Updated on 2025/03/27

写真a

 
IKARASHI Nobuyuki
 
Organization
Institute of Materials and Systems for Sustainability Center for Integrated Research of Future Electronics Materials Nano-Characterization Section Professor
Graduate School
Graduate School of Engineering
Title
Professor
Contact information
メールアドレス
External link

Degree 1

  1. 博士(理学) ( 1997.9   東京工業大学 ) 

Research Interests 5

  1. cryatalographic defects

  2. device phisics

  3. atomically thin materials

  4. electron microscopy

  5. semiconductor physics

Research Areas 3

  1. Others / Others  / デバイス物理学

  2. Others / Others  / 物性解析

  3. Others / Others  / 表面・界面

Current Research Project and SDGs 1

  1. ultra low power consumption devices

Research History 4

  1. 名古屋大学・教授

    2015

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    Country:Japan

  2. ルネサスエレクトロニクス

    2011 - 2015

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    Country:Japan

  3. 東京工業大・連携大学院准教授

    2008 - 2015

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    Country:Japan

  4. 日本電気株式会社

    1988 - 2011

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    Country:Japan

Education 1

  1. Tokyo Institute of Technology   Graduate School, Division of Science and Engineering

    - 1988.3

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    Country: Japan

Professional Memberships 2

  1. The Japanese Society of Microscopy

    2003.4

  2. 公益社団法人 応用物理学会   会員

 

Papers 47

  1. Misfit accommodation in a single interface atomic layer at a highly lattice-mismatched InN/GaN Reviewed International journal

    Nagase, T; Chokawa, K; Kano, E; Fukuta, K; Sasaki, T; Fujikawa, S; Takahashi, M; Shiraishi, K; Oshiyama, A; Araki, T; Ikarashi, N

    JOURNAL OF APPLIED PHYSICS   Vol. 137 ( 5 )   2025.2

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/5.0231584

    Web of Science

  2. Engineered interface charges and traps in GaN MOSFETs providing high channel mobility and <i>E</i>-mode operation

    Narita, T; Ito, K; Iguchi, H; Kikuta, D; Kanechika, M; Tomita, K; Iwasaki, S; Kataoka, K; Kano, E; Ikarashi, N; Horita, M; Suda, J; Kachi, T

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 63 ( 12 )   2024.12

  3. Transport Properties in GaN Metal-Oxide-Semiconductor Field-Effect Transistor Almost Free of Interface Traps with AlSiO/AlN/p-Type GaN Gate Stack

    Narita, T; Ito, K; Tomita, K; Iguchi, H; Iwasaki, S; Horita, M; Kano, E; Ikarashi, N; Kikuta, D

    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS   Vol. 18 ( 12 )   2024.12

  4. Discovering the incorporation limits for wurtzite AlP<sub>y</sub>N<sub>1<bold>-</bold>y</sub> grown on GaN by metalorganic vapor phase epitaxy

    Yang, X; Furusawa, Y; Kano, E; Ikarashi, N; Amano, H; Pristovsek, M

    APPLIED PHYSICS LETTERS   Vol. 125 ( 13 )   2024.9

  5. Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion-Implanted GaN Reviewed International coauthorship International journal

    Kano, E; Uzuhashi, J; Kobayashi, K; Ishikawa, K; Sawabe, K; Narita, T; Sierakowski, K; Bockowski, M; Ohkubo, T; Kachi, T; Ikarashi, N

    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS   Vol. 18 ( 9 )   2024.9

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/pssr.202400074

    Web of Science

  6. Observation of 2D-magnesium-intercalated gallium nitride superlattices

    Wang, J; Cai, WT; Lu, WF; Lu, S; Kano, E; Agulto, VC; Sarkar, B; Watanabe, H; Ikarashi, N; Iwamoto, T; Nakajima, M; Honda, Y; Amano, H

    NATURE   Vol. 631 ( 8019 ) page: 67 - +   2024.7

  7. Observation of 2D-magnesium-intercalated gallium nitride superlattices

    Wang, J; Cai, WT; Lu, WF; Lu, S; Kano, E; Agulto, VC; Sarkar, B; Watanabe, H; Ikarashi, N; Iwamoto, T; Nakajima, M; Honda, Y; Amano, H

    NATURE     2024.6

  8. Metal Stop Laser Drilling for Blind via Holes of GaN-on-GaN Devices

    Sasaoka, C; Ando, Y; Takahashi, H; Ikarashi, N; Amano, H

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   Vol. 220 ( 16 )   2023.8

  9. Over 200 cm<SUP>2</SUP> V<SUP>-1</SUP> s<SUP>-1</SUP> of electron inversion channel mobility for AlSiO/GaN MOSFET with nitrided interface

    Ito, K; Iwasaki, S; Tomita, K; Kano, E; Ikarashi, N; Kataoka, K; Kikuta, D; Narita, T

    APPLIED PHYSICS EXPRESS   Vol. 16 ( 7 )   2023.7

  10. Pressure Effect on Diffusion of Native Defects and Mg Impurity in Mg-Ion-Implanted GaN during Ultrahigh-Pressure Annealing Reviewed International coauthorship International journal

    Kano, E; Otsuki, R; Kobayashi, K; Kataoka, K; Sierakowski, K; Bockowski, M; Nagao, M; Narita, T; Kachi, T; Ikarashi, N

    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS   Vol. 17 ( 7 )   2023.7

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1002/pssr.202300035

    Web of Science

  11. Fabrication of <i>β</i>-Mn type Co-Zn-Mn(001) film on MgO single crystal substrate

    Oshima, D; Kato, T; Ikarashi, N; Nagao, M

    AIP ADVANCES   Vol. 13 ( 2 )   2023.2

  12. Annealing properties of vacancy-type defects in ion implanted GaN during ultra-high-pressure annealing studied by using a monoenergetic positron beam

    Uedono, A; Sakurai, H; Uzuhashi, J; Narita, T; Sierakowski, K; Ishibashi, S; Chichibu, SF; Bockowski, M; Suda, J; Ohkubo, T; Ikarashi, N; Hono, K; Kachi, T

    GALLIUM NITRIDE MATERIALS AND DEVICES XVIII   Vol. 12421   2023

  13. Process engineering of GaN power devices via selective-area p-type doping with ion implantation and ultra-high-pressure annealing

    Kachi, T; Narita, T; Sakurai, H; Matys, M; Kataoka, K; Hirukawa, K; Sumida, K; Horita, M; Ikarashi, N; Sierakowski, K; Bockowski, M; Suda, J

    JOURNAL OF APPLIED PHYSICS   Vol. 132 ( 13 )   2022.10

  14. Effect of Ultra-High-Pressure Annealing on Defect Reactions in Ion-Implanted GaN Studied by Positron Annihilation

    Uedono, A; Sakurai, H; Uzuhashi, J; Narita, T; Sierakowski, K; Ishibashi, S; Chichibu, SF; Bockowski, M; Suda, J; Ohkubo, T; Ikarashi, N; Hono, K; Kachi, T

    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS   Vol. 259 ( 10 )   2022.10

  15. Nanoscale Characteristics of a Room-Temperature Coexisting Phase of Magnetic Skyrmions and Antiskyrmions for Skyrmion-Antiskyrmion-Based Spintronic Applications

    Shimizu, D; Nagase, T; So, YG; Kuwahara, M; Ikarashi, N; Nagao, M

    ACS APPLIED NANO MATERIALS   Vol. 5 ( 9 ) page: 13519 - 13528   2022.9

  16. Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation Reviewed International coauthorship International journal

    Kano, E; Kataoka, K; Uzuhashi, J; Chokawa, K; Sakurai, H; Uedono, A; Narita, T; Sierakowski, K; Bockowski, M; Otsuki, R; Kobayashi, K; Itoh, Y; Nagao, M; Ohkubo, T; Hono, K; Suda, J; Kachi, T; Ikarashi, N

    JOURNAL OF APPLIED PHYSICS   Vol. 132 ( 6 )   2022.8

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    DOI: 10.1063/5.0097866

    Web of Science

  17. Elucidation of PVD MoS<sub>2</sub> film formation process and its structure focusing on sub-monolayer region Reviewed

    Ono, R; Imai, S; Kusama, Y; Hamada, T; Hamada, M; Muneta, I; Kakushima, K; Tsutsui, K; Kano, E; Ikarashi, N; Wakabayashi, H

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 61 ( SC )   2022.5

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    Language:Japanese  

    DOI: 10.35848/1347-4065/ac3fc9

    Web of Science

  18. Effect of beam current on defect formation by high-temperature implantation of Mg ions into GaN Reviewed

    Itoh, Y; Watanabe, H; Ando, Y; Kano, E; Deki, M; Nitta, S; Honda, Y; Tanaka, A; Ikarashi, N; Amano, H

    APPLIED PHYSICS EXPRESS   Vol. 15 ( 2 )   2022.2

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    DOI: 10.35848/1882-0786/ac481b

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  19. Effects of the sequential implantation of Mg and N ions into GaN for p-type doping Reviewed

    Sakurai, H; Narita, T; Kataoka, K; Hirukawa, K; Sumida, K; Yamada, S; Sierakowski, K; Horita, M; Ikarashi, N; Bockowski, M; Suda, J; Kachi, T

    APPLIED PHYSICS EXPRESS   Vol. 14 ( 11 )   2021.11

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    DOI: 10.35848/1882-0786/ac2ae7

    Web of Science

  20. Propagation of threading dislocations and effects of Burgers vectors in HVPE-grown GaN bulk crystals on Na-flux-grown GaN substrates Reviewed

    Hamachi, T; Tohei, T; Hayashi, Y; Imanishi, M; Usami, S; Mori, Y; Ikarashi, N; Sakai, A

    JOURNAL OF APPLIED PHYSICS   Vol. 129 ( 22 )   2021.6

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    Language:Japanese  

    DOI: 10.1063/5.0053766

    Web of Science

  21. Observation of domain wall bimerons in chiral magnets Reviewed

    Nagase, T; So, YG; Yasui, H; Ishida, T; Yoshida, HK; Tanaka, Y; Saitoh, K; Ikarashi, N; Kawaguchi, Y; Kuwahara, M; Nagao, M

    NATURE COMMUNICATIONS   Vol. 12 ( 1 )   2021.6

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  22. Enhanced activation of Mg ion-implanted GaN at decreasing annealing temperature by prolonging duration Reviewed International coauthorship International journal

    Nakashima, T; Kano, E; Kataoka, K; Arai, S; Sakurai, H; Narita, T; Sierakowski, K; Bockowski, M; Nagao, M; Suda, J; Kachi, T; Ikarashi, N

    APPLIED PHYSICS EXPRESS   Vol. 14 ( 1 )   2021.1

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    Web of Science

  23. Wurtzite AlP<i><sub>y</sub></i>N<sub>1-<i>y</i></sub>: a new III-V compound semiconductor lattice-matched to GaN (0001) Reviewed International coauthorship International journal

    Pristovsek, M; Dinh, DV; Liu, T; Ikarashi, N

    APPLIED PHYSICS EXPRESS   Vol. 13 ( 11 )   2020.11

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    Authorship:Last author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1882-0786/abbbca

    Web of Science

  24. Progress on and challenges of p-type formation for GaN power devices Reviewed International coauthorship

    Narita, T; Yoshida, H; Tomita, K; Kataoka, K; Sakurai, H; Horita, M; Bockowski, M; Ikarashi, N; Suda, J; Kachi, T; Tokuda, Y

    JOURNAL OF APPLIED PHYSICS   Vol. 128 ( 9 )   2020.9

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    Language:Japanese  

    DOI: 10.1063/5.0022198

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  25. Redistribution of Mg and H atoms in Mg-implanted GaN through ultra-high-pressure annealing

    Sakurai, H; Narita, T; Omori, M; Yamada, S; Koura, A; Iwinska, M; Kataoka, K; Horita, M; Ikarashi, N; Bockowski, M; Suda, J; Kachi, T

    APPLIED PHYSICS EXPRESS   Vol. 13 ( 8 )   2020.8

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    DOI: 10.35848/1882-0786/aba64b

    Web of Science

  26. Defect evolution in Mg ions implanted GaN upon high temperature and ultrahigh N<sub>2</sub> partial pressure annealing: Transmission electron microscopy analysis Reviewed International coauthorship International journal

    Iwata, K; Sakurai, H; Arai, S; Nakashima, T; Narita, T; Kataoka, K; Bockowski, M; Nagao, M; Suda, J; Kachi, T; Ikarashi, N

    JOURNAL OF APPLIED PHYSICS   Vol. 127 ( 10 )   2020.3

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.5140410

    Web of Science

  27. Overview of carrier compensation in GaN layers grown by MOVPE: toward the application of vertical power devices Reviewed International coauthorship

    Narita, T; Tomita, K; Kataoka, K; Tokuda, Y; Kogiso, T; Yoshida, H; Ikarashi, N; Iwata, K; Nagao, M; Sawada, N; Horita, M; Suda, J; Kachi, T

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 59   2020.1

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    DOI: 10.7567/1347-4065/ab4610

    Web of Science

  28. Impacts of high temperature annealing above 1400 °C under N<sub>2</sub> overpressure to activate acceptors in Mg-implanted GaN Reviewed International coauthorship

    Sakurai, H; Narita, T; Hirukawa, K; Yamada, S; Koura, A; Kataoka, K; Horita, M; Ikarashi, N; Bockowski, M; Suda, J; Kachi, T

    PROCEEDINGS OF THE 2020 32ND INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD 2020)     page: 321 - 324   2020

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    Web of Science

  29. Smectic Liquid-Crystalline Structure of Skyrmions in Chiral Magnet Co<sub>8.5</sub>Zn<sub>7.5</sub>Mn<sub>4</sub>(110) Thin Film Reviewed

    Nagase, T; Komatsu, M; So, YG; Ishida, T; Yoshida, H; Kawaguchi, Y; Tanaka, Y; Saitoh, K; Ikarashi, N; Kuwahara, M; Nagao, M

    PHYSICAL REVIEW LETTERS   Vol. 123 ( 13 )   2019.9

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  30. Gate Tuning of Synaptic Functions Based on Oxygen Vacancy Distribution Control in Four-Terminal TiO<sub>2-x</sub> Memristive Devices Reviewed

    Nagata, Z; Shimizu, T; Isaka, T; Tohei, T; Ikarashi, N; Sakai, A

    SCIENTIFIC REPORTS   Vol. 9   2019.7

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  31. Effects of plasma shield plate design on epitaxial GaN films grown for large-sized wafers in radical-enhanced metalorganic chemical vapor deposition Reviewed

    Isobe, Y; Sakai, T; Sugiyama, N; Mizushima, I; Suguro, K; Miyashita, N; Lu, Y; Wilson, AF; Kumar, DA; Ikarashi, N; Kondo, H; Ishikawa, K; Shimizu, N; Oda, O; Sekine, M; Hori, M

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   Vol. 37 ( 3 )   2019.5

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    Language:Japanese  

    DOI: 10.1116/1.5083970

    Web of Science

  32. Atomic resolution structural analysis of magnesium segregation at a pyramidal inversion domain in a GaN epitaxial layer Reviewed International coauthorship International journal

    Iwata, K; Narita, T; Nagao, M; Tomita, K; Kataoka, K; Kachi, T; Ikarashi, N

    APPLIED PHYSICS EXPRESS   Vol. 12 ( 3 )   2019.3

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    DOI: 10.7567/1882-0786/ab04f1

    Web of Science

  33. Demonstrative operation of four terminal memristive devices fabricated on reduced TiO<sub>2</sub> single crystals Reviewed

    Takeuchi, S; Shimizu, T; Isaka, T; Tohei, T; Ikarashi, N; Sakai, A

    SCIENTIFIC REPORTS   Vol. 9   2019.2

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  34. Single-Step, Low-Temperature Simultaneous Formations and in Situ Binding of Tin Oxide Nanoparticles to Graphene Nanosheets by In-Liquid Plasma for Potential Applications in Gas Sensing and Lithium-Ion Batteries

    Borude, RR; Sugiura, H; Ishikawa, K; Tsutsumi, T; Kondo, H; Ikarashi, N; Hori, M

    ACS APPLIED NANO MATERIALS   Vol. 2 ( 2 ) page: 649 - 654   2019.2

  35. Low-Temperature MoS<sub>2</sub> Film Formation Using Sputtering and H<sub>2</sub>S Annealing

    Shimizu, J; Ohashi, T; Matsuura, K; Muneta, I; Kakushima, K; Tsutsui, K; Ikarashi, N; Wakabayashi, H

    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY   Vol. 7 ( 1 ) page: 2 - 6   2019

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    Language:Japanese  

    DOI: 10.1109/JEDS.2018.2854633

    Web of Science

  36. Effect of N<sub>2</sub>/H<sub>2</sub> plasma on GaN substrate cleaning for homoepitaxial GaN growth by radical-enhanced metalorganic chemical vapor deposition (REMOCVD)

    Amalraj, FW; Dhasiyan, AK; Lu, Y; Shimizu, N; Oda, O; Ishikawa, K; Kondo, H; Sekine, M; Ikarashi, N; Hori, M

    AIP ADVANCES   Vol. 8 ( 11 )   2018.11

  37. Wide range doping control and defect characterization of GaN layers with various Mg concentrations

    Narita, T; Ikarashi, N; Tomita, K; Kataoka, K; Kachi, T

    JOURNAL OF APPLIED PHYSICS   Vol. 124 ( 16 )   2018.10

  38. Analysis of Ti valence states in resistive switching regions of a rutile TiO<sub>2-<i>x</i></sub> four-terminal memristive device

    Yamaguchi, K; Takeuchi, S; Tohei, T; Ikarashi, N; Sakai, A

    JAPANESE JOURNAL OF APPLIED PHYSICS   Vol. 57 ( 6 )   2018.6

  39. Mechanism for High Hall-Effect Mobility in Sputtered-MoS<sub>2</sub> Film Controlling Particle Energy

    Sakamoto, T; Ohashi, T; Matsuura, K; Muneta, I; Kakushima, K; Tsutsui, K; Suzuki, Y; Ikarashi, N; Wakabayashi, H

    2018 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)     2018

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  40. III-nitride core-shell nanorod array on quartz substrates

    Bae, SY; Min, JW; Hwang, HY; Lekhal, K; Lee, HJ; Jho, YD; Lee, DS; Lee, YT; Ikarashi, N; Honda, Y; Amano, H

    SCIENTIFIC REPORTS   Vol. 7   2017.3

  41. Low-carrier density sputtered-MoS<sub>2</sub> film by H<sub>2</sub>S annealing for normally-off accumulation-mode FET

    Shimizu, J; Ohashi, T; Matsuura, K; Muneta, I; Kakushima, K; Tsutsui, K; Ikarashi, N; Wakabayashi, H

    2017 IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM)     page: 222 - 223   2017

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  42. In-situ electron holography of carrier accumulation at SiO2/InGaZnO4 interface, Reviewed

    Nobuyuki Ikarashi, Kisyoh Kaneko, Motofumi Saitoh, and Hiroshi Takeda

    Jpn. J. Appl. Phys.   Vol. 53   page: 031101   2014

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

  43. In-situ electron holography of surface potential response to gate voltage application in a sub-30-nm gate-length metal-oxide-semiconductor field-effect transistor Reviewed

    Nobuyuki Ikarashi, Hiroshi Takeda, Koichi Yako, and Masami Hane

    Appl. Phys. Lett.   Vol. 100   page: 101912   2012

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  44. Silicide formation process of Pt added Ni at low temperature: Control of NiSi2 formation Reviewed

    Nobuyuki Ikarashi and Koji Masuzaki,

    J. Appl. Phys.   Vol. 109   page: 063506   2011

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

  45. Direct Two-Dimensional Electrostatic Potential Cross-sectional Mapping of Sub-30-nm MOSFET under Operation Mode Using Electron Holography Reviewed

    Nobuyuki Ikarashi, Hiroshi Takeda, Koichi Yako, and Masami Hane

    IEEE International Electron Devices Meeting 2011 Tech. Digest     2011

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/IEDM.2011.6131499

  46. Electron holography for analysis of deep submicron devices: Present status and challenges Reviewed

    Nobuyuki Ikarashi, Akio Toda, Kazuya Uejima, Koichi Yako, Toyoji Yamamoto, Masami Hane, and Hiroshi Sato

    J. Vac. Sci. Technol. B   Vol. 28   page: C1D5   2010

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  47. Atomic structure of a Ni diffused Si (001) surface layer: Precursor to formation of NiSi2 at low temperature Reviewed

    J. Appl. Phys   Vol. 107   page: 033505   2010

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Books 1

  1. Characterization of Defects and Deep Levels for GaN Power Devices Reviewed International journal

    Kachi, T( Role: Contributor ,  Chapter 4 Structural Defects in Mg-Doped GaN: TEM Analysis)

    AIP Publishing  ( ISBN:978-0-7354-2270-4

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    Total pages:224   Language:English Book type:Scholarly book

    DOI: 10.1063/9780735422698_004

Presentations 2

  1. 高温アニールMgイオン注入GaN結晶の欠陥解析 International coauthorship

    中島 拓也 櫻井 秀樹 荒井重 岩田 研治 成田 哲 片岡 恵太 Bockowski M 長尾 全寛 須田 淳 加地 徹 五十嵐 信行

    第76学術講演会  2020.5.25  顕微鏡学会

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    Event date: 2020.5

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:online   Country:Japan  

    高温アニールMgイオン注入GaN結晶の欠陥解

  2. Mgイオン注入GaN結晶の高温・超高圧アニールにより形成される結晶欠陥の透過型電子顕微鏡観察 International coauthorship

    中島 拓也 櫻井 秀樹 荒井重 岩田 研治 成田 哲 片岡 恵太 Bockowski M 長尾 全寛 須田 淳 加地 徹 五十嵐 信行

    学術講演会  2020.3.12  応用物理学会

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:online   Country:Japan  

    Mgイオン注入GaN結晶の高温・超高圧アニールにより形成される結晶欠陥の透過型電子顕微鏡観察

Research Project for Joint Research, Competitive Funding, etc. 1

  1. 省エネルギー社会の実現に資する次世代半導体 International coauthorship

    2016.4 - 2020.3

    受託研究  受託研究

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    Authorship:Coinvestigator(s)  Grant type:Competitive

    Grant amount:\7800000 ( Direct Cost: \7500000 、 Indirect Cost:\300000 )

KAKENHI (Grants-in-Aid for Scientific Research) 2

  1. Output power improvement of microchip deep-ultraviolet laser diodes for innovative manufacturing systems

    Grant number:21H04560  2021.4 - 2026.3

    Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (A)

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    Authorship:Coinvestigator(s) 

  2. ワイドギャップ半導体MOS界面欠陥の正体の横断的解明

    Grant number:20H00340  2020.4 - 2025.3

    科学研究費助成事業  基盤研究(A)

    梅田享英, 牧野 俊晴, 五十嵐 信行, 磯谷 順一, 染谷 満, 松下 雄一郎, 原田 信介

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    Authorship:Coinvestigator(s) 

    Grant amount:\900000 ( Direct Cost: \900000 、 Indirect Cost:\90000 )

    次世代パワーエレクトロニクスのキーデバイスとなるワイドギャップ半導体MOS(金属-酸化膜-半導体)型電界効果トランジスタ(MOSFET)について、その核心部となるMOS界面の界面欠陥の正体を解明する。ターゲットは炭化ケイ素4H-SiC、窒化ガリウムGaN、ダイヤモンドの代表的な3種類のMOS界面とし、正体を解明する手段として電流検出型電子スピン共鳴(EDMR)分光+第一原理計算を用いる。本研究により、長い間、正体不明のままだったワイドギャップ半導体MOS界面欠陥の横断的解明が期待できる。これは日本が強みをもつ半導体パワーエレクトロニクス分野をさらに強化し発展させることにつながる。
    電流検出型ESR(EDMR)分光を使って以下の3つのMOSFETのMOS界面欠陥の観察を行った。(1)ダイヤMOSFET、(2)炭化ケイ素a面MOSFET、(3)炭化ケイ素p-ch MOSFET。同時にスピン依存チャージポンピング(Spin Dependent Charge Pumping:SDCP)分光装置の開発を行った。
    (1)では、ダイヤMOSFETのEDMR分光実験が世界で初めて行われた。MOS界面は産総研-金沢大製のOH終端ダイヤ/ALD-Al2O3界面で、しきい値電圧-3.5V、最大電界効果移動度14cm2/V/sである。バイアス条件を広くふってEDMR実験が行われたもののEDMR信号は検出できなかった。その原因はユニポーラ動作下でしかEDMR実験ができないことにあると推測された。そこで強制的にバイポーラ動作を起こしてEDMR信号を発生させるSDCP分光の開発に取り組んだ。
    (2)では、ドライ酸化a面特有の大量の界面準位のEDMR観察に取り組んだが、それに由来する信号は検出できなかった。大量の界面準位は価電子帯端と伝導帯端に偏って分布していると考えられ、実際に、伝導帯端に5e12cm-2台の電子トラップ準位があることを20Kでの電気特性評価で見出した。この準位の起源を第一原理計算で探索して、a面に発生し得るSiダングリングボンド(DB)-炭素DB対であると推定した。
    (3)では、p-ch MOSFETのEDMR実験が世界で初めて行われた。その結果、ドライ酸化Si面の界面欠陥による巨大なEDMR信号が観測された(バイポーラ動作条件下)。新規開発したSDCPも適用したところ、巨大なSDCP信号を観測した。EDMR信号とSDCP信号が同じものなのか、信号の起源は何であるのか、n-ch界面の信号とどのように違うのか等が来年度に詳しく検討される予定である。
    本研究計画のハイライトの1つであるダイヤMOSFETのEDMR分光実験を行ったが、残念ながら界面欠陥のEDMR信号は観測されなかった。そのために戦略の変更を余儀なくされた。信号が検出できない原因を調査した結果、ダイヤMOSFETが3端子デバイスであるためにユニポーラ動作下でしかEDMR実験できないことが原因ではないかと見込まれた。そこで、強制的にバイポーラ動作を引き起こすチャージポンピング法とEDMR分光を組み合わせたスピン依存チャージポンピング(SDCP)分光装置を新たに開発した。そのデモンストレーションを炭化ケイ素MOSFETで行ったところ、SDCP信号の検出に成功した。SDCP分光は未知の部分が多いため、炭化ケイ素MOSFETを使ってEDMR分光とSDCP分光とを比較しながら、その素性を明らかにしていく必要がある。
    炭化ケイ素MOSFETを使って、n-chとp-chが比較できるEDMR分光データを初めて取得することができた。詳しい解析はこれからの課題であるが、両者の比較によって、伝導帯側と価電子帯側の両方の界面準位の情報が手に入ると見込んでいる。
    また、炭化ケイ素において標準面(Si面)と非極性面(a面)を比較できるEDMR分光データも初めて取得された。ここから面方位と界面準位の関係を議論できるのではないかと見込んでいる。
    「現在までの進捗状況」に述べたように、当初計画にはなかったSDCP分光の開発を行った。この新手法はバイポーラ動作を強制的に励起してEDMR信号(スピン依存電流)を検出するものである。そのデモンストレーションに成功し、巨大なSDCP信号を見ることができた。今後はSDCP分光を新たな武器として、これまで界面信号が未検出のMOS界面(ダイヤMOS界面、窒化ガリウムMOS界面、炭化ケイ素a面MOS界面)を調べていく。
    炭化ケイ素p-ch MOS界面では、EDMR分光でもSDCP分光でも巨大な界面信号が検出されている。その信号はn-chの界面信号と異なることが分かっている。p-chは価電子帯の正孔、n-chは伝導帯の電子をキャリアとするので、エネルギー位置の違う界面準位がp-chとn-chで可視化されたのではないかと予想している。それを証明するため、n-chの界面信号のエネルギー位置を決定した手法をp-chにも適用し、p-ch界面信号のエネルギー位置を正確に決定する。また、13C超微細分裂、29Si超微細分裂の解読を行って、p-chの界面信号の起源同定を行う。
    以上の過程では、第一原理計算によるエネルギー計算や超微細分裂計算も行う予定である。3種類のワイドギャップ半導体MOS界面(炭化ケイ素、窒化ガリウム、ダイヤモンド)や、伝導帯側と価電子帯側の界面準位を比較議論できるような分光情報の取得を目指していく。

 

Teaching Experience (On-campus) 4

  1. 真空電子工学

    2020

  2. 電磁気学I

    2015

  3. 粒子線工学特論

    2015

  4. 真空電子工学

    2015

 

Academic Activities 1

  1. International Conference on Materials and Systems for Sustainability 2021 International contribution

    Role(s):Planning, management, etc., Panel moderator, session chair, etc.

    ichiro naruse  2021.11

     More details

    Type:Competition, symposium, etc.