Faculty Profiles - HATA Seiichi

Presentations -

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マイクロアクチュータを使用した薄膜金属材料疲労試験

YapJeng Hua，佐藤康平，Tamjidi Nastaran，桜井淳平，中光豊，秦　誠一

日本機械学会 2013年度年次大会

金属ガラス厚膜微細構造体の新しい微細加工法

秦　誠一

粉体粉末冶金協会講演　平成２４年度秋季大会

Material search in the age of AI applying microfabrication Invited

HATA Seiichi

The Proceedings of Mechanical Engineering Congress, Japan 2021 The Japan Society of Mechanical Engineers

Language：Japanese Presentation type：Oral presentation (invited, special)

<p>In this paper, it is reviewed that combinatorial technologies for the fabrication and characterization of a large number of samples at once, the use of MEMS and other microfabrication technologies for the characterization of the samples, and our efforts to use machine learning to analyze and improve the search efficiency of the large number of sample data obtained by the combinatorial technologies. We introduce combinatorial arc plasma deposition, which enables the combinatorial deposition of amorphous alloy materials. The composition-graded films fabricated by this method are separated and labeled into thin-film libraries by using microfabrication methods, and their properties are evaluated using MEMS structures. As an example of material search with the aid of machine learning, we describe the identification of physical properties with high contribution to the current density of electrocatalysts by random forest analysis, the examination of search termination conditions by Bayesian optimization, and the estimation of crystal grain size of magnetic materials from Barkhausen noise by machine learning.</p>

DOI： 10.1299/jsmemecj.2021.k041-01

CiNii Research

機械と電気の真の融合を目指した新しい微細加工技術 International conference

秦誠一

第５回集積化MEMS技術研究ワークショップ 2014.7.11 応用物理学会集積化MEMS技術研究会

28pm3-F-7 Fabrication of thin-film thermoelectric generator with CuO-based anti-reflection structures

Kondo Tasuku, Mizoshiri Mizue, Mikami Masashi, Itou Yoshitaka, Sakurai Junpei, Hata Seiichi

The Proceedings of the Symposium on Micro-Nano Science and Technology 2015 The Japan Society of Mechanical Engineers

Language：Japanese Presentation type：Oral presentation (general)

A thin-film thermoelectric generator with anti-reflection structures was fabricated to convert near-infrared solar light, which cannot be converted to electric energy by photovoltaic conversion, to electric energy. The anti-reflection structures were designed using Rigorous Coupled Wave Analysis, resulting that the anti-reflection structures which were formed by close-packed SiO_2 microspheres with 200 nm diameter and coated with CuO thin films estimated to be 6.7%. The anti-reflection structures were formed onto the SiO_2 glass substrate by dip coating method. When the SiO_2 microspheres were dispersed into deionized water and amphiphilic block copolymer F-127, the hexagonally close-packed microspheres were formed on the substrate by dip coating. Bi_<0.5>Sb_<1.5>Te_3 (p-type) and Bi_2Te_<2.7>Se_<0.3> (n-type) thin film elements were formed onto the glass substrate by lithography and sputtering method and serially connected by Cu thin films. After SiO_2 thin-film over-coating the thermoelectric elements, CuO-based anti-reflection structures were successfully formed onto the hot side of the generators.

DOI： 10.1299/jsmemnm.2015.7._28pm3-f-7

CiNii Research

635 Moisture-in-oil sensor using NFTS deposition

YOSHII Yusuke, NAKAMITSU Yutaka, MUKAI Nobuyuki, MIZOGUTI Takashi, TAKAHASHI Tsutomu, HATA Seiichi

The Proceedings of the Materials and processing conference 2013 The Japan Society of Mechanical Engineers

634 Fabrication and evaluation of thin-film thermoelectric solar power generator

MIZOSHIRI Mizue, MIKAMI Masashi, OZAKI Kimihiro, SHIKIDA Mitsuhiro, HATA Seiichi

The Proceedings of the Materials and processing conference 2013 The Japan Society of Mechanical Engineers

Language：Japanese Presentation type：Oral presentation (general)

We fabricated thin-film thermoelectric generators and evaluated their generation properties using focused solar light Thin-film thermoelectric elements of Bi_<0.5>Sb_<1.5>Te_<0.3> (p-type) and Bi_2Te_<2.7>Se_<0.3> (n-type), were deposited on glass substrates by radiofrequency magnetron sputtering, and patterned using lift-off techniques After patterning the module, annealing treatment was carried out in a vacuum at 300℃ for 1 h Solar light was focused onto the hot side of the thin-film thermoelectric module with 10 pn junctions using convex lens The focal spot was approximately 2 mm with solar concentration of 156 suns The temperature difference between the hot and cold sides of pn junctions was approximately 90℃ Under this condition, the open circuit voltage and maximum generation power were 245 mV and 1.2 μW, respectively This value of the open circuit voltage of the module was consistent with the calculated value using Seebeck coefficient of thermoelectric thin films and the temperature difference of the module

DOI： 10.1299/jsmemp.2013.21._634-1_

CiNii Research

632 Novel evaluation method for machinability of Ni-Nb-Ti alloy

JIANG Shengxian, SAKURAI Junpei, AONO Yuko, HATA Seiichi

The Proceedings of the Materials and processing conference 2013 The Japan Society of Mechanical Engineers

Language：Japanese Presentation type：Oral presentation (general)

Abstract As mold material for glass lens with microstructures, it requires not only excellent mechanical properties, high thermal stability and oxidation resistance, but also satisfying machinability Using combinatorial arc plasma deposition, Ni-Nb-Ti thin film libraries were deposited for evaluations of some properties, such as, crystallization temperature, thermal stabilities, hardness, oxidation resistance and so on When Ni within 40-58 at %, Nb within 24-46 at %, Ti within 5-20 at %, the thin film exhibited excellent thermal stability However, for machinability, the conventional method can measure only one composition at each time which is both time-consuming and expensive Therefore, a novel combinatorial deposition and evaluation method for machinability are proposed In those methods, thin film samples with concentrically grading composition are sputter - deposited using combination targets The sample has grading compositions of which in the center Ti content is rich and becomes gradually decreasing from center to edge This means that each position on the surface of sample represents a particular composition Then this sample will be cut at different positions After that, cutting depth and the roughness of cutting surfaces will be measured It is clearly to see this new method is more efficient than conventional method, which is able to measure a lot of compositions' machinability at one time with one sample

DOI： 10.1299/jsmemp.2013.21._632-1_

CiNii Research

29pm1-B-4 Fabrication of Cu2O-rich micro-temperature sensor using direct femtosecond laser reduction patterning

Itou Yasuaki, Mizoshiri Mizue, Arakane Shun, Sakurai Junpei, Hata Seiichi

The Proceedings of the Symposium on Micro-Nano Science and Technology 2015 The Japan Society of Mechanical Engineers

Language：Japanese Presentation type：Oral presentation (general)

Micro-temperature sensors consisting of Cu_2O-rich sensing part and Cu-rich electrodes were fabricated using femtosecond laser induced reduction of CuO nanoparticles. Cu_2O-rich and Cu-rich microstructures were selectively formed by controlling laser irradiation conditions. When the laser scanning pitch was 10 μm, Cu_2O-rich microstructures were formed under the condition that the laser scanning speed and pulse energy were 1 mm/s and 0.45 nJ, respectively. Cu-rich microstructures were fabricated by the scanning speed of 10 mm/s and the pulse energy of 0.28 nJ. The Cu_2O-rich sensing part and Cu-rich electrodes were formed using the evaluated conditions. The micro-temperature sensors composed of Cu_2O-rich and Cu-rich hybrid structures were successfully obtained.

DOI： 10.1299/jsmemnm.2015.7._29pm1-b-4

CiNii Research

Cu micropatterning on poly(dimethylsiloxane) using femtosecond laser reduction of CuO nanoparticles

Mizue Mizoshiri, Yasuaki Ito, Junpei Sakurai, Seiichi Hata

The Second Smart Laser Processing Conference 2016 (SLPC2016) 2016.5.17

金属ガラス厚膜微細構造体の新しい微細加工法 International conference

秦誠一

粉体粉末冶金協会講演平成２４年度秋季大会 2012.11.20 粉体粉末冶金協会

新奇金属系マイクロマシン・センサ材料とその微細加工 Invited International conference

秦誠一, 溝尻瑞枝, 櫻井淳平

「センサ・マイクロマシンと応用システム」シンポジム 2016.10.24 日本機械学会

リアルメカトロニクスを目指すマルチマテリアル・マルチスケール３Ｄ造形技術 Invited

秦誠一

第65回高分子討論会 2016.9.14 高分子学会

マルチスケール、マルチマテリアル3D造形技術とCOMSOLへの期待 Invited International conference

秦誠一

COMSOL CONFERENCE 2016 2016.12.9 計測エンジニアリング社

マイクロアクチュータを使用した薄膜金属材料疲労試験 International conference

YapJeng Hua, 佐藤康平, Tamjidi Nastaran, 桜井淳平, 中光豊, 秦誠一

日本機械学会 2013年度年次大会 2013.9.8

フェムト秒レーザ還元直接描画法を用いた金属微細パターニングとその応用 Invited International conference

溝尻瑞枝, 秦誠一

（社）溶接学会第114回マイクロ接合研究委員会 2016.7.22 （社）溶接学会マイクロ接合研究委員会

フェムト秒レーザ還元直接描画法による非平面基板上への温度センサ作製 International conference

伊藤恭章, 溝尻瑞枝, 櫻井淳平, 秦誠一

第2回日本機械学会イノベーション講演会 2016.11.23

フェムト秒レーザ還元直接描画法による非平面基板上へのCu微細構造形成 International conference

伊藤恭章, 溝尻瑞枝, 櫻井淳平, 秦誠一

日本機械学会2016年度年次大会 2016.9.11

フェムト秒レーザ還元直接描画法による3次元微細Cuパターンの積層造形 International conference

荒金駿, 溝尻瑞枝, 櫻井淳平, 秦誠一

日本機械学会2016年度年次大会 2016.9.11

フェムト秒レーザ還元焼結を用いたNi合金微細パターン作製 International conference

田村健紀, 溝尻瑞枝, 櫻井淳平, 秦誠一

第33回「センサ・マイクロマシンと応用システム」シンポジウム 2016.10.24

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<HATA Seiichi>

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