma with floating liner International conference

    Yukinori Chiba, Manabu Kyuzo, Haruka Suzuki and Hirotaka Toyoda

    The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12)  2021.12.9 

     More details

    Event date: 2021.12

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Taiwan, Province of China  

  21. Spatial distribution measurement of atomic oxygen from atmospheric-pressure microwave line plasma by atomic absorption spectroscopy International conference

    Tomohiro Ogasawara, Yuki Iwata, Haruka Suzuki, Takayoshi Tsutsumi, Masaru Hori, Hirotaka Toyoda

    The 12th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology(APSPT-12)  2021.12.10 

     More details

    Event date: 2021.12

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Taiwan, Province of China  

  22. パルスマイクロ波励起大気圧長尺酸素添加アルゴンプラズマ源の性能評価

    小笠原知裕、岩田悠揮、鈴木陽香、豊田浩孝

    第38回 プラズマ・核融合学会 年会  2021.11.22  プラズマ・核融合学会

     More details

    Event date: 2021.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン   Country:Japan  

  23. 高密度表面波プラズマを用いた銀ナノ粒子の溶融

    疋田和也,笹井健典,鈴木陽香,豊田浩孝

    第38回 プラズマ・核融合学会 年会  2021.11.22  プラズマ・核融合学会

     More details

    Event date: 2021.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン   Country:Japan  

  24. 水素プラズマ照射下でのスズおよびスズ合金からのスパッタリング計測

    田村晃汰,鈴木陽香,宮澤順一,増崎貴,時谷政行,豊田浩孝

    第38回 プラズマ・核融合学会 年会  2021.11.22  プラズマ・核融合学会

     More details

    Event date: 2021.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン   Country:Japan  

  25. High Speed sp2-rich Carbon Film Deposition with Surface-wave Microwave Plasma International conference

    Hansin Bae, Haruka Suzuki, Kensuke Sasai, Hirotaka Toyoda

    42nd International Symposium Dry Process (DPS2021)  2021.11.19 

     More details

    Event date: 2021.11

    Language:English   Presentation type:Poster presentation  

    Venue:Online   Country:Japan  

  26. Influence of small grounded surface on plasma property in an inductively-coupled plasma with floating liner International conference

    Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki, Hirotaka Toyoda

    42nd International Symposium Dry Process (DPS2021)  2021.11.19 

     More details

    Event date: 2021.11

    Language:English   Presentation type:Poster presentation  

    Venue:Online   Country:Japan  

  27. Investigation of Ar/O2 atmospheric-pressure microwave line plasma and its application to Polyimide film ashing International conference

    Haruka Suzuki, Tomohiro Ogasawara, Yuki Iwata, Hirotaka Toyoda

    42nd International Symposium Dry Process (DPS2021)  2021.11.18 

     More details

    Event date: 2021.11

    Language:English   Presentation type:Poster presentation  

    Venue:Online   Country:Japan  

  28. Sputtering Behavior of Sn and Sn-based Alloy Under Hydrogen Plasma Exposure International conference

    Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Hirotaka Toyoda

    The 30th International Toki Conference on Plasma and Fusion Research  2021.11.18 

     More details

    Event date: 2021.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Japan  

  29. Microwave application to liquid process in reduced pressure environment International conference

    Hirotaka Toyoda, Kazuya Yamaguchi, Kengo Yunoki, Haruka Suzuki, Kensuke Sasai

    Workshop Japan-RUB 2021Bridging the Pandemic: Reigniting Cooperation on Plasma Research  2021.10.29 

     More details

    Event date: 2021.10 - 2021.12

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online   Country:Germany  

  30. Oxygen radical measurement in Ar/O2 atmospheric pressure microwave line plasma International conference

    Yuki Iwata, Tomohiro Ogasawara, Haruka Suzuki, Hirotaka Toyoda

    Workshop Japan-RUB 2021Bridging the Pandemic: Reigniting Cooperation on Plasma Research  2021.11.25 

     More details

    Event date: 2021.10 - 2021.12

    Language:English   Presentation type:Poster presentation  

    Venue:Online   Country:Germany  

  31. Conductive carbon deposition by surface wave plasma with high voltage pulse biasing International conference

    Ikumi Hamaguchi, Hansin Bae, Haruka Suzuki,Kensuke Sasai, Hirotaka Toyoda

    Workshop Japan-RUB 2021Bridging the Pandemic: Reigniting Cooperation on Plasma Research  2021.11.25 

     More details

    Event date: 2021.10 - 2021.12

    Language:English   Presentation type:Poster presentation  

    Venue:Online   Country:Germany  

  32. Evaluation of charge density at hole bottom of capillary plates in a pulsed dual-frequency capacitively coupled plasma International conference

    Haruka Suzuki, Makoto Moriyama, Naoya Nakahara, Hirotaka Toyoda

    The 74th Annual Gaseous Electronics Conference (GEC2021)  2021.10.7 

     More details

    Event date: 2021.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online  

  33. Highly conductive carbon film deposition by DC and microwave power superposition International conference

    Hansin Bae, Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    The 74th Annual Gaseous Electronics Conference (GEC2021)  2021.10.5 

     More details

    Event date: 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online  

  34. Fast and massive synthesis of silver nanoparticle by a liquid-flow plasma source using AgNO3 solution International conference

    Haruka Suzuki, Kazuya Yamaguchi, Kensuke Sasai, Hirotaka Toyoda

    The 74th Annual Gaseous Electronics Conference (GEC2021)  2021.10.5 

     More details

    Event date: 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online  

  35. Time-resolved Measurement of Charge Density at the Bottom of High-aspect-ratio Holes in a Pulsed Capacitively Coupled Plasma Invited International conference

    H. Suzuki, M. Moriyama, N. Nakahara, K. Ichikawa, and H. Toyoda

    5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021)  2021.9.28 

     More details

    Event date: 2021.9 - 2021.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Online  

  36. Large Area Ashing Treatment of Polyimide Film by Atmospheric pressure Pulsed Microwave Line Plasma with Ar/O2 International conference

    T. Ogasawara, Y. Iwata, H. Suzuki, and H. Toyoda

    5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021)  2021.9.26 

     More details

    Event date: 2021.9 - 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online  

  37. 流動液体プラズマ処理装置を用いたAgナノ粒子の長時間安定合成

    山口 和也, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第82回応用物理学会秋季学術講演会  2021.9.22  応用物理学会

     More details

    Event date: 2021.9

    Presentation type:Poster presentation  

  38. ECRプラマを用いた高伝導性カーボン薄膜成膜, 第82回応用物理学会秋季学術講演会

    Bae Hansin, 濱口 育未, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第82回応用物理学会秋季学術講演会  2021.9.12  応用物理学会

     More details

    Event date: 2021.9

    Presentation type:Oral presentation (general)  

  39. 大気圧長尺マイクロ波ラインプラズマによる広幅高速アッシング処理

    岩田 悠揮, 小笠原 知裕, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

     More details

    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  40. イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測

    市川景太, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

     More details

    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  41. 二周波容量結合型フルオロカーボンプラズマ中のラジカル計測

    関 悠斗, 久保井 宗一, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

     More details

    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  42. 表面波プラズマを用いた高導電性炭素膜の高速堆積

    濱口 育未, Bae Hansin, 笹井 建典, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

     More details

    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  43. 表面波プラズマによるグラファイトライクカーボン膜の高速成膜

    BAE Hansin, 疋田 和也, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.18 

     More details

    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  44. 液温制御による流動液体プラズマ処理装置の長時間安定運転と Ag ナノ粒子合成

    山口 和也, 鈴木 丈, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.19 

     More details

    Event date: 2021.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  45. パルスマイクロ波励起大気圧酸素添加アルゴンプラズマによる広幅アッシング処理

    小笠原 知裕, 岩田 悠揮, 鈴木 陽香, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.18 

     More details

    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  46. 絶縁ライナー付誘導結合型プラズマへの微小接地電極挿入におけるプラズマ変動

    千葉 行徳, 久蔵 学, 鈴木 陽香, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.19 

     More details

    Event date: 2021.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  47. Wide-area and High-speed Deposition of Graphitic Film by Microwave Surface Wave Plasma with High Power Pulse International conference

    Hansin Bae, Haruka Suzuki, Kensuke Sasai, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.9 

     More details

    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  48. Deuterium Depth Profile of Plasma-Exposed Solid/Liquid Tin International conference

    Kota Tamura, Haruka Suzuki, Suguru Masuzaki, Masayuki Tokitani, Junichi Miyazawa, Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

     More details

    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  49. Time-dependent Measurement of Charge Density at Bottom of High-aspect Hole in a Capacitively-coupled Plasma International conference

    Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, Manh Hung Chu, Haruka Suzuki, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

     More details

    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  50. Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave LinePlasma with Ar/O2 International conference

    Haruka Suzuki, Tomohiro Ogasawara, Yuki Iwata, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

     More details

    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  51. Effect of grounded electrode on plasma propety in ICP with floating liner International conference

    Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

     More details

    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  52. 表面波プラズマを用いたグラファイト様炭素膜の大面積高速堆積

    ベ ハンシン, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第38回プラズマプロセシング研究会  2021.1.29 

     More details

    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  53. パルス変調容量結合プラズマにおける高アスペクト比ホール中蓄積電荷の時間変化

    森山 誠, 中原 尚哉, 市川景太, Chu Manh Hung, 鈴木 陽香, 豊田 浩孝

    第38回プラズマプロセシング研究会  2021.1.29 

     More details

    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  54. 大気圧マイクロ波プラズマの大面積かつ高速表面処理への応用

    鈴木 陽香, 小笠原 知裕, Chu Manh Hung, 岩田 悠揮, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.3 

     More details

    Event date: 2020.12

    Language:Japanese   Presentation type:Symposium, workshop panel (nominated)  

    Country:Japan  

  55. High speed and wide area conductive carbon film deposition by surface-wave plasma

    H.Bae, K.Hikita, H.Suzuki, K.Sasai, H.Toyoda

    プラズマ・核融合学会 第37回年会  2020.12.3 

     More details

    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  56. パルスマイクロ波励起大気圧酸素添加アルゴンプラズマによる樹脂材料表面処理

    小笠原 知裕, 鈴木 陽香, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.2 

     More details

    Event date: 2020.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  57. パルス変調二周波重畳容量結合型プラズマにおけるキャピラリープレート下部の電荷密度評価

    中原 尚哉, 森山 誠, 鈴木 陽香, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.2 

     More details

    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  58. 重水素プラズマ照射スズ中における重水素の深さ分布測定

    田村 晃汰, 鈴木 陽香, 増崎 貴, 時谷 政行, 宮澤 順一, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.2 

     More details

    Event date: 2020.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  59. Quantitative Evaluation of Hydrogen Retention of Solid and Liquid Tin by Thermal Desorption Spectroscopy International conference

    Kota TAMURA1, Haruka SUZUKI1, Junichi MIYAZAWA2, Suguru MASUZAKI2, Hirotaka TOYODA1;2 1. Nagoya University 2. National Institute for Fusion Science

    The 29th International Toki Conference on Plasma and Fusion Research  2020.10.28 

     More details

    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  60. Evaluation of absolute charge density at the bottom of hole pattern using high aspect ratio capillary plate International conference

    Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Hirotaka Toyoda

    The 73rd Annual Gaseous Electronics Conference  2020.10.7 

     More details

    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  61. Film Surface Treatment with O2/Ar Line Plasma under Atmospheric Pressure International conference

    Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Manh Hung Chu, Hirotaka Toyoda

    The 73rd Annual Gaseous Electronics Conference  2020.10.6 

     More details

    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  62. パルス変調容量結合型プラズマにおけるキャピラリープレート下部の電荷密度変化

    中原 尚哉, 森山 誠, 鈴木 陽香, 豊田 浩孝

    第81回応用物理学会秋季学術講演会  2020.9.11 

     More details

    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  63. パルス変調容量結合型プラズマにおけるキャピラリープレート下部の電荷密度の時分解計測

    中原 尚哉, 森山 誠, 鈴木 陽香, 豊田 浩孝

    令和2年度電気・電子・情報関係学会東海支部連合大会  2020.9.3 

     More details

    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  64. 誘導型結合プラズマ中の銀粒子挙動

    疋田 和也, べ ハンシン, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    令和2年度電気・電子・情報関係学会東海支部連合大会  2020.9.4 

     More details

    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  65. 大気圧長尺マイクロ波ラインプラズマによる表面親水化処理

    小笠原 知裕, 小間 浩嗣, 鈴木 陽香, 豊田 浩孝

    令和2年度電気・電子・情報関係学会東海支部連合大会  2020.9.4 

     More details

    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  66. アルカリ剤を用いたプラズマ 合成 Agナノ粒子の再溶解抑制

    鈴木 丈, 鈴木 陽香,豊田 浩孝

    第67回応用物理学会春季学術講演会 

     More details

    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  67. Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate

    The 67th JSAP Spring Meeting 

     More details

    Event date: 2020.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  68. 容量結合型 プラズマ中におけるキャピラリープレート上部電位の推定

    中原 尚哉, 森山 誠, 三矢 晶洋, 鈴木 陽香,豊田 浩孝

    第67回応用物理学会春季学術講演会 

     More details

    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  69. パルス変調容量結合プラズマにおけるキャピラリープレート近傍のャージ量絶対評価

    森山 誠,中原 尚哉,三矢 晶洋,鈴木 陽香,豊田 浩孝

    第67回応用物理学会春季学術講演会 

     More details

    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  70. Temperature measurement of slot-plate in an atmospheric-pressure microwave linear plasma International conference

    Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  71. Electromagnetic Analysis in a Long-scale Slot Plasma Excited by Microwave Travelling Wave International conference

    Hirotsugu Koma, Haruka Suzuki, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  72. Synthesis of silver nanoparticles by in line liquid process using microwave plasma source International conference

    Jyo Suzuki, Haruka Suzuki, Kensuke Sasai, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  73. Quantitative Evaluation of Hydrogen Retention in Metal Tin using Thermal Desorption Spectroscopy International conference

    Kota Tamura, Haruka Suzuki Junichi Miyazawa and Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  74. Spatial characteristics analysis of atmospheric pressure microwave plasma with FEM simulation International conference

    Yoshiki Baba, Makoto Moriyama, Haruka Suzuki, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  75. 容量結合プラズマ中に設置されたエッチングホール模擬用キャピラリープレートの電位構造解析

    森⼭ 誠, 中原 尚哉, 三⽮ 晶洋, 鈴⽊ 陽⾹, 豊⽥ 浩孝

    プラズマ・核融合学会 第36回年会 

     More details

    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  76. 核融合炉ダイバー応用へ向けたスズの水素吸蔵量定量評価

    田村 晃汰,鈴木 陽香,宮澤 順一,豊田 浩孝

    プラズマ・核融合学会 第36回年会 

     More details

    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  77. potential structure of high-aspect-ratio capillary hole in a pulsed-VHF capactive coupled plasma International conference

    M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda

    2019 International Symposium on DryProcess 

     More details

    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  78. Microscopic observation of an atmospheric-pressure microwave plasma produced in a meter-scale slot with sub-millimeter gap International conference

    H. Toyoda, H. Koma, Y. Baba, M. Chu, H. Bae, H. Suzuki

    The 72nd Annual Gaseous Electronics Conference 

     More details

    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  79. Space-resolved oxygen radical measurement of atmospheric pressure microwave line plasma using vacuum ultraviolet absorption spectroscopy International conference

    H. Bae, H. Koma, H. Suzuki, H. Toyoda

    The 72nd Annual Gaseous Electronics Conference 

     More details

    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  80. 表面波プラズマ生成アンテナへのDCパルス電圧印加時における絶縁表面電位の時間変化

    福田 奨, 鈴木 陽香, 村田 祐也, 山本 兼司, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  81. パルスマイクロ波励起大気圧長尺スロットプラズマの時分解計測

    チュー マン フン,鈴木 陽香,豊田 浩孝

    第80回応用物理学会秋季学術講演会 

     More details

    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  82. 二周波重畳容量結合型プラズマ装置におけるファラデーカップを用いたイオンエネルギー分布の計測

    三矢 晶洋, 森山 誠, 中原 尚哉, 鈴木 陽香, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  83. 電磁界シミュレーションによる進行波を用いた長尺スロットプラズマ内における電磁界分布の検討

    小間 浩嗣, 鈴木 陽香, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  84. ⼆周波重畳容量結合型プラズマにおけるキャピラリープレート内の電位構造解析

    森⼭ 誠, 三⽮ 晶洋, 中原 尚哉, 鈴⽊ 陽⾹, 豊⽥ 浩孝

    第80回応用物理学会秋季学術講演会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  85. 大気圧下におけるスロット励起マイクロ波O2/Arプラズマの断面空間構造の空間分解観測

    馬場 賀己, 鈴木 陽香, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  86. 二周波重畳容量結合型プラズマにおけるキャピラリープレート内の電位構造解析

    中原 尚哉, 森山 誠,三矢 晶洋,鈴木 陽香,豊田 浩孝, 栗原 一彰,飯野 大輝,福水 裕之,林 久貴,鈴木 啓之

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  87. High Speed Synthesis of Nanoparticles in Liquid Environment by In-Line Type Plasma Device

     More details

    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  88. 表面波プラズマ生成アンテナへのDC パルス電圧印可時における絶縁膜表面電位の考察

    福田 奨,鈴木 陽香,村田 祐也,山本 兼司,豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  89. 昇温脱離法を用いた固体スズ中の水素吸蔵量評価

    田村 晃汰,鈴木 陽香,宮澤 順一,豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  90. 大気圧マイクロ波プラズマにおけるギャップ内ガス温度の空間分解計測

    馬場 賀己,鈴木 陽香,豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  91. 二周波重畳容量結合型プラズマ装置におけるファラデーカップを用いたイオンエネルギー分布の測定解析

    三矢 晶洋,森山 誠,中原 尚哉, 鈴木 陽香, 豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  92. Oxygen Radical Flux Measurement of Atmospheric Pressure Microwave Line Plasma International conference

    H. Bae, Y. Koike, H. Koma, H. Suzuki, H. Toyoda

    AEPSE2019 

     More details

    Event date: 2019.9

    Language:English   Presentation type:Poster presentation  

    Country:Korea, Republic of  

  93. Potential Control of Surface Wave Excited Plasma by Pulsed DC Voltage Applied to Plasma-Immersed Waveguide International conference

    S. Fukuda, K. Udagawa, H. Suzuki, Y. Tauchi, H. Toyoda

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) 

     More details

    Event date: 2019.7

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  94. Measurement of ion energy in dual-frequency capacitive coupled plasma International conference

    M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) 

     More details

    Event date: 2019.7

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  95. Large-area surface treatment using microwave plasma excited in meter-length slot with sub-millimeter gap International conference

    Haruka Suzuki, Hirotsugu Koma, Manh Hung Chu, Hansin Bae, Yoshiki Baba, Hirotaka Toyoda

    The 10th of International Workshop on Microplasmas (IWM-10) 

     More details

    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  96. Time-resolved microscopic measurement of slot excited atmospheric pressure microwave plasma International conference

    Yoshiki Baba, Haruka Suzuki, Hirotaka Toyoda

    The 10th of International Workshop on Microplasmas (IWM-10) 

     More details

    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  97. Development of Microwave Remote Plasma Source for New Surface Functionalization International conference

    T. Okimoto, Yoshiyuki Isomura, Y. Ikari, Y. Tauchi, K. Nishiyama, Japan H. Toyoda, H. Suzuki

    International Conference on Metallurgical Coatings and Thin Films(ICMCTF 2019) 

     More details

    Event date: 2019.5

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  98. Optimized waveguide structure for atmospheric pressure microwave plasma International conference

    Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2019.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  99. Hydrogen Recycling Properties of Tin Wall in DC Glow Hydrogen Plasma International conference

    Kota Tamura, Haruka Suzuki, Hirotaka Toyoda, Junichi Miyazawa

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  100. Time-resolved Measurement of Cross-Sectional Structure of a Narrow Gap Plasma Produced by an Atmospheric Pressure Microwave Discharge International conference

    Yoshiki Baba, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  101. Oxygen radical measurement of atmospheric pressure microwave plasma employing vacuum ultraviolet absorption spectroscopy International conference

    Hansin Bae, Yosuke Koike, Hirotsugu Koma, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  102. Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Slot type Microwave Antenna International conference

    Sho Fukuda, Kou Udagawa, Haruka Suzuki, Yuki Yauchi, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  103. Microscopic Measurement of Long Microwave Plasma at Atmospheric Pressure International conference

    Hirotsugu Koma, Yosuke Koike, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  104. マイクロ波アンテナへのDCパルス電圧印加による絶縁表面へのイオン衝撃

    福田 奨, 宇田川 洸, 鈴木 陽香, 田内 裕基, 豊田 浩孝

    第66回応用物理学会春季学術講演会 

     More details

    Event date: 2019.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  105. 大気圧長尺マイクロ波プラズマによる大面積高速表面処理

    小間 浩嗣,杉山 敦士,鈴木 陽香,本田 剛,豊田 浩孝

    第66回応用物理学会春季学術講演会 

     More details

    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  106. High Speed Synthesis of Nanoparticles by Liquid Flow-type Microwave Plasma

     More details

    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  107. Oxygen Radical Measurement of Atmospheric Pressure Microwavw Line Plasma by Vacuum Ultraviolet Absorption Spectroscopy

     More details

    Event date: 2019.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  108. 二周波重畳容量結合プラズマ基本特性の実験的評価

    三矢 晶洋,森山 誠,鈴木 陽香,豊田 浩孝

    第66回応用物理学会春季学術講演会 

     More details

    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  109. スロット型大気圧マイクロ波プラズマの時空間分解計測

    馬場 賀己,鈴木 陽香,豊田 浩孝

    第66回応用物理学会春季学術講演会 

     More details

    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  110. シミュレーションによる二周波重畳容量結合プラズマの基本特性解析

    森山 誠,三矢 晶洋,中原 尚哉,鈴木 陽香,豊田 浩孝

    第66回応用物理学会春季学術講演会 

     More details

    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  111. メートル級長尺スロット型プラズマ源における 大気圧マイクロ波プラズマの顕微計測

    小間浩嗣, 小池洋右, 鈴木陽香, 豊田浩孝

    第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

     More details

    Event date: 2019.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  112. スロット励起大気圧マイクロ波プラズマの断面構造の時分解顕微観測

    馬場賀己, 鈴木陽香, 豊田浩孝

    第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

     More details

    Event date: 2019.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  113. シミュレーションを援用した大気圧マイクロ波プラズマ源の非対称断面導波管内電磁界分布の解析

    Chu Manh Hung, 鈴木陽香, 豊田浩孝

    第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

     More details

    Event date: 2019.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  114. Water Vapor Plasma Treatment Process Using Slot-Excited Microwave Plasma Invited

    Haruka Suzuki, Hirotaka Toyoda

     More details

    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  115. Organic-matter removal treatment using atmospheric pressure microwave O2/CF4

    Shota Ishikawa, Haruka Suzuki, Tsuyoshi Honda, Hirotaka Toyoda

     More details

    Event date: 2018.12

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  116. 新規大気圧マイクロ波プラズマ源の開発と応用 Invited

    鈴木 陽香

    高機能トライボ表面プロセス部会 第12回例会 「トライボロジーと表面技術」  

     More details

    Event date: 2018.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  117. 直流放電プラズマを用いた金属スズの水素リサイクリング評価

    田村 晃汰、鈴木 陽香、豊田 浩孝、宮澤 順一

    第35回プラズマ・核融合学会年会 

     More details

    Event date: 2018.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  118. 二周波重畳容量結合プラズマの基本特性評価

    森山 誠、三矢 晶洋、中原 尚哉、鈴木 陽香、豊田 浩孝

    第35回プラズマ・核融合学会年会 

     More details

    Event date: 2018.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  119. 大気圧マイクロ波ラインプラズマにおける酸素原子の紫外吸収分光計測

    Bae Hansin、小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝

    第35回プラズマ・核融合学会年会 

     More details

    Event date: 2018.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  120. 大気圧下でのメートル級マイクロ波プラズマの生成と応用

    鈴木 陽香、豊田 浩孝

    第35回プラズマ・核融合学会年会 

     More details

    Event date: 2018.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  121. Ring-shaped microwave plasma production in liquid flow environment for nanoparticle synthesis International conference

    S. Fujimura, S. Yang, K. Sasai, H. Suzuki, H. Toyoda

    The 40th International Symposium on Dry Process(2018) 

     More details

    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  122. Optimal design of atmospheric-pressure plasma source for industrial application International conference

    Haruka Suzuki

    The 40th International Symposium on Dry Process(2018) 

     More details

    Event date: 2018.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  123. High speed photoresist removal using slot-excited atmospheric-pressure microwave O2/CF4 plasma International conference

    S. Ishikawa, H. Suzuki, T. Honda, H. Toyoda

    The 40th International Symposium on Dry Process(2018) 

     More details

    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  124. Influence of magnetic field on high-energy negative ion behavior in magnetron plasma with oxide targets Invited International conference

    Hirotaka Toyoda, Kou Udagawa, Akihiro Mitsuya, Hansin Bae, Haruka Suzuki

    2nd Asia-Pacific Conference on Plasma Physics 

     More details

    Event date: 2018.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  125. Observation of cross sectional plasma structure in a gap of an atmospheric pressure microwave discharge International conference

    Hirotaka Toyoda, Yoshiki Baba, Haruka Suzuki

    71st Annual Gaseous Electronics Conference  

     More details

    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  126. Scaling of Microwave Absorption in Atmospheric Pressure Microwave Line Plasma International conference

    Ivan Ganachev, Haruka Suzuki, Hirotaka Toyoda

    THERMEC2018 

     More details

    Event date: 2018.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:China  

  127. Diagnostics of energetic particles in magnetron plasma using oxide target Invited International conference

    Hirotaka Toyoda, Hansin Bae, Kou Udagawa, Akihiro Mitsuya, Haruka Suzuki

    International Symposium on Sputtering & Plasma Processes (ISSP2018) 

     More details

    Event date: 2018.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  128. 大気圧マイクロ波励起O2/CF4プラズマによるフォトレジスト除去処理

    石川 翔太、鈴木 陽香、本田 剛、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  129. Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Microwave Antenna

    Kou Udagawa、Sho Fukuda、Haruka Suzuki、Yuki Tauchi、Hirotaka Toyoda

    第79回応用物理学会秋季学術講演会 

     More details

    Event date: 2018.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  130. メートル級長尺大気圧マイクロ波プラズマの顕微計測

    鈴木 陽香、小池 洋右、小間 浩嗣、馬場 賀己、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  131. 流動液体マイクロ波プラズマによるナノ粒子生成

    藤村 昇平、楊 少菲、鈴木 陽香、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  132. 電磁界シミュレーションを用いた大気圧長尺マイクロ波プラズマにおける定在波抑制

    小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  133. 大気圧メートル級長尺マイクロ波ラインプラズマの顕微計測

    小間 浩嗣、小池 洋右、鈴木 陽香、豊田 浩孝

    平成30年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  134. 酸化物ターゲットを用いたマグネトロンスパッタにおける酸素負イオンフラックスの空間分布の数値解析

    三矢 晶洋、宇田川 洸、鈴木 陽香、豊田 浩孝

    平成30年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  135. スロット励起大気圧マイクロ波プラズマにおけるスロット断面構造の顕微観測

    馬場 賀己、鈴木 陽香、豊田 浩孝

    平成30年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  136. 表面波プラズマアンテナへのDC パルス電圧印加によるプラズマ電位制御

    福田 奨、宇田川 洸、鈴木 陽香、豊田浩孝、田内 裕基

    平成30年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  137. Surface Roughness Control of ITO Films by VHF Superposed DC Magnetron Plasmand its application- Invited International conference

    Hirotaka Toyoda, Haruka Suzuki

    THERMEC2018 

     More details

    Event date: 2018.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:France  

  138. Long-scale atmospheric-pressure microwave plasma -production mechanism and its application- Invited International conference

    H. Toyoda, H. Suzuki, Y. Koike, H. Koma, Y. Baba, J.H. Qiu, M.H. Chu, A. Sugiyama

    JAPAN-RUB Workshop on Plasma Science 

     More details

    Event date: 2018.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Germany  

  139. マグネトロンプラズマにおける高エネルギー負イオン軌道の数値解析

    宇田川洸, 三矢晶洋, 鈴木陽香, 豊田浩孝

    第65回応用物理学会春季学術講演会 

     More details

    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  140. 大気圧長尺マイクロ波プラズマにおける電力吸収の空間分布

    小池洋右, 田村宥人, 鈴木陽香, 豊田浩孝

    第65回応用物理学会春季学術講演会 

     More details

    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  141. 同軸導波管の外部導体ギャップ間におけるマイクロ波プラズマ生成

    藤村昇平, 鈴木陽香, 笹井建典, 豊田浩孝

    第65回応用物理学会春季学術講演会 

     More details

    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  142. Space-resolved Measurement of Microwave Power along Waveguide in Atmospheric Pressure Microwave Line Plasma International conference

    Yosuke Koike, Haruka Suzuki, Yuto Tamura, Yoshiki Baba, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  143. Power Absorption Mechanism of Atmospheric-pressure Microwave Line Plasma International conference

    Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2018.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  144. Water-vapor Atmospheric Pressure Microwave Plasma in an Air-shielded Environment by Water Flow International conference

    Haruka Suzuki, Hikaru Senba, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  145. A Coaxial-waveguide Microwave Plasma Source for In-line Treatment of Large Volume Liquid International conference

    Shohei Fujimura, Haruka Suzuki, Kensuke Sasai, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  146. Oxygen Negative Ion Behavior in a VHF-superposed DC Magnetron Sputtering International conference

    Kou Udagawa, Akihiro Mitsuya, Haruka Suzuki, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

     More details

    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  147. 直流およびVHF重畳直流マグネトロンプラズマにおける高エネルギー酸素負イオンに起因する指向性熱フラックスの測定

    宇田川洸, 三矢晶洋, 鈴木陽香, 豊田浩孝

     More details

    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  148. 大気圧マイクロ波プラズマCVDによるSiO2膜形成及び膜評価

    石川翔太, 鈴木陽香, 豊田浩孝

     More details

    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  149. ギャップ型マイクロ波プラズマ源の改良による液体処理能力向上

    藤村昇平, 堤和紀, 鈴木陽香, 豊田浩孝

     More details

    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  150. 電磁界シミュレーションを用いた大気圧マイクロ波ラインプラズマの均一性向上の検討

    小池洋右, 田村宥人, 鈴木陽香, 豊田 浩孝

     More details

    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  151. 水流遮蔽水蒸気マイクロ波プラズマの生成とその応用

    鈴木陽香, 仙波輝, 豊田浩孝

     More details

    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  152. Power Absorption Mechanism of Atmospheric Pressure Microwave Line Plasma International conference

    Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba, Hirotaka Toyoda

    39th International Symposium on Dry Process 

     More details

    Event date: 2017.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  153. Oxygen Negative Ion Flux Evaluation in DC and DC-VHF Magnetron Plasmas through Directional Heat Flux Measurement International conference

    Hirotaka Toyoda, Kou Udagawa, Haruka Suzuki, Taku Suyama, Hansin Bae

    The 11th Asian-European International Conference on Plasma Surface Engineering 

     More details

    Event date: 2017.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  154. 空間分解型吸収分光装置を用いたプラズマによる有機溶質分解過程の調査

    藤村 昇平, 堤 和紀, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  155. スロット励起大気圧マイクロ波プラズマにおける消費電力シミュレーション

    小池 洋右, 田村 宥人, 馬場 賀己, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  156. VHF-DC重畳マグネトロンプラズマにおける高エネルギーO-イオンに由来する熱フラックスの評価

    宇田川 洸, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  157. スロット励起大気圧マイクロ波プラズマCVDによるSiO2薄膜形成

    石川 翔太, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  158. マイクロ波インライン液体処理における反応領域のその場計測

    堤 和紀, 藤村 昇平, 鈴木 陽香, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  159. スロット励起大気圧マイクロ波プラズの電力消費に関する電磁界シミュレーョン

    鈴木 陽香, 小池 洋右, 田村 宥人, 馬場 賀己, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  160. 大気圧マイクロ波ラインプラズマにおける電力吸収機構

    田村 宥人, 小池 洋右, 鈴木 陽香, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  161. 水流により遮蔽された空間での水蒸気マイクロ波プラズ生成

    仙波 輝, 小池 洋右, 鈴木 陽香, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

     More details

    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  162. Improvement of SiO2 film properties synthesized by plasma-enhanced chemical vapor deposition using slot-type microwave plasma with O2/TEOS International conference

    Shota Ishikawa, Masaki Yamamoto, Haruka Suzuki, Hirotaka Toyoda

    The 15th International Conference on Advanced Materials 

     More details

    Event date: 2017.8 - 2017.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  163. Meter -scale microwave plasma production with various discharge gases for large-area surface treatment under atmospheric pressur Invited International conference

    Haruka Suzuki

    The 15th International Conference on Advanced Materials 

     More details

    Event date: 2017.8 - 2017.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  164. 高速表面処理に向けた新しい大気圧プラズマ源の開発 Invited

    鈴木陽香

    プラズマ材料科学153委員会30周年記念講演会 

     More details

    Event date: 2017.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  165. Optical measurement of meter-scale microwave line plasma under atmospheric pressure International conference

    Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hirotaka Toyoda

    XXXIII International Conference on Phenomena in Ionized Gases 

     More details

    Event date: 2017.7

    Language:English   Presentation type:Poster presentation  

    Country:Portugal  

  166. Quantitative Evaluation of High-Energy Oxygen Negative Ion Flux in DC Magnetron Sputtering of Indium-Tin-Oxide International conference

    Hirotaka Toyoda, Hansin Bae, Taku Suyama, Kenta Setaka, Haruka Suzuki

    XXXIII International Conference on Phenomena in Ionized Gases 

     More details

    Event date: 2017.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Portugal  

  167. Microwave Plasma Production inside the Micro-gap with Meter-scale Length Invited International conference

    Haruka Suzuki

    9th International Workshop on Microplasmas 2017 

     More details

    Event date: 2017.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Germany  

  168. Development of atmospheric pressure microwave plasma source for large-area surface treatment Invited International conference

    Haruka Suzuki

    The 22th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The 9th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 

     More details

    Event date: 2017.4

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Korea, Republic of  

  169. マイクロ波励起メートル級大気圧プラズマの生成とその特性 Invited

    鈴木陽香, 田村宥人, 猪俣弥雄起, 関根誠, 堀勝, 豊田浩孝

    第64回応用物理学会春季学術講演会 

     More details

    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  170. マイクロ波励起長尺大気圧プラズマにおけるプラズマ維持機構の検討

    田村 宥人, 猪俣 弥雄起, 鈴木 陽香, 豊田 浩孝

    第64回応用物理学会春季学術講演会 

     More details

    Event date: 2017.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  171. マイクロ波インライン液体処理における反応領域の空間分布計測

    堤 和紀 滝藤 奨, 藤村 昇平, 鈴木 陽香, 豊田 浩孝

    第64回応用物理学会春季学術講演会 

     More details

    Event date: 2017.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  172. 水流により遮蔽された空間での大気圧プラズマジェット生成

    仙波 輝, 小池 洋右, 鈴木 陽香, 豊田 浩孝

    第64回応用物理学会春季学術講演会 

     More details

    Event date: 2017.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  173. Long-scale N2 line plasma production under atmospheric pressure International conference

    Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

     More details

    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  174. Film quality improvement in slot-type microwave plasma CVD of SiO2 International conference

    Masaki Yamamoto, Shota Ishikawa, Haruka Suzuki, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

     More details

    Event date: 2017.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  175. Measurement of Directional Heat Flux Component in VHF-Magnetron Sputtering International conference

    Hansin Bae, Taku Suyama, Kenta Setaka, Haruka Suzuki, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

     More details

    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  176. Shielding of plasma jets from ambient air by water flow International conference

    Hikaru Senba, Yosuke Koike, Haruka Suzuki, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

     More details

    Event date: 2017.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  177. Efficient production of meter-scale atmospheric-pressure line plasma using modified waveguide and cw microwave power

     More details

    Event date: 2017.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  178. 長尺ラインプラズマ生成のための改良型導波管の電磁界シミュレーション

    堤 和紀, 滝藤 奨, 藤村 昇平, 伊藤 美智子, 高島 成剛, 鈴木 陽香, 豊田浩孝

    第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム(合同会議) 

     More details

    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  179. インラインマイクロ波プラズマ処理の高流速化による有機物分解効率の向上

    堤 和紀, 滝藤 奨, 藤村 昇平, 伊藤 美智子, 高島 成剛, 鈴木 陽香, 豊田浩孝

    第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム(合同会議) 

     More details

    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  180. ITOターゲットを用いたVHF重畳DCマグネトロンプラズマにおける熱フラックスの空間分布

    Bae Hansin, 巣山 拓, 鈴木 陽香, 豊田 浩孝

    第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム(合同会議) 

     More details

    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  181. マグネトロンプラズマ中の高エネルギー負イオンフラックス評価

    豊田 浩孝, 巣山 拓, Bae Hansin, 鈴木 陽香

    プラズマ・核融合学第33回会年会 

     More details

    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  182. Plasma-enhanced chemical vapor deposition of SiO2 films by slot type microwave plasma with O2/TEOS International conference

    Haruka Suzuki, Masaki Yamamoto, Hirotaka Toyoda

    38th International Symposium on Dry Process 

     More details

    Event date: 2016.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  183. Evaluation of O- Ion Flux in a VHF-DC Magnetron Plasma under ITO Sputtering Process International conference

    Haruka Suzuki, Masaki Yamamoto, and Hirotaka Toyoda

    38th International Symposium on Dry Process 

     More details

    Event date: 2016.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  184. 100% N2 atmospheric-pressure microwave-line-plasma production with a modi ed waveguide structure International conference

    69th Annual Gaseous Electronics Conference 

     More details

    Event date: 2016.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  185. High speed deposition of SiO2 lm by slot-type microwave CVD system International conference

    Hirotaka Toyoda, Masaki Yamamoto, Haruka Suzuki

    69th Annual Gaseous Electronics Conference 

     More details

    Event date: 2016.10

    Language:English   Presentation type:Poster presentation  

    Country:Germany  

  186. Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path International conference

    Haruka Suzuki, Sho Takitou, Hirotaka Toyoda

    The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016) 

     More details

    Event date: 2016.9

    Language:English   Presentation type:Poster presentation  

    Country:Korea, Republic of  

  187. 改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成

    鈴木陽香, 田村宥人, 伊藤仁, 関根誠, 堀勝, 豊田浩孝

    第77回応用物理学会秋季学術講演会 

     More details

    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  188. ITOマグネトロンスパッタにおける酸素負イオンフラックス評価

    巣山 拓, Bae Hansin, 瀬高 健太, 笹井 建典, 鈴木 陽香, 豊田 浩孝

    第77回応用物理学会秋季学術講演会 

     More details

    Event date: 2016.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  189. O2/TEOS スロット型マイクロ波プラズマCVD によるSiO2膜形成

    山本 匡毅, 鈴木 陽香, 豊田 浩孝

    第77回応用物理学会秋季学術講演会 

     More details

    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  190. 窒素ガスを用いたマイクロ波大気圧ラインプラズマの生成

    田村 宥人, 鈴木 陽香, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    平成28年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  191. Evaluation of O- Ion Flux in VHF-DC Magnetron Sputtering

     More details

    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  192. High-Speed-Camera Observation of Plasma Behavior in Atmospheric-Pressure Microwave Line Plasma International conference

    7th International Workshop on Plasma Spectroscopy (IPS 2016) 

     More details

    Event date: 2016.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  193. Two-Dimensional Atomic Absorption Spectroscopy of Plasma-Stimulated Zn Atom Desorption from ZnSO4 Solution International conference

    Hirotaka Toyoda, Takafumi Takaba, Haruka Suzuki

    7th International Workshop on Plasma Spectroscopy (IPS2016) 

     More details

    Event date: 2016.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  194. スロット内生成マイクロ波プラズマを用いた高速プラズマCVD

    山本 匡毅, 鈴木 陽香, 豊田 浩孝

    第63回応用物理学会春季学術講演会 

     More details

    Event date: 2016.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  195. Low Pressure Sustainment of Surface-Wave Microwave Plasma with Modified Microwave Coupler (MMC-SWP) International conference

    Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma)/9th International Conference on Plasma-Nano Technology & Science (IC-PLANTS) 

     More details

    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  196. 大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性

    鈴木 陽香, 中野 優, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第32回プラズマ・核融合学会年会 

     More details

    Event date: 2015.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  197. Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    68th Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing 

     More details

    Event date: 2015.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  198. スロット内生成マイクロ波プラズマの基礎的検討

    山本 匡毅, 鈴木 陽香, 豊田 浩孝

    平成27年度電気・電子・情報関係学会東海支部連合大会 

     More details

    Event date: 2015.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  199. Desorption of Alkaline Metals from Electrolyte Liquid Contacting with a DC Pulsed-Plasma International conference

    Haruka Suzuki, Takafumi Takaba, Noriharu Takada, Hirotaka Toyoda

    The 10th Asian-European International Conference on Plasma SurfaceEngineering (AEPSE2015)  

     More details

    Event date: 2015.9

    Language:English   Presentation type:Poster presentation  

    Country:Korea, Republic of  

  200. Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

     More details

    Event date: 2015.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  201. Gas Temperature Measurement in Atmospheric-Pressure Microwave Line Plasmas International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma) /8th International Conference on Plasma-Nano Technology & Science (IC-PLANTS) 

     More details

    Event date: 2015.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  202. 大気圧マイクロ波ラインプラズマにおけるプラズマ挙動シミュレーション

    鈴木 陽香,中野 優,伊藤 仁,関根誠,堀 勝,豊田 浩孝

    第62回応用物理学会春季学術講演会 

     More details

    Event date: 2015.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  203. 電解質溶液を電極としたパルスDCプラズマにおける液相由来金属原子の吸収分光計測

    鷹羽 貴史, 鈴木 陽香, 高田 昇治, 豊田 浩孝

     More details

    Event date: 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  204. 狭ギャップスロットアンテナを用いた大気圧ラインプラズマ生成

    中野 優, 鈴木 陽香, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

     More details

    Event date: 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  205. Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure International conference

    Hirotaka Toyoda, Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori

    67th Annual Gaseous Electronics Conference 

     More details

    Event date: 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  206. Plasma movement mechanism in pseudo-continuous meter-scale atmospheric-pressure line plasma

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

     More details

    Event date: 2014.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  207. パルスマイクロ波励起大気圧ラインプラズマの空間分解計測

    鈴木 陽香, 中野 優, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第61回応用物理学関係連合講演会 

     More details

    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  208. 電解質溶液電極を用いたパルスDCプラズマにおける電解質由来金属原子の二次元吸収分光計測

    鷹羽 貴史, 鈴木 陽香, 高田 昇治, 豊田 浩孝

    第61回応用物理学関係連合講演会 

     More details

    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  209. メートル級マイクロ波大気圧ラインプズマの均一性評価

    中野 優, 鈴木 陽香, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第61回応用物理学関係連合講演会 

     More details

    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  210. Production of High-Uniform Microwave Line Plasma at Atmospheric Pressure International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014)/7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014) 

     More details

    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  211. Spatio-temporal Behavior of Alkaline Metals in a DC Pulsed-Plasma with Liquid Electrode International conference

    Takafumi Takaba, Haruka Suzuki, Noriharu Takada, Hirotaka Toyoda

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014)/7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014) 

     More details

    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  212. Spatiotemporal Resolved Investigations of Atmospheric Pressure Line Plasma International conference

    Suguru Nakano, Haruka Suzuki, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014)/7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014) 

     More details

    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  213. Release Behavior of Metal Atom from Solution Surface Contacting to Plasma International conference

    Haruka Suzuki, Takafumi Takaba, Hirotaka Toyoda

    The 18th International Workshop of Advanced Plasma Processing and Diagnostics 

     More details

    Event date: 2014.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  214. Meter-Scale Production of Atmospheric Pressure Microwave Plasma by Travelling Wave International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    8th International Conference on Reactive Plasmas/31st Symposium on Plasma Processing 

     More details

    Event date: 2014.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  215. Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure International conference

    66th Annual Gaseous Electronics Conference 

     More details

    Event date: 2013.9 - 2013.10

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  216. 電解質溶液電極を用いた大気圧パルスDCプラズマにおける放出金属原子の時分解吸収分光計測

    鷹羽 貴史, 鈴木 陽香, 高田 昇治, 豊田 浩孝

    平成25年度電気関係学会東海支部連合大会 

     More details

    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  217. 進行波重畳によるメートル級マイクロ大気圧ランプズの生成

    中野 優, 鈴木 陽香, 関根 誠, 堀 勝, 豊田 浩孝, 伊藤 仁

    平成25年度電気関係学会東海支部連合大会 

     More details

    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  218. 新規アンテナ構造を用いたメートル級マイクロ波大気圧ラインプラズマの生成

    鈴木 陽香, 中野 優, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第74回応用物理学会学術講演会 

     More details

    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  219. Absorption Spectroscopy of Atomic Metal in Atmospheric-pressure Plasma with Electrolyte Solution Electrode International conference

    17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & 4th The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 

     More details

    Event date: 2013.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  220. 電解質溶液電極を用いた大気圧パルスプラズマにおける金属原子吸収分光計測

    鈴木 陽香, 鷹羽 貴史, 高田 昇治, 豊田 浩孝

    第60回応用物理学関係連合講演会 

     More details

    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  221. Temporal and Spatial Variations of Atomic Metals in Atmospheric-Pressure Pulsed-Plasmas with Liquid Electrode International conference

    Haruka Suzuki, Takafumi Takaba, Noriharu Takada, Hirotaka Toyoda

    The 6th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2013) 

     More details

    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  222. Temporal Variation of Alkaline Metals in an Atmospheric-Pressure Pulsed-Plasma with Liquid Electrode International conference

    Haruka Suzuki, Takafumi Takaba, Noriharu Takada, Hirotaka Toyoda

     More details

    Event date: 2013.1 - 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  223. 液体電極を用いた大気圧マイクロ波プラズマの光学的時分解計測

    鈴木 陽香, 鷹羽 貴史, 高田 昇治, 豊田 浩孝

    第5回プラズマ技術産業応用センター&プラズマが拓くものづくり研究会国際シンポジウム 

     More details

    Event date: 2012.10

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  224. 液体を電極としたマイクロ波励起大気圧プラズマの発光分光計測

    鈴木 陽香, 鷹羽 貴史, 高田 昇治, 豊田 浩孝

    第73回応用物理学会学術講演会 

     More details

    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  225. 液中気泡内における水蒸気とマイクロ波プラズマの相互作用

    鈴木 陽香, 石島 達夫, 豊田 浩孝

    第59回応用物理学関係連合講演会 

     More details

    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  226. Temporal Variation of Water Vapor Pressure inside a Bubble under Water Induced by Microwave Plasma International conference

    The 5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012)

    Haruka Suzuki, Tatsuo Ishijima, Hirotaka Toyoda  

     More details

    Event date: 2012.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  227. Temporal Variation of Water Vapor Pressure inside a Bubble under Water Induced by Atmospheric Pressure Microwave Plasma International conference

    Haruka Suzuki, Tatsuo Ishijima, Hirotaka Toyoda

    4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 

     More details

    Event date: 2012.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  228. Bubble Plasma Production under Water using Microwave -Basic Study in Multiphase Structure and Application- International conference

    Tatsuo Ishijima, Haruka Suzuki, Koji Kanetake, Hirotaka Toyoda

    12th International Symposium on Biomimetic Materials Processing (BWWMP-12) 

     More details

    Event date: 2012.1

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  229. マイクロ波励起液中気泡内プラズマの時分解発光分光計測

    鈴木 陽香, 石島 達夫, 豊田 浩孝

     More details

    Event date: 2011.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  230. Time-resolved OES measurement of microwave plasma produced inside controlled bubbles under water International conference

    Tatsuo Ishijima, Haruka Suzuki, Hirotaka Toyoda

    64th Annual Gaseous Electronics Conference 

     More details

    Event date: 2011.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  231. パルスマイクロ波液中気泡内プラズマの時分解発光分光計測

    鈴木 陽香, 石島 達夫, 豊田 浩孝

    応用物理学会 プラズマエレクトロニクス分科会20周年(研究会創設25周年)記念 特別シンポジウム 

     More details

    Event date: 2011.10

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  232. パルスマイクロ波液中プラズマの時分解発光分光計測

    鈴木 陽香, 石島 達夫 豊田 浩孝

    平成23年度電気関係学会東海支部連合大会 

     More details

    Event date: 2011.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

▼display all

Research Project for Joint Research, Competitive Funding, etc. 2

  1. 大面積フィルム処理のための大気圧長尺マイクロ波プラズマにおける酸素ラジカル空間分布計測

    2021

    第39回(令和3年度)研究助成 

  2. 液体流プラズマを用いた高速大流量液体処理中における反応生成物の調査

    2021

    2021年度国内研究助成 

KAKENHI (Grants-in-Aid for Scientific Research) 4

  1. 高周波プロセスプラズマにおいて真空容器壁面の状態がプラズマに与える影響の評価

    Grant number:21K13907  2021.4 - 2023.3

    日本学術振興会  若手研究 

  2. ラジカル生成促進のための大気圧マイクロ波プラズマの電子温度制御技術の開発

    Grant number:18K13531  2018.4 - 2021.3

    日本学術振興会  若手研究

    鈴木 陽香

      More details

    Authorship:Principal investigator 

    Grant amount:\4160000 ( Direct Cost: \3200000 、 Indirect Cost:\960000 )

    大気圧プラズマは簡易な構成でプラズマ生成が可能であるため、様々な産業への応用が期待される。プロセス速度において最も重要となる化学活性種(ラジカル)供給量は、プラズマの密度とサイズ、電子温度により決定される。申請者はこれまでの研究で大面積表面処理用のメートル級長尺の高密度大気圧マイクロ波プラズマ源を世界で初めて実現した。しかし、高電子密度プラズマであったとしても、電子温度が低ければ生成されるラジカル量が少ないことがプロセスへの応用において問題となる。そこで、本研究では大気圧マイクロ波プラズマの電子温度制御による解離促進手法を確立し、高密度ラジカル生成を目的とする。本研究が成功すればラジカル供給量の制御による大気圧プラズマプロセスの性能の飛躍的な向上が期待できる。
    2019年度においては、まず、分子ガスを添加してマイクロ波パルス放電プラズマの安定生成条件の探索を行った。その結果、添加量に依存して安定化の条件が大きく異なることが明らかとなった。また、希ガス放電より大きな電力を要するため、装置の加熱による熱ひずみがプラズマ生成の不安定化につながるという問題が発生した。そこで、プラズマからの受熱がどの程度あるかの調査を行い、それに対して十分な冷却能力を考慮した装置の設計を行った。また、高速ゲートICCDカメラを用いてパルス放電時におけるプラズマ挙動の調査を行うとともに、発光分光を用いて活性種生成量の調査を行った。
    本研究では大気圧マイクロ波プラズマにおいて、パルス制御放電等を用いて電子温度制御することにより高密度ラジカルを供給し、表面処理プロセスを行うことを最終的な目的としている。
    2019年度においては、マイクロ波パルス放電プラズマの特性の調査を計画していたが、安定生成できるウィンドウが狭く、統一された実験条件での放電維持が困難であった。その一因として、分子ガス添加による熱の影響で装置がひずむという問題があることが明らかとなった。そのため、プラズマからの受熱量の調査を行い、装置を再製作した。並行して、限定的な条件であるが、プラズマの挙動調査、発光分光を行った。以上のように、パルス放電の特性の調査は十分進んでおらず、当初計画より遅れている。一方で、分子ガスプラズマの安定生成には大きな電力を要するため、本装置においては熱のマネジメントが非常に重要であることが明らかとなった。
    2019年度の研究において、パルス放電時の特性および熱のマネジメントの重要性が明らかとなった。
    次年度においては装置の改良をおこない、当初計画通り、パルス放電条件に対する電子温度、電子密度の関係性について調査するとともに、ラジカル生成増加の最適条件を検討する。電子温度は制動輻射光から定量評価するとともに、放電ガスに難解離性分子である窒素または酸素を用いて、発光分光から解離の効果について定性的に評価する。プラズマ安定維持のために外部印加電圧による補助も検討する。
    また、分子ガス添加プラズマを用いた応用実験を行い、放電条件と処理速度の関係性の調査を行うことを予定している。

  3. Atmospheric-pressure plasma process using high-density and high-purity water-derived reactive species produced by a water-vapor microwave plasma

    Grant number:16H06859  2016.8 - 2018.3

    Japan Society for the Promotion of Science 

    SUZUKI Haruka

      More details

    Authorship:Principal investigator 

    Grant amount:\2990000 ( Direct Cost: \2300000 、 Indirect Cost:\690000 )

    Atmospheric pressure plasma sources in air-shielded environment by water flow were developed for plasma process utilizing water-derived reactive species without air contamination in the atmosphere. A microwave-excited water-vapor plasma source in a space shielded by cone-shaped water flow was developed using a coaxial waveguide with a ring-shaped slot to use high-density hydroxyl radical without air contamination at atmospheric pressure. Water vapor plasma without the air was successfully realized by the pulsed microwave discharges. Production of hydroxyl radical was confirmed from the optical emission from the plasma. As an application example of the water-vapor plasma in the air shield environment, atmospheric pressure photoresist removal treatment was demonstrated.

  4. Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applications

    Grant number:16H03893  2016.4 - 2019.3

    Japan Society for the Promotion of Science 

    Toyoda Hirotaka

      More details

    Authorship:Coinvestigator(s) 

    Microwave plasmas have been used in various industrial areas. In this study, meter-length microwave atmospheric pressure plasma inside meter-length slot was studied, especially fosucing on the discharge using molecular gases. Through this study, 50cm pure N2 plasma was successfully produced. This result strongly suggests application of this plasma source for various surface modification in large area.

Industrial property rights 3

  1. プラズマCVD装置、及びフィルムの製造方法

    豊田浩孝, 鈴木陽香, 慈幸範洋, 奈良井哲

     More details

    Application no:2018-051429  Date applied:2018.3

    Country of applicant:Domestic  

  2. プラズマ発生装置

    豊田浩孝, 鈴木陽香

     More details

    Application no:2017-242257  Date applied:2017.12

    Country of applicant:Domestic  

  3. マイクロ波供給装置、プラズマ処理装置、及び、プラズマ処理方法

    伊藤仁, 堀勝, 豊田浩孝, 鈴木陽香, 関根誠

     More details

    Application no:特願2016-121668  Date applied:2016.6

    Announcement no:特開2017-228354  Date announced:2017.12

    Country of applicant:Domestic  

 

Teaching Experience (On-campus) 19

  1. 電気電子情報工学実験第2

    2021

  2. 物理学実験

    2021

  3. 電気電子情報工学実験第1

    2021

  4. Electromagnetic Theory with Exercises

    2020

  5. 電気電子情報工学実験第1

    2020

  6. 電気電子情報工学実験第2

    2020

  7. 電気電子情報工学実験第1

    2019

  8. 電気電子情報工学実験第2

    2019

  9. 電気磁気学及び演習

    2019

  10. 電気電子情報工学実験第2

    2018

  11. 電気磁気学及び演習

    2018

  12. 電気電子情報工学実験第1

    2018

  13. 電気電子情報工学実験第2

    2017

  14. 電気磁気学及び演習

    2017

  15. 電気電子情報工学実験第1

    2017

  16. 電気・電子工学実験第2

    2016

  17. 電気磁気学及び演習

    2016

  18. 電気・電子工学実験第1

    2016

  19. 集積プロセス特別実験及び演習

    2016

▼display all

 

Social Contribution 5

  1. テクノフロンティアセミナー TEFS2019

    Role(s):Lecturer, Planner

    2019.8

     More details

    Audience: High school students

    Type:Seminar, workshop

  2. テクノフロンティアセミナー TEFS2018

    Role(s):Lecturer, Planner

    2018.8

     More details

    Audience: High school students

    Type:Seminar, workshop

  3. テクノフロンティアセミナー TEFS2017

    Role(s):Lecturer, Planner

    2017.8

     More details

    Audience: High school students

    Type:Seminar, workshop

  4. 女子中高生理系進学推進セミナー

    Role(s):Appearance

    名古屋大学男女共同参画推進専門委員会  2016.8

     More details

    Audience: Junior students, High school students

    Type:Seminar, workshop

  5. テクノフロンティアセミナー TEFS2016

    Role(s):Lecturer, Planner

    2016.8

     More details

    Audience: High school students

    Type:Seminar, workshop