Updated on 2021/11/03

写真a

 
SUZUKI Haruka
 
Organization
Graduate School of Engineering Electronics 1 Assistant Professor
Graduate School
Graduate School of Engineering
Undergraduate School
School of Engineering Electrical Engineering, Electronics, and Information Engineering
Title
Assistant Professor
Contact information
メールアドレス
External link

Degree 1

  1. Doctor of Engineering ( 2016.3   Nagoya University ) 

Research Interests 4

  1. プラズマプロセス

  2. プラズマ診断

  3. マイクロ波プラズマ

  4. 大気圧プラズマ

Research Areas 1

  1. Energy Engineering / Applied plasma science  / Plasma

Current Research Project and SDGs 1

  1. 新規プロセスプラズマの開発

Research History 2

  1. Nagoya University   Center for Low-temperature Plasma Sciences (cLPS)   Assistant Professor

    2019.4

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    Country:Japan

  2. 名古屋大学   大学院 工学研究科   助教

    2016.4

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    Country:Japan

Education 3

  1. Nagoya University   Graduate School, Division of Engineering

    2013.4 - 2016.3

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    Country: Japan

  2. Nagoya University   Graduate School, Division of Engineering

    2011.4 - 2013.3

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    Country: Japan

  3. Nagoya University   Faculty of Engineering

    2007.4 - 2011.3

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    Country: Japan

Professional Memberships 3

  1. 電気学会

  2. プラズマ・核融合学会

  3. 応用物理学会

Committee Memberships 11

  1. 一般社団法人 プラズマ・核融合学会   編集委員  

    2021.6   

  2. ISPlasma2022/IC-PLANTS2022   Executive Committee  

    2021   

  3. ISPlasma2022/IC-PLANTS2022   Program Committee  

    2021   

  4. ISPlasma2021/IC-PLANTS2021   Executive Committee  

    2020   

  5. ISPlasma2021/IC-PLANTS2021   Program Committee  

    2020   

  6. ISPlasma2020/IC-PLANTS2020   Executive Committee  

    2019   

  7. ISPlasma2019/IC-PLANTS2019   Executive Committee  

    2018   

  8. 40th International Symposium on Dry Process   Executive Committee  

    2018   

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    Committee type:Academic society

  9. 40th International Symposium on Dry Process   Ad Hoc Committee for 40th Anniversary Project  

    2017.3 - 2018   

  10. ISPlasma2018/IC-PLANTS2018   Executive Committee  

    2017   

  11. ISPlasma2017/IC-PLANTS2017   Executive Committee  

    2016   

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Awards 6

  1. 2018年秋季学術講演会Poster Award

    2018.10   公益社団法人 応用物理学会  

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  2. 2017年秋季学術講演会Poster Award

    2017.9   公益社団法人 応用物理学会  

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  3. 講演奨励賞

    2017.3   公益社団法人 応用物理学会   改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  4. The Best Poster Award

    2016.9   ICMAP 2016   Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path

    Haruka Suzuki, Sho Takitou, Hirotaka Toyoda

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    Award type:Award from international society, conference, symposium, etc.  Country:Korea, Republic of

  5. 若手学会発表賞

    2015.11   一般社団法人 プラズマ・核融合学会   大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

  6. 電気学会優秀論文発表賞

    2012.1   一般社団法人 電気学会   パルスマイクロ波液中プラズマの時分解発光分光計測

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    Award type:Award from Japanese society, conference, symposium, etc.  Country:Japan

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Papers 19

  1. Quantitative evaluation of hydrogen retention of solid tin after exposure to hydrogen plasma Reviewed

    Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Hirotaka Toyoda

    Fusion Engineering and Design   Vol. 170   page: 112532   2021.9

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.fusengdes.2021.112532

  2. High-speed deposition of graphite-like carbon film by Ar/C6H6 surface-wave plasma with high-voltage pulse biasing Reviewed

    H. Bae, K. Sasai, H. Suzuki, and H. Toyoda

    Vacuum   Vol. 192   page: 110429   2021.7

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    Language:English  

    DOI: 10.1016/j.vacuum.2021.110429

  3. Spatial uniformity evaluation of atmospheric-pressure microwave line plasma for wide-area surface treatment Reviewed

    Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Yosuke Koike, Hirotaka Toyoda

    Plasma and Fusion Research   Vol. 16   page: 1406046   2021.4

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1585/pfr.16.1406046

  4. Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma Reviewed

    Makoto Moriyama, Naoya Nakahara, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, Haruka Suzuki, and Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 60 ( 1 ) page: 016001   2020.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/abd0ca

  5. Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma Reviewed

    Makoto Moriyama, Naoya Nakahara, Akihiro Mitsuya, Haruka Suzuki, Kazuaki Kurihara, Daiki Iino, Hiroyuki Fukumizu, and Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 59 ( SJ ) page: SJJB03   2020.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ab85af

  6. Atmospheric-pressure microwave line plasma with an asymmetric cross-section waveguide for long-scale N<sub>2</sub> plasma production Reviewed

    Haruka Suzuki, Yuto Tamura, Manh Hung Chu and Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 59 ( 1 ) page: 016002   2020.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab649e

  7. Rapid resist ashing by slot-excited atmospheric pressure microwave O<sub>2</sub> plasma Reviewed

    Hirotaka Toyoda, Shota Ishikawa, Haruka Suzuki, Takeshi Honda

    Japanese Journal of Applied Physics   Vol. 58 ( 12 ) page: 126001   2019.11

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    Language:English   Publishing type:Research paper (scientific journal)  

  8. Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow Reviewed

    Hikaru Senba, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 58   page: SAAC05   2018.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/aaeb3d

  9. Production of atmospheric pressure microwave plasma with dielectric half-mirror resonator and its application to polymer surface treatment Reviewed

    Kensuke Sasai, Kazuki Keyamura, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 57   page: 066201   2018.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.57.066201

  10. Quantitative evaluation of high-energy O<sup>-</sup> ion particle flux in a DC magnetron sputter plasma with an indium-tin-oxide target Reviewed

    Taku Suyama, Hansin Bae, Kenta Setaka, Hayato Ogawa, Yushi Fukuoka, Haruka Suzuki, Hirotaka Toyoda

    Journal of Physics D: Applied Physics   Vol. 50 ( 44 ) page: 445201   2017.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/1361-6463/aa87a1

  11. An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge Reviewed

    Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 56 ( 11 ) page: 116001   2017.9

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.56.116001

  12. Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition Reviewed

    Kensuke Sasai, Toshiya Hagihara, Tomonori Noda, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 55 ( 8 ) page: 086202   2016.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.086202

  13. Desorption behavior of zinc atoms from zinc-sulfate solution irradiated with pulsed DC plasma Reviewed

    Takafumi Takaba, Haruka Suzuki, Hirotaka Toyoda

    Journal of Physics D: Applied Physics   Vol. 49 ( 29 ) page: 295202   2016.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/0022-3727/49/29/295202

  14. Characteristics of an atmospheric-pressure line plasma excited by 2.45 GHz microwave travelling wave Reviewed

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 55 ( 1S ) page: 01AH09   2015.12

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.01AH09

  15. Low-pressure sustainment of surface-wave microwave plasma with modified microwave coupler Reviewed

    Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    Japanese Journal of Applied Physics   Vol. 55 ( 1 ) page: 016203   2015.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/JJAP.55.016203

  16. New line plasma source excited by 2.45 GHz microwave at atmospheric pressure Reviewed

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    Applied Physics Express   Vol. 8 ( 3 ) page: 036001   2015.2

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/APEX.8.036001

  17. Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation Reviewed

    Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

    Japanese Journal of Applied Physics   Vol. 58 ( SE ) page: SE802   2019.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab1638

  18. Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development Reviewed

    Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

    Japanese Journal of Applied Physics   Vol. 58 ( SE ) page: SE804   2019.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab163b

  19. Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes? Reviewed

    Taku Iwase, Yoshito Kamaji, Song Yun Kang, Kazunori Koga, Nobuyuki Kuboi, Moritaka Nakamura, Nobuyuki Negishi, Tomohiro Nozaki, Shota Nunomura, Daisuke Ogawa, Mitsuhiro Omura, Tetsuji Shimizu, Kazunori Shinoda, Yasushi Sonoda, Haruka Suzuki, Kazuo Takahashi, Takayoshi Tsutsumi, Kenichi Yoshikawa, Tatsuo Ishijima, Kenji Ishikawa

    Japanese Journal of Applied Physics   Vol. 58 ( SE ) page: SE803   2019.6

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.7567/1347-4065/ab163a

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MISC 2

  1. 大気圧マイクロ波放電による高密度長尺ラインプラズマ

    豊田浩孝, 鈴木陽香

    応用物理   Vol. 88 ( 2 ) page: 101 - 104   2019.2

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    Language:Japanese  

  2. マイクロ波励起メートル級プラズマの生成とその特性

    鈴木陽香

    プラズマエレクトロニクス分科会会報   ( 66 ) page: 29 - 30   2017.6

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    Authorship:Lead author, Last author, Corresponding author   Language:Japanese  

Presentations 201

  1. Evaluation of charge density at hole bottom of capillary plates in a pulsed dual-frequency capacitively coupled plasma International conference

    H. Suzuki, M. Moriyama, N. Nakahara, and H. Toyoda

    The 74th Annual Gaseous Electronics Conference (GEC2021)  2021.10.7 

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    Event date: 2021.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Online  

  2. Fast and massive synthesis of silver nanoparticle by a liquid-flow plasma source using AgNO3 solution International conference

    H. Suzuki, K. Yamaguchi, K. Sasai, and H. Toyoda

    The 74th Annual Gaseous Electronics Conference (GEC2021)  2021.10.5 

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    Event date: 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online  

  3. Highly conductive carbon film deposition by DC and microwave power superposition International conference

    H. Bae, K. Sasai, H. Suzuki, and H. Toyoda

    The 74th Annual Gaseous Electronics Conference (GEC2021)  2021.10.5 

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    Event date: 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online  

  4. Time-resolved Measurement of Charge Density at the Bottom of High-aspect-ratio Holes in a Pulsed Capacitively Coupled Plasma Invited International conference

    H. Suzuki, M. Moriyama, N. Nakahara, K. Ichikawa, and H. Toyoda

    5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021)  2021.9.28 

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    Event date: 2021.9 - 2021.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Venue:Online  

  5. Large Area Ashing Treatment of Polyimide Film by Atmospheric pressure Pulsed Microwave Line Plasma with Ar/O2 International conference

    T. Ogasawara, Y. Iwata, H. Suzuki, and H. Toyoda

    5th Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2021)  2021.9.26 

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    Event date: 2021.9 - 2021.10

    Language:English   Presentation type:Poster presentation  

    Venue:Online  

  6. 流動液体プラズマ処理装置を用いたAgナノ粒子の長時間安定合成

    山口 和也, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第82回応用物理学会秋季学術講演会  2021.9.22  応用物理学会

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    Event date: 2021.9

    Presentation type:Poster presentation  

  7. ECRプラマを用いた高伝導性カーボン薄膜成膜, 第82回応用物理学会秋季学術講演会

    Bae Hansin, 濱口 育未, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第82回応用物理学会秋季学術講演会  2021.9.12  応用物理学会

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    Event date: 2021.9

    Presentation type:Oral presentation (general)  

  8. 大気圧長尺マイクロ波ラインプラズマによる広幅高速アッシング処理

    岩田 悠揮, 小笠原 知裕, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  9. イメージング法による容量結合型プラズマから電極へ入射する高速粒子の角度分布計測

    市川景太, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  10. 二周波容量結合型フルオロカーボンプラズマ中のラジカル計測

    関 悠斗, 久保井 宗一, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  11. 表面波プラズマを用いた高導電性炭素膜の高速堆積

    濱口 育未, Bae Hansin, 笹井 建典, 鈴木 陽香, 豊田 浩孝

    令和3年度電気・電子・情報関係学会東海支部連合大会  2021.9.7  電気学会東海支部

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    Event date: 2021.9

    Language:Japanese   Presentation type:Oral presentation (general)  

  12. 絶縁ライナー付誘導結合型プラズマへの微小接地電極挿入におけるプラズマ変動

    千葉 行徳, 久蔵 学, 鈴木 陽香, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.19 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  13. 液温制御による流動液体プラズマ処理装置の長時間安定運転と Ag ナノ粒子合成

    山口 和也, 鈴木 丈, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.19 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  14. 表面波プラズマによるグラファイトライクカーボン膜の高速成膜

    BAE Hansin, 疋田 和也, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.18 

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    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  15. パルスマイクロ波励起大気圧酸素添加アルゴンプラズマによる広幅アッシング処理

    小笠原 知裕, 岩田 悠揮, 鈴木 陽香, 豊田 浩孝

    第68回応用物理学会春季学術講演会  2021.3.18 

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  16. Wide-area and High-speed Deposition of Graphitic Film by Microwave Surface Wave Plasma with High Power Pulse International conference

    Hansin Bae, Haruka Suzuki, Kensuke Sasai, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.9 

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    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  17. Effect of grounded electrode on plasma propety in ICP with floating liner International conference

    Manabu Kyuzo, Yukinori Chiba, Haruka Suzuki, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

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    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  18. Deuterium Depth Profile of Plasma-Exposed Solid/Liquid Tin International conference

    Kota Tamura, Haruka Suzuki, Suguru Masuzaki, Masayuki Tokitani, Junichi Miyazawa, Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

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    Event date: 2021.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  19. Time-dependent Measurement of Charge Density at Bottom of High-aspect Hole in a Capacitively-coupled Plasma International conference

    Makoto Moriyama, Naoya Nakahara, Keita Ichikawa, Manh Hung Chu, Haruka Suzuki, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

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    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  20. Ashing Treatment of Polyimide Film by Atmospheric-pressure Microwave LinePlasma with Ar/O2 International conference

    Haruka Suzuki, Tomohiro Ogasawara, Yuki Iwata, and Hirotaka Toyoda

    13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/14th International Conference on Plasma-Nano Technology & Science  2021.3.8 

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    Event date: 2021.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  21. 表面波プラズマを用いたグラファイト様炭素膜の大面積高速堆積

    ベ ハンシン, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    第38回プラズマプロセシング研究会  2021.1.29 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  22. パルス変調容量結合プラズマにおける高アスペクト比ホール中蓄積電荷の時間変化

    森山 誠, 中原 尚哉, 市川景太, Chu Manh Hung, 鈴木 陽香, 豊田 浩孝

    第38回プラズマプロセシング研究会  2021.1.29 

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    Event date: 2021.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  23. High speed and wide area conductive carbon film deposition by surface-wave plasma

    H.Bae, K.Hikita, H.Suzuki, K.Sasai, H.Toyoda

    プラズマ・核融合学会 第37回年会  2020.12.3 

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  24. 大気圧マイクロ波プラズマの大面積かつ高速表面処理への応用

    鈴木 陽香, 小笠原 知裕, Chu Manh Hung, 岩田 悠揮, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.3 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Symposium, workshop panel (nominated)  

    Country:Japan  

  25. 重水素プラズマ照射スズ中における重水素の深さ分布測定

    田村 晃汰, 鈴木 陽香, 増崎 貴, 時谷 政行, 宮澤 順一, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.2 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  26. パルスマイクロ波励起大気圧酸素添加アルゴンプラズマによる樹脂材料表面処理

    小笠原 知裕, 鈴木 陽香, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.2 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  27. パルス変調二周波重畳容量結合型プラズマにおけるキャピラリープレート下部の電荷密度評価

    中原 尚哉, 森山 誠, 鈴木 陽香, 豊田 浩孝

    プラズマ・核融合学会 第37回年会  2020.12.2 

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    Event date: 2020.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  28. Quantitative Evaluation of Hydrogen Retention of Solid and Liquid Tin by Thermal Desorption Spectroscopy International conference

    Kota TAMURA1, Haruka SUZUKI1, Junichi MIYAZAWA2, Suguru MASUZAKI2, Hirotaka TOYODA1;2 1. Nagoya University 2. National Institute for Fusion Science

    The 29th International Toki Conference on Plasma and Fusion Research  2020.10.28 

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    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  29. Evaluation of absolute charge density at the bottom of hole pattern using high aspect ratio capillary plate International conference

    Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Hirotaka Toyoda

    The 73rd Annual Gaseous Electronics Conference  2020.10.7 

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    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  30. Film Surface Treatment with O2/Ar Line Plasma under Atmospheric Pressure International conference

    Haruka Suzuki, Hirotsugu Koma, Tomohiro Ogasawara, Manh Hung Chu, Hirotaka Toyoda

    The 73rd Annual Gaseous Electronics Conference  2020.10.6 

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    Event date: 2020.10

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  31. パルス変調容量結合型プラズマにおけるキャピラリープレート下部の電荷密度変化

    中原 尚哉, 森山 誠, 鈴木 陽香, 豊田 浩孝

    第81回応用物理学会秋季学術講演会  2020.9.11 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  32. 大気圧長尺マイクロ波ラインプラズマによる表面親水化処理

    小笠原 知裕, 小間 浩嗣, 鈴木 陽香, 豊田 浩孝

    令和2年度電気・電子・情報関係学会東海支部連合大会  2020.9.4 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  33. 誘導型結合プラズマ中の銀粒子挙動

    疋田 和也, べ ハンシン, 鈴木 陽香, 笹井 建典, 豊田 浩孝

    令和2年度電気・電子・情報関係学会東海支部連合大会  2020.9.4 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  34. パルス変調容量結合型プラズマにおけるキャピラリープレート下部の電荷密度の時分解計測

    中原 尚哉, 森山 誠, 鈴木 陽香, 豊田 浩孝

    令和2年度電気・電子・情報関係学会東海支部連合大会  2020.9.3 

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  35. パルス変調容量結合プラズマにおけるキャピラリープレート近傍のャージ量絶対評価

    森山 誠,中原 尚哉,三矢 晶洋,鈴木 陽香,豊田 浩孝

    第67回応用物理学会春季学術講演会 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  36. アルカリ剤を用いたプラズマ 合成 Agナノ粒子の再溶解抑制

    鈴木 丈, 鈴木 陽香,豊田 浩孝

    第67回応用物理学会春季学術講演会 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  37. 容量結合型 プラズマ中におけるキャピラリープレート上部電位の推定

    中原 尚哉, 森山 誠, 三矢 晶洋, 鈴木 陽香,豊田 浩孝

    第67回応用物理学会春季学術講演会 

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  38. Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate

    The 67th JSAP Spring Meeting 

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    Event date: 2020.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  39. Temperature measurement of slot-plate in an atmospheric-pressure microwave linear plasma International conference

    Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  40. Electromagnetic Analysis in a Long-scale Slot Plasma Excited by Microwave Travelling Wave International conference

    Hirotsugu Koma, Haruka Suzuki, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  41. Synthesis of silver nanoparticles by in line liquid process using microwave plasma source International conference

    Jyo Suzuki, Haruka Suzuki, Kensuke Sasai, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  42. Quantitative Evaluation of Hydrogen Retention in Metal Tin using Thermal Desorption Spectroscopy International conference

    Kota Tamura, Haruka Suzuki Junichi Miyazawa and Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  43. Spatial characteristics analysis of atmospheric pressure microwave plasma with FEM simulation International conference

    Yoshiki Baba, Makoto Moriyama, Haruka Suzuki, Hirotaka Toyoda

    12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2020.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  44. 容量結合プラズマ中に設置されたエッチングホール模擬用キャピラリープレートの電位構造解析

    森⼭ 誠, 中原 尚哉, 三⽮ 晶洋, 鈴⽊ 陽⾹, 豊⽥ 浩孝

    プラズマ・核融合学会 第36回年会 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  45. 核融合炉ダイバー応用へ向けたスズの水素吸蔵量定量評価

    田村 晃汰,鈴木 陽香,宮澤 順一,豊田 浩孝

    プラズマ・核融合学会 第36回年会 

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    Event date: 2019.11 - 2019.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  46. potential structure of high-aspect-ratio capillary hole in a pulsed-VHF capactive coupled plasma International conference

    M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda

    2019 International Symposium on DryProcess 

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  47. Microscopic observation of an atmospheric-pressure microwave plasma produced in a meter-scale slot with sub-millimeter gap International conference

    H. Toyoda, H. Koma, Y. Baba, M. Chu, H. Bae, H. Suzuki

    The 72nd Annual Gaseous Electronics Conference 

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    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  48. Space-resolved oxygen radical measurement of atmospheric pressure microwave line plasma using vacuum ultraviolet absorption spectroscopy International conference

    H. Bae, H. Koma, H. Suzuki, H. Toyoda

    The 72nd Annual Gaseous Electronics Conference 

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    Event date: 2019.10 - 2019.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  49. パルスマイクロ波励起大気圧長尺スロットプラズマの時分解計測

    チュー マン フン,鈴木 陽香,豊田 浩孝

    第80回応用物理学会秋季学術講演会 

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  50. 二周波重畳容量結合型プラズマ装置におけるファラデーカップを用いたイオンエネルギー分布の計測

    三矢 晶洋, 森山 誠, 中原 尚哉, 鈴木 陽香, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  51. 電磁界シミュレーションによる進行波を用いた長尺スロットプラズマ内における電磁界分布の検討

    小間 浩嗣, 鈴木 陽香, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  52. ⼆周波重畳容量結合型プラズマにおけるキャピラリープレート内の電位構造解析

    森⼭ 誠, 三⽮ 晶洋, 中原 尚哉, 鈴⽊ 陽⾹, 豊⽥ 浩孝

    第80回応用物理学会秋季学術講演会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  53. 大気圧下におけるスロット励起マイクロ波O2/Arプラズマの断面空間構造の空間分解観測

    馬場 賀己, 鈴木 陽香, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  54. 表面波プラズマ生成アンテナへのDCパルス電圧印加時における絶縁表面電位の時間変化

    福田 奨, 鈴木 陽香, 村田 祐也, 山本 兼司, 豊田 浩孝

    第80回応用物理学会秋季学術講演会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  55. 二周波重畳容量結合型プラズマにおけるキャピラリープレート内の電位構造解析

    中原 尚哉, 森山 誠,三矢 晶洋,鈴木 陽香,豊田 浩孝, 栗原 一彰,飯野 大輝,福水 裕之,林 久貴,鈴木 啓之

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  56. High Speed Synthesis of Nanoparticles in Liquid Environment by In-Line Type Plasma Device

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    Event date: 2019.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  57. 表面波プラズマ生成アンテナへのDC パルス電圧印可時における絶縁膜表面電位の考察

    福田 奨,鈴木 陽香,村田 祐也,山本 兼司,豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  58. 昇温脱離法を用いた固体スズ中の水素吸蔵量評価

    田村 晃汰,鈴木 陽香,宮澤 順一,豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  59. 大気圧マイクロ波プラズマにおけるギャップ内ガス温度の空間分解計測

    馬場 賀己,鈴木 陽香,豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  60. 二周波重畳容量結合型プラズマ装置におけるファラデーカップを用いたイオンエネルギー分布の測定解析

    三矢 晶洋,森山 誠,中原 尚哉, 鈴木 陽香, 豊田 浩孝

    令和元年度 電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2019.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  61. Oxygen Radical Flux Measurement of Atmospheric Pressure Microwave Line Plasma International conference

    H. Bae, Y. Koike, H. Koma, H. Suzuki, H. Toyoda

    AEPSE2019 

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    Event date: 2019.9

    Language:English   Presentation type:Poster presentation  

    Country:Korea, Republic of  

  62. Potential Control of Surface Wave Excited Plasma by Pulsed DC Voltage Applied to Plasma-Immersed Waveguide International conference

    S. Fukuda, K. Udagawa, H. Suzuki, Y. Tauchi, H. Toyoda

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) 

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    Event date: 2019.7

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  63. Measurement of ion energy in dual-frequency capacitive coupled plasma International conference

    M. Moriyama, A. Mitsuya, N. Nakahara, H. Suzuki, H. Toyoda

    XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) 

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    Event date: 2019.7

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  64. Large-area surface treatment using microwave plasma excited in meter-length slot with sub-millimeter gap International conference

    Haruka Suzuki, Hirotsugu Koma, Manh Hung Chu, Hansin Bae, Yoshiki Baba, Hirotaka Toyoda

    The 10th of International Workshop on Microplasmas (IWM-10) 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  65. Time-resolved microscopic measurement of slot excited atmospheric pressure microwave plasma International conference

    Yoshiki Baba, Haruka Suzuki, Hirotaka Toyoda

    The 10th of International Workshop on Microplasmas (IWM-10) 

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    Event date: 2019.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  66. Development of Microwave Remote Plasma Source for New Surface Functionalization International conference

    T. Okimoto, Yoshiyuki Isomura, Y. Ikari, Y. Tauchi, K. Nishiyama, Japan H. Toyoda, H. Suzuki

    International Conference on Metallurgical Coatings and Thin Films(ICMCTF 2019) 

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    Event date: 2019.5

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  67. Time-resolved Measurement of Cross-Sectional Structure of a Narrow Gap Plasma Produced by an Atmospheric Pressure Microwave Discharge International conference

    Yoshiki Baba, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  68. Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Slot type Microwave Antenna International conference

    Sho Fukuda, Kou Udagawa, Haruka Suzuki, Yuki Yauchi, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  69. Microscopic Measurement of Long Microwave Plasma at Atmospheric Pressure International conference

    Hirotsugu Koma, Yosuke Koike, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  70. Oxygen radical measurement of atmospheric pressure microwave plasma employing vacuum ultraviolet absorption spectroscopy International conference

    Hansin Bae, Yosuke Koike, Hirotsugu Koma, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  71. Optimized waveguide structure for atmospheric pressure microwave plasma International conference

    Manh Hung Chu, Haruka Suzuki, Hirotaka Toyoda

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2019.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  72. Hydrogen Recycling Properties of Tin Wall in DC Glow Hydrogen Plasma International conference

    Kota Tamura, Haruka Suzuki, Hirotaka Toyoda, Junichi Miyazawa

    11th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/12th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  73. 二周波重畳容量結合プラズマ基本特性の実験的評価

    三矢 晶洋,森山 誠,鈴木 陽香,豊田 浩孝

    第66回応用物理学会春季学術講演会 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  74. スロット型大気圧マイクロ波プラズマの時空間分解計測

    馬場 賀己,鈴木 陽香,豊田 浩孝

    第66回応用物理学会春季学術講演会 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  75. シミュレーションによる二周波重畳容量結合プラズマの基本特性解析

    森山 誠,三矢 晶洋,中原 尚哉,鈴木 陽香,豊田 浩孝

    第66回応用物理学会春季学術講演会 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  76. Oxygen Radical Measurement of Atmospheric Pressure Microwavw Line Plasma by Vacuum Ultraviolet Absorption Spectroscopy

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    Event date: 2019.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  77. マイクロ波アンテナへのDCパルス電圧印加による絶縁表面へのイオン衝撃

    福田 奨, 宇田川 洸, 鈴木 陽香, 田内 裕基, 豊田 浩孝

    第66回応用物理学会春季学術講演会 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  78. 大気圧長尺マイクロ波プラズマによる大面積高速表面処理

    小間 浩嗣,杉山 敦士,鈴木 陽香,本田 剛,豊田 浩孝

    第66回応用物理学会春季学術講演会 

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    Event date: 2019.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  79. High Speed Synthesis of Nanoparticles by Liquid Flow-type Microwave Plasma

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    Event date: 2019.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  80. メートル級長尺スロット型プラズマ源における 大気圧マイクロ波プラズマの顕微計測

    小間浩嗣, 小池洋右, 鈴木陽香, 豊田浩孝

    第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  81. スロット励起大気圧マイクロ波プラズマの断面構造の時分解顕微観測

    馬場賀己, 鈴木陽香, 豊田浩孝

    第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

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    Event date: 2019.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  82. シミュレーションを援用した大気圧マイクロ波プラズマ源の非対称断面導波管内電磁界分布の解析

    Chu Manh Hung, 鈴木陽香, 豊田浩孝

    第36回プラズマプロセシング研究会と第31回プラズマ材料科学シンポジウム 

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    Event date: 2019.1

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  83. Water Vapor Plasma Treatment Process Using Slot-Excited Microwave Plasma Invited

    Haruka Suzuki, Hirotaka Toyoda

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    Event date: 2018.12

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  84. Organic-matter removal treatment using atmospheric pressure microwave O2/CF4

    Shota Ishikawa, Haruka Suzuki, Tsuyoshi Honda, Hirotaka Toyoda

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    Event date: 2018.12

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  85. 新規大気圧マイクロ波プラズマ源の開発と応用 Invited

    鈴木 陽香

    高機能トライボ表面プロセス部会 第12回例会 「トライボロジーと表面技術」  

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    Event date: 2018.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  86. 直流放電プラズマを用いた金属スズの水素リサイクリング評価

    田村 晃汰、鈴木 陽香、豊田 浩孝、宮澤 順一

    第35回プラズマ・核融合学会年会 

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    Event date: 2018.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  87. 二周波重畳容量結合プラズマの基本特性評価

    森山 誠、三矢 晶洋、中原 尚哉、鈴木 陽香、豊田 浩孝

    第35回プラズマ・核融合学会年会 

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    Event date: 2018.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  88. 大気圧マイクロ波ラインプラズマにおける酸素原子の紫外吸収分光計測

    Bae Hansin、小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝

    第35回プラズマ・核融合学会年会 

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    Event date: 2018.12

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  89. 大気圧下でのメートル級マイクロ波プラズマの生成と応用

    鈴木 陽香、豊田 浩孝

    第35回プラズマ・核融合学会年会 

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    Event date: 2018.12

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  90. Ring-shaped microwave plasma production in liquid flow environment for nanoparticle synthesis International conference

    S. Fujimura, S. Yang, K. Sasai, H. Suzuki, H. Toyoda

    The 40th International Symposium on Dry Process(2018) 

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    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  91. Optimal design of atmospheric-pressure plasma source for industrial application International conference

    Haruka Suzuki

    The 40th International Symposium on Dry Process(2018) 

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    Event date: 2018.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  92. High speed photoresist removal using slot-excited atmospheric-pressure microwave O2/CF4 plasma International conference

    S. Ishikawa, H. Suzuki, T. Honda, H. Toyoda

    The 40th International Symposium on Dry Process(2018) 

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    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  93. Influence of magnetic field on high-energy negative ion behavior in magnetron plasma with oxide targets Invited International conference

    Hirotaka Toyoda, Kou Udagawa, Akihiro Mitsuya, Hansin Bae, Haruka Suzuki

    2nd Asia-Pacific Conference on Plasma Physics 

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    Event date: 2018.11

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  94. Observation of cross sectional plasma structure in a gap of an atmospheric pressure microwave discharge International conference

    Hirotaka Toyoda, Yoshiki Baba, Haruka Suzuki

    71st Annual Gaseous Electronics Conference  

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    Event date: 2018.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  95. Scaling of Microwave Absorption in Atmospheric Pressure Microwave Line Plasma International conference

    Ivan Ganachev, Haruka Suzuki, Hirotaka Toyoda

    THERMEC2018 

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    Event date: 2018.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:China  

  96. Diagnostics of energetic particles in magnetron plasma using oxide target Invited International conference

    Hirotaka Toyoda, Hansin Bae, Kou Udagawa, Akihiro Mitsuya, Haruka Suzuki

    International Symposium on Sputtering & Plasma Processes (ISSP2018) 

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    Event date: 2018.10

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  97. 大気圧マイクロ波励起O2/CF4プラズマによるフォトレジスト除去処理

    石川 翔太、鈴木 陽香、本田 剛、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  98. 電磁界シミュレーションを用いた大気圧長尺マイクロ波プラズマにおける定在波抑制

    小池 洋右、小間 浩嗣、鈴木 陽香、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  99. Potential Control of Surface Wave Plasma by Applying DC Pulse Voltage to a Microwave Antenna

    Kou Udagawa、Sho Fukuda、Haruka Suzuki、Yuki Tauchi、Hirotaka Toyoda

    第79回応用物理学会秋季学術講演会 

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    Event date: 2018.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  100. メートル級長尺大気圧マイクロ波プラズマの顕微計測

    鈴木 陽香、小池 洋右、小間 浩嗣、馬場 賀己、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  101. 流動液体マイクロ波プラズマによるナノ粒子生成

    藤村 昇平、楊 少菲、鈴木 陽香、豊田 浩孝

    第79回応用物理学会秋季学術講演会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  102. 大気圧メートル級長尺マイクロ波ラインプラズマの顕微計測

    小間 浩嗣、小池 洋右、鈴木 陽香、豊田 浩孝

    平成30年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  103. 酸化物ターゲットを用いたマグネトロンスパッタにおける酸素負イオンフラックスの空間分布の数値解析

    三矢 晶洋、宇田川 洸、鈴木 陽香、豊田 浩孝

    平成30年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  104. スロット励起大気圧マイクロ波プラズマにおけるスロット断面構造の顕微観測

    馬場 賀己、鈴木 陽香、豊田 浩孝

    平成30年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  105. 表面波プラズマアンテナへのDC パルス電圧印加によるプラズマ電位制御

    福田 奨、宇田川 洸、鈴木 陽香、豊田浩孝、田内 裕基

    平成30年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2018.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  106. Surface Roughness Control of ITO Films by VHF Superposed DC Magnetron Plasmand its application- Invited International conference

    Hirotaka Toyoda, Haruka Suzuki

    THERMEC2018 

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    Event date: 2018.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:France  

  107. Long-scale atmospheric-pressure microwave plasma -production mechanism and its application- Invited International conference

    H. Toyoda, H. Suzuki, Y. Koike, H. Koma, Y. Baba, J.H. Qiu, M.H. Chu, A. Sugiyama

    JAPAN-RUB Workshop on Plasma Science 

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    Event date: 2018.7

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Germany  

  108. 大気圧長尺マイクロ波プラズマにおける電力吸収の空間分布

    小池洋右, 田村宥人, 鈴木陽香, 豊田浩孝

    第65回応用物理学会春季学術講演会 

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  109. 同軸導波管の外部導体ギャップ間におけるマイクロ波プラズマ生成

    藤村昇平, 鈴木陽香, 笹井建典, 豊田浩孝

    第65回応用物理学会春季学術講演会 

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  110. マグネトロンプラズマにおける高エネルギー負イオン軌道の数値解析

    宇田川洸, 三矢晶洋, 鈴木陽香, 豊田浩孝

    第65回応用物理学会春季学術講演会 

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    Event date: 2018.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  111. Space-resolved Measurement of Microwave Power along Waveguide in Atmospheric Pressure Microwave Line Plasma International conference

    Yosuke Koike, Haruka Suzuki, Yuto Tamura, Yoshiki Baba, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  112. Power Absorption Mechanism of Atmospheric-pressure Microwave Line Plasma International conference

    Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2018.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  113. Water-vapor Atmospheric Pressure Microwave Plasma in an Air-shielded Environment by Water Flow International conference

    Haruka Suzuki, Hikaru Senba, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  114. A Coaxial-waveguide Microwave Plasma Source for In-line Treatment of Large Volume Liquid International conference

    Shohei Fujimura, Haruka Suzuki, Kensuke Sasai, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  115. Oxygen Negative Ion Behavior in a VHF-superposed DC Magnetron Sputtering International conference

    Kou Udagawa, Akihiro Mitsuya, Haruka Suzuki, Hirotaka Toyoda

    10th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/11th International Conference on Plasma-Nano Technology & Science 

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    Event date: 2018.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  116. 直流およびVHF重畳直流マグネトロンプラズマにおける高エネルギー酸素負イオンに起因する指向性熱フラックスの測定

    宇田川洸, 三矢晶洋, 鈴木陽香, 豊田浩孝

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    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  117. 電磁界シミュレーションを用いた大気圧マイクロ波ラインプラズマの均一性向上の検討

    小池洋右, 田村宥人, 鈴木陽香, 豊田 浩孝

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    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  118. 水流遮蔽水蒸気マイクロ波プラズマの生成とその応用

    鈴木陽香, 仙波輝, 豊田浩孝

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    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  119. ギャップ型マイクロ波プラズマ源の改良による液体処理能力向上

    藤村昇平, 堤和紀, 鈴木陽香, 豊田浩孝

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    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  120. 大気圧マイクロ波プラズマCVDによるSiO2膜形成及び膜評価

    石川翔太, 鈴木陽香, 豊田浩孝

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    Event date: 2017.11

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  121. Power Absorption Mechanism of Atmospheric Pressure Microwave Line Plasma International conference

    Haruka Suzuki, Yosuke Koike, Yuto Tamura, Yoshiki Baba, Hirotaka Toyoda

    39th International Symposium on Dry Process 

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    Event date: 2017.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  122. Oxygen Negative Ion Flux Evaluation in DC and DC-VHF Magnetron Plasmas through Directional Heat Flux Measurement International conference

    Hirotaka Toyoda, Kou Udagawa, Haruka Suzuki, Taku Suyama, Hansin Bae

    The 11th Asian-European International Conference on Plasma Surface Engineering 

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    Event date: 2017.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  123. 空間分解型吸収分光装置を用いたプラズマによる有機溶質分解過程の調査

    藤村 昇平, 堤 和紀, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  124. スロット励起大気圧マイクロ波プラズマにおける消費電力シミュレーション

    小池 洋右, 田村 宥人, 馬場 賀己, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  125. VHF-DC重畳マグネトロンプラズマにおける高エネルギーO-イオンに由来する熱フラックスの評価

    宇田川 洸, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  126. スロット励起大気圧マイクロ波プラズマCVDによるSiO2薄膜形成

    石川 翔太, 鈴木 陽香, 豊田 浩孝

    平成29年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  127. マイクロ波インライン液体処理における反応領域のその場計測

    堤 和紀, 藤村 昇平, 鈴木 陽香, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  128. スロット励起大気圧マイクロ波プラズの電力消費に関する電磁界シミュレーョン

    鈴木 陽香, 小池 洋右, 田村 宥人, 馬場 賀己, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  129. 大気圧マイクロ波ラインプラズマにおける電力吸収機構

    田村 宥人, 小池 洋右, 鈴木 陽香, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  130. 水流により遮蔽された空間での水蒸気マイクロ波プラズ生成

    仙波 輝, 小池 洋右, 鈴木 陽香, 豊田 浩孝

    第78回応用物理学会秋季学術講演会 

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    Event date: 2017.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  131. Improvement of SiO2 film properties synthesized by plasma-enhanced chemical vapor deposition using slot-type microwave plasma with O2/TEOS International conference

    Shota Ishikawa, Masaki Yamamoto, Haruka Suzuki, Hirotaka Toyoda

    The 15th International Conference on Advanced Materials 

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    Event date: 2017.8 - 2017.9

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  132. Meter -scale microwave plasma production with various discharge gases for large-area surface treatment under atmospheric pressur Invited International conference

    Haruka Suzuki

    The 15th International Conference on Advanced Materials 

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    Event date: 2017.8 - 2017.9

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  133. 高速表面処理に向けた新しい大気圧プラズマ源の開発 Invited

    鈴木陽香

    プラズマ材料科学153委員会30周年記念講演会 

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    Event date: 2017.7

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  134. Optical measurement of meter-scale microwave line plasma under atmospheric pressure International conference

    Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hirotaka Toyoda

    XXXIII International Conference on Phenomena in Ionized Gases 

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    Event date: 2017.7

    Language:English   Presentation type:Poster presentation  

    Country:Portugal  

  135. Quantitative Evaluation of High-Energy Oxygen Negative Ion Flux in DC Magnetron Sputtering of Indium-Tin-Oxide International conference

    Hirotaka Toyoda, Hansin Bae, Taku Suyama, Kenta Setaka, Haruka Suzuki

    XXXIII International Conference on Phenomena in Ionized Gases 

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    Event date: 2017.7

    Language:English   Presentation type:Oral presentation (general)  

    Country:Portugal  

  136. Microwave Plasma Production inside the Micro-gap with Meter-scale Length Invited International conference

    Haruka Suzuki

    9th International Workshop on Microplasmas 2017 

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    Event date: 2017.6

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Germany  

  137. Development of atmospheric pressure microwave plasma source for large-area surface treatment Invited International conference

    Haruka Suzuki

    The 22th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & The 9th Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 

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    Event date: 2017.4

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Korea, Republic of  

  138. マイクロ波励起メートル級大気圧プラズマの生成とその特性 Invited

    鈴木陽香, 田村宥人, 猪俣弥雄起, 関根誠, 堀勝, 豊田浩孝

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  139. マイクロ波励起長尺大気圧プラズマにおけるプラズマ維持機構の検討

    田村 宥人, 猪俣 弥雄起, 鈴木 陽香, 豊田 浩孝

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  140. 水流により遮蔽された空間での大気圧プラズマジェット生成

    仙波 輝, 小池 洋右, 鈴木 陽香, 豊田 浩孝

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  141. マイクロ波インライン液体処理における反応領域の空間分布計測

    堤 和紀 滝藤 奨, 藤村 昇平, 鈴木 陽香, 豊田 浩孝

    第64回応用物理学会春季学術講演会 

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    Event date: 2017.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  142. Long-scale N2 line plasma production under atmospheric pressure International conference

    Haruka Suzuki, Yuto Tamura, Yaoki Inomata, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

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    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  143. Film quality improvement in slot-type microwave plasma CVD of SiO2 International conference

    Masaki Yamamoto, Shota Ishikawa, Haruka Suzuki, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

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    Event date: 2017.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  144. Measurement of Directional Heat Flux Component in VHF-Magnetron Sputtering International conference

    Hansin Bae, Taku Suyama, Kenta Setaka, Haruka Suzuki, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

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    Event date: 2017.3

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  145. Shielding of plasma jets from ambient air by water flow International conference

    Hikaru Senba, Yosuke Koike, Haruka Suzuki, Hirotaka Toyoda

    9th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanotaterials (ISPlasma) / 10th International Conference on Plasma-Nanotechnology & Science (IC-PLANTS) 

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    Event date: 2017.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  146. Efficient production of meter-scale atmospheric-pressure line plasma using modified waveguide and cw microwave power

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    Event date: 2017.1

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  147. インラインマイクロ波プラズマ処理の高流速化による有機物分解効率の向上

    堤 和紀, 滝藤 奨, 藤村 昇平, 伊藤 美智子, 高島 成剛, 鈴木 陽香, 豊田浩孝

    第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム(合同会議) 

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    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  148. ITOターゲットを用いたVHF重畳DCマグネトロンプラズマにおける熱フラックスの空間分布

    Bae Hansin, 巣山 拓, 鈴木 陽香, 豊田 浩孝

    第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム(合同会議) 

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    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  149. 長尺ラインプラズマ生成のための改良型導波管の電磁界シミュレーション

    堤 和紀, 滝藤 奨, 藤村 昇平, 伊藤 美智子, 高島 成剛, 鈴木 陽香, 豊田浩孝

    第34回プラズマプロセシング研究会/第29回プラズマ材料科学シンポジウム(合同会議) 

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    Event date: 2017.1

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  150. マグネトロンプラズマ中の高エネルギー負イオンフラックス評価

    豊田 浩孝, 巣山 拓, Bae Hansin, 鈴木 陽香

    プラズマ・核融合学第33回会年会 

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    Event date: 2016.11 - 2016.12

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  151. Plasma-enhanced chemical vapor deposition of SiO2 films by slot type microwave plasma with O2/TEOS International conference

    Haruka Suzuki, Masaki Yamamoto, Hirotaka Toyoda

    38th International Symposium on Dry Process 

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    Event date: 2016.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  152. Evaluation of O- Ion Flux in a VHF-DC Magnetron Plasma under ITO Sputtering Process International conference

    Haruka Suzuki, Masaki Yamamoto, and Hirotaka Toyoda

    38th International Symposium on Dry Process 

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    Event date: 2016.11

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  153. 100% N2 atmospheric-pressure microwave-line-plasma production with a modi ed waveguide structure International conference

    69th Annual Gaseous Electronics Conference 

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    Event date: 2016.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:Germany  

  154. High speed deposition of SiO2 lm by slot-type microwave CVD system International conference

    Hirotaka Toyoda, Masaki Yamamoto, Haruka Suzuki

    69th Annual Gaseous Electronics Conference 

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    Event date: 2016.10

    Language:English   Presentation type:Poster presentation  

    Country:Germany  

  155. Improvement of Liquid Treatment Efficiency using Microwave In-Line Plasma System with Narrow Flow Path International conference

    Haruka Suzuki, Sho Takitou, Hirotaka Toyoda

    The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016) 

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    Event date: 2016.9

    Language:English   Presentation type:Poster presentation  

    Country:Korea, Republic of  

  156. 改良型導波管構造によるマイクロ波励起純窒素大気圧ラインプラズマの生成

    鈴木陽香, 田村宥人, 伊藤仁, 関根誠, 堀勝, 豊田浩孝

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  157. ITOマグネトロンスパッタにおける酸素負イオンフラックス評価

    巣山 拓, Bae Hansin, 瀬高 健太, 笹井 建典, 鈴木 陽香, 豊田 浩孝

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  158. O2/TEOS スロット型マイクロ波プラズマCVD によるSiO2膜形成

    山本 匡毅, 鈴木 陽香, 豊田 浩孝

    第77回応用物理学会秋季学術講演会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  159. 窒素ガスを用いたマイクロ波大気圧ラインプラズマの生成

    田村 宥人, 鈴木 陽香, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    平成28年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2016.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  160. Evaluation of O- Ion Flux in VHF-DC Magnetron Sputtering

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    Event date: 2016.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  161. High-Speed-Camera Observation of Plasma Behavior in Atmospheric-Pressure Microwave Line Plasma International conference

    7th International Workshop on Plasma Spectroscopy (IPS 2016) 

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    Event date: 2016.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  162. Two-Dimensional Atomic Absorption Spectroscopy of Plasma-Stimulated Zn Atom Desorption from ZnSO4 Solution International conference

    Hirotaka Toyoda, Takafumi Takaba, Haruka Suzuki

    7th International Workshop on Plasma Spectroscopy (IPS2016) 

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    Event date: 2016.6

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  163. スロット内生成マイクロ波プラズマを用いた高速プラズマCVD

    山本 匡毅, 鈴木 陽香, 豊田 浩孝

    第63回応用物理学会春季学術講演会 

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    Event date: 2016.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  164. Low Pressure Sustainment of Surface-Wave Microwave Plasma with Modified Microwave Coupler (MMC-SWP) International conference

    Kensuke Sasai, Haruka Suzuki, Hirotaka Toyoda

    8th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma)/9th International Conference on Plasma-Nano Technology & Science (IC-PLANTS) 

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    Event date: 2016.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  165. 大気圧マイクロ波放電による長尺ラインプラズマの生成と基礎特性

    鈴木 陽香, 中野 優, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第32回プラズマ・核融合学会年会 

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    Event date: 2015.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  166. Application of Atmospheric-Pressure Microwave Line Plasma for Low Temperature Process International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    68th Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing 

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    Event date: 2015.10

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  167. スロット内生成マイクロ波プラズマの基礎的検討

    山本 匡毅, 鈴木 陽香, 豊田 浩孝

    平成27年度電気・電子・情報関係学会東海支部連合大会 

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    Event date: 2015.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  168. Desorption of Alkaline Metals from Electrolyte Liquid Contacting with a DC Pulsed-Plasma International conference

    Haruka Suzuki, Takafumi Takaba, Noriharu Takada, Hirotaka Toyoda

    The 10th Asian-European International Conference on Plasma SurfaceEngineering (AEPSE2015)  

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    Event date: 2015.9

    Language:English   Presentation type:Poster presentation  

    Country:Korea, Republic of  

  169. Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

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    Event date: 2015.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  170. Gas Temperature Measurement in Atmospheric-Pressure Microwave Line Plasmas International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma) /8th International Conference on Plasma-Nano Technology & Science (IC-PLANTS) 

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    Event date: 2015.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  171. 大気圧マイクロ波ラインプラズマにおけるプラズマ挙動シミュレーション

    鈴木 陽香,中野 優,伊藤 仁,関根誠,堀 勝,豊田 浩孝

    第62回応用物理学会春季学術講演会 

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    Event date: 2015.3

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  172. 電解質溶液を電極としたパルスDCプラズマにおける液相由来金属原子の吸収分光計測

    鷹羽 貴史, 鈴木 陽香, 高田 昇治, 豊田 浩孝

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    Event date: 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  173. 狭ギャップスロットアンテナを用いた大気圧ラインプラズマ生成

    中野 優, 鈴木 陽香, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

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    Event date: 2014.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  174. Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure International conference

    Hirotaka Toyoda, Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori

    67th Annual Gaseous Electronics Conference 

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    Event date: 2014.11

    Language:English   Presentation type:Oral presentation (general)  

    Country:United States  

  175. Plasma movement mechanism in pseudo-continuous meter-scale atmospheric-pressure line plasma

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

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    Event date: 2014.9

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  176. パルスマイクロ波励起大気圧ラインプラズマの空間分解計測

    鈴木 陽香, 中野 優, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第61回応用物理学関係連合講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  177. 電解質溶液電極を用いたパルスDCプラズマにおける電解質由来金属原子の二次元吸収分光計測

    鷹羽 貴史, 鈴木 陽香, 高田 昇治, 豊田 浩孝

    第61回応用物理学関係連合講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  178. メートル級マイクロ波大気圧ラインプズマの均一性評価

    中野 優, 鈴木 陽香, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第61回応用物理学関係連合講演会 

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    Event date: 2014.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  179. Production of High-Uniform Microwave Line Plasma at Atmospheric Pressure International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014)/7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014) 

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    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  180. Spatio-temporal Behavior of Alkaline Metals in a DC Pulsed-Plasma with Liquid Electrode International conference

    Takafumi Takaba, Haruka Suzuki, Noriharu Takada, Hirotaka Toyoda

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014)/7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014) 

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    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  181. Spatiotemporal Resolved Investigations of Atmospheric Pressure Line Plasma International conference

    Suguru Nakano, Haruka Suzuki, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2014)/7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014) 

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    Event date: 2014.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  182. Release Behavior of Metal Atom from Solution Surface Contacting to Plasma International conference

    Haruka Suzuki, Takafumi Takaba, Hirotaka Toyoda

    The 18th International Workshop of Advanced Plasma Processing and Diagnostics 

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    Event date: 2014.2

    Language:English   Presentation type:Oral presentation (general)  

    Country:Japan  

  183. Meter-Scale Production of Atmospheric Pressure Microwave Plasma by Travelling Wave International conference

    Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori, Hirotaka Toyoda

    8th International Conference on Reactive Plasmas/31st Symposium on Plasma Processing 

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    Event date: 2014.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  184. Electromagnetic Simulation of Long-Slotted Waveguide Antenna for Production of Meter-Scale Plasma under Atmospheric Pressure International conference

    66th Annual Gaseous Electronics Conference 

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    Event date: 2013.9 - 2013.10

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  185. 電解質溶液電極を用いた大気圧パルスDCプラズマにおける放出金属原子の時分解吸収分光計測

    鷹羽 貴史, 鈴木 陽香, 高田 昇治, 豊田 浩孝

    平成25年度電気関係学会東海支部連合大会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  186. 進行波重畳によるメートル級マイクロ大気圧ランプズの生成

    中野 優, 鈴木 陽香, 関根 誠, 堀 勝, 豊田 浩孝, 伊藤 仁

    平成25年度電気関係学会東海支部連合大会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  187. 新規アンテナ構造を用いたメートル級マイクロ波大気圧ラインプラズマの生成

    鈴木 陽香, 中野 優, 伊藤 仁, 関根 誠, 堀 勝, 豊田 浩孝

    第74回応用物理学会学術講演会 

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    Event date: 2013.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  188. Absorption Spectroscopy of Atomic Metal in Atmospheric-pressure Plasma with Electrolyte Solution Electrode International conference

    17th Korea-Japan Workshop on Advanced Plasma Processes and Diagnostics & 4th The Workshop for NU-SKKU Joint Institute for Plasma-Nano Materials 

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    Event date: 2013.5

    Language:English   Presentation type:Oral presentation (general)  

    Country:Korea, Republic of  

  189. 電解質溶液電極を用いた大気圧パルスプラズマにおける金属原子吸収分光計測

    鈴木 陽香, 鷹羽 貴史, 高田 昇治, 豊田 浩孝

    第60回応用物理学関係連合講演会 

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    Event date: 2013.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  190. Temporal and Spatial Variations of Atomic Metals in Atmospheric-Pressure Pulsed-Plasmas with Liquid Electrode International conference

    Haruka Suzuki, Takafumi Takaba, Noriharu Takada, Hirotaka Toyoda

    The 6th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2013) 

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    Event date: 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  191. Temporal Variation of Alkaline Metals in an Atmospheric-Pressure Pulsed-Plasma with Liquid Electrode International conference

    Haruka Suzuki, Takafumi Takaba, Noriharu Takada, Hirotaka Toyoda

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    Event date: 2013.1 - 2013.2

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  192. 液体電極を用いた大気圧マイクロ波プラズマの光学的時分解計測

    鈴木 陽香, 鷹羽 貴史, 高田 昇治, 豊田 浩孝

    第5回プラズマ技術産業応用センター&プラズマが拓くものづくり研究会国際シンポジウム 

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    Event date: 2012.10

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  193. 液体を電極としたマイクロ波励起大気圧プラズマの発光分光計測

    鈴木 陽香, 鷹羽 貴史, 高田 昇治, 豊田 浩孝

    第73回応用物理学会学術講演会 

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    Event date: 2012.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  194. 液中気泡内における水蒸気とマイクロ波プラズマの相互作用

    鈴木 陽香, 石島 達夫, 豊田 浩孝

    第59回応用物理学関係連合講演会 

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    Event date: 2012.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  195. Temporal Variation of Water Vapor Pressure inside a Bubble under Water Induced by Microwave Plasma International conference

    The 5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012)

    Haruka Suzuki, Tatsuo Ishijima, Hirotaka Toyoda  

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    Event date: 2012.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  196. Temporal Variation of Water Vapor Pressure inside a Bubble under Water Induced by Atmospheric Pressure Microwave Plasma International conference

    Haruka Suzuki, Tatsuo Ishijima, Hirotaka Toyoda

    4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2012) 

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    Event date: 2012.3

    Language:English   Presentation type:Poster presentation  

    Country:Japan  

  197. Bubble Plasma Production under Water using Microwave -Basic Study in Multiphase Structure and Application- International conference

    Tatsuo Ishijima, Haruka Suzuki, Koji Kanetake, Hirotaka Toyoda

    12th International Symposium on Biomimetic Materials Processing (BWWMP-12) 

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    Event date: 2012.1

    Language:English   Presentation type:Oral presentation (invited, special)  

    Country:Japan  

  198. マイクロ波励起液中気泡内プラズマの時分解発光分光計測

    鈴木 陽香, 石島 達夫, 豊田 浩孝

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    Event date: 2011.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

  199. Time-resolved OES measurement of microwave plasma produced inside controlled bubbles under water International conference

    Tatsuo Ishijima, Haruka Suzuki, Hirotaka Toyoda

    64th Annual Gaseous Electronics Conference 

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    Event date: 2011.11

    Language:English   Presentation type:Poster presentation  

    Country:United States  

  200. パルスマイクロ波液中気泡内プラズマの時分解発光分光計測

    鈴木 陽香, 石島 達夫, 豊田 浩孝

    応用物理学会 プラズマエレクトロニクス分科会20周年(研究会創設25周年)記念 特別シンポジウム 

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    Event date: 2011.10

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

  201. パルスマイクロ波液中プラズマの時分解発光分光計測

    鈴木 陽香, 石島 達夫 豊田 浩孝

    平成23年度電気関係学会東海支部連合大会 

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    Event date: 2011.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

▼display all

Research Project for Joint Research, Competitive Funding, etc. 2

  1. 大面積フィルム処理のための大気圧長尺マイクロ波プラズマにおける酸素ラジカル空間分布計測

    2021

    第39回(令和3年度)研究助成 

  2. 液体流プラズマを用いた高速大流量液体処理中における反応生成物の調査

    2021

    2021年度国内研究助成 

KAKENHI (Grants-in-Aid for Scientific Research) 4

  1. 高周波プロセスプラズマにおいて真空容器壁面の状態がプラズマに与える影響の評価

    Grant number:21K13907  2021.4 - 2023.3

    日本学術振興会  若手研究 

  2. ラジカル生成促進のための大気圧マイクロ波プラズマの電子温度制御技術の開発

    Grant number:18K13531  2018.4 - 2021.3

    日本学術振興会  若手研究

    鈴木 陽香

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    Authorship:Principal investigator 

    Grant amount:\4160000 ( Direct Cost: \3200000 、 Indirect Cost:\960000 )

    大気圧プラズマは簡易な構成でプラズマ生成が可能であるため、様々な産業への応用が期待される。プロセス速度において最も重要となる化学活性種(ラジカル)供給量は、プラズマの密度とサイズ、電子温度により決定される。申請者はこれまでの研究で大面積表面処理用のメートル級長尺の高密度大気圧マイクロ波プラズマ源を世界で初めて実現した。しかし、高電子密度プラズマであったとしても、電子温度が低ければ生成されるラジカル量が少ないことがプロセスへの応用において問題となる。そこで、本研究では大気圧マイクロ波プラズマの電子温度制御による解離促進手法を確立し、高密度ラジカル生成を目的とする。本研究が成功すればラジカル供給量の制御による大気圧プラズマプロセスの性能の飛躍的な向上が期待できる。
    2019年度においては、まず、分子ガスを添加してマイクロ波パルス放電プラズマの安定生成条件の探索を行った。その結果、添加量に依存して安定化の条件が大きく異なることが明らかとなった。また、希ガス放電より大きな電力を要するため、装置の加熱による熱ひずみがプラズマ生成の不安定化につながるという問題が発生した。そこで、プラズマからの受熱がどの程度あるかの調査を行い、それに対して十分な冷却能力を考慮した装置の設計を行った。また、高速ゲートICCDカメラを用いてパルス放電時におけるプラズマ挙動の調査を行うとともに、発光分光を用いて活性種生成量の調査を行った。
    本研究では大気圧マイクロ波プラズマにおいて、パルス制御放電等を用いて電子温度制御することにより高密度ラジカルを供給し、表面処理プロセスを行うことを最終的な目的としている。
    2019年度においては、マイクロ波パルス放電プラズマの特性の調査を計画していたが、安定生成できるウィンドウが狭く、統一された実験条件での放電維持が困難であった。その一因として、分子ガス添加による熱の影響で装置がひずむという問題があることが明らかとなった。そのため、プラズマからの受熱量の調査を行い、装置を再製作した。並行して、限定的な条件であるが、プラズマの挙動調査、発光分光を行った。以上のように、パルス放電の特性の調査は十分進んでおらず、当初計画より遅れている。一方で、分子ガスプラズマの安定生成には大きな電力を要するため、本装置においては熱のマネジメントが非常に重要であることが明らかとなった。
    2019年度の研究において、パルス放電時の特性および熱のマネジメントの重要性が明らかとなった。
    次年度においては装置の改良をおこない、当初計画通り、パルス放電条件に対する電子温度、電子密度の関係性について調査するとともに、ラジカル生成増加の最適条件を検討する。電子温度は制動輻射光から定量評価するとともに、放電ガスに難解離性分子である窒素または酸素を用いて、発光分光から解離の効果について定性的に評価する。プラズマ安定維持のために外部印加電圧による補助も検討する。
    また、分子ガス添加プラズマを用いた応用実験を行い、放電条件と処理速度の関係性の調査を行うことを予定している。

  3. Atmospheric-pressure plasma process using high-density and high-purity water-derived reactive species produced by a water-vapor microwave plasma

    Grant number:16H06859  2016.8 - 2018.3

    Japan Society for the Promotion of Science 

    SUZUKI Haruka

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    Authorship:Principal investigator 

    Grant amount:\2990000 ( Direct Cost: \2300000 、 Indirect Cost:\690000 )

    Atmospheric pressure plasma sources in air-shielded environment by water flow were developed for plasma process utilizing water-derived reactive species without air contamination in the atmosphere. A microwave-excited water-vapor plasma source in a space shielded by cone-shaped water flow was developed using a coaxial waveguide with a ring-shaped slot to use high-density hydroxyl radical without air contamination at atmospheric pressure. Water vapor plasma without the air was successfully realized by the pulsed microwave discharges. Production of hydroxyl radical was confirmed from the optical emission from the plasma. As an application example of the water-vapor plasma in the air shield environment, atmospheric pressure photoresist removal treatment was demonstrated.

  4. Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applications

    Grant number:16H03893  2016.4 - 2019.3

    Japan Society for the Promotion of Science 

    Toyoda Hirotaka

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    Authorship:Coinvestigator(s) 

    Microwave plasmas have been used in various industrial areas. In this study, meter-length microwave atmospheric pressure plasma inside meter-length slot was studied, especially fosucing on the discharge using molecular gases. Through this study, 50cm pure N2 plasma was successfully produced. This result strongly suggests application of this plasma source for various surface modification in large area.

Industrial property rights 3

  1. プラズマCVD装置、及びフィルムの製造方法

    豊田浩孝, 鈴木陽香, 慈幸範洋, 奈良井哲

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    Application no:2018-051429  Date applied:2018.3

    Country of applicant:Domestic  

  2. プラズマ発生装置

    豊田浩孝, 鈴木陽香

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    Application no:2017-242257  Date applied:2017.12

    Country of applicant:Domestic  

  3. マイクロ波供給装置、プラズマ処理装置、及び、プラズマ処理方法

    伊藤仁, 堀勝, 豊田浩孝, 鈴木陽香, 関根誠

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    Application no:特願2016-121668  Date applied:2016.6

    Announcement no:特開2017-228354  Date announced:2017.12

    Country of applicant:Domestic  

 

Teaching Experience (On-campus) 19

  1. 物理学実験

    2021

  2. 電気電子情報工学実験第1

    2021

  3. 電気電子情報工学実験第2

    2021

  4. Electromagnetic Theory with Exercises

    2020

  5. 電気電子情報工学実験第1

    2020

  6. 電気電子情報工学実験第2

    2020

  7. 電気電子情報工学実験第1

    2019

  8. 電気電子情報工学実験第2

    2019

  9. 電気磁気学及び演習

    2019

  10. 電気電子情報工学実験第2

    2018

  11. 電気磁気学及び演習

    2018

  12. 電気電子情報工学実験第1

    2018

  13. 電気電子情報工学実験第2

    2017

  14. 電気磁気学及び演習

    2017

  15. 電気電子情報工学実験第1

    2017

  16. 電気・電子工学実験第2

    2016

  17. 電気磁気学及び演習

    2016

  18. 電気・電子工学実験第1

    2016

  19. 集積プロセス特別実験及び演習

    2016

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Social Contribution 5

  1. テクノフロンティアセミナー TEFS2019

    Role(s):Lecturer, Planner

    2019.8

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    Audience: High school students

    Type:Seminar, workshop

  2. テクノフロンティアセミナー TEFS2018

    Role(s):Lecturer, Planner

    2018.8

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    Audience: High school students

    Type:Seminar, workshop

  3. テクノフロンティアセミナー TEFS2017

    Role(s):Lecturer, Planner

    2017.8

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    Audience: High school students

    Type:Seminar, workshop

  4. テクノフロンティアセミナー TEFS2016

    Role(s):Lecturer, Planner

    2016.8

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    Audience: High school students

    Type:Seminar, workshop

  5. 女子中高生理系進学推進セミナー

    Role(s):Appearance

    名古屋大学男女共同参画推進専門委員会  2016.8

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    Audience: Junior students, High school students

    Type:Seminar, workshop